Gas-discharge laser, laser system and method of generating radiation

FIELD: physics, optics.

SUBSTANCE: invention relates to laser engineering. The gas-discharge laser includes: a laser chamber (1) consisting a ceramic material and filled with a gas mixture, elongated electrodes (2, 3) defining a discharge region (4), a preionisation unit (5); the gas circulation system (9, 10, 11, 12, 13); a set of capacitors (14) arranged outside the laser chamber (1) and connected to the first and second electrodes (2, 3) via electrical leads (17, 18) of the laser chamber (1) and gas-permeable reverse current leads (19) disposed in the laser chamber on both sides of the electrodes; a power supply connected to the capacitors and a resonator. The laser chamber (1) comprises a ceramic tube (24) and two end flanges (25) rigidly interconnected by a fastening system (26) that extends along the ceramic tube (24). The fastening system (26) is in form of a metal tube encircling the ceramic tube, equipped with a sufficiently wide extended recess for installing the set of capacitors (14) and having on the faces of the end flanges attached to end flanges (25) of the laser chamber (1) or in form of tightening beams.

EFFECT: high power.

22 cl, 13 dwg

The technical FIELD

The invention relates to a high intensity discharge device, in particular an excimer lasers, laser systems and methods generation of laser radiation.

PRIOR art

Excimer lasers are the most powerful sources of directional radiation in the ultraviolet (UV) range of the spectrum. In accordance with the needs of modern high-performance technology using excimer lasers and their power is constantly increasing. However, increasing the energy and power of a gas discharge excimer lasers has fundamental physical limits, which if exceeded, the optimal values of energy generation and pulse repetition rate cause a decrease in the efficiency of the laser, reducing the reliability and stability of its work and, ultimately, increase the cost of operation of the laser.

All this determines the urgency of finding solutions to optimize the design and method of operation of an excimer laser, to increase their capacity and reduce the cost of energy generation at various combinations of energy generation and pulse repetition rate.

From Coherent Inc. Excimer / UV Optical Systems Product Catalog 2012 known one of the most powerful gas discharge excimer laser systems for industrial applications - dalucia the laser VYPER, including hosted on a shared chassis with two identical compact laser, similar to those described in patent US 6757315. Each of the lasers includes a housing in the form of a metal tube, which is mounted compact ceramic discharge chamber with a long metal flange. On the high-voltage metal ceramic flange cameras installed high-voltage electrode and a block of preionization mode. The method of generating laser radiation provides simultaneous, synchronized pumping of two identical lasers and the combination of two parallel laser beams outside of the laser.

Data device and method provide the laser radiation parameters that fit a range of technological applications at the level of the lasing energy of 1 j/pulse and power of the UV laser radiation of 600 W for each laser with the length of the electrodes is about 1 m

However, a further increase in energy generation laser systems is difficult because of the use in each of its laser preionization mode low-voltage corona discharge and the limited size of the ceramic discharge chamber installed in a metal housing with a gas circulation system. Since the discharge chamber, the gas flow abruptly changes direction, it is not possible to effectively increase the velocity of the gas in the electrode gap, leading to the restriction on leaseho increase the repetition frequency of the discharge pulses and the average power of laser radiation.

Partly these deficiencies deprived of the gas discharge, in particular, an excimer laser or the laser at the molecular fluorine, comprising a laser chamber, consisting at least partially of a ceramic material and filled with a gas mixture, the length of the first electrode and the second electrode located opposite each other and define a discharge region between the first electrode is placed near or directly on the inner surface of the laser chamber; at least one extended block of preionization mode; a gas circulation system; a set of capacitors that are located outside of the laser chamber and connected to the first and second electrodes through electrical inputs laser the gas-permeable chamber and return ducts located in the laser chamber on both sides of the electrodes; a power source connected to the capacitors, the patent EP 1525646 B1. The method of generating laser radiation includes the implementation of the preionization mode of gas between the first and second electrodes, the pulse charging of the capacitors, the implementation of discharge between the first and second electrodes and generating a laser beam.

Extended laser camera includes a cylindrical pipe with a uniform inner and outer diameters, made of ceramics. Performing laser camera mainly about ceramic is open to the possibility of achieving high lifetime of the gas mixture excimer laser, containing such extremely chemically active components as F₂or HCl. For the formation of the gas flow in the discharge zone, on both sides of the first electrode located on the inner wall of the cylindrical tube camera, flush with it posted by long ceramic guides the gas stream. In the laser implemented the possibility of increasing the volume of active gas environment to ensure a high uniform level of preionization mode, and high speed gas flow between the electrodes. The result is the possibility of increasing energy generation and power repetitively pulsed excimer laser.

However, to date, failed to realize the manufacture of one-piece high-quality pipes of large dimensions (for example, a diameter of 0.45 m and 1.4 m long) made of ceramics Al₂O₃high (>95%) purity with high physical-chemical properties and the required processing accuracy required for cameras excimer laser. The implementation of the technology of their manufacture requires too much investment. In addition, increasing the energy of laser generation requires an increase in the interelectrode distance and increasing discharge voltage. The latter requires increasing the distance between high-voltage and grounded electrical inputs ceramic laser camera for predator is their parasitic outbreaks, which leads to an increase in the inductance of the discharge circuit and decrease the efficiency of the laser. From this point of view, the geometry of the laser chamber and discharge system is not fully optimized to achieve high power generation and laser power. There are different ways of decrease caused by the gas pressure of the radial component of the mechanical load on the ceramic tube camera, however, the possibility of reducing the longitudinal component of the load is not suggested.

DISCLOSURE of INVENTIONS

The objective of the invention is to create the most powerful gas discharge, in particular excimer lasers and laser systems.

The technical result of the invention is to improve the design of metal-ceramic laser, an increase in energy generation, the average output power with high efficiency laser or laser system and reducing the cost of obtaining energy generation.

To solve this problem is proposed discharge, in particular, an excimer laser or the laser at the molecular fluorine, comprising a laser chamber, consisting at least partially of a ceramic material and filled with a gas mixture, the length of the first electrode and the second electrode located opposite each other and define a discharge region between the first electrode is placed near the Li directly on the inner surface of the laser chamber; at least one extended block of preionization mode; a gas circulation system; a set of capacitors that are located outside of the laser chamber and connected to the first and second electrodes through the electrical inputs of the laser chamber and the gas-permeable reverse distributors located in the laser chamber on both sides of the electrodes; a power source connected to the capacitor and the resonator, the laser camera includes a ceramic tube and two end flange rigidly connected to each other by means of the fastening system (26), extended along the ceramic tube, the mounting system is made either in the form of a covering of ceramic pipe, metal pipe, has a fairly wide extended cut for the installation of a set of capacitors and having on the end faces of the annular flanges, sealed with end flanges laser camera, either in the form of tie beams, each end flange is sealed with a ceramic tube through the sealing " o " ring seal placed on the outer surface of the end portion (29) ceramic pipes, having the form of a right circular cylinder, each end flange has an inside circular niche, in which is placed the end of the ceramic tube, each end flange closely adjacent to the ceramic pipe only on the outer surface the ceramic tube (24) in place, install the o-ring gasket, having a clearance fit on the outer surface of the end portion (29) ceramic pipes.

Preferably, each end flange fixed to one of the two flange-mounted on the outer surface of the end parts of the ceramic tube to compress the o-ring gaskets.

In embodiments of the invention the ceramic tube laser camera consists either of two or of three ceramic modules with an airtight connection of each joint between the ceramic modules provided by the pair of fastened by a flange (35, 36), while between the bonded flanges placed at least one annular seal (34) from halogenating elastomer, the flanges are made of a dielectric material, and each dielectric flange is installed on part of the outer surface of one of the ceramic modules, adjacent to the junction and having the form of a right circular cylinder.

It is preferable that each pair of bonded dielectric flanges is either dense or a sliding fit on the outer surface of the ceramic modules, performing the function of the retaining ring in the joint area between the ceramic modules composite ceramic tube laser camera.

