Gas-discharge laser and method of generating radiation
 Gas-discharge laser / 2503104In the gas-discharge laser, capacitors which are low-conductance connected to electrodes of the laser, are placed near the first electrode in ceramic containers and are low-inductance connected to a pulsed power supply through current leads of each container, high-voltage current leads of the metallic laser chamber and extended earthing leads, placed on both sides of the containers. |
 Mobile combat laser complex / 2496078Combat vehicle is mounted on caterpillar running gear. Combat laser is mounted at mid rotary platform and comprises liquid propellant engine and resonators arranged perpendicular to its lengthwise axis. Oxidiser and propellant tanks are arranged above said mid rotary platform. |
 Method for positioning the mirrors of triple axis laser gyrometer, in particular when starting gyrometer / 2493642Each of the resonators contains a medium which is excited to generate light waves. Each of the resonators is formed by a set of mirrors which includes two movable mirrors. Each of the three movable mirrors participates in forming two resonators. Pre-positioning of the three mirrors is carried out. The three mirrors are simultaneously moved with the same amplitude which is less than or equal to the intermediate mode of the resonator, such that each of the resonators passes through a length where maximum amplification is provided. Intensity of waves passing through each of the three resonators is measured for each triplet of positions occupied by the mirrors. The length of each of the resonators, where maximum intensity is provided, is determined based on the three triplets. The final positions of the mirrors where maximum intensity in the three resonators is provided are determined. |
 Orbital space system / 2488527Invention relates to systems of space objects with transmission of energy and pulses there between by laser radiation and may be used at space objects at space objects whereat microgravitation conditions are created at the level of ~ 10-7 …10-8 of acceleration at Earth surface. Proposed system comprises space power station (SPS) 1 with solar cells 2 and four laser radiation sources 4, and space object 7 with receive-convert unit 11, 12, 13 optically communicated with said sources. To orient, stabilise and keep SPS and space object in near-earth orbit low-thrust engines 3, 9 are used. Said receive-convert unit has two pairs of reception planes 12, 13 arranged in symmetry about space object lengthwise axis extending through its center of gravity. One pair of planes 13 controls space object yaw while another pair controls its pitch. Said planes do not extend beyond space object midsection. Any source 4 can vary radiation power or be reoriented to whatever reception pane 12, 13. That is, laser transfer of power (for example, constant for low-thrust engines) allows control orientation and stabilisation at a time. Besides, effects of disturbances (e.g. aerodynamic) are decreased in conditions of microgravitation. |
 Combat laser / 2482581Combat laser comprises a source of energy, such as a horizontally installed liquid rocket engine with a supersonic nozzle. At the outlet of the nozzle there is an exhaust device installed as capable of rotation. Resonators are installed on the exhaust device and comprise ball hinged joints, providing for rotation of resonators in the vertical plane. The exhaust device is made as capable of regenerative cooling and comprises inner and outer walls. On the inner wall there is a layer of uranium 235, particles of uranium 235 are introduced into the wall itself. |
 Combat laser / 2481544Combat laser contains foundation with laser station mounted on it on the base of gas dynamic laser, note that laser station is made in the form of liquid fuel rocket engine with nozzle that contains subsonic and supersonic parts and critical section on their joint mounted vertically with the possibility of exhausting the combustion products vertically upwards and resonator mounted in critical section on cylindrical hinge. |
 Combat laser / 2479900Combat laser comprises a source of energy and at least one resonator. The source of energy is arranged in the form of a power plant on the basis of a gas turbine engine and comprises an input device, a compressor, a combustion chamber, a turbine and the main shaft. Also the laser comprises a free turbine, the shaft of which is connected with a generator, an exhaust device, which comprises a fixed part and a cylindrical exhaust device arranged as capable of rotation. On the cylindrical exhaust device on a cylindrical hinged joint there is at least one resonator installed as capable of rotation in a vertical plane. |
 Space system for production of materials in space / 2478063Invention relates to satellite system intended for production and analysis of material with unique properties in low gravitation conditions. System comprises technological module 1 and power platform 2 placed in one circular orbit 3. Said platform is equipped with electric power generation means, for example, solar batteries 4, docking and orientation drive, quantum generator to convert electric power into that of laser beam 7. Beam 7 with definite divergence angle is directed to the center of receiving plane of receive-and-convert module (not shown) of module 1. Said unit convert laser bean energy into electric power for supply of said docking and orientation drive engine and its components. Laser beam direction is aligned with that of velocity vector 15 of module 1 and extends through center of gravity of said module. Said conditions are ensured by locating laser source 7 in the plane of orbit 3 spaced therefrom by some altitude defined from simple geometrical considerations. Minor thrust created by laser beam 7 compensates for drag at module flight altitude. Hence, microgravitation on board of module 1 is reduced for notable time interval. |
 Two-dimensional intracavity radiation scanning gas laser / 2477913Gas laser has a system for high-frequency excitation of the active medium with a scanning device, having two metal disc electrodes, one of which on the side of the interelectrode space is coated by a dielectric layer which current-conducting wedge-like metal tracks are deposited. The laser optical cavity is formed by two circular annular mirrors. On one half of the perimeter of the mirror, the coating provides partial reflection, and the other half of the surface of the circular annular mirror (3) is in form of an orthogonal array composed of n×m controlled mirrors (5), having a coating with a controlled reflection coefficient (6) such that the form of the common surface of the array repeats the form of half of the surface of the annular mirror which partially transmits radiation. There are additional actuating elements (19) in amount of n×m per controlled mirror of the array and an electronic switch (20) for elevation-angle deviation of output radiation which carries the deviation signal to the ij-th actuating element (19) for changing the reflection coefficient of the ij-th controlled mirror (1≤i≤m, 1≤j≤n) to a value closer to one. |
