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Method and apparatus for recording diffraction reflection curves

Method and apparatus for recording diffraction reflection curves
IPC classes for russian patent Method and apparatus for recording diffraction reflection curves (RU 2466384):
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3 cl, 3 tbl, 6 dwg

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Diffractometer and method of diffraction analysis Diffractometer and method of diffraction analysis / 2314517
Diffractometer comprises base, analytic instrument, source of radiation beam, radiation beam detector, means for moving the analytic instrument in space, cantilever for supporting the analytic instrument that is mounted for permitting rotation, means for rotation of the source and detector around the center of the diffractometer so that the axes of the beams of the source and detector of radiation lie in the equatorial plane, and structure for moving the analytic instrument.

FIELD: physics.

SUBSTANCE: beam of X-ray radiation of a given range is directed onto an analysed crystal and intensity of X-ray radiation diffracted in the analysed crystal is determined using a detector, with successive measurement of parameters of diffraction conditions of the picked up X-ray reflection, wherein parameters of diffraction conditions are varied by modulating the interplanar distance of the picked up X-ray reflection through ultrasonic radiation.

EFFECT: possibility of recording diffraction reflection curves by controlling parameters of an X-ray beam using ultrasound.

6 cl, 4 dwg

 

The proposed group of inventions relates to the field of x-ray diffraction techniques and may be used for non-destructive testing of perfection of crystals and films by recording diffraction reflection curves.

The known method of registration diffraction reflection curves, namely, that x-ray radiation of the given range are sent to the investigated crystal, and the intensity of x-ray radiation affected by diffraction in the studied crystal is determined using a detector at the sequential change of the parameters of the diffraction removable x-ray reflex (U.S. Patent US 6,385,289 B1, "X-ray diffraction apparatus and method for measuring X-ray rocking curves", IPC G01N 13/00, published may 07, 2002).

The disadvantage of this method is the necessity of providing mechanical angular displacement of the investigated crystal, which should be performed with high accuracy, and therefore requires the use of expensive equipment.

The objective of the proposed method is to eliminate the disadvantage of this method.

The technical result is the creation of a method of registering diffraction reflection curves by controlling the x-ray beam parameters using ultrasound.

The goal of the project and the results achieved by the fact that mo is in the way of registration diffraction reflection curves, namely, that the x-ray beam of the given range are sent to the investigated crystal, and the intensity of x-ray radiation affected by diffraction in the studied crystal is determined using a detector at the sequential change of the parameters of the diffraction removable x-ray reflex, the parameters of the diffraction conditions change modulation interplanar distance shooting x-ray reflex by ultrasonic radiation. To implement the method applied ultrasonic radiation, the wavelength of which at least three times the width of the x-ray beam, which is directed to the investigated crystal.

It is known a device for recording the diffraction reflection curves containing consistently placed on the x-ray source, the device parameters forming the x-ray beam containing a first slit aperture, the crystal-monochromator attached to crystallochemical, and the second slit aperture, the holder of the investigated sample, the detector and the scanning device of diffraction with removable x-ray reflex, defined by the ratio of the angle of incidence of the x-ray beam, the interplanar distance and the wavelength of the radiation (U.S. Patent US 6,385,289 B1, "X-ray diffraction apparatus and method for measring X-ray rocking curves", IPC G01N 13/00, published may 07, 2002).

A disadvantage of the known device is its structural complexity and lack of reliability.

Object of the present invention is to provide a device that provides reliable and accurate registration diffraction reflection curves.

The technical result is a device in which there is no system mechanical angular displacement of the investigated crystal.

