Gas discharge laser and method of radiation generation. RU patent 2510109.
 Gas discharge laser, laser system and method of radiation generation / 2507654In a gas discharge laser capacitors (11), which are in a low inductive manner connected to electrodes (2, 3) of the laser, are placed near the first electrode (2) in ceramic containers (10) and in a low inductive manner are connected to a pulse source of power supply (15) via current leads (12, 13) of each container, high-voltage current leads (21) of a metal laser chamber (1) and lengthy grounded current leads (23), arranged at both sides of ceramic containers (10). End parts (29) of each ceramic container (10) are tightly fixed in the ends (30) of the laser chamber (1) with the possibility of access or connection to the inner part of the container (10). |
 Gas discharge laser / 2507653Gas discharge laser comprises the following: a laser chamber filled with a gas mixture, which comprises the first and second long electrodes that are distant from each other, a pre-ionisation unit, a system of gas circulation, a set of capacitors arranged outside the laser chamber and connected to electrodes via electric inputs of the laser chamber and gas permeable reverse current conductors, arranged in the laser chamber at both sides of electrodes, a source of power supply connected to capacitors and designed for their pulse charging to breakthrough voltage, and a resonator for generation of a laser beam. The laser chamber comprises a ceramic pipe with two end flanges rigidly fixed to each other by means of a fastening system stretched along the ceramic pipe. Each of end flanges is sealed with a ceramic pipe by means of a circular gasket placed on the outer surface of the end part of the ceramic pipe. Each end flange has a circular niche on the inner side, where the end of the ceramic pipe is placed, and the end flange closely adjoins the ceramic pipe only on its outer surface in place of installation of a sealing circular gasket. |
 Gas-discharge laser and method of generating radiation / 2506671Invention relates to laser engineering. The laser, preferably an excimer laser, includes a laser chamber consisting of ceramic material and having elongated first and second electrodes, the first of which is situated near the inner surface of the laser chamber, a pre-ionisation unit; a gas circulation system; a set of capacitors situated outside the laser chamber, and a power supply connected to the capacitors. Elongated ceramic containers housing additional capacitors are placed near the second electrode. The capacitors and the additional capacitors are connected in series to each other through earthed gas-permeable reverse current lead situated on both sides of the electrodes and are connected to the first and second electrodes through leads of the laser chamber and leads of the ceramic containers. |
 Gas-discharge laser / 2503104In the gas-discharge laser, capacitors which are low-conductance connected to electrodes of the laser, are placed near the first electrode in ceramic containers and are low-inductance connected to a pulsed power supply through current leads of each container, high-voltage current leads of the metallic laser chamber and extended earthing leads, placed on both sides of the containers. |
 Mobile combat laser complex / 2496078Combat vehicle is mounted on caterpillar running gear. Combat laser is mounted at mid rotary platform and comprises liquid propellant engine and resonators arranged perpendicular to its lengthwise axis. Oxidiser and propellant tanks are arranged above said mid rotary platform. |
 Method for positioning the mirrors of triple axis laser gyrometer, in particular when starting gyrometer / 2493642Each of the resonators contains a medium which is excited to generate light waves. Each of the resonators is formed by a set of mirrors which includes two movable mirrors. Each of the three movable mirrors participates in forming two resonators. Pre-positioning of the three mirrors is carried out. The three mirrors are simultaneously moved with the same amplitude which is less than or equal to the intermediate mode of the resonator, such that each of the resonators passes through a length where maximum amplification is provided. Intensity of waves passing through each of the three resonators is measured for each triplet of positions occupied by the mirrors. The length of each of the resonators, where maximum intensity is provided, is determined based on the three triplets. The final positions of the mirrors where maximum intensity in the three resonators is provided are determined. |
 Orbital space system / 2488527Invention relates to systems of space objects with transmission of energy and pulses there between by laser radiation and may be used at space objects at space objects whereat microgravitation conditions are created at the level of ~ 10-7 …10-8 of acceleration at Earth surface. Proposed system comprises space power station (SPS) 1 with solar cells 2 and four laser radiation sources 4, and space object 7 with receive-convert unit 11, 12, 13 optically communicated with said sources. To orient, stabilise and keep SPS and space object in near-earth orbit low-thrust engines 3, 9 are used. Said receive-convert unit has two pairs of reception planes 12, 13 arranged in symmetry about space object lengthwise axis extending through its center of gravity. One pair of planes 13 controls space object yaw while another pair controls its pitch. Said planes do not extend beyond space object midsection. Any source 4 can vary radiation power or be reoriented to whatever reception pane 12, 13. That is, laser transfer of power (for example, constant for low-thrust engines) allows control orientation and stabilisation at a time. Besides, effects of disturbances (e.g. aerodynamic) are decreased in conditions of microgravitation. |
 Combat laser / 2482581Combat laser comprises a source of energy, such as a horizontally installed liquid rocket engine with a supersonic nozzle. At the outlet of the nozzle there is an exhaust device installed as capable of rotation. Resonators are installed on the exhaust device and comprise ball hinged joints, providing for rotation of resonators in the vertical plane. The exhaust device is made as capable of regenerative cooling and comprises inner and outer walls. On the inner wall there is a layer of uranium 235, particles of uranium 235 are introduced into the wall itself. |
 Combat laser / 2481544Combat laser contains foundation with laser station mounted on it on the base of gas dynamic laser, note that laser station is made in the form of liquid fuel rocket engine with nozzle that contains subsonic and supersonic parts and critical section on their joint mounted vertically with the possibility of exhausting the combustion products vertically upwards and resonator mounted in critical section on cylindrical hinge. |