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Two-dimensional intracavity radiation scanning gas laser / 2477913 Gas laser has a system for high-frequency excitation of the active medium with a scanning device, having two metal disc electrodes, one of which on the side of the interelectrode space is coated by a dielectric layer which current-conducting wedge-like metal tracks are deposited. The laser optical cavity is formed by two circular annular mirrors. On one half of the perimeter of the mirror, the coating provides partial reflection, and the other half of the surface of the circular annular mirror (3) is in form of an orthogonal array composed of n×m controlled mirrors (5), having a coating with a controlled reflection coefficient (6) such that the form of the common surface of the array repeats the form of half of the surface of the annular mirror which partially transmits radiation. There are additional actuating elements (19) in amount of n×m per controlled mirror of the array and an electronic switch (20) for elevation-angle deviation of output radiation which carries the deviation signal to the ij-th actuating element (19) for changing the reflection coefficient of the ij-th controlled mirror (1≤i≤m, 1≤j≤n) to a value closer to one. |
 High-frequency excited co2 waveguide laser / 2244367Proposed laser has two channels of which first one functions as discharge channel, as well as high-reflection and light-splitting mirrors installed at ends of discharge channel. Each channel is bound on opposite ends with extreme and central electrodes and on two other ends, with insulating wafers. One of extreme electrodes has rectangular longitudinal slot of depth L ≥ 1.5h and width H ≥ h + 1 to form insulating space together with closest second channel holding additional working gas supply, where h is discharge channel width. |
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High-frequency excited co2 waveguide laser / 2244367 Proposed laser has two channels of which first one functions as discharge channel, as well as high-reflection and light-splitting mirrors installed at ends of discharge channel. Each channel is bound on opposite ends with extreme and central electrodes and on two other ends, with insulating wafers. One of extreme electrodes has rectangular longitudinal slot of depth L ≥ 1.5h and width H ≥ h + 1 to form insulating space together with closest second channel holding additional working gas supply, where h is discharge channel width. |
 Method and device for producing laser beam / 2244990Proposed method used for producing beam from pulse-periodic laser pumped with self-maintained spatial discharge with XeXl, KrF, CO2, and HF base active means includes formation of at least one electrode of a number of plasma generations near effective surface with self-maintained spatial discharge producing repetitive plasma structure and generation of laser beam. Plasma generations are formed in any plane perpendicular to optical axis of laser near effective surface of at least one of electrodes, its size being smaller than maximal size of plasma generation at one repetition period of plasma structure and smaller than or equal to size of laser radiation beam produced in same plane near effective surface of mentioned electrode. Device implementing this method has at least two opposing electrodes connected to common buses of pumping source and optical cavity; at least one of electrodes is made of repetitive parts each having its respective effective surface. Repetitive electrode parts are installed either in planes parallel to optical axis of laser or in those disposed at acute angle to this axis, or in cylindrical surfaces with generating lines perpendicular to optical axis of laser and guides of these surfaces in the form of curves or broken lines. Such design ensures desired energy distribution for various processes. |
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Method and device for producing laser beam / 2244990 Proposed method used for producing beam from pulse-periodic laser pumped with self-maintained spatial discharge with XeXl, KrF, CO2, and HF base active means includes formation of at least one electrode of a number of plasma generations near effective surface with self-maintained spatial discharge producing repetitive plasma structure and generation of laser beam. Plasma generations are formed in any plane perpendicular to optical axis of laser near effective surface of at least one of electrodes, its size being smaller than maximal size of plasma generation at one repetition period of plasma structure and smaller than or equal to size of laser radiation beam produced in same plane near effective surface of mentioned electrode. Device implementing this method has at least two opposing electrodes connected to common buses of pumping source and optical cavity; at least one of electrodes is made of repetitive parts each having its respective effective surface. Repetitive electrode parts are installed either in planes parallel to optical axis of laser or in those disposed at acute angle to this axis, or in cylindrical surfaces with generating lines perpendicular to optical axis of laser and guides of these surfaces in the form of curves or broken lines. Such design ensures desired energy distribution for various processes. |
 Excimer laser / 2249282Proposed excimer laser that can be used for intracavitary therapy in medicine, for microelectronics, laser chemistry, and processes using heavy-power ultraviolet rays has electrode system, pulse power circuit with storage capacitor, and switch in the form of thyratron. Electrode system has insulating plate that carries electrodes; thyratron is connected in series with storage capacitor and electrode system. Electrode system is designed to ensure pumping of excimer gas medium with discharge creeping over insulating plate surface. |