The goal of the project and the results achieved by the fact that in the device for recording the diffraction reflection curves containing consistently placed on the x-ray source, the device parameters forming the x-ray beam, which contains the first slit aperture, the crystal-monochromator attached to crystallochemical, and the second slit aperture, the holder of the investigated sample, the detector and the scanning device of diffraction with removable x-ray reflex, defined by the ratio of the angle of incidence of the x-ray beam, the interplanar distance and the wavelength of the radiation, the device scans the diffraction conditions made in the form of electro-acoustic resonator. Named resonator acoustically associated with a test sample placed on the sample holder, electroacoustic R is Senator is electrically connected to a generator of electrical oscillations and stroboscopic unit registration and named the unit also connected to the detector. As an x-ray source can be used a source with a range of radiation of the wave length of 0.1-10 Å. Electroacoustic resonator may contain acoustically United electro-acoustic transducer and crystal monochromator, and as a crystal monochromator is possible to use quartz.

The essence of the proposed group of inventions is illustrated by diagrams and charts presented on the figures:

figure 1 is a diagram of the known device, which is taken as a prototype;

figure 2 - curve of the diffraction reflections obtained in a known manner;

figure 3 - diagram of the device;

figure 4 is a curve of the diffraction reflection obtained by the proposed method.

The known device comprises an x-ray source 1, a diaphragm 2, a device for monochromatization of x-ray - crystal monochromator 3, crystallochemical 4, a diaphragm 5, the analyzed crystal 6, which may take positions 6A and 66 during rotation of Kristallografiya 7, precision goniometer 8, the stepping motor 9 and detector 10.

In the device, implement the following method. The x-ray beam from the source 1 is directed to the forming device parameters of the x-ray beam consisting of selev the second diaphragm 2, crystal-monochromator 3 attached to crystallochemical 4, and the second slit diaphragm 5. Of the above-mentioned diaphragm goes rays, limited to a narrow spectral and angular interval. This radiation falls on the analyzed crystal 6 set of diffraction according to Bragg 6A (reflection) or in the position of diffraction in Laue 6b (passage) in crystallochemical 7 precision goniometer 8, rotated by an electric motor 9. When turning the crystal 6 near the Bragg angle for shooting x-ray reflex signal intensity measured by the detector 10 has a bell shape, width, shape, and the diffraction reflection coefficient, which is determined by the degree of perfection of the crystal.

An example of the curve of the diffraction reflections (BWW), obtained in a known manner, is shown in figure 2. Curve taken on the device, in which the goniometer was turned by the stepper motor and was applied double-crystal spectrometer. The first crystal - silicon wafer - reflection 110. The second crystal germanium crystal in Laue geometry is a reflection of 110. The width of BWW to 3.8 seconds.

The drawback of the device and sold it method is the necessity of providing mechanical angular displacement of the investigated crystal for registration BWW.

This disadvantage is not proposed in the equip, since registration BWW is achieved by excitation in the investigated crystal wavelength of the ultrasonic vibrations, which periodically change the value of lattice parameter, followed by a translation stroboscopically selected time interval detection. As a result of application of ultrasound the opportunity to refuse the use of mechanical angular displacement of the investigated crystal. Disclaimer nodes that use moving parts, allows to increase the reliability of the whole device.

The proposed device (figure 3) contains consistently located the x-ray source 1 and the device parameters forming the x-ray beam consisting of a slit diaphragm 2, the crystal-monochromator 3 attached to crystallochemical 4, and the second slit diaphragm 5. The investigated crystal 6 mounted on the holder 11. Crystal 6 acoustically associated with the electroacoustic resonator 12. The latter is electrically connected to a generator of electrical oscillations 13 and block strobe register 14, which is electrically connected to the detector 15.

The device, which allows to determine the MLC by the proposed method operates as follows. The x-ray beam, the wavelength of which is in the range of the t is 0.1 to 1.0 angstroms, direct from source 1 on the diaphragm 2, which provides a narrow beam of radiation in order to obtain a parallel beam instead of diverging. Narrowed beam falls on the crystal monochromator 3, which reflects it towards the second aperture 5, providing radiation limited to a narrow spectral and angular interval. This radiation falls on the analyzed crystal 6, mounted on the holder 11. In the investigated crystal 6 with electroacoustic resonator 12 and the generator electromagnetic signals 13 excite a standing ultrasonic wave. The unit strobe register 14 provides the selection and adjustment of the phase fluctuations, which in turn allows you to register using the detector 15 curve diffraction reflection removable x-ray reflex without mechanical rotation of the crystal.