In embodiments of the invention the ceramic tube laser camera is on the inner side during the ing niche which includes at least the first electrode.

In embodiments of the invention part of the inner surface of the ceramic tube, adjacent to long a recess in which is installed the first electrode are flush with the first electrode to form spaced upper and downstream from the first electrode guides the gas stream or spoilers.

In other embodiments of the invention the ceramic tube laser camera is on the inner side of the extended niche, in which, along with the first electrode is placed at least part of the discharge region, and an inner edge niches located on both sides of the discharge region, form located up and downstream from the discharge region guides the gas stream or spoilers, significantly altering the direction of the gas flow when passing through the discharge region.

Preferably, on both sides of the first electrode from the outside of the ceramic tube in the wall made distributed along the length of the ceramic tube, with the exception of its end parts, or niches, or cells in which at least partially immersed capacitors.

In embodiments of the invention the first electrode is adjacent its side edges to the inner faces of the longest niche or is in close proximity to them.

It is preferable that p is Otieno a recess on the inner surface of ceramic tubes along with the first electrode set, at least one block of preionization mode.

In embodiments of the invention near the second electrode has either one or two long ceramic container, each ceramic container placed additional capacitors, capacitors, and additional capacitors in series are connected through the gas-permeable reverse conductors and connected to the first and second electrodes distributed along the laser camera electrical inputs ceramic pipes and electrical inputs ceramic containers.

It is preferable that the outside of the laser chamber is an additional power source, the polarity of which is opposite to the polarity of the power source and the additional power source is connected to the additional capacitor and the ends of each ceramic container.

It is preferable that the time delay between the inclusions of additional power source and the power source is equal to the time difference of the pulse charging additional capacitors produced additional power source through the ends of the ceramic container/containers, and the charging time of the capacitors produced in a low-inductance connected to the power source.

It is preferable that faces the discharge region of the side surface of each of the th longest ceramic container is formed near the second electrode guides the gas stream.

It is preferable that the gas-permeable reverse distributors made concave toward the discharge region

It is preferable that at least one ceramic container has the form of either round or rectangular pipes.

In some embodiments, near the second electrode has a single ceramic container with a surface facing the discharge region, has an extensive niche, in which is placed the second electrode,

In embodiments of the invention the ceramic tube laser camera consists either of two or of three ceramic modules with an airtight connection of each joint between the ceramic modules that contain at least one annular sealing gasket of halogenating elastomer.

The invention in another aspect relates to a method of generating laser radiation, consisting in the implementation of the preionization mode of gas between the first and second electrodes, the pulse charging of the capacitors, the implementation of the discharge between the first and second electrodes and generating a laser beam, in which

pre-include an additional power source and the ends of each ceramic container to produce a pulse charging additional capacitors, then with a time delay equal to the difference of times of charging of additional capacitors and cond is Nestorov, include the power source and provide fast pulse charging of the capacitor voltage, the polarity of which is opposite to the polarity of the charging voltage of the additional capacitors, since the simultaneous charging of the capacitor and the additional capacitor discharge between the high voltage first and second electrodes of opposite polarity by a low-inductance discharge circuit comprising the capacitor and the additional capacitor, connected in series to each other via a gas-permeable reverse distributors, concave in the direction of the discharge region.

It is preferable that a time delay relative to the time of the inclusion of an additional power source, equal to the difference of times of charging of additional capacitors and capacitors, using the power supply automatically the pre-ionization from the first electrode.

The invention in another aspect relates to a laser system containing chassis hosting the first laser made in accordance with the present invention, the second laser, identical to the first laser, the power sources of the first and second lasers are combined in a common power source of the laser system, while between the capacitors of the second laser and the power supply would the Jena delay line, providing the delayed ignition of the discharge in the second laser at the time not exceeding the duration of the time interval between the moment of ignition of the discharge and the time of reach threshold in the first laser, and the chassis is placed an optical connection between the two lasers, providing injection to the second external laser optical signal, which represents a small fraction of the radiation of the first laser.

The invention in another aspect relates to a method of generating laser radiation, consisting in the implementation of each laser preionization mode of gas between the first and second electrodes, the implementation of the discharge between the first and second electrodes and generating a laser beam, in which

after ignition of the discharge in the first laser light discharge in the second laser with a time delay, not exceeding the duration of the time interval between the moment of ignition of the discharge and the time of reach threshold in the first laser, and using the optical communication system produce injection to the second external laser optical signal, which represents a small fraction of the radiation of the first laser, reducing the lasing threshold of the second laser.

The above and other objects, aspects, features and advantages of the invention will become more apparent from the following description and claims.

Description the tion is given in the form, sufficient for understanding the principles of the invention by experts in the field of laser technology. A detailed description of the component gas discharge, in particular excimer lasers can be found in US Patent 20030118072, US Patent 6757315, Excimer Laser Technology. Ed. by D. Basting, G. Marowsky. Springer-Verglas Berlin Heidelberg (2005).

BRIEF DESCRIPTION of DRAWINGS

The invention is illustrated the accompanying drawings, which are presented in a form sufficient for understanding the principles of the invention, and in no way limit the scope of the present invention.

Figure 1 - schematic representation of the cross-section of gas-discharge laser.

Figure 2 - schematic representation of a longitudinal section of the laser in accordance with the embodiment of the invention in a reduced, compared with Figure 1, scale.

Figure 3 is a longitudinal cross section of the laser with a three-module ceramic tube laser camera.

4 is a cross section of a laser with a three-module ceramic tube laser camera.

5 is a cross-section of the laser, in which the first electrode is installed in an extended recess on the inner surface of the ceramic tube laser camera.

6 is a cross-section of the laser with blocks of preionization mode based on corona discharge.

7 is a cross section of the laser, with a partially transparent first electrode mounted in a recess on the inner surface of the ceramic the pipe, and capacitors, partially submerged in the long niches on the outer surface of the ceramic tube.

Fig is a cross section of the laser discharge region, located in long recess on the inner surface of ceramic tubes.

Fig.9 is a cross section of the laser with more power and additional capacitors are placed in two ceramic containers installed near the second electrode.

Figure 10 is a cross section of the laser with one ceramic container mounted near the second electrode.

11 is a schematic depiction of the cross-section of the laser system.

Fig - schematic representation of the cross-section of the laser system.

Fig - block diagram of the laser system optical communication between the lasers.

In the drawings, the matching components of the device are denoted by the same numbers of items.

EMBODIMENTS OF THE INVENTION.

Gas discharge laser, in particular an excimer laser or the laser at the molecular fluorine, the cross section of which in one embodiment of the invention shown in figure 1, includes: a laser chamber 1 consisting at least partially of a ceramic material and filled with a gas mixture. The laser also contains extensive first electrode 2, second electrode 3, a sh is against each other and define a discharge region 4 between them, with the first electrode 2 located near or directly on the inner surface of the laser chamber 1, and at least one extended block of preionization mode 5. In a variant implementation of the invention shown in figure 1, one unit of preionization mode 5 located on the side of the second electrode 3 made in the form of a system of forming a sliding discharge on the surface of the dielectric, in particular, the sapphire plate 6 covering the initiating electrode (as we call it) 7, with the control electrode (as we call it) 8 located on the surface of the dielectric plate 6.

To update the gas in the discharge region 4 between successive discharge pulses in a ceramic tube 1 laser camera also contains a gas circulation system containing diametrically fan 9 water cooled tubes 10 of the heat exchanger, two ceramic spoiler 11, 12 and the guide blades 13 for forming a gas stream.

Outside of the laser chamber 1 is set distributed along the ceramic tube 1 capacitors 14 connected with the first and second electrodes 2, 3 through a current-conducting buses 15, 16, electrical inlets 17, 18 ceramic tube 1 laser chamber and a gas-permeable reverse the conductors 19, located in the laser chamber on both sides of the electrodes 2, 3. The capacitor 14 is connected to the power source 2, designed for pulse charge to the breakdown voltage, providing a gas discharge between the first and second electrodes 2, 3 for excitation of the laser gas mixture.