 Method and device for exciting self-restrained and self-heated metal atom junction pulsing lasers / 2251179Proposed method includes generation of one additional delay pulse with each drive pulse at certain delay between pulses and constant energy insertion in laser active element. Lasing power characteristics at stabilized parameters of plasma are controlled by momentum changes of additional pulse location relative to drive pulse. For lasing mode additional pulse is generated past main drive pulse and for lasing pulse suppression mode it is produced in advance of main drive pulse; in this case energy of additional pulse should be sufficient only for populating metastable laser levels of metal atoms. Pulse advance time and pulse delay time of additional pulse counted from origin of drive pulse should be lower than lifetime of metastable laser levels. Stabilization of plasma parameters is additionally corrected by varying advance time and delay time of additional pulse with respect to drive pulse. Device implementing this method has laser tube whose cathode and grounded anode are shorted out by inductance coil; resonator; two switches; two energy storage capacitors whose leads are integrated and connected to laser tube cathode; adjustable high-voltage power supply whose common lead is connected to grounded cathodes of switches; trigger pulse generator; two adjustable delay lines; two anode reactors; two pulse modulator drivers; nonadjustable delay line; electronic relay; controller. |
 Method and device for exciting gas molecules and atoms / 2255398Proposed method intended for exciting molecules and atoms of working gas includes voltage supply to electrodes and organization of working gas flow in discharge gap so that working gas flow is fully passed through cathode layer of volume glow discharge; gas flow organizing means is disposed upstream of cathode so that gas mixture flow is passed through cathode , interelectrode space, anode, and radiation generation working area. Device implementing this method has flow organizing means, power supply, working gas, and discharge chamber incorporating anode and cathode made in the form of grids; at least cathode grid has regular pitch not to exceed thickness of cathode layer of normal gas volume glow discharge; peripheral regions of device electrodes are separated and protected against breakdown by means of electric insulator; flow organizing means is disposed upstream of cathode. |
 Method for transmitting optical pulses / 2262199Method for transferring optical pulses by several laser beams includes forming a central laser beam and cover around it in form of tunnel. Tunnel is formed by one beam or a set of beams, contacting each other. Tunnel is made also with possible rotation relatively to central beam and consists of two portions, formed by set of oppositely directed beams. |
 Method and device for forming powerful laser pulse / 2267197Method and device can be used at powerful multichannel laser installations with radiation power level higher than 1012 W. Operation of laser is based upon forming of partially coherent laser pulse. Characteristics of laser pulse are specified by design mutual coherence function. Values of the function are necessary and sufficient for optimal matching of laser-target system. Device for forming powerful laser pulse has master oscillator, system for forming space-time characteristics of laser pulse and amplifiers. Amplifiers are disposed in sequence along rising cross-section of beam to be amplified correspondingly to space-angle distribution of radiation intensity. Distribution is matched with design function of mutual coherence. High uniformity intensity distribution is provided in focus of laser. |
 Scheme of excitation of lasers on metal fume / 2269850The scheme has n modules linked up to a power source through a charging inductance. Each module has one section of a multisectional high frequency transformer. Each section of the transformer has two primary windings coiled back-to-back and one secondary winding. Each module has also two accumulative condensers, two charging diodes and twp transistor commutators. The accumulative condenser is charged through a corresponding charging diode and a charging inductance from the power source and is discharged through corresponding transistor commutators and primary windings of the section of the multisectional transformer. The shutters of the transistor commutators are linked up through devices matching with the scheme of the starting. The secondary windings of all sections of the multisectional transformer are successively connected and linked up to the outputs of the gas discharge tube. |
FIELD: physics, optics.
SUBSTANCE: invention relates to laser engineering. The laser, preferably an excimer laser, includes a laser chamber consisting of ceramic material and having elongated first and second electrodes, the first of which is situated near the inner surface of the laser chamber, a pre-ionisation unit; a gas circulation system; a set of capacitors situated outside the laser chamber, and a power supply connected to the capacitors. Elongated ceramic containers housing additional capacitors are placed near the second electrode. The capacitors and the additional capacitors are connected in series to each other through earthed gas-permeable reverse current lead situated on both sides of the electrodes and are connected to the first and second electrodes through leads of the laser chamber and leads of the ceramic containers.
EFFECT: increasing laser power and reducing the cost of generating energy.
13 cl, 3 dwg
The technical field
The invention relates to a high intensity discharge device, in particular, excimer lasers, laser systems and method of generating laser radiation.
The level of technology
Excimer lasers are the most powerful sources of directional radiation in the ultraviolet (UV) range of the spectrum. Depending on the composition of the gas excimer lasers emit at the junctions of different molecules: ArF (193 nm), KrCl (222 nm), KrF (248 nm), XeBr (282 nm), XeCl (308 nm), XeF (351 nm). Lasers at the molecular fluorine F2 (157 nm) is close to excimer lasers are gas composition and method of pumping. The most efficient, with an efficiency of about 3%, high-energy, up to ~1 j/pulse, and a powerful, up to 600 watts, are KrF and XeCl lasers, found greatest application in various technologies. These include the production of flat LCD and OLED displays, 3D microprocessing of materials, production of high-temperature superconductors by laser ablation, a powerful UV lidar. ArF lasers with a relatively small energy generating 5-10 MJ/pulse and high (4-6 kHz) pulse repetition frequency, due to the shortest wavelength that allows you to use a reliable quartz optics are widely used in large-scale lithographic production of integrated circuits with a characteristic size of the elements in only several tens of nm.