 Combat laser / 2479900Combat laser comprises a source of energy and at least one resonator. The source of energy is arranged in the form of a power plant on the basis of a gas turbine engine and comprises an input device, a compressor, a combustion chamber, a turbine and the main shaft. Also the laser comprises a free turbine, the shaft of which is connected with a generator, an exhaust device, which comprises a fixed part and a cylindrical exhaust device arranged as capable of rotation. On the cylindrical exhaust device on a cylindrical hinged joint there is at least one resonator installed as capable of rotation in a vertical plane. |
 High-frequency excited co2 waveguide laser / 2244367Proposed laser has two channels of which first one functions as discharge channel, as well as high-reflection and light-splitting mirrors installed at ends of discharge channel. Each channel is bound on opposite ends with extreme and central electrodes and on two other ends, with insulating wafers. One of extreme electrodes has rectangular longitudinal slot of depth L ≥ 1.5h and width H ≥ h + 1 to form insulating space together with closest second channel holding additional working gas supply, where h is discharge channel width. |
| High-frequency excited co2 waveguide laser / 2244367 Proposed laser has two channels of which first one functions as discharge channel, as well as high-reflection and light-splitting mirrors installed at ends of discharge channel. Each channel is bound on opposite ends with extreme and central electrodes and on two other ends, with insulating wafers. One of extreme electrodes has rectangular longitudinal slot of depth L ≥ 1.5h and width H ≥ h + 1 to form insulating space together with closest second channel holding additional working gas supply, where h is discharge channel width. |
 Method and device for producing laser beam / 2244990Proposed method used for producing beam from pulse-periodic laser pumped with self-maintained spatial discharge with XeXl, KrF, CO2, and HF base active means includes formation of at least one electrode of a number of plasma generations near effective surface with self-maintained spatial discharge producing repetitive plasma structure and generation of laser beam. Plasma generations are formed in any plane perpendicular to optical axis of laser near effective surface of at least one of electrodes, its size being smaller than maximal size of plasma generation at one repetition period of plasma structure and smaller than or equal to size of laser radiation beam produced in same plane near effective surface of mentioned electrode. Device implementing this method has at least two opposing electrodes connected to common buses of pumping source and optical cavity; at least one of electrodes is made of repetitive parts each having its respective effective surface. Repetitive electrode parts are installed either in planes parallel to optical axis of laser or in those disposed at acute angle to this axis, or in cylindrical surfaces with generating lines perpendicular to optical axis of laser and guides of these surfaces in the form of curves or broken lines. Such design ensures desired energy distribution for various processes. |
| Method and device for producing laser beam / 2244990 Proposed method used for producing beam from pulse-periodic laser pumped with self-maintained spatial discharge with XeXl, KrF, CO2, and HF base active means includes formation of at least one electrode of a number of plasma generations near effective surface with self-maintained spatial discharge producing repetitive plasma structure and generation of laser beam. Plasma generations are formed in any plane perpendicular to optical axis of laser near effective surface of at least one of electrodes, its size being smaller than maximal size of plasma generation at one repetition period of plasma structure and smaller than or equal to size of laser radiation beam produced in same plane near effective surface of mentioned electrode. Device implementing this method has at least two opposing electrodes connected to common buses of pumping source and optical cavity; at least one of electrodes is made of repetitive parts each having its respective effective surface. Repetitive electrode parts are installed either in planes parallel to optical axis of laser or in those disposed at acute angle to this axis, or in cylindrical surfaces with generating lines perpendicular to optical axis of laser and guides of these surfaces in the form of curves or broken lines. Such design ensures desired energy distribution for various processes. |
 Excimer laser / 2249282Proposed excimer laser that can be used for intracavitary therapy in medicine, for microelectronics, laser chemistry, and processes using heavy-power ultraviolet rays has electrode system, pulse power circuit with storage capacitor, and switch in the form of thyratron. Electrode system has insulating plate that carries electrodes; thyratron is connected in series with storage capacitor and electrode system. Electrode system is designed to ensure pumping of excimer gas medium with discharge creeping over insulating plate surface. |
 Method and device for exciting self-restrained and self-heated metal atom junction pulsing lasers / 2251179Proposed method includes generation of one additional delay pulse with each drive pulse at certain delay between pulses and constant energy insertion in laser active element. Lasing power characteristics at stabilized parameters of plasma are controlled by momentum changes of additional pulse location relative to drive pulse. For lasing mode additional pulse is generated past main drive pulse and for lasing pulse suppression mode it is produced in advance of main drive pulse; in this case energy of additional pulse should be sufficient only for populating metastable laser levels of metal atoms. Pulse advance time and pulse delay time of additional pulse counted from origin of drive pulse should be lower than lifetime of metastable laser levels. Stabilization of plasma parameters is additionally corrected by varying advance time and delay time of additional pulse with respect to drive pulse. Device implementing this method has laser tube whose cathode and grounded anode are shorted out by inductance coil; resonator; two switches; two energy storage capacitors whose leads are integrated and connected to laser tube cathode; adjustable high-voltage power supply whose common lead is connected to grounded cathodes of switches; trigger pulse generator; two adjustable delay lines; two anode reactors; two pulse modulator drivers; nonadjustable delay line; electronic relay; controller. |