To generate a beam 21 of the laser outside of the laser chamber 1 is placed resonator includes at least two mirrors 22, 23, as shown in figure 2, which schematically shows a longitudinal cross section of the laser.

In accordance with the invention of the laser chamber 1 includes a ceramic tube 24 and two end flange 25, rigidly connected to each other by means of the fastening system 26 that extends along the ceramic tube 24. Each of the end flanges 25 are sealed with a ceramic tube 24 through the o-ring gasket 27 (figure 1, figure 2).

At each end flange 25 is installed on the optical window 28 to output the laser beam 21 from the laser chamber 1.

In the proposed design of the laser is easy and reliable sealing of the laser chamber 1.

The use of extended mounting system end 26 of the flanges 25 removes the ceramic tube 24 of the longitudinal component of the mechanical load, due to the massive force of the pressure of the gas mixture on the end flanges 25. This ensures high reliability metal-ceramic laser chamber 1 defining simplicity and significant advantages to the society of the proposed design.

In embodiments of the invention the mounting system 26 may be made in the form of covering the ceramic tube 24 of a metal pipe, has a fairly wide extended cut for the installation of a set of capacitors 14 and having on the end faces of the annular flanges, sealed with end flanges 25 of the laser chamber 1 (figure 1, figure 2).

O-ring gasket 27 laser chamber 1 can be performed either from metal or from halogenating elastomer in accordance with two adopted for sealing an excimer laser technology, providing a great time of life galactosaemia gas mixture.

Each ring gasket 27, whereby each end flange 25 is sealed with a ceramic tube 24, is placed on the outer surface of the end portion 29 of the ceramic tube 24 having the form of a right circular cylinder (Figure 2).

Each end flange 25 is on the back side 30 of the circular niche 31, in which is placed the end of the ceramic tube 24 of the laser chamber 1. While the endcap 25 close to the ceramic tube 24 only on its outer surface at the place of installation of the sealing ring gasket 27, having a sliding fit on the outer surface of the end portion 29 of the ceramic tube. Mobile landing each end of the flange 25 on the outer surface of the Coeur the economic pipe 24 allows a reliable rigid end flanges 25 on the mounting system 26.

The device as proposed simplifies the sealing system of the laser camera. In addition, the path of the parasitic breakdown on the surface of the ceramic tube 24 is located on the inner surface of the high voltage of the first electrode 2 to the grounded end flange 25 terminates at the outer surface of the ceramic tube 24 of the laser chamber 1. The result is an increase in the path of the parasitic breakdown and achieved high performance electrical insulation between the electrode 2 and the end flanges 25. It allows you to either minimize the length of the ceramic tube 24 of the laser chamber 1, which simplifies its design, or can increase the length of the first and second electrodes 2, 3 and, accordingly, increase energy generation and laser power.

In variants of the invention (Fig.3-9) fastening system 26 is made in the form of tie beams, which provides a further simplification of the design of the laser while maintaining the high reliability of the laser chamber.

Gas discharge laser (figure 1, figure 2) works as follows. The activation of the power source 20 connected to the capacitors 14 located outside the long gas-filled laser chamber 1, which includes a ceramic tube 24, the end portions 29 which has end flanges 25 fastened together by means which the government extended the mounting system 26. Between the control electrode 8 and the triggering electrode 7 of the formation of a sliding discharge unit preionization mode 5 lit completed sliding discharge on the surface of the extended sapphire plate 6 (Fig 1). UV radiation from the auxiliary discharge unit preionization mode 5 provides pre-ionization of the gas in the discharge region 4 between the first and second electrodes of the laser 2, 3. At the same time by pulse charging of the capacitor 14 to the breakdown voltage, providing a gas discharge in region 4 between the first and second electrodes 2, 3. The energy stored in the capacitor 14, is embedded in the category of low-inductance discharge circuit includes a set of capacitors 14, the current-carrying bus 15, 16, electrical inlets 17, 18 ceramic tube 24 of the laser chamber and the gas-permeable reverse the conductors 19, located on both sides of the electrodes 2, 3. The discharge provides the excitation of the gas mixture in the discharge region 4 that through Windows 28 and mirrors 22, 23 of the resonator allows to obtain the generation of the beam 21 of the laser (Figure 2). When cooled tubes of the heat exchanger 10 high-speed gas flow is provided diametrically fan 9 and guides the gas flow, which include spoilers 11, 12, and guides the blades 13, will replace the gas in the discharge region 4 between the electrodes 2, 3, the cycle of operation of the laser is povtoryaetsya. To provide gas flow in the discharge region 4 reverse ducts 19 is made gas-permeable.

During laser operation, each of the flanges 25 is sealed with a ceramic tube 24 through the o-ring gasket 27. O-ring gasket 27 laser chamber 1 can be performed either from metal or from halogenating elastomer in accordance with two adopted for excimer laser technology sealing, ensuring long lifetime of the gas mixture.

Extended along the ceramic tube 24 of the mounting system 26 provides a mounting end flanges 25, each of which is loaded tonnage, usually in the range from 4 to 8 t, the force of pressure of the gas contained in the laser chamber 1. The use of the mounting system 26 of the end flanges 25 removes the ceramic tube 24 of the longitudinal component of the mechanical load caused by the pressure of gas on the end flanges 25. This ensures high reliability metal-ceramic laser chamber 1, defining a significant advantage of the proposed design.

When the laser ensure the absence of parasitic breakdown between the high voltage electrode 2 and the grounded end flanges 25. In this regard, in preferred embodiments of the invention, each end flange 25 is on the back storone circular niche 31, hosting the end of the ceramic tube 24, and the end flange 25 close to the ceramic tube 24 only on the outer surface of its end portion 29 at the place of installation of the sealing ring gasket 27. In this way the parasitic breakdown voltage of the first electrode 2 to the grounded end flange 25 passes through the inner end and outer surfaces of the ceramic tube 24 of the laser chamber 1. The result is a highly effective electrical insulation between the electrode 2 and the end flanges 21, allowing you to either minimize the length of the ceramic tube laser camera that simplifies and cheapens its design, or to increase the length of the electrodes and, consequently, to improve energy generation and laser power.

The placement of o-rings 27, through which the end flange 25 is sealed with a ceramic tube 24, on the outer surface of the end portion 29 of the ceramic tube 24, and the execution of the outer surface of the end portion 29 of the ceramic tube 24 of the laser chamber 1 in the form of a right circular cylinder simplifies the design of the laser chamber 1.

In variants of the invention (Fig.3-9) fastening system 26 is made in the form of tie beams. This provides a further simplification of the design of the laser while maintaining the high reliability of the laser chamber.

In mariantonietta (3) each of the two end flanges 25 provided with a mating flange 32, mounted on the outer surface of the end part of the ceramic tube 24 and fastened to the end flange 25 for sealing " o " ring seal 27, through which the end flange 25 is sealed with a ceramic tube 24 of the laser chamber 1. This design provides a simple and reliable sealing end flanges 25 of the laser chamber 1.

As noted, the solid high-quality ceramic pipes of large dimensions (for example, a diameter of 0.45 m and a length of 1.4 m from ceramics Al₂O₃high, >95%purity with high physical-chemical properties and the required processing accuracy required for cameras excimer laser) it is difficult and expensive.

The following tested variants of the invention can simplify the manufacturing technology and reduce the cost of the ceramic tube laser camera. In these embodiments of the invention, the ceramic tube laser chamber 24 consists either of two or of three ceramic modules 24a, 24b, 24c (Figure 3 and Figure 4) with an airtight connection of each junction 33 between the ceramic modules 24a, 24b, 24c, containing at least one annular sealing gasket 34 of halogenating elastomer, in particular, Viton.