In accordance with what potrebnostjami modern high-performance technology using excimer lasers and their power is constantly increasing. However, increasing the energy and power of a gas discharge excimer lasers has fundamental physical limits, which if exceeded, the optimal values of energy generation and pulse repetition rate cause a decrease in the efficiency of the laser, reducing the reliability and stability of its work and, ultimately, increase the cost of operation of the laser.
All this determines the urgency of finding solutions to optimize the design and method of operation of an excimer laser, to increase their capacity and reduce the cost of energy generation at various combinations of energy generation and pulse repetition rate.
Known pulse-periodic discharge laser with a low-voltage pre-ionization by corona discharge, United States Patent 6782030, in order to reduce the inductance of the discharge circuit, which ensures high efficiency of the laser, the capacitors connected to the electrodes placed near the high voltage electrode placed on the side wall of the laser chamber. For compatibility with aggressive media laser is proposed to use capacitors with a coating of inert material.
The disadvantage of this technical solution is that the composition of the ceramic capacitors are components, such as solder, which in the case in which osenia protective layer when exposed to F 2or HCl will lead to the exit of the condenser and then laser failure. In addition, in the gas laser parasitic breakdown on the surface of the ceramic capacitors designed for use in electrically rugged environment, does not allow you to charge them up to rated voltage. This dramatically reduces the power stock capacitors when they are placed in the gas medium of the laser, not allowing to achieve high levels of energy generation and laser power.
This lack deprived excimer laser with x-ray pre-ionization kilowatt average power of radiation, in which the high-voltage electrode placed on the long ceramic flange metal laser camera is connected to the additional chamber with electrically durable gas. Laser Focus World, 25, 10, 23, 1989. The laser device and method of generating laser radiation can increase the aperture of the discharge and, accordingly, energy generation, and the average power of the laser. Low inductance discharge circuit required for high efficiency of the laser is achieved by minimizing the thickness of the dielectric flange by reducing the mechanical load on it when the alignment of internal and external pressures.
The disadvantage of this device and method of generating laser radiation is the complexity of e is about exploitation and large dimensions, since the presence of q the preionization mode causes the application is too complex laser chamber, the cross section of which has a track configuration. In addition, the deformation of the laser chamber complex form while filling the high pressure gas can lead to the destruction rigidly mounted on the ceramic flange.
Known one of the most powerful gas discharge excimer laser systems for industrial applications - dual beam laser VYPER, Coherent Inc. ExcimerProductGuide2011, including hosted on a shared chassis with two identical compact laser, similar to that described in United States Patent 6,757,315, each of which includes a housing in the form of a metal tube, which is mounted compact ceramic discharge chamber with a long metal flange. On the high-voltage metal ceramic flange cameras installed high-voltage electrode and a block of preionization mode. The method of generating laser radiation provides simultaneous, synchronized pumping of two identical lasers and the combination of two parallel laser beams outside of the laser.
Data device and method provide the laser radiation parameters that fit a range of technological applications at the level of the lasing energy of 1 j/pulse and power of the UV laser radiation 600 watts to each laser is the length of the electrodes is about 1 m
However, a further increase in energy generation laser systems is difficult because of the use in each of its laser preionization mode low-voltage corona discharge and the limited size of the ceramic discharge chamber installed in a metal housing with a gas circulation system. Since the discharge chamber, the gas flow abruptly changes direction, it is not possible to effectively increase the velocity of the gas in the electrode gap, resulting in limiting the further increase of the repetition frequency of the discharge pulses and the average power of laser radiation.
The closest technical solution, which can be selected as a prototype, is a gas discharge, in particular, excimer laser, comprising: filled with a gas mixture of the laser chamber, consisting at least partially of a ceramic material and having spaced apart extended first and second electrodes defining a discharge region between the first electrode located near or directly on the inner surface of the laser chamber, at least one extended block of preionization mode for the preionization mode of gas between the first and second electrodes; a gas circulation system to update the gas in the discharge region between successive discharge pulses; a set of capacitors, the location is routed outside of the laser chamber and connected to the first and second electrodes through the electrical inputs of the laser chamber and the gas-permeable reverse distributors, located in the laser chamber on both sides of the electrodes; a power source connected to the capacitors for their pulse charge to the breakdown voltage, providing a gas discharge between the first and second electrodes for excitation of the laser gas mixture and a resonator for generating a laser beam. Patent EP 1525646 B1. The method of generating laser radiation includes the implementation of the preionization mode of gas between the first and second electrodes, the pulse charging of the capacitors, the implementation of discharge between the first and second electrodes and generating a laser beam.
In the laser implemented the possibility of increasing the volume of active gas environment to ensure a high uniform level of preionization mode, and high speed gas flow between the electrodes. The result is the possibility of increasing energy generation and power repetitively pulsed excimer laser. Extended camera laser includes a cylindrical tube made of ceramics. For the formation of high-speed gas flow in the discharge zone, on both sides of the first electrode located on the inner wall of the cylindrical tube camera, flush with it posted by long ceramic guides the gas stream. Performing laser camera mainly ceramic member is t the possibility of achieving high lifetime of the gas mixture excimer laser, containing such extremely chemically active components as F2or HCl. When generating on excimer molecules in the laser with compact (diameter 0.45 m) ceramic chamber and the length of the electrodes not exceeding 1 m, an average power UV laser radiation is ~500 watts in various combinations of energy generation, from 0.1 to 2 j/pulse, and pulse repetition rate.