 Method and device for exciting gas molecules and atoms / 2255398Proposed method intended for exciting molecules and atoms of working gas includes voltage supply to electrodes and organization of working gas flow in discharge gap so that working gas flow is fully passed through cathode layer of volume glow discharge; gas flow organizing means is disposed upstream of cathode so that gas mixture flow is passed through cathode , interelectrode space, anode, and radiation generation working area. Device implementing this method has flow organizing means, power supply, working gas, and discharge chamber incorporating anode and cathode made in the form of grids; at least cathode grid has regular pitch not to exceed thickness of cathode layer of normal gas volume glow discharge; peripheral regions of device electrodes are separated and protected against breakdown by means of electric insulator; flow organizing means is disposed upstream of cathode. |
 Method for transmitting optical pulses / 2262199Method for transferring optical pulses by several laser beams includes forming a central laser beam and cover around it in form of tunnel. Tunnel is formed by one beam or a set of beams, contacting each other. Tunnel is made also with possible rotation relatively to central beam and consists of two portions, formed by set of oppositely directed beams. |
 Method and device for forming powerful laser pulse / 2267197Method and device can be used at powerful multichannel laser installations with radiation power level higher than 1012 W. Operation of laser is based upon forming of partially coherent laser pulse. Characteristics of laser pulse are specified by design mutual coherence function. Values of the function are necessary and sufficient for optimal matching of laser-target system. Device for forming powerful laser pulse has master oscillator, system for forming space-time characteristics of laser pulse and amplifiers. Amplifiers are disposed in sequence along rising cross-section of beam to be amplified correspondingly to space-angle distribution of radiation intensity. Distribution is matched with design function of mutual coherence. High uniformity intensity distribution is provided in focus of laser. |
 Scheme of excitation of lasers on metal fume / 2269850The scheme has n modules linked up to a power source through a charging inductance. Each module has one section of a multisectional high frequency transformer. Each section of the transformer has two primary windings coiled back-to-back and one secondary winding. Each module has also two accumulative condensers, two charging diodes and twp transistor commutators. The accumulative condenser is charged through a corresponding charging diode and a charging inductance from the power source and is discharged through corresponding transistor commutators and primary windings of the section of the multisectional transformer. The shutters of the transistor commutators are linked up through devices matching with the scheme of the starting. The secondary windings of all sections of the multisectional transformer are successively connected and linked up to the outputs of the gas discharge tube. |
FIELD: electricity.
SUBSTANCE: gas discharge laser comprises: a laser chamber comprising lengthy electrodes distanced from each other, a lengthy pre-ionisation unit; a system of gas circulation; a set of capacitors installed in ceramic containers located near the first electrode, the specified capacitors are connected to electrodes via current leads of ceramic containers and via current leads arranged at both sides of electrodes. The laser also comprises a pulse source of power supply connected to capacitors, at the same time in the laser chamber there are additional lengthy ceramic containers, each comprising additional capacitors. There are tight current leads installed in walls of each additional container along it. At the same time capacitors are connected to the second electrode via gas permeable current conductors, current leads of each additional container and additional capacitors. Outside the laser chamber there is an additional pulse source of supply, polarity of which is opposite to the polarity of the source of supply, being connected to additional capacitors.
EFFECT: making it possible to increase laser capacity.
18 cl, 3 dwg
The technical field.
The invention relates to a device, high intensity discharge, in particular excimer, lasers and method of generation of laser radiation.
The level of technology
Excimer lasers are the most powerful sources of directional radiation in UV spectral range. Depending on the gas composition of excimer lasers emit at the junctions of different molecules: ArF (193 nm), KrCl (222 nm), KrF (248 nm), Haug (282 nm), HES (308 nm), XeF (351 nm). Lasers at the molecular fluorine F2 (157 nm) is close to excimer lasers for gas composition and method of pumping. The most efficient, with efficiency of about 3%, high-energy, up to about 1 j/pulse, and powerful, up to 600 W, are KrF and Has lasers, which have been most used in various technologies. These include the production of flat LCD and OLED displays, 3D microprocessing materials, production of high-temperature superconductors by laser ablation, powerful UV lidars. ArF excimer lasers with a relatively small energy generation 5-10 MJ/pulse and high (4-6 kHz repetition rate pulses through the shortest wavelength that allows you to use reliable quartz optics, widely used in large-scale lithographic production of integrated circuits with the characteristic size only to a few tens of nanometers. In accordance with the needs of modern high-performance technologies with use of excimer lasers their power is constantly increasing. However, increasing energy and radiation power gas-discharge excimer lasers is of fundamental physical restrictions, which if exceeded the optimal values of energy generation and pulse repetition rate result in a decrease in the efficiency of laser, reduced reliability and stability of its work and ultimately increase the cost of operation of the laser.
All this determines the urgency of finding solutions to optimize the design and method of work of excimer lasers, increase their capacity and to reduce costs for energy generation at various combinations of energy generation and pulse repetition rate.
Of The United States Patent 6782030 known repetitively pulsed gas-discharge laser with pre-ionization low corona, which in order to reduce the inductance of discharge circuit that provides high efficiency of laser, capacitors, connected to the electrodes placed near high-voltage electrode, situated on the side wall laser camera. For compatibility with aggressive environment laser is proposed to use capacitors with a coating of inert material.
The disadvantage of this technical solution is that the composition of the ceramic capacitors includes components such as solder that in case of violation of the protective layer when exposed to F 2 or Hcl will lead to the output capacitor and then laser failure. In addition, in the gas medium of the laser spurious break on the surface ceramic capacitors designed for operation in electrically robust environment, it is not possible to charge them up to rated voltage. This dramatically reduces the power stock capacitors in the gas medium of the laser, not allowing to achieve high levels of energy generation and power of the laser.