In a variant of the invention, illustrated in Figure 3, showing a longitudinal cross section of the laser, the tight connection of the AC is to facilitate joint 34 between the ceramic modules 24a, 24b, 24c is provided with a pair of bonded flanges 35, 36. Between the bonded flanges 35, 36 are placed, at least one annular gasket 34 of halogenating elastomer. The flanges 35, 36 are made of a dielectric material, in particular from fiberglass. Each of the dielectric flanges 35, 36 mounted on the portion 37 of the outer surface of one of the ceramic modules 24a, 24b, 24c, adjacent to the junction 33 and having the form of a right circular cylinder with a uniform external diameter. This provides a further simplification of the design and technology of the laser chamber 1.

In embodiments of the invention, each of the bonded dielectric flanges 35, 36 has either a tight fit or sliding fit over the portion 37 of the outer surface of one of the ceramic modules 24a, 24b, 24c adjacent to junction 33 of the ceramic modules 24a, 24b, 24c and having the form of a right circular cylinder. Each pair of bonded dielectric flanges 35, 36 performs the function of the retaining ring in the area of junction 33 of the ceramic modules 24a, 24b, 24c composite ceramic tube 24 of the laser chamber 1.

In this embodiment of the invention in the process of laser seal joints between modules 24a, 24b, 24c ceramic tube 24 of the laser chamber by sealing gaskets 34 from halogeno tonoga elastomer, what is accepted for excimer laser technology seal.

The execution of the outer surface of the end portion of each ceramic module in the form of a right circular cylinder along with the application for sealing clamped between a flange having either a dense or a sliding fit on the outer surface 37 of the ceramic modules 24a, 24b, 24c and perform the function of the retaining ring in the area of junction 33 of the ceramic modules eliminates the need for axial compression of the ceramic modules for sealing joints. When such sealing joints no longitudinal mechanical stress on the ceramic modules 24a, 24b, 24c, despite the high pressure of the gas mixture in the laser chamber. All this facilitates the construction of a composite laser chamber 1, it provides mechanical strength and high reliability.

Performing as fastened by a flange 35, 36, and placed between them an annular gasket 34 provides high electrical dielectric strength ceramic tube 24 of the laser chamber 1 and does not introduce distortions in the distribution of electric field intensity between the first and second electrodes 2, 3 of the laser, which is necessary for its efficient operation.

Number of modules: either two or three, is the most appropriate. With the high number of modules length ka the Dogo ceramic module is close to its diameter, or does not exceed its size, making it easier and cheaper technology. Ceramic modules can be handled with much greater precision than solid ceramic pipe of great length, which simplifies the creation of laser camera with optimal settings.

In General, running the camera from a separate ceramic modules allows you to increase the size of the cermet laser camera to optimally large size, increase the repetition rate of the laser pulses, the energy generation and average power gas discharge, in particular excimer laser.

In a preferred embodiment of the invention block the preionization mode 5 contains the system of the extended homogeneous sliding discharge on a dielectric surface. Application for the preionization mode UV radiation sliding discharge (Fig.1-5, 7-12) in the form of extended plasma sheet and plasma sheet on the surface of the dielectric (sapphire) 6 allows to implement in the discharge region 4 uniform pre-ionization optimally high level due to the possibility of adjusting the energy input in the sliding discharge. This ensures a high efficiency of the laser, as the laser beam and the stability of the laser in a long-term mode, which is an advantage of the preionization mode of the given type.

While limiting the voltage amplitude of the discharge on the surface the t of the dielectric can be a crown, 1, 3. In accordance with this block of preionization mode 5 can contain a system of formation of corona discharge.

In embodiments, the device or the first electrode 2, as shown in Figure 3, 4, 7, 10, 11 or the second electrode 3 is made partially transparent due to the presence on its surface of the slot window 38. When this block of preionization mode 5 is installed on the reverse side of the partially transparent electrode. As a variant, the block of preionization mode 5 is designed as a compact symmetric ignition system sliding discharge on the surface of the dielectric, mainly sapphire plate 6 covering the initiating electrode 7 on the surface of which is mounted a firing electrode 8.

In these embodiments of the invention when the laser pre-ionization of the discharge region 4 is UV block the preionization mode 5 through the partially transparent electrode with slit Windows transparency 38 (Figure 4).

This allows close-uniform volumetric discharge in a compact low-inductance discharge laser system and high efficiency change of the gas in the discharge region 4, that is, with small, ~1, the coefficient For change of gas sufficient for a highly effective work of a powerful laser.

Example 1 of the invention.

An example of the practical implementation of the invention is to power the th excimer laser with the ability to generate molecular fluorine, high, up to 5.5 kHz, the pulse frequency. Bit laser system similar to the one shown in figure 1. Laser camera is made on the basis of a three-module ceramic pipes with a diameter of 420 mm Sealed joints three modules ceramic tube laser camera was carried out two pairs of bonded together steklotekstolity flanges having a sliding fit on the end portion of the outer surface of the ceramic modules and performs the function of the retaining ring in the area of interface modules. The length of the electrodes was 0.8 meters power Source 20 was made completely solid-state with the use of semiconductor switches type IGBT with a system of magnetic compression of the pumping pulse. When the pulse repetition rate f=4 kHz for the case of generation of ArF laser energy generation accounted for more than 50 MJ/pulse at a small, not more than 1%, the relative instability of energy generation. Powerful high-stability 200 W - ArF laser in accordance with a variant of the invention, characterized by high for this type of laser efficiency 2%. When generating on KrF laser power was approximately two times higher.

Example 2 embodiment of the invention.

Another example of the practical implementation of the invention is a powerful close-up of excimer XeCl laser. the laser with the laser camera on the basis of a three-module ceramic tube was used electrode system, shown in Figure 4. During long-term test XeCl laser stable level of average output power 450 W at f=300 Hz was maintained at one of the gas mixture for 60 million pulses. During long-term continuous operation of the laser during the 53-hour reduction in the effectiveness of laser for burning halogen and pollution quick change window laser automatically compensated by the increase of the charging voltage of the power source. The relative instability of energy generation σ was at a low level: 0.7 to 1%, indicating a high stability of the lasing energy of the laser.

Examples and experimental results indicate that proposed in accordance with the present invention the design of the lasers using laser-based camera ceramic tube allows you to implement a series of powerful high-performance solid-state excimer lasers with different combinations of wavelength, energy generation and pulse repetition rate with a large lifetime of the gas mixture.

Following the embodiments of the invention enable him to acquire new positive qualities.

In variants of the invention (Figure 5-10) ceramic tube 24 of the laser chamber 1 has an inner side extended niche 39, which established the first electrode 2. Parts 40, 41 of the inner surface of the ceramic tube 24 adjacent to the long recess 39, in which the first electrode 2, to form spaced upper and downstream from the discharge region 4 guides the gas stream. It is preferable that the first electrode 2 adjacent its side edges to the inner faces 39 niches or is in the immediate vicinity (Figure 5). The first electrode 2 may be located in an extended recess 39 flush with the parts 40, 41 of the inner surface of the ceramic tube 24 adjacent to the long recess 39.

The data of the embodiments of the invention (Figure 5-10) help in the process of laser work effectively form a high-speed gas flow in the discharge region 4 through adjacent to the long recess 39 of the parts 40, 41 of the inner surface of ceramic tubes 24 forming spaced upper and downstream from the discharge region 4 guides the gas stream. When the first electrode 2 adjacent its side edges to the inner faces 39 niches or is in close proximity to them, and when the first electrode 2 is extended recess flush with the parts 40, 41 of the inner surface of ceramic tubes, adjacent to the long recess, the gas-dynamic characteristics of the gas flow is improved. All this provides the possibility is ü increasing the pulse repetition rate and average power of laser radiation. In other respects the operation of the laser is not different from that described above.

In embodiments of the laser (6-10) in the long recess 39 on the inner surface of ceramic tubes 24 along with the first electrode 2 has at least one block of preionization mode 5. In embodiments, laser unit or units of preionization mode 5 can be located on the side of the first electrode (6, 8, 9) or on the reverse side of the first electrode 2, the working surface of which is partially transparent (7, 10).