However, the increase in energy generation laser requires an increase in the interelectrode distance and increasing discharge voltage, followed by the need to increase the distance between high-voltage and grounded electrical inputs ceramic laser camera - to prevent spurious electrical breakdown, which leads to an increase in the inductance of the discharge circuit and decrease the efficiency of the laser. From this point of view, the geometry of the laser chamber is not fully optimized. In the prototype there are various options for reduction caused by the gas pressure of the radial component of the mechanical load on the ceramic tube camera, however, the possibility of reducing the longitudinal component of the load is not suggested.
The disadvantage of this device prototype and method of its operation is the reduction in the efficiency with further increase in the energy generation and average power of the laser. Required for this increase in m is elektrodnogo distance leads to higher discharge voltage, what complicates the operation of the laser, and is accompanied by the need to increase the distance between the grounded and a high voltage current leads ceramic laser housing to prevent unwanted breakdowns, increasing the inductance of the discharge circuit and, as a consequence, the drop in efficiency of the laser. In addition, the increase of the longitudinal dimensions of the laser housing, as by increasing the interelectrode distance and the discharge voltage is necessary to increase the distance from the end faces of the first electrode, which is in the prototype high voltage, to end grounded metal flange of the ceramic body, which increases the cost of housing, and also complicates the operation of the laser.
Disclosure of inventions
The objective of the invention is to overcome the physical and technological constraints associated with the creation of more powerful compared to existing, gas discharge, in particular, excimer lasers
The technical result of the invention is to increase energy generation and average output power with high efficiency laser, simplifying the design and reducing the cost of manufacturing of the power gas discharge laser, reducing operating costs and, in General, reducing the cost of energy generation.
To solve this problem is proposed discharge, in private the tee, the excimer laser, comprising: filled with a gas mixture of the laser chamber, consisting at least partially of a ceramic material and having spaced apart extended first and second electrodes defining a discharge region between the first electrode located near or directly on the inner surface of the laser chamber, at least one extended block of preionization mode; a gas circulation system; a set of capacitors that are located outside of the laser chamber and connected to the first and second electrodes through the electrical inputs of the laser chamber and the gas-permeable reverse distributors located in the laser chamber on both sides of the electrodes; and a power source connected to the capacitors.
Improvement of laser is that the laser chamber near the second electrode has either one or two long ceramic container, each ceramic container placed additional capacitors, capacitors, and additional capacitors in series are connected through the gas-permeable reverse conductors and connected to the first and second electrodes distributed along the laser camera electrical inputs ceramic pipes and electrical inputs ceramic containers.
Preferably, tonari laser camera is optional switching power supply, the polarity of which is opposite to the polarity of the pulse power source and the additional power source is connected to the additional capacitor and the ends of each ceramic container.
It is preferable that the time delay between the inclusions of additional power source and the power source is equal to the time difference of the pulse charging additional capacitors produced additional power source through the ends of the ceramic container/containers, and the charging time of the capacitors produced in a low-inductance connected to the power source.
It is preferable that faces the discharge region of the side surface of each extended ceramic container is formed near the second electrode guides the gas stream.
It is preferable that the gas-permeable reverse distributors made concave toward the discharge region
It is preferable that at least one ceramic container has the form of either round or rectangular pipes.
In some embodiments, near the second electrode has a single ceramic container with a surface facing the discharge region has a long niche, in which is placed the second electrode,
It is preferable that the block of preionization mode contains a system of four is investing extended homogeneous sliding discharge on a dielectric surface.
In some embodiments, the block of preionization mode contains the system of the extended corona discharge
In some embodiments, the first electrode and the second electrode is made of a solid, and at least one block of preionization mode is installed on the side of one of the two electrodes.
In some embodiments, either the first electrode or the second electrode is made partially transparent, and block the preionization mode is installed on the reverse side of the partially transparent electrode.
It is preferable that the laser contains electrically connected with the block of preionization mode and one of the electrodes of the auxiliary capacitors, the capacitance of which is many times less than the capacitance of the capacitors.
Brief description of drawings
The invention is illustrated the accompanying drawings, which are presented in a form sufficient for understanding the principles of the invention and in no way limit the scope of the present invention.
In the drawings, the matching elements of the device have the same item numbers.
Figure 1 - cross section of a laser in accordance with the invention.
Figure 2 is a cross section of the laser with automatic pre-ionization of the second electrode in accordance with the invention.
Figure 3 is a cross section of the laser with automatic pre-ionization of the first electrode in accordance with the invention.
In the ways of carrying out the invention.
Gas discharge laser, in particular, excimer laser, the cross section of which is schematically shown in figure 1, contains filled with a gas mixture of the laser chamber made mainly of ceramics, in particular, laser camera includes a ceramic tube 1 with end flanges (not shown). In the laser chamber is placed distant from each other long the first electrode 2 and second electrode 3, which define the discharge region 4 between them. The first electrode 2 is located near or directly on the inner surface of the ceramic tube 1 laser camera. In the laser chamber is also posted at least one extended block of preionization mode 5 for gas preionization mode between the first and second electrodes 2, 3.