This lack deprived excimer laser with x-ray pre-ionization kW average power of radiation, which the high-voltage electrode is placed on the long ceramic metal flange of the laser camera is connected to secondary camera with electrically robust gas, Laser Focus World, 25, 10, 23, 1989. The laser device and method of generation of laser radiation allows to increase the aperture of discharge, and, consequently, energy generation, and the average power of laser radiation. Low inductance discharge circuit needed for high performance laser, is achieved by minimizing the thickness of the dielectric flange due to the decrease of the mechanical load on it when aligning internal and external pressures.
The disadvantage of this device and method of generation of laser radiation is the complexity of its operation and large dimensions, as x-ray pre-ionization causes the application is too complex laser cameras, the cross section of which has a track configuration. In addition, the deformation of the laser chamber of complex shape with its filling high-pressure gas can lead to the destruction of the rigidly fixed on him ceramic flange.
Known for one of the most powerful gas-discharge excimer laser systems for industrial applications - two-beam laser VYPER, Coherent Inc. ExcimerProductGuide2011, including hosted on shared chassis two identical compact laser, similar to that described in United States Patent 6,757,315, each of which contains a body in the form of a metal pipe on which is mounted compact ceramic bit camera with a long metal flange. On the high-voltage metal flange ceramic camera mounted high-voltage electrode and the block of preionization mode. Method of generation of laser radiation provides simultaneous, synchronized pumping two identical lasers and the combination of two parallel laser beams out of the laser.
Data unit and a way to provide parameters of laser radiation that fit a range of technological applications at the level of energy generation 1 j/pulse and power UV laser radiation 600 W for each laser with the length of electrodes about 1 m
However, further energy laser system generation is difficult because of the use in each of its laser preionization mode low voltage corona and the limited size of ceramic bit camera mounted on a metal case of the circulation system of gas. Because in the discharge gas flow abruptly changes direction, it is not possible to effectively increase the speed of gas in the electrode gap, resulting in limiting the further increase of the frequency of recurrence bit pulse and average power of laser radiation.
The closest technical solution which can be chosen as a prototype, is a discharge, in particular, excimer laser, known from the Patent RF №2446530 from 28.01.2011 published 27.03.2012 EN TPMF №9. Laser includes:
filled with a gas mixture laser camera, consisting mainly of metal and having separated from each other extended the first and the second electrode, define the area of the discharge between them, with the first electrode, located from the side of the inner surface of the laser camera, at least one long block of preionization mode for the preionization mode of gas between the first and second electrodes; the circulation system of gas to update the gas in the discharge region between the next bit pulses; a set of capacitors connected to the first and the second electrode, switching power supply, connected to the capacitors designed and for their pulse charging up the breakdown voltage, providing gas discharge between the first and second electrodes for excitation of gas mixtures laser and generation of laser radiation, and located near the first electrode of the two longest ceramic containers in which to reduce inductance discharge circuit and ensure high efficiency of laser posted a set of capacitors, connected to the first and second through a high-voltage electrodes and grounded current leads each ceramic container and grounded through gas-permeable reverse current distributors located on both sides of the electrodes.
In the specified device containers are made in the form of a cylindrical pipe, installed on both sides of the plane passing through the axis of the electrodes. The surface of the containers addressed to the discharge region and located flush with the first electrode, serve as guides gas stream. Functioning of the laser includes implementation pulse charging the capacitor placed in a ceramic container, using pulsed power source and preionization mode of gas between the first and the second electrode, implementation discharge between the first and second electrodes and generation of laser radiation. The pre-ionization carry out UV radiation completed moving discharge through the partially transparent or first electrode, or the second electrode that can effectively increase the aperture of the discharge.
The laser is characterized by a simple, cheap and reliable design of the laser chamber in which ensures the high speed gas flow between the electrodes, and the possibility of achieving high average power laser radiation.
In the prototype is limited to the charge speed of pulse capacitors made through the ends of ceramic containers, leading to a decrease in efficiency of the laser. In addition, for the ignition auxiliary discharge of pre-ionizer in metal laser camera, you must have isolated current leads, which complicates the design of the laser camera. Also in laser is limited increase of energy generation due to the limited size of the containers and, therefore, limited Energocapital the capacitors. In addition, required to increase energy generation increase of interelectrode distance increases discharge voltage, which complicates the operation of the laser, and is accompanied by the need to increase the size of the ceramic parts of the laser, serving as high-voltage insulators, and laser cameras in General, which complicates its design. Geometry ceramic containers in the form of a circular cylinder is not fully satisfies the conditions of minimizing the inductance of discharge circuit, which can reduce the efficiency of a laser with increasing energy generation.
Disclosure of the invention
The objective of the invention is to create some powerful excimer lasers, different, adaptability and simplicity of design, ensuring uniform high-speed gas flow between the electrodes, low inductance discharge circuit, the possibility of increasing the aperture laser with reduction of working voltage.
The technical result of the invention is to improve the design of metal-ceramic laser, the increase of energy generation, the average radiation power with high efficiency laser and overall reduction of costs for energy generation.
To solve these tasks, a gas discharge, in particular the excimer laser, which includes: filled with a gas mixture laser chamber, consisting mainly of metal and having separated from each other extended the first and the second electrode, defining the area of the discharge between them, with the first electrode, located from the side of the inner surface of the laser camera, at least one long block of preionization mode; the circulation system of gas; a set of capacitors placed either in one of ceramic container or in two ceramic containers installed near the first electrode and the capacitor connected to the first and second through a high-voltage electrodes and grounded current leads, each ceramic container and grounded through the reverse wire-ways, located on both sides of the electrodes, the laser also contains switching power supply that is connected to the capacitor, with
from the first electrode metal wall laser camera along with the sealed high-voltage current, each of which includes ceramic insulator,
inside the laser camera on both sides ceramic container/container posted United with metal wall laser camera extended grounded conductors,
and switching power supply connected to a low-inductance capacitors through these high-voltage current leads and earthed conductors laser cameras, and through the current of each ceramic container.