In embodiments of the invention, one of which is illustrated in Fig.6, the block of preionization mode 5 contains a system of formation of corona discharge. In the laser (6) in the long recess 39 on the inner surface of ceramic tubes 24 along with the first electrode 2 on the sides of the first electrode 2 has two identical blocks of preionization mode 5, each of which includes a system of the extended corona discharge. Each system of the formation of corona discharge is made in the form of a dielectric tube 42 made of ceramics Al₂O₃or sapphire, the internal surface of which is combined with a surface placed in the dielectric tube 42 of the internal electrode 43. Internal electrode 43 from the end of the tube 42 is electrically connected to the opposite electrode 3 laser (connection for simplicity not shown).

In a variant of the laser, while the data of figure 6, when voltage is applied between the first and second electrodes 2, 3 laser automatically corona discharge between the first electrode 2 and the inner electrode 43 a block of preionization mode 5 through a dielectric barrier in the form of a wall of the dielectric tube 42. UV radiation korennykh bits on the sides of the first electrode 2 laser performs the pre-ionization of the discharge region 4. Otherwise, the laser operation is carried out as described above. Use a block of preionization mode, made in the form located on the sides of the first electrode 2 two identical systems of the extended corona discharge (6), allows in some cases to simplify a bit the laser system and to reduce the inductance of the discharge circuit and to increase the efficiency of the laser.

When installing the unit preionization mode 5 along with the first electrode 2 in an extended recess 39 on the inner surface of ceramic tubes 24 of the laser chamber 1 (6-10) pre-ionization is performed by the first electrode 2. This usually allows us to simplify the current leads to the block of preionization mode 5, and also to eliminate the pre-ionization of the gas on the parts 40, 41 of the inner surface of ceramic tubes adjacent to the first electrode 2, having improved their insulating properties, which increases the reliability of the laser.

The first electrode 2 in an extended recess 39 podrazumevao the presence of thickening of the wall of the ceramic tube 24 of the laser chamber 1 on the side niches 39 (Figure 5-10). This allows reduction of mechanical strength of the ceramic tube to implement variants of the invention (FG-10), in which both sides of the first electrode 2 from the outside of the ceramic tube 24 in its wall made distributed along the length of the ceramic tube, with the exception of its end parts, or niches, or cells 44 that at least partially immersed capacitors 14.

Niches 44 differ from cell 44 by the fact that in each recess 44 is located a couple of capacitors, and in each cell 44 - one capacitor 14, so that they differ only in the length and form. By placing in the recesses or cells 44 capacitors 14 close to the discharge region 4. This reduces the inductance of the discharge circuit and allows to increase the energy of the laser generation without compromising the efficiency of the laser.

In embodiments of the invention, illustrated in Fig.7, to increase energy generation uses a large aperture volumetric discharge pre-ionization through the partially transparent first electrode 2.

Increasing the aperture of the discharge and the increase of energy generation can be achieved without the use of a rather complicated to manufacture partially transparent electrodes. In embodiments of the invention illustrated Fig, the first and second electrodes 2, 3 are continuous, and two blocks of preionization mode 5 are located on the sides of the first electron is of genus 2. Each of the two identical blocks of preionization mode 5 is made in the form of a system of forming a sliding discharge, similar to those shown in Figure 1 and described above. This electrical discharge system (Fig) with relatively simple in manufacture of solid electrodes allows highly effective to increase the aperture of the discharge and to increase the energy of laser generation in contrast discharge laser system. Figure 1, Figure 5, contains one block of preionization mode.

Simplification of the laser is achieved in embodiments of the invention with automatic pre-ionization. In these embodiments, illustrated Fig-12, the laser contains electrically connected with the block of preionization mode 5 and one of the electrodes of the auxiliary capacitors 45, the capacity of which is many times less than the capacitance of the capacitor 14. On Fig-12 block or blocks of preionization mode 5 are located near the first electrode 2 and the auxiliary capacitor 45 are electrically connected with the first electrode 2 through the auxiliary electrical inputs 46, mounted in the wall of the ceramic tube 24 of the laser chamber 1 along it.

In these embodiments of the invention, the pre-ionization of the discharge region 4 is performed automatically when the power source 20 through the charging of the auxiliary capacitor 46 through the auxiliary bit period of each block of the preionization mode 5. In the process the e automatic preionization mode current auxiliary discharge unit preionization mode 5 flows through a low-inductance discharge circuit, includes the first electrode 2, the auxiliary electrical inputs 46 and the auxiliary capacitor 45. Small capacity auxiliary capacitors 45 determines optimally small energy input in the auxiliary discharge unit preionization mode. This ensures high efficiency of the laser is a great time of life block of preionization mode, the gas mixture of the laser as a whole. Otherwise, the laser operation is carried out similarly as described above.

In embodiments of the invention illustrated Fig, in order to reduce the inductance of the discharge circuit may be even greater approximation of the capacitor 14 to the discharge region 4. In these embodiments of the invention the ceramic tube 24 laser camera is on the inner side of the extended niche 39 such a large volume that it, along with the first electrode 2 is placed in at least part of the discharge region 4. When this inner edge niches 48, 49, located on both sides of the discharge region 4, form located up and downstream from the discharge region 4 guides the gas stream or spoilers, significantly altering the direction of the gas flow when passing through the discharge region 4.

This geometry of the gas flow can be quite effective, as it easily eliminates unwanted effect separation of the gas flow from the second electrode 3 after por the circulation gas flow discharge region 4. These variants of the invention allow a wide range to optimize the geometry of the gas flow with minimized inductance discharge circuit. In addition, on both sides of the extended niches 39 with the outer side of the ceramic tube 24 in its wall made distributed along the length of the ceramic tube of the laser chamber 1 niche or cell 44 that at least partially immersed capacitors 14 (Fig). Due to this, the capacitors 14 can be as close as possible to the discharge region 4, which ensures an increase in the efficiency of the laser and the capability for high boost energy generation and laser power.

Ceramic tube 24 of the laser chamber 1, having the longest niche 39 on the inner surface, may be carried out in accordance with the variations of the invention either one-piece or composed of several ceramic modules.

Other embodiments of the invention enable a further increase in the aperture of the discharge energy generation and laser power. In these embodiments, illustrated in Figure 9, Figure 10, in the vicinity of the second electrode 3 is set or two long ceramic container 50 (Fig.9), or one (Figure 10) long ceramic container 50. Side surfaces 51, 52 of the container 50 (Fig.9) or container 50 (Figure 10), facing toward the discharge region 4, form is what's up and downstream from the second electrode 3 guides the gas stream. End portion of each ceramic container 50 is hermetically secured on the end flanges 25 of the laser chamber 1 with access or tight connection to the interior of the container (for simplicity not shown). Each ceramic container 50 posted by additional capacitors 53. Outside of the laser chamber is an additional power source 54, the polarity of which is opposite to the polarity of the power source 20. Additional power source 54 is connected to the additional capacitor 53 and the ends of each ceramic container 50. Capacitors 14 and additional capacitors 53 are connected to each other via a grounded gas-permeable reverse the conductors 19 and connected to the first and second electrodes 2, 3 through distributed along the laser camera electrical inputs 17, 18 laser camera and electrical inputs 55, 56 ceramic container 50, and the gas-permeable reverse the conductors 19 are made concave toward the discharge region 4. Thus the time delay between the inclusions of additional power source 54 and the power source 20 is equal to the time difference of the pulse charging additional capacitors 53, produce additional power source 54 through the ends of the ceramic container or containers 50, and charge time con is Nestorov 14, produce low-inductance connected thereto by a power source 20.

In embodiments of the invention the ceramic tube 24 of the laser chamber 1 may consist of either two or three ceramic modules with an airtight connection of each joint between the ceramic modules that contain at least one annular sealing gasket of halogenating elastomer, in the same way as described above.

In other embodiments, illustrated in Figure 10, in the vicinity of the second electrode 3 has a single ceramic container 50, the surface of which facing the discharge region 4, has an extensive niche 57, in which is placed the second electrode 3.