In a variant of realization of the laser shown in figure 1, the block of preionization mode 5 is designed as a compact symmetric ignition system sliding discharge on the surface of the dielectric, mainly sapphire plate 6 covering the initiating electrode 7 on the surface of which is mounted a firing electrode 8. Block preionization mode 5 is installed from the back side electrode of the first electrode 2 made partially transparent due to slot Windows 9 on its working surface, perpendicular to the longitudinal axis of the electrode.
Outside of the laser chamber is set distribution is different along the laser chamber, the set of capacitors 10. The capacitor 10 connected to the switching power supply 11. Near the second electrode 3 is extended ceramic container 12 (Fig 1). End portion of each ceramic container 12 is hermetically secured on the end flanges of the laser chamber with access or tight connection to the interior of the container (for simplicity not shown). Each ceramic container 12 posted by additional capacitors 13. Outside of the laser chamber is optional pulse power supply 14, the polarity of which is opposite to the polarity of the pulse power source 11. Additional power source 14 is connected to the additional capacitor 13 with the ends of each ceramic container 12. The capacitors 10 and additional capacitors 13 are connected to each other via a grounded gas-permeable reverse the conductors 15 and connected to the first and second electrodes 2, 3 through distributed along the laser camera electrical inputs 16, 17 laser camera and electrical inputs 18, 19 ceramic containers 12. Moreover, gas-permeable reverse the conductors 15 are made concave toward the discharge region 4. To update the gas in the discharge region between successive discharge pulses in a ceramic tube 1 laser camera also contains a system circus the ablation gas, containing diametrically fan 20 water cooled tubes 21 of the heat exchanger and forming a gas flow rotary blade 22 and the ceramic spoilers 23 formed adjacent to the first electrode 2 parts laser camera. In addition, facing toward the discharge region 4 surface installed near the second electrode 3 of the ceramic container 12 has an extensive niche 24, in which is placed the second electrode 3. While facing the discharge region 4 of part 25 of the ceramic container 12 form located up and down stream from the second electrode 3 guides the gas stream.
The method of generating laser through the laser is as follows. Between the control electrode 8 and the triggering electrode 7 systems forming unit preionization mode 5 light finished sliding discharge on the surface of the extended sapphire plate 6, figure 1. Using UV radiation of the auxiliary discharge unit preionization mode 5 pre-ionization of the gas mixture in the discharge region 4 between the first and second electrodes of the laser 2, 3. Include an additional power source 14 and the ends of each ceramic container 12 to produce a pulse charging additional capacitor 13 is relatively slow, because the inductance of the charging circuit through the ends of eroticheskoe container 12 is relatively high. With a time delay equal to the difference of times of charging additional capacitors 13 and capacitor 10 includes a pulsed power source 11 and provide fast pulse charging of the capacitors 10 voltage, the polarity of which is opposite to the polarity of the charging voltage of the additional capacitors 13. Due to the mutually agreed parameters selection bit circuit, on the one hand, and pressure, composition and other characteristics of gas on the other, provide simultaneous completion of the charging of the capacitors 10, additional capacitors 13 and reaching the breakdown voltage between the electrodes 2, 3. Ignite the discharge in region 4 between the high-voltage first and second electrodes 2, 3 of the opposite polarity. The discharge is performed in a low-inductance discharge circuit comprising the capacitors 10 and additional capacitors 13, sequentially interconnected through a grounded gas-permeable reverse the conductors 15, concave in the direction of the discharge region 4 and the electrical inputs 16, 17, 18, 19 of the laser chamber and the ceramic container 12. The result is the generation of a laser beam. After the gas circulation system, which includes the fan 20, the tubes of the heat exchanger 21, and forming the gas flow turning vane 22, the ceramic spoilers 23, and adjacent to the recess 24 cha the tee 25 ceramic container, replace the gas in the discharge region 4, the cycle is repeated.
The simplification of the operation of the laser is achieved in embodiments of the invention with automatic pre-ionization. In these embodiments, illustrated in figure 2, 3, the laser contains electrically connected with the block of preionization mode 5 and one of the electrodes of the auxiliary capacitors 26, the capacity of which is many times less than the capacitance of the capacitor 10.
Figure 2 block of preionization mode 5 is located on the back side of the second translucent electrode 3, near which is equipped with two ceramic container 12 having the shape of a cylindrical pipe. The auxiliary capacitor 26 is placed in each container 12 and is electrically connected with the block of preionization mode 5 through the auxiliary electrical inputs 27 installed in the wall of each of the ceramic container.
In these embodiments of the invention the pre-ionization carried out automatically since the inclusion of an additional power source 11 through the charging of the auxiliary capacitor 26 through the auxiliary discharge gap unit preionization mode 5. In the process of automatic preionization mode current auxiliary discharge preionization mode 5 flows through a low-inductance discharge circuit that includes the second electrode 2, the auxiliary electrical inputs 27 and the auxiliary capacitor 26. The small size of vspomogatelny capacitors 26 determines optimally small energy input in the auxiliary discharge unit preionization mode. Otherwise, the laser operation is carried out similarly as described above.
Application for the preionization mode UV radiation sliding discharge in the form of extended plasma sheet on the surface of the dielectric (sapphire) 6 allows you to implement a uniform in the discharge region 4 optimally high level of preionization mode due to the possibility of adjusting the energy input in the auxiliary sliding discharge. This ensures a high efficiency of the laser, as the laser beam and the stability of the laser in a long-term mode, which is an advantage of the preionization mode of the given type.