In the variants of the invention in a laser camera placed one or two extra long ceramic containers, each additional ceramic container is mainly with outside parties of the second electrode, in each additional ceramic container placed additional capacitors, in the walls of each additional ceramic container along it installed sealed high-voltage current and ground current, while the capacitor connected to the second electrode gas-permeable through wire-ways, the current of each additional container and additional capacitors, outside of the laser chamber is connected to the additional capacitors additional switching power supply, polarity which is the opposite polarity of the power source.
It is preferable that the end of each additional ceramic container tightly attached to the ends of metal laser camera with the possibility of access or tight connection to the inner part of the additional container.
It is preferable that the additional power source is connected to the additional capacitors ends with each additional container.
It is preferable that the time delay between additional inclusions power source and the power supply is equal to the difference of time pulse charging additional capacitors and time charging the capacitor.
It is preferable that part of the surface of each additional container turned to a bit field, form a close second electrode located up and down the stream directing the gas stream.
In the variants of the invention grounded gas-permeable ducts made concave towards the discharge region.
In the variants of the invention, at least one block of pre-ionizer placed in the immediate vicinity of the second electrode and at least one additional ceramic container along its length installed auxiliary sealed the current leads are auxiliary capacitors, one of the plates which is connected to the unit of pre-ionizer through supporting the current leads.
In the variants of the invention, near to second electrode is set one additional container, the surface of which turned to a bit field has a long niche that hosts the second electrode.
In the variants of the invention near the first electrode has a long ceramic container with a surface facing the bit field, has a long niche that hosts the first electrode.
In the variants of the invention in a niche of a ceramic container along with the first electrode installed in at least one unit of preionization mode,
in the variants of the invention of the laser Luggage which is provided with an additional gas circulation system.
In the variants of the invention first electrode and the second electrode is made of solid and at least one unit of preionization mode is installed at the side of one of the two electrodes.
In the variants of the invention or the first electrode, or the second electrode is made partially transparent, and the block of preionization mode is installed on the reverse side partially transparent electrode.
It is preferable that the power of preionization mode contains the system of the extended homogeneous moving discharge on a surface of a dielectric.
In the variants of the invention, at least one container/container has the form of either a round or rectangular pipes.
in the variants of the invention to the ends of each container filled with electrically robust environment, tightly connected pressure maintenance system electrically robust environment, close to the gas pressure in the laser chamber, the pressure maintenance system is made with the possibility circulation and cooling electrically robust environment.
The invention in another aspect relates to a method of generation of laser radiation by means of the laser, which consists in implementing a pulse charging the capacitor placed in each ceramic container, using pulse power supply and gas preionization mode between the first and the second electrode, implementation discharge between the first and second electrodes and generation the generation of the laser beam, which
previously include the additional source of food and ends with each additional ceramic container produce a pulse charging additional capacitors, then with a time delay equal to the difference between the times of charging additional condensers and capacitors include switching power supply and provide fast pulse charging capacitor voltage, polarity which opposite polarity voltage charging additional capacitors, after a moment simultaneous charging additional capacitors, after a moment simultaneous charging of the capacitors and additional capacitors discharge between the first and the high-voltage the second electrodes opposite polarity on low-inductance to discharge circuit, including capacitors and additional capacitors, consistently connected among themselves through the gas-permeable wire-ways, concave towards the discharge region.
In some variants with a time delay with respect to the inclusion of additional power source, equal to the difference between the times of charging additional capacitors and condensers, carry out pre-ionization from the first electrode.
The invention in another aspect relates to the way generation of laser radiation by means of the laser, which in the process of laser maintain pressure electrically durable medium that fills at least one ceramic container holds capacitors close to the gas pressure in the laser chamber.
The above and other objects, aspects, features and advantages of the invention will become more apparent from the following description and claims.
Brief description of drawings
The invention is illustrated by the attached drawings, which are presented in the form sufficient for understanding the invention, and in no way limit the scope of the present invention.
Figure 1 - the cross section laser with one ceramic container established near the first electrode.
Figure 2 - the cross section laser with an additional power source.
Figure 3 - the cross section laser with two circulation systems of gas.
The drawings matching items devices marked with the same number of positions.
Embodiments of the invention.
In accordance with the invention of gas discharge, in particular excimer laser, the cross section of which is schematically shown in figure 1, includes: filled with a gas mixture laser camera 1, consisting mainly of metal and having separated from each other long first electrode 2 and the second electrode 3 defining the scope of category 4 between them. The first electrode 1 is located on the inner surface of the laser chamber 1. In a laser camera is also posted at least one long block of preionization mode 5 for preionization mode of gas in the discharge region 4. In implementation of the laser, shown in figure 1, two identical blocks of preionization mode 5, located at the side of the first electrode 2 and made in the form of systems the formation of the moving of the discharge on a surface of a dielectric (sapphire) plate 6, covering the trigger electrode 7, burn the electrode 8, located on the surface of a dielectric plate 6. This electrode 7 block of preionization mode is connected with the first electrode 2 laser. To update the gas in the discharge region between the next bit pulses in a ceramic pipe 1 laser cameras also posted circulation system of gas containing diametrically fan 9 water cooled tube 10 of the heat exchanger, the system of guide blades 11 and spoilers 12. Also, the laser contains set of capacitors 14, connected to the first and second electrodes 2, 3, and switching power supply 15-connected capacitors for their pulse charging up the breakdown voltage, providing gas discharge between the first and second electrodes 2, 3 for excitation the gas mixture laser and generation of the laser beam with the help of the resonator (not shown). In the variant of the invention, shown in figure 1, near the first electrode 2 is one long ceramic container 16 with a long niche 13, which hosted the first electrode 2. In a ceramic container 16 to reduce the inductance of discharge circuit and ensure high efficiency of laser posted a set of capacitors 14. Capacitors are connected to the first and second electrodes 2, 3 via high-voltage and grounded current 17, 18 ceramic container 16 and grounded through gas-permeable back connectors 19, located on both sides of the electrodes of 2.3.