The method of generating laser radiation in these variants of the invention (Figures 9, 10) is as follows. Create a continuous flow of gas between placed near or directly on the inner surface of the laser chamber 1, the first electrode 2 and second electrode 3, which through electrical inputs 17, 18, 55, 56, and return conductors 19 are connected serially connected capacitors 14 and additional capacitors 53. Include an additional power source 54 and the ends of each ceramic container 50 produces a pulse charging additional capacitors 53, relatively slow, because the inductance of the charging circuit across the ends of the ceramic container 50 is relatively high. Carry out the pre-ionization of the gas between the first and second electrodes 2, 3. With a time delay equal to the difference of times of charging additional capacitors 53 and capacitor 14 includes a power source 20 and provide fast pulse charging of the capacitors 14 a voltage, the polarity of which is opposite to the polarity of the charging voltage of the additional capacitors 53. By the time the simultaneous charging of the capacitors 14 and additional capacitors 53 discharge between the high voltage first and second electrodes 2, 3 of the opposite polarity by a low-inductance discharge circuit comprising the capacitors 14 and additional capacitors 53, connected in series to each other through a grounded gas-permeable reverse the conductors 19, concave in the direction of the discharge region 4. The result is the generation of the laser. After the gas circulation system, which includes the fan 9, the tubes of the heat exchanger 10, guides the gas stream 13, 51, 52, will replace the gas between the electrodes 2, 3, the cycle of operation of the laser again.

In variants of the method of generating laser radiation, illustrated in Figure 9, Figure 10, the pre-ionization carried out automatically when the power source 20 through the charging of the auxiliary capacitor 46 through the auxiliary bit about erotoc each block of preionization mode 5. After a moment of simultaneous charging of capacitors 14 and additional capacitors 53 lit main volume discharge in the discharge region 4 between the high-voltage first and second electrodes 2, 3 of the opposite polarity, allowing for the generation of the laser.

The opportunity offered in this variant of the method is highly efficient automatic preionization mode with a time delay relative to the time of the inclusion of an additional power source 54, that is, after the start of growth of the discharge voltage, it is not obvious. However, in accordance with the experimental data, the effective pre-ionization in this mode can be carried out. This is due to the fact that the gas mixture excimer lasers have a high rate of electron attachment to donors halides HCl, F₂depending on the magnitude of the electric field strength between the electrodes 2, 3. In this regard, the pre-ionization can ensure maximum efficiency of the laser when it is enabled, after reaching the voltage on the electrodes 2, 3 laser in which the frequency of ionization of the gas by the electric field begins to dominate over the frequency of electron attachment to the donors of Halogens. In accordance with the experimental data for the characteristic time ~180 NS growth voltage from the zero level to the breakdown delay max is effective preionization mode relative to the beginning of growth of the discharge voltage for the XeCl laser is 50 NS. The delay may be increased if the rate of increase of the voltage prior to the preionization mode below. Thus, when the charging time of capacitors ~180 NS time charging additional capacitor 53 may be substantially more than 230 NS, providing in accordance with the proposed variant of the method of generating laser radiation of high-performance automatic pre-ionization of the first electrode 2.

Run facing the discharge region 4 parts 51, 52 of the surfaces of ceramic containers 50 (Fig.9) or container 50 (Figure 10) in the form of directing the gas flow near the second electrode 3, and the placement of the second electrode 3 in an extended recess 57 of the container 50 (Figure 10) allows you to generate high-speed gas flow between the electrodes. This provides a quick change of the gas in the discharge region 4, giving the possibility to increase the pulse repetition rate and average power of laser radiation.

The introduction of ceramic containers 50 in number or two (Fig.9), or one (Figure 10) optimally to ensure simplicity of design with powerful high-energy laser.

The choice of the form of ceramic containers allows you to optimize the characteristics of the discharge circuit and/or circulation system gas. In this regard, in embodiments of the invention, at least one ceramic container 50 is made in the form or rectangular the school (Fig.9), either round pipe (Fig).

The use of containers 50 in the form of a circular pipe (Fig) provides the greatest ease and mechanical strength of the structure and, accordingly, the reliability of the containers loaded with high external pressure.

The containers 50 in the form of rectangular tubes (Figure 9) provides a compact ceramic containers 10 with a high degree of filling ceramic capacitors 11, used for high-power gas-discharge lasers. The result is a low inductance discharge circuit and increase efficiency of the laser. In addition, long flat parts 51, 52 of the container 50, facing toward the discharge region 4, effectively forming in her high-speed gas stream.

In embodiments of the invention, illustrated in Figure 9, Figure 10, the shape of the grounded gas-permeable reverse distributors 19, concave in the direction of the discharge region 4, conforms to the shape of the equipotential lines of the electric field between the high voltage electrodes 2, 3 of the opposite polarity. In this regard, is achieved by reducing the inductance of the discharge circuit without distorting the configuration of the electric field in the discharge region 4, which contributes to the achievement of high efficiency of the laser.

Connection of additional power source 54 to the additional capacitors 53 and charging with the butt-end is in each ceramic container 50 provides the greatest ease of discharge laser system.

Since the inductance of the charging circuit of the additional capacitors 53 and, accordingly, the time of charging more than for capacitors 14, in order to achieve the maximum slew rate the strength of the electric field in the electrode gap on the prebreakdown stage of discharge and uniform stable discharge laser power supply 20 includes a specified time delay relative to the time of the inclusion of an additional power source 54.

In General, embodiments of the invention, illustrated in Figure 9, Figure 10, due to the introduction of additional capacitors 53, placed in a ceramic container or the container 50 and is charged by an additional power source 54, the first and second electrodes 2, 3 are both high voltage of different polarity and placed on insulators, which are ceramic tube 24 and ceramic containers or container 50. Compared laser, shown in Figure 1-7, the voltage between adjacent high-voltage and grounded electrical inputs 17, 18, and also between the electrodes 2, 3 and end flanges 25 of the laser chamber is reduced by half. This allows you to extend the length of the electrodes, increasing the energy of laser generation in low-inductance discharge circuit and high efficiency of the laser. This reduces the requirements for electronic the historical isolation of the laser, which improves reliability and simplifies operation of the laser.

In the proposed embodiments of the invention the amplitude of the voltage of the power source and the additional power source is 2 times lower compared laser using a single power source.

Thus, the performance of laser and method of generating laser radiation as proposed allows to increase the energy generation and average power of laser radiation at high laser efficiency and reduce operating costs of the laser.

Variants of the invention, aimed at further enhancing energy and laser power, refer to the laser system. Two-beam laser system, schematically shown at 11, includes chassis 58, hosts performed in accordance with the present invention and described above, the first laser 59 and identical to the first, the second laser 60. When the power sources of the first and second lasers are combined into a common power source 61. Conclusions 62, 63 General power source 61 low-inductance connected to the capacitors 14 of each of the lasers 59, 60. It is preferable that the total power source 61 includes a compression system pump-pulse lasers, 59, 60, containing two low-inductance saturable inductor 64, 65, findings are combined with high-voltage pins 62, 63 of the corresponding power source 61. Between the capacitors 14 of the second laser 60 and the common power source 61 may be introduced by the delay line 66. Thus the delay line 66 can be combined with saturable inductor 65 General power source 61.

During operation of the laser system sinhronizovano are pre-ionization of the gas between the first and second electrodes 2, 3, pulse charging of the capacitor 14, the discharge between the first and second electrodes 2, 3, and generation of radiation in each of the lasers 59, 60 when using a common power source 61 that is installed together with the lasers on the chassis 58. When this pulse charging of the capacitor 14 of each of the lasers 59, 60 are preferably carried out through providing compression of the pump pulses in a low-inductance saturable inductors 64, 65, conclusions which are aligned with the pins 62, 63 General power source 61. If necessary, using delay lines 66 to regulate the time between the triggering of the lasers 59, 60. In all other respects, the operation of each of the lasers 59, 60 not differ from those described above, which allows to obtain the laser system generating two laser beams.