The implementation of the preionization mode through the partially transparent electrode makes it possible to realize a large aperture homogeneous volumetric discharge in a compact low-inductance discharge laser system and high efficiency change of the gas in the discharge region 4.
Increasing the aperture of the discharge and the increase of energy generation can be achieved without the use of a rather complicated to manufacture partially transparent electrodes. In embodiments of the invention illustrated in figure 3, the first electrode 2 and second electrode 3 is made solid, and two blocks of preionization mode are located on the sides of the first electrode 2. Each of the two identical blocks of preionization mode 5 is made in the form of a system of forming a sliding discharge. This electrorate the health of the system (figure 3) is quite simple in the manufacture of solid electrodes also allows highly effective to increase the aperture of the discharge and to increase the energy of laser generation.
While limiting the voltage amplitude of the discharge on a dielectric surface may be corona, figure 1. In accordance with this block of preionization mode may contain the system of formation of corona discharge. Other systems the formation of corona discharge for simplicity will not be considered.
A variant of the invention, shown in Fig 3 blocks of preionization mode 5 are located on the sides of the first electrode. Auxiliary capacitors 26 are placed outside the laser chamber and electrically connected with the blocks of preionization mode 5 through the auxiliary electrical inputs 28 installed in the wall of the ceramic tube 1 laser camera.
In variants of the method of generating laser radiation, illustrated in figure 3, the automatic pre-ionization from the side of the first electrode is performed using a power source 11 from the time of its inclusion. The pre-ionization is performed with a time delay relative to the time of the inclusion of an additional power source 12, is equal to the difference of times of charging additional capacitor 12 and capacitor 10.
The opportunity offered in this variant of the method is highly efficient automatic preionization mode with a time delay relative to the time of the inclusion of an additional power source, i.e. after the start of growth of the discharge voltage is not obvious. Though the, in accordance with the experimental data, the effective pre-ionization in this mode can be carried out. This is due to the fact that the gas mixture excimer lasers have a high rate of electron attachment to donors halogen model HC1, F2depending on the magnitude of the electric field strength between the electrodes 2, 3. In this regard, the pre-ionization can ensure maximum efficiency of the laser when it is enabled, after reaching the voltage on the electrodes 2, 3 laser in which the frequency of ionization of the gas by the electric field begins to dominate over the frequency of electron attachment to the donors of Halogens. In accordance with the experimental data for the characteristic time ~180 no growth voltage from the zero level to the breakdown, delay the effective preionization mode relative to the beginning of growth of the discharge voltage for the XeCl laser reaches 50 not. The delay may be increased if the rate of increase voltage until the unit of preionization mode below. Thus, when the charging time of capacitors ~180 NS time charging additional capacitor 13 may be substantially more than 230 is not providing in accordance with the proposed variant of the method of generating laser radiation of high-performance automatic pre-ionization of the first electrode 2.
When running in predlojeno is the form of the laser acquires new positive qualities.
The running surfaces of the ceramic containers/container facing the discharge region 4, in the form of directing the gas flow near the second electrode 3 and the placement of the second electrode 2 in an extended recess 24 of the container 12 (figure 1) allows you to generate high-speed gas flow between the electrodes. This provides a quick change of the gas in the discharge region 4, giving the possibility to increase the pulse repetition rate and average power of laser radiation.
The introduction of ceramic containers 12 in the amount of either of the two (figure 2, 3)or one (1) optimally to ensure simplicity of design with powerful high-energy laser.
The use of containers 12 in the form of a cylindrical pipe (figure 2) provides the greatest ease and mechanical strength of the structure and, accordingly, the reliability of the containers loaded with high external pressure.
The shape of the containers 12 in the form of rectangular tubes (figure 2) allows to provide a low inductance discharge circuit and to increase the efficiency of the laser. In addition, the flat extended portion 25 of the container 12, facing toward the discharge region 4, effectively forming in her high-speed gas stream.
Form a grounded gas-permeable reverse current conductors 15, concave in the direction of the discharge region 4 (figure 1-3), corresponds to the shape of the equipotential whether the second electric field between the high voltage electrode 2, 3 opposite polarity. In this regard, is achieved by reducing the inductance of the discharge circuit without distorting the configuration of the electric field in the discharge region 4, which contributes to the achievement of high efficiency of the laser.
Connection of additional power source 14 to the additional capacitors 13 and charging the ends of each ceramic container 12 provides the greatest ease of discharge laser system.
Since the inductance of the current path and the charging time of the additional capacitors 13 are greater than that of the capacitor 10, to achieve the maximum slew rate of the electric field in the electrode gap on the prebreakdown stage of discharge and uniform stable discharge power supply 11 includes a specified time delay relative to the time of the inclusion of an additional power source 14.
In accordance with the invention, the first and second electrodes 2, 3 are both high voltage of different polarity and placed on insulators, which are ceramic tube 1 laser camera and ceramic containers/container 12. Compared with the prototype, the voltage between adjacent high-voltage and grounded electrical inputs 16, 17, and between the electrodes 2, 3 and end flanges of the laser chamber is reduced by half with olego bit of pressure to his half. This allows to provide a low inductance discharge circuit and high efficiency of the laser, as well as to increase the length of the electrodes, increasing the energy of laser generation. This reduces the requirements for electrical insulation of the laser, which simplifies the operation of the laser and increases its reliability.