From the first electrode metal wall 20 laser camera along with the sealed high-voltage current 21, each of which includes ceramic insulator 22. Inside the laser camera on both sides of the ceramic container posted United with metal wall 20 laser camera extended grounded conductors 23. Switching power supply 15 connected to a low-inductance capacitors 14 through high-voltage current 21 and grounded ducts 23 laser cameras, as well as the current 17, 18 each container 16.
In the variant of the invention, shown in figure 1, part 24, 25 extended ceramic container form guides gas flow up and down stream from the first electrode 2. To do this in NIS 13 of 16 container along with the electrode 2 installed both units of preionization mode 5.
For automatic preionization mode that simplifies operation of a laser in a ceramic container 16 are auxiliary capacitors 26, the capacity of which is many times lower than the capacity of capacitors 14. Along the length of each container 16, containing auxiliary capacitors 26, installed auxiliary sealed the current 27. One of the plates of the subsidiary capacitors 26 connected to the unit of pre-ionizer 5 through supporting the current 27 ceramic containers.
Application for preionization mode UV radiation moving discharge in the form of extended plasma sheet on the surface of the dielectric (sapphire) 6 allows implementation in the field of category 4 homogeneous and optimally high level of preionization mode due to the possibility of adjustment energy input in the trailing digit. This ensures high efficiency of the laser, the quality of the laser beam and the stability of the laser in a long-term mode, which is an undoubted advantage of preionization mode of this type.
This variant of the invention with the installation of ceramic long the 16 container with a long niche 13, which hosted the first electrode 2 and blocks of preionization mode allows you to optimize the shape of the container for the formation of high-speed gas flow in the discharge region, ensuring a low inductance discharge circuit, increasing the number and Energocapital placed in the container capacitors.
Optimized from the point of view of increasing the power laser form container 16 (1) differs from that used in the prototype form of a circular cylinder. This leads to increased stress in the container 16, caused by gas pressure in the laser chamber. To reduce mechanical stress during work the 16 container filled preferably either gas (e.g. nitrogen)or liquid (for example, Galden Fluid) electrically robust environment 28 under the pressure close to the gas pressure in the laser chamber 1. While the ends of 16 container tightly the connected system 29 pressure maintenance electrically robust environment, close to the gas pressure in the laser chamber, made with the possibility of circulation and cooling electrically robust environment 28 that if necessary allows to maintain optimum working conditions capacitors 16, 26 mode with a high pulse repetition rate.
In this embodiment, the invention of the method of generation of laser radiation includes maintenance in the process of laser pressure electrically durable medium that fills at least one ceramic container holds capacitors close to the gas pressure in the laser chamber.
All this allows to increase energy generation and average laser power with high efficiency.
Other embodiments of the invention is aimed at further increasing the aperture discharge, energy generation and power of the laser. In these cases, illustrated in figure 2-3, near to second electrode 3 is installed or two extra long ceramic container 30 (2), or one extended additional ceramic container 30 (figure 3). Each additional ceramic container 30 is mainly with outside parties of the second electrode 3. Each additional container 30 placed additional capacitors 31. In the walls of each additional container 30 along it installed sealed high-voltage current 32 and grounded current 33. Capacitors 14 is connected to the second electrode 3 grounded through the gas-permeable conductors 19, concave towards the discharge region 4, through the current 32, 33 per container 30 and additional capacitors 31. Outside laser camera 1 placed additional switching power supply 34, polarity which is the opposite polarity of the power source 15. Additional power supply 34 connected to the secondary capacitors 30 the ends of each additional container 30. End of each additional ceramic container 30 sealed at the ends part of the surface of 35, 36 per container 30, addressed to the bit field 4, form a close second electrode 3 located up and down the stream directing the gas stream. In the variants of the invention, at least one additional container 30 made in the form of either a round or rectangular pipes (figure 2).
As shown in figure 2, the laser at least one block of pre-ionizer 5 can be placed in the immediate vicinity of the second electrode 3 and at least one additional ceramic container 30 along its length installed auxiliary sealed the current 27 and placed auxiliary capacitors 26, one of the plates which is connected to the unit of pre-ionizer through supporting the current 27. Figure 2 block of pre-ionizer containing compact symmetric system of formation of the moving discharge placed on the reverse side partially transparent electrode 3.