When the operation of the device electro-acoustic resonator 12 from the generator electromagnetic signals 13 signal corresponding to the resonant frequency f of the aforementioned resonator consisting of rentgenometricheskogo analyzer and the piezoelectric transducer. The latter creates ultrasonic radiation, the wavelength of which is at least three times greater than the width of the x-ray beam, which is directed to the analyzed Crist is ll

In the investigated crystal 6 can create homogeneous in space and variable in time deformation, which leads to modulation at the frequency f of the lattice parameter. The unit strobe register 14 allows you to register on the detector 15 a specific area BWW removable x-ray reflex, and the interval of the selected area is set much smaller than the width of the diffraction curve of reflection.

Figure 4 shows the experimental curve of the diffraction reflections, taken for the same pair of measured crystal - crystal monochromator and the same illuminated area, as for the experiment, the results of which are presented in figure 2.

However, the crystal remained motionless, and changed allocated stroboscopic device, the phase of the ultrasonic wave. Each phase corresponds to a specific value of the amplitude of ultrasonic deformation, which in turn corresponds to the value of the interplanar distances. As a consequence, the reconstruction phase of the ultrasonic waves makes the same change in the condition of Bragg as the rotation of the crystal. Step by phase of 0.02×T (T is the period of ultrasonic vibrations), which corresponds to 0.6 coal. s when registering the standard way of mechanical rotation. The width of BWW is 2,7s.

Comparison of the curves obtained is known (Figure 2) and proposed (Figure 4), shows that ultrasound does not introduce any distortion. The accuracy of withdrawal BWW nonmechanical method can be easily increased, whereas the crushing steps in a mechanical goniometer does not automatically lead to improved accuracy.

The proposed method allows to adapt a simple x-ray goniometry not equipped exact goniometry, for removal of BWW. It is also effective in research facilities that are sensitive to mechanical stress. Arguments confirm the industrial applicability of the proposed method and device for recording diffraction reflection curves.

1. The device for recording the diffraction reflection curves containing consistently placed on the x-ray source, the device parameters forming the x-ray beam containing a first slit aperture, the crystal-monochromator attached to crystallochemical, the second slit aperture, the holder of the investigated sample, the detector and the scanning device of diffraction with removable x-ray reflex, defined by the ratio of the angle of incidence of the x-ray beam, the interplanar distance and the wavelength of the radiation, wherein the device is scanning diffraction conditions made in the form of electroacoustic resonator, which is acoustically connected with a test sample placed on the sample holder, electroacoustic resonator is electrically connected to a generator of electrical oscillations and stroboscopic unit registration and named the unit also connected to the detector.

2. The device according to claim 1, characterized in that the x-ray source using the source range of the radiation wave length of 0.1-10 Å.

3. The device according to claim 1, characterized in that the electroacoustic resonator contains acoustically United electro-acoustic transducer and crystal monochromator.

4. The device according to claim 3, characterized in that the crystal monochromator with an electroacoustic transducer, quartz.

5. The method of registration diffraction reflection curves, namely, that the x-ray beam of the given range are sent to the investigated crystal, and the intensity of x-ray radiation affected by diffraction in the studied crystal is determined using a detector at the sequential change of the parameters of the diffraction removable x-ray reflex, characterized in that the parameters of the diffraction conditions change modulation interplanar distance shooting x-ray reflex by ultrasonic radiation.

6. the procedure according to claim 5, characterized in that the use of ultrasonic radiation, the wavelength of which at least three times the width of the x-ray beam, which is directed to the investigated crystal.

 

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