For applications can use either two separate laser beam or single beam. In the latter case, the combination of two laser beams is carried out in a special optical module preferably placed outside the chassis 58.

In embodiments, izopet the tion, schematically shown in Fig, a laser system includes chassis 58, hosts performed in accordance with the present invention, the first laser 59 and the second laser 60, identical to the first. When the power sources of the first and second lasers are combined into a common power source 61 and additional power sources of the first and second lasers 59, 60 are combined in the total additional power source 67.

Through the use of chassis, providing portability of the laser system, and a common power source for its operation is more simple than using a separate high-power lasers. This simplifies the synchronization of two lasers, as well as simplified the possibility of combining the two laser beams into one. When performing specified in the form of a laser system allows to double the laser energy and power compared to a single laser while maintaining a high efficiency of conversion of electrical energy into laser energy.

In a variant of the invention (Fig) operation of the laser system is implemented as follows. Include the total additional power source 67 and the ends of each ceramic container 50 each laser 59, 60 produces a pulse charging additional capacitors 53. Then with a time delay equal to the difference of times of charging will complement the selected capacitors 53 and capacitors 14, include a common power source 61. After saturation in a low-inductance of the inductors 64, 65 through the conclusions 62, 63 General power source 61 provide fast pulse charging of the capacitor 14 of each of the lasers 59, 60 voltage, the polarity of which is opposite to the polarity of the charging voltage of the additional capacitors 53. At the same time provide automatic pre-ionization of the gas in the discharge region 4. After charging the capacitor 14 and the additional capacitors 53 carry out the bits in the first and second lasers between the high voltage first 2 and second 3 electrodes of opposite polarity. Each of the lasers 59, 60, the discharge current flows through a low-inductance discharge circuit comprising the capacitors 14, additional capacitors 53, gas-permeable reverse the conductors 19, electrical inlets 17, 18 ceramic tube 24 laser camera and electrical inputs 55, 56 ceramic containers 50.

The following variants of the invention are directed to more than double the increase of the radiation power of the laser system compared to the capacity of each of two of its constituent lasers.

In these embodiments of the invention between the capacitors of the second laser 60 and the common power source 61 is introduced by the delay line 66, which provides a delay in the ignition of the discharge in the second laser 60, PR is exceeding the duration of the time interval between the moment of ignition of the discharge and the time of reach threshold in the first laser 59 (11, Fig). In this case, as illustrated by the flowchart of Figure 13, the chassis 58 posted by an optical connection 68 between the two lasers 59, 60, providing injection in the second laser 60 external optical signal, which represents a small fraction of the radiation of the first laser 59.

The optical connection 68 between the lasers 59, 60 may be placed either inside or outside (Fig) mirrors 22, 23 of each resonator of the laser. As embodiments of the invention, the optical communication system 68 may include plates 69, 70, coated on one side, that is, deflecting about 4% of the laser radiation, and a fully reflecting mirror 71, 72, providing an increase in optical communication between the two lasers 59, 60.

In industrial production using laser radiation can be used, or two separate laser beam 21, or one beam 73. In the latter case, the combination of two laser beams 21 is outside of the chassis 58 of the laser system in the optical module 74.

In these embodiments of the invention a method of generating laser radiation by the laser system (11, 12, 13) is as follows. Due to the delay line 66 between the power source 61 and the second laser 60, the discharge in the second laser 60 light with time delay, not exceeding the duration of the time interval (less than tens of NS between the timing of discharge and when the threshold is reached, the generation of the first laser 59. By using the optical communication system 68 includes, for example, coated on one side of the plate 69, 70 and a fully reflecting mirror 71, 72 (Fig), produce injection in the second laser 60 external optical signal. An external optical signal is a small fraction of the laser radiation emerging from the resonator formed by the mirrors 22, 23 of the first laser 59. Due to the injection of an external optical signal reduces the lasing threshold of the second laser 60. By using the optical communication system 68 in the final stage of discharge in the first laser 59 to perform the injection of the external optical signal from the second laser 60. If necessary, the combination of two laser beams 21 in one laser beam 73 carry out chassis 58 of the laser system in the optical module 74. After each laser gas circulation system will replace the gas between the electrodes 2, 3, the cycle of operation of the laser system again.

In this embodiment of the invention reduces the lasing threshold of the second laser by injection into the external optical signal immediately after ignition in it category. This can increase the efficiency of the second laser at ~30%. On the other hand, injection of an external optical signal from the second laser, the first laser increases the proportion of energy generation of the first laser at the final stage of discharge.

Thus, when performing the specified laser system and method of generating laser radiation allows to increase the efficiency of the laser system as a whole.

When performing in accordance with the present invention a gas discharge, in particular, excimer laser or the laser on a molecular fluorine laser system shows significant positive quality.

The use of the mounting system 26 of the end flanges 25 removes the ceramic tube 24 of the laser chamber 1 of the longitudinal component of the mechanical load, due to the massive force of the pressure of the gas mixture on the end flanges 25, which provides a high reliability metal-ceramic laser chamber 1, defining a significant advantage of the proposed design of a powerful laser.

By placing the end of the ceramic tube 24 in a circular recess 31 on the back side 30 of the front flange 25 of the laser chamber 1 (Figure 2) is highly effective electrical insulation between the first electrode 2 and the end flanges 25. It allows you to either minimize the length of the ceramic tube 24 laser camera that simplifies and reduces the cost of its design, gives a possibility to increase the length of the electrodes 2, 3 and, accordingly, increase energy generation and laser power. In addition, to achieve simple and reliable sealing of the laser chamber 1.

The execution of the ceramic tube of the laser chamber of a separate ceramic modules 24a, 24b, 24c (Figure 3 and Figure 4) simplifies manufacturing technology laser is camera 1, that reduces the laser and reduces the cost of energy generation. In General, running the camera from a separate ceramic modules allows you to increase the size of the cermet laser camera to optimally large size, increase the repetition rate of the laser pulses, the energy generation and average power gas discharge, in particular excimer laser.

The embodiments of the invention (Figure 5-10), in which the first electrode 2 is placed in an extended recess 39 on the inner surface of ceramic tubes 24 laser camera, effectively forming a high-speed gas flow in the discharge region 4, which provides the possibility of increasing the pulse repetition rate and average power of laser radiation.

Variants of the invention (Fig), in which NIS 39 on the inner surface of ceramic tubes 24 of the laser chamber are made so large that it, along with the first electrode 2 is placed in at least part of the discharge region 4, and the inner faces 48, 49 extended niches 39 form located up and downstream from the discharge region 4 guides the gas flow, significantly altering the direction of the gas flow when passing through the discharge region 4, - make it easy to eliminate the undesirable effect of tear gas flow from the second electrode 3 after the responsive is of flow of the discharge region 4. In addition, these variants of the invention (Fig) allow a wider range, as compared with the known analogues, to optimize the geometry of the gas stream to increase the pulse repetition rate and increase the average power of laser radiation.

Variants of the invention in which the outside of the ceramic tube in the wall made distributed along its length niches or cell 44 that at least partially immersed capacitors 14 connected to the electrodes 2, 3, allow to bring the capacitors 14 to the discharge region 4. This makes it possible to minimize the inductance of the discharge circuit, to improve energy generation and laser power while ensuring its high efficiency.

In embodiments of the invention using additional capacitors 53, placed in a ceramic container 50, and an additional power source 54 both electrodes 2, 3 laser are high voltage of opposite polarity (Fig.9, 10). In comparison with other variants of the invention, the voltage between the grounded and a high voltage discharge circuit elements of the laser chamber 1 is reduced by half. This allows you to extend the length of the electrodes, increasing the energy of laser generation, and to provide a low inductance discharge circuit and high efficiency of high-energy laser. To thaeme reduced requirements for electrical isolation of the laser simplifies the operation of the laser and increases its reliability.