For this variant of the invention method of generation of laser radiation is as follows. Previously include additional power supply 34 and the ends of each additional ceramic container 30 produce pulse charging additional capacitors 31 relatively slowly as the electric circuit inductance of their charging relatively high. In the variant of the invention (figure 2) when an additional power supply 34 produce automatic pre-ionization by auxiliary charging capacitors 26 through subsidiary bit period/ periods block of pre-ionizer 5. Then with a time delay, equal to the difference between the times of charging additional capacitors 31 and capacitors 14, include switching power supply 15 and implement rapid pulse charging capacitors 14 voltage, polarity which is the opposite polarity of the voltage charging additional capacitors 31. After the moment simultaneous charging of the capacitors 14 and additional capacitors 31 discharge between the first and second high-voltage electrodes 2, 3 opposite polarity on low-inductance to discharge circuit, which includes capacitors 14 and additional capacitors 31, consistently connected among themselves through a grounded gas-permeable connectors 19, concave towards the discharge region, and the current 17, 18, 32, 32, 33 containers 16 and additional 30 containers. The result is the generation of laser radiation. After the circulation system of gas will replace the gas between the electrodes 2, 3, cycle laser repeat.
In the variant of the invention, shown in figure 3, the additional circulation system of gas containing diametrically fan 38, water-cooled tube 39 of the heat exchanger, the system of guide blades and spoileron 40, 41. This significantly increases the rate of change of gas electrodes and improves cooling of gas, which increases the pulse repetition rate and the average power of laser radiation. In the vicinity of the second electrode 3 formation of gas flow improved by placing it in NIS 37 on the surface of additional container 30. Additional container can be connected circulation system and pressure maintenance electrically robust environment close to the gas pressure in the laser chamber (not shown).
In the variant of the invention, shown in figure 3, block of preionization mode is located near the first electrode. For this variant of the invention the pre-ionization carried out by the first electrode 2 from the moment of switching power supply 15 with a time delay with respect to the inclusion of additional power supply 34, equal to the difference between the times of charging additional capacitors 31 and capacitors 14. The pre-ionization carried out, producing a rapid pulse charging subsidiary capacitors 26 through the power of pre-ionizer 5. This improves the homogeneity of the auxiliary discharge and, as consequence, increases the uniformity and stability of the main discharge. Otherwise, the laser operates as described above.
A possibility suggested in this embodiment, the invention of high-performance automatic preionization mode with a time delay with respect to the inclusion of additional power supply 34, that is, after the beginning of growth bit voltage, is not obvious. However, in accordance with the experimental data effective pre-ionization in this mode can be carried out. This is because the gas mixture excimer lasers are characterized by high speed of electron attachment to donors Halogens model HC1, F 2 , depending on the magnitude of the electric field between the electrodes 2, 3. In this regard, the pre-ionization can ensure maximum efficiency of the laser when it is enabled, after reaching the value of the voltage at the electrodes 2, 3 laser, in which the gas ionization frequency electric field is beginning to prevail over the frequency of electron attachment to donors of Halogens. In accordance with the experimental data for specific time ~ 180 NS growth voltage from zero level up to the breakdown delay the effective preionization mode relative to the beginning of growth bit voltage for l laser reaches 50 NS. The delay may be increased if the rate of growth of tension before the inclusion of the block of preionization mode below. Thus, at the time of charging the capacitor ~180 NS time charging additional capacitors 33 can be significantly more than 230 of the national Assembly, providing in accordance with the proposed a variant of the method of generation of laser radiation highly efficient automatic pre-ionization in the first electrode 2.
The introduction of additional ceramic container/container 30 placed in them additional capacitors 31 significantly, almost twice in comparison with the variants implementation instruments presented in figures 1, 2, 5, to increase the total energy stored in the capacitor connected to the electrodes laser 2, 3. This significantly, almost twice, increases energy laser generation.
The implementation of charging additional capacitors 31 additional power supply 34 the ends of each additional container 30 provides the most easy way to charge additional capacitors 31. Since the inductance of the path and the charging time additional capacitors 31 more than capacitors 14, to achieve a maximum slew rate of the electric field in the electrode gap on the prebreakdown stage of the discharge and uniform sustained discharge power supply 15 include the specified time delay on against the inclusion of an additional source 34.
The proposed introduction of a number (one or two) additional ceramic containers optimally to ensure simplicity of a design of powerful high-energy laser. The execution of the current 32, 33 additional ceramic containers 30 sealed need to separate the gas medium of the laser from the outer atmosphere. To ensure a low-inductance discharge circuit enough installed along each additional container 30 to 12 current 32, 33 per 1 m of length of electrodes.
The application of additional 30 containers in the form of a cylindrical pipe (figure 2) provides the greatest simplicity and mechanical durability of a design and, consequently, the reliability of containers loaded with high external pressure. The form of an additional 30 containers in the form of rectangular pipes allows to provide a low inductance discharge circuit, to increase the efficiency of laser and effectively form a high-speed gas stream.
When performing earthed conductors 19 concave towards the discharge gap by their shape is aligned with the equipotential lines of the electric field between realized in the given invention two high-voltage electrode of the opposite polarity. This allows to reduce the inductance of discharge circuit without distortion configuration of the electric field in the discharge gap, which also contributes to the achievement of high efficiency lasers and high-quality laser beam. In addition, the approach to the discharge region 4 earthed gas permeable conductors 19 allows you to bring to the region of the discharge and guides gas flow 11, 12, 13. This improves the characteristics of the gas flow and reduces the need for high-performance solid-state laser work volume flow of gas in the discharge region between the next bit pulses, allowing to minimize the operational costs of the laser. This contributes to the fact that, in accordance with the variants of the invention of the surface of 35, 36 per container 30, addressed to the bit field 4, form a close second electrode 3 located up and down the stream directing the gas stream.
Thus, the execution gas discharge, in particular excimer laser and methods of generation of radiation in the proposed allows to increase energy generation, average radiation power with high efficiency laser simple and reliable construction and in General to reduce the operating costs in obtaining laser radiation.