Performing laser and method of generating laser radiation in the specified form can significantly increase energy generation and average power of laser radiation at high laser efficiency and reduce operating costs of the laser. For example, the interelectrode distance h and the width of the discharge w can be increased by √2. The discharge aperture h×w, the active volume of the laser, the total power stock capacitors and additional capacitors will be increased in 2 times, and the amplitude of the voltage source equal to the voltage of the additional power supplies) will be much (√2) reduced compared with lasers, using one source. This allows to increase the energy of the laser at 100% at moderate operating voltages. The inductance of the discharge circuit can be minimized by placing capacitors in the vicinity of the electrodes and by reducing at least √2 times the distance between the high voltage and the grounded elements of the discharge circuit, to provide the Wai increase power generation at high efficiency of the laser.
Thus, the implementation of gas discharge excimer laser, and the generation of laser radiation as proposed allows to increase the energy generation, the average radiation power at high efficiency laser and, in General, to reduce the cost of energy generation.
The list of designations
1. ceramic tube laser camera
2. the first electrode
3. the second electrode
4. the area of the discharge
5. block preionization mode
6. dielectric (sapphire) plate
7. initiating electrode
8. firing electrode
9. slit window on the working electrode surface
10. capacitors
11. switching power supply
12. one or two long ceramic container
13. additional capacitors placed in each ceramic container surface ceramic container forming the gas flow
14. additional switching power supply
15. reverse distributors
16, 17, 18, 19 electrical inputs laser camera and containers
20. diametrically fan
21. tube heat exchanger
22. the guide blades
23. spoilers
24. extensive niche in which you installed the second electrode
25. part of the surface of the container forming the thread
26. auxiliary capacitors
27. auxiliary electrical inputs pin is lerov
28. auxiliary electrical inputs laser camera
1. Discharge, in particular excimer laser, comprising: filled with a gas mixture of the laser chamber, consisting at least partially of a ceramic material and having spaced apart extended first and second electrodes defining a discharge region between the first electrode located near or directly on the inner surface of the laser chamber, at least one extended block of preionization mode; a gas circulation system; a set of capacitors that are located outside of the laser chamber and connected to the first and second electrodes through the electrical inputs of the laser chamber and the gas-permeable reverse distributors located in the laser chamber on both sides of the electrodes; a power source connected to the capacitor, in which the laser chamber near the second electrode has either one or two long ceramic container; each ceramic container placed additional capacitors; capacitors and additional capacitors in series are connected through the gas-permeable reverse conductors and connected to the first and second electrodes distributed along the laser camera electrical inputs ceramic pipes and electrical inputs to rumichaca containers.
2. The laser according to claim 1, in which the outside of the laser chamber is additional switching power supply, the polarity of which is opposite to the polarity of the pulse power source and the additional power source is connected to the additional capacitor and the ends of each ceramic container.
3. The laser according to claim 1, in which the time delay between the inclusions of additional power source and the power source is equal to the time difference of the pulse charging additional capacitors produced additional power source through the ends of the ceramic container/containers, and the charging time of the capacitors produced in a low-inductance connected to the power source.
4. The laser according to claim 1, which faces the discharge region of the side surface of each extended ceramic container is formed near the second electrode guides the gas stream.
5. The laser according to claim 1, in which the gas-permeable reverse distributors made concave toward the discharge region.
6. The laser according to claim 1, in which at least one ceramic container has the form of either round or rectangular pipes.
7. The laser according to claim 1, in which the vicinity of the second electrode has a single ceramic container with a surface facing the discharge region has a PR is teenney niche hosting the second electrode.
8. The laser according to any one of claims 1 to 7, in which the preionization mode contains the system of the extended homogeneous sliding discharge on a dielectric surface.
9. The laser according to any one of claims 1 to 7, in which the preionization mode contains the system of the extended corona discharge.
10. The laser according to any one of claims 1 to 7, in which either the first electrode or the second electrode is made partially transparent, and block the preionization mode is installed on the reverse side of the partially transparent electrode.
11. The laser according to any one of claims 1 to 7, in which the first electrode and the second electrode is made of a solid, and at least one block of preionization mode is installed on the side of one of the two electrodes.
12. The laser according to any one of claims 1 to 7 containing electrically connected with the block of preionization mode and one of the electrodes of the auxiliary capacitors, the capacitance of which is many times less than the capacitance of the capacitors.
13. The method of generating laser radiation through the laser according to any one of claims 1 to 12, consisting in the implementation of the preionization mode of gas between the first and second electrodes, the pulse charging of the capacitors, the implementation of the discharge between the first and second electrodes and generating a laser beam, in which
pre-include an additional power source and the ends of each keramicheskoj the container to produce a pulse charging additional capacitors, then with a time delay equal to the difference of times of charging of additional capacitors and capacitors include switching power supply and provide fast pulse charging of the capacitor voltage, the polarity of which is opposite to the polarity of the charging voltage of the additional capacitors, since the simultaneous charging of the capacitor and the additional capacitor discharge between the high voltage first and second electrodes of opposite polarity by a low-inductance discharge circuit comprising the capacitor and the additional capacitor, connected in series to each other via a gas-permeable reverse distributors, concave in the direction of the discharge region.