Excimer laser system and method of generating radiation. RU patent 2519869.

FIELD: physics, optics.

SUBSTANCE: invention relates to laser engineering. The excimer laser system has a chassis on which are mounted: a pulsed power supply whose terminals are low-inductively connected to capacitors of each laser module; an additional power supply whose polarity is opposite to that of the power supply, connected to additional capacitors through ends of each ceramic container; a first laser module and a second laser module identical to the first. Each module includes a long ceramic housing which houses a gas stream generating system, a pre-ioniser, first and second electrodes, capacitors placed outside the housing and connected to the first electrode through high-voltage current leads of the housing. The housing also houses either one or two long ceramic containers, arranged such that walls of each ceramic container facing the discharge region form part of the gas stream generating system in the electrode region. Each container houses additional capacitors connected to the second electrode through grounded current leads of the housing, long grounded gas-permeable current conductors, arranged at both sides of the electrodes, current leads of each ceramic container and additional capacitors.

EFFECT: increasing laser power and reducing the cost of generating energy.

4 cl, 3 dwg

IPC classes for russian patent Excimer laser system and method of generating radiation. RU patent 2519869. (RU 2519869):

H01S3/03 - Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves (semiconductor lasers H01S0005000000)

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