The list of designations
1. laser camera
2. the first electrode
3. the second electrode
4. the area of the discharge
5. block of preionization mode
6, 7, 8. the dielectric plate, the initiating and control electrodes
9. diametrically fan
10. tube heat exchanger
11 guides blades
12. guides blades
13. niche on the surface of the container
14. capacitors, located in a ceramic container/container
15. switching power supply
16. ceramic container/ container
17. high-voltage sealed current ceramic container
18. grounded tight the current ceramic container
19. long grounded gas-permeable reverse current distributors
20. metal wall laser camera
21. sealed high-voltage current laser camera
22. ceramic insulators
23. long grounded conductors, United with laser camera
24,25. part of the surface of a ceramic container forming thread
26. auxiliary capacitors
27. auxiliary current container/ container
28. electrically robust environment
29. the pressure maintenance system and circulation electrically robust environment
30. one, or two extra long ceramic container,
31. additional capacitors, available at additional containers
32. high-voltage sealed current leads additional container
33. grounded sealed current leads additional ceramic container
34. additional switching power supply
35. 36. part of the surface of additional containers, forming gas flow
37. niche on the surface of additional container
38. diametrically fan
39. tube heat exchanger
40, 41. guides blades
1. Gas discharge, in particular excimer laser, which includes: filled with a gas mixture laser chamber, consisting mainly of metal and having separated from each other extended the first and the second electrode, define the area of the discharge between them, with the first electrode located from the side of the inner surface of the laser camera, at least one long block of preionization mode; the circulation system of gas; a set of capacitors placed either in one of ceramic container or in two ceramic containers installed near the first electrode, these capacitors are connected to the first and second through a high-voltage electrodes and grounded current leads each ceramic container and grounded through the reverse wire-ways, located on both sides of the electrodes, the laser also contains a switching power supply that is connected to capacitors, laser camera placed one or two extra long ceramic containers, each additional ceramic container is mainly with outside parties of the second electrode, each additional ceramic container placed additional capacitors, in the walls of each additional ceramic container along it installed sealed high-voltage current and ground current, while the capacitor connected to the second electrode through the gas-permeable wire-ways, the current leads each additional container and additional capacitors, outside of the laser chamber is connected to the additional capacitors additional switching power supply, polarity which is the opposite polarity of the power source.
2. Laser according to claim 1, which from the first electrode metal wall laser camera along with the sealed high-voltage current, each of which includes ceramic insulator, laser inside the camera on both sides of the ceramic container/container posted United with metal wall laser camera extended grounded wire-ways, and switching power supply connected to a low-inductance capacitors through these high-voltage current leads and earthed conductors laser cameras, as well as through the current of each ceramic container.
3. The laser of claim 1, wherein the end of each additional ceramic container tightly attached to the ends of metal laser camera with the possibility of access or tight connection to the inner part of the additional container.
4. Laser according to claim 1 in which additional power source is connected to the additional capacitors ends with each additional container.
5. Laser according to claim 1 in which the time delay between additional inclusions power source and the power supply is equal to the difference of time pulse charging additional capacitors and time charging the capacitor.
6. Laser according to claim 1 in which part of the surface of each additional container turned to a bit field, form a close second electrode located up and down the stream directing the gas stream.
7. Laser according to claim 1, which grounded gas-permeable ducts made concave towards the discharge region.
8. The laser of claim 1, wherein at least one block of pre-ionizer placed in the immediate vicinity of the second electrode and at least one additional ceramic the container along its length installed auxiliary sealed the current leads are auxiliary capacitors, one of the plates which is connected to the unit of pre-ionizer through supporting the current leads.
9. Laser according to claim 1 in which the close of the second electrode is set one additional container, the surface of which turned to a bit field, has a long niche that hosts the second electrode.
10. Laser according to claim 1, which is near the first electrode has a long ceramic container with a surface facing the bit field, has a long niche that hosts the first electrode.
11. Laser paragraph 10, in which the first electrode and at least one unit of preionization mode posted in the long niche on the surface of a ceramic container.
12. Laser according to claim 1 in which the laser camera equipped with an additional gas circulation system.
13. The laser of claim 1, wherein the first electrode and the second electrode is made of solid, and at least one unit of preionization mode is installed at the side of one of the two electrodes.
14. The laser of claim 1, wherein either the first electrode, or the second electrode is made partially transparent, and the block of preionization mode is installed on the reverse side partially transparent electrode.
15. Laser according to claim 1 in which the unit of preionization mode contains the system of the extended homogeneous moving discharge on a surface of a dielectric.
16. The laser of claim 1, wherein at least one container/container has the form of either a round or rectangular pipes.
18. Method of generation of laser radiation by means of laser according to claim 1, which consists in implementing a pulse charging the capacitor placed in each ceramic container using a pulsed power supply and gas preionization mode between the first and the second electrode, the implementation of the discharge between the first and second electrodes and generation of the laser beam, which include pre-extra power supply and the ends of each additional ceramic container produce pulse charging additional capacitors, then with a time delay, equal to the difference between the times of charging additional condensers and capacitors include switching power supply and carry out pre-ionization from the first electrode, and quick pulse charging capacitor voltage, polarity which is the opposite polarity of the voltage charging additional capacitors, after a moment simultaneous charging of the capacitors and additional capacitors discharge between the first and second high-voltage electrodes opposite polarity on low-inductance to discharge circuit, including capacitors and additional capacitors, consistently connected among themselves through the gas-permeable wire-ways, concave towards the discharge region.