In these variants of the invention (Figures 9, 10) form a grounded gas-permeable reverse distributors 19, concave in the direction of the discharge region 4, conforms to the shape of the equipotential lines of the electric field between the high voltage electrodes 2, 3 of the opposite polarity. In this regard, when using a grounded return conductors 19, concave in the direction of the discharge region 4, is achieved by reducing the inductance of the discharge circuit without distorting the configuration of the electric field in the discharge region 4, which contributes to the achievement of high efficiency of the laser.

The implementation of the surfaces 51, 52 of ceramic containers/container 50, facing toward the discharge region 4, in the form of directing the gas flow near the second electrode 3 or the placement of the second electrode 3 in an extended recess 57 of the container 50 (Figure 10) allows you to generate high-speed gas flow between the first and second electrodes 2, 3. This provides a quick change of the gas in the discharge region 4, giving the possibility to increase the pulse repetition rate and increase the average power of the laser.

The introduction of ceramic containers 50 in number or two (Fig.9), or one (Figure 10) optimally to ensure simplicity of design with powerful high-energy laser. The use of ceramic containers 50 in the form of a cylindrical pipe (Fig) about who has their greatest simplicity, mechanical strength and, accordingly, the reliability of ceramic containers 50, loaded with high external pressure.

The containers 50 in the form of rectangular tubes (Figure 9) allows to minimize the inductance of the discharge circuit and to increase the efficiency of the laser. In addition, long flat parts 51, 52 of the container 50, facing toward the discharge region 4, effectively forming in her high-speed gas stream.

Connection of additional power source 54 to the additional capacitors 53 and charging the ends of each ceramic container 50 (Fig.9, 10) provides the greatest ease of discharge laser system with additional capacitors 53, placed in a ceramic container 50. While turning on the power source 20 with a time delay relative to the time of the inclusion of an additional power source 54, is equal to the time difference of the pulse charging additional capacitors 53 and the charging time of the capacitors 14, provides the maximum slew rate of the electric field in the electrode gap on the prebreakdown stage of discharge. The result is the formation of a homogeneous steady discharge volume of the laser.

All this allows to significantly increase the energy generation and average power of laser radiation with high efficiency laser, will also reduce the operating costs of the laser.

The proposed design options powerful laser allows to apply various types of bit systems. So, using blocks of preionization mode 5 containing system 6, 7, 8 of the extended sliding discharge in the form of extended plasma sheet and plasma sheet on the surface of the dielectric (sapphire) plate 6 (Fig 1-5, 7-12), allows to realize in the discharge region 4 uniform pre-ionization optimally high level. This ensures a high efficiency of the laser, as the laser beam and the stability of the laser in long-term mode.

The implementation of pregenital through the partially transparent electrode with slit Windows transparency 38 (Fig 3, 4, 7, 10, 11) allows to realize a large aperture homogeneous volumetric discharge in a compact low-inductance bit system. This bit is also characterized by high efficiency change of the gas in the discharge region 4, that is, with small, ~1, rate of change of gas sufficient for a highly effective work of a powerful laser.

In other embodiments of the invention high energy generation and the power of the laser pre-ionization UV radiation sliding discharge is provided by using a more simple and cheap solid electrodes (Figure 1, 2, 5, 8, 9).

Simplification of the laser is also achieved in variants of the Britania, involving electrically connected with the block of preionization mode 5 and one of the electrodes 2, 3 auxiliary capacitor 45, the capacity of which is many times less than the capacitance of the capacitor 14 (Fig.9-12). It provides automatic pre-ionization with its optimized by choosing values of capacitance of the auxiliary capacitor 45. The small size of the auxiliary capacitor 45, which is sufficient for high efficiency highly stable laser operation, provides a great time of life block of preionization mode, the gas mixture of the laser as a whole.

Use a block of preionization mode 5 in the form of two identical systems 42, 43 of the extended corona discharge, located on each side of the electrode 2 (6), allows in some cases, does not require high energy generation, further simplify bit laser system.

The use of laser systems with two identical lasers, made in accordance with the variations of the present invention, (11, 12), at least double the power of the laser radiation.

Through the use of chassis 58, providing portability of the laser system, and a common power source 61 it is more simple than using a separate high-power lasers. This simplifies the synchronization of two lasers 59 60, and also simplified the possibility of combining the two laser beams 21 in one laser beam 73.

With the introduction of the delay line 66 in the charging circuit of the capacitor 14 of one of the lasers 60, and optical communication system 68 between the lasers 59, 60 by operation of laser systems proposed method reduces the lasing threshold of the second laser 60 by external optical injection signal immediately after ignition in it category. This can increase the energy generation in the second laser 60 to ~30%, providing a more than twofold increase of the radiation power of the laser system compared to the capacity of each of two of its constituent lasers 59, 60.

Thus, the execution of the gas discharge, in particular, excimer laser, laser systems and methods for generating radiation as proposed allows to simplify the design and manufacturing technology of ceramic-laser camera, significantly increase energy generation and average power of laser radiation with high efficiency laser or laser system, and reduce operating costs.

The proposed invention allows to create the most high-energy, powerful and highly efficient excimer lasers and laser systems with different combinations of wavelength (from 157 to 351 nm), energy generation (from ~0.01 to more than 2 j/pulse is one) and the pulse repetition rate (~300 Hz to about 6000 Hz) for large industrial plants, scientific research and other applications. These include: production of flat LCD and OLED displays using laser annealing, modification and hardening the surface, 3D microprocessing of materials, production of high-temperature superconductors by pulsed laser ablation, environmental monitoring using powerful UV lidar, the manufacture of integrated circuits using laser VUV lithography and other

The list of designations

1. Discharge, in particular, an excimer laser or the laser at the molecular fluorine, comprising a laser chamber (1)comprising at least partially of a ceramic material and filled with a gas mixture, the length of the first electrode (2) and the second electrode (3)located opposite each other and define a discharge region (4) between them, with the first electrode (2)placed near or directly on the inner surface of the laser chamber (1); at least one extended block of preionization mode (5); a gas circulation system(9, 10, 11, 12, 13); a set of capacitors (14)located outside of the laser chamber (1) and connected to the first and the second electrode is mi (2, 3) through electrical leads (17, 18) of the laser chamber (1) and gas-permeable reverse distributors (19)located in the laser chamber on both sides of the electrodes; a power source connected to the capacitor and the resonator, while
laser camera (1) includes a ceramic tube (24) and two end flange (25), rigidly connected to each other by means of the fastening system (26), extended along the ceramic tube (24),
mounting system (26) is made either in the form of a covering of ceramic pipe, metal pipe, has a fairly wide extended cut for the installation of a set of capacitors (14) and having on the end faces of the annular flanges, sealed with end flanges (25) laser camera (1), either in the form of tie beams,
each end flange (25) is sealed with a ceramic tube (24) through the o-ring seal (27)placed on the outer surface of the end portion (29) ceramic tube (24)having the form of a right circular cylinder, each end flange (25) is on the inner side (30) of the circular niche (31)in which the end of the ceramic tube (24),
each end flange (25) close to the ceramic tube (24) only on the outer surface of the ceramic tube (24) in place, install the o-ring gasket (27), having a clearance fit on uenoi surface of the end portion (29) ceramic tube (24).

2. The laser according to claim 1, in which each end flange (25) is fastened to one of the two flange (32)installed on the outer surface of the end parts (29) ceramic tube (24) to compress the o-ring seal (27).

3. The laser according to claim 1, in which the ceramic pipe (24) of the laser chamber (1) consists either of two or of three ceramic modules (24a, 24b, 24c) with an airtight connection of each joint (33) between the ceramic modules (24a, 24b, 24c), which is provided with a pair fastened by a flange (35, 36), while between the bonded flanges (35, 36) is placed, at least one annular seal (34) from halogenating elastomer, flanges (35, 36) is made of dielectric material and each dielectric flange (35, 36) has a part (37) of the outer surface of one of the ceramic modules(24a, 24b, 24c), adjacent to the junction (33) and having the form of a right circular cylinder.

4. The laser according to claim 2, in which each pair of bonded dielectric flanges (35, 36) has either a dense or a sliding fit on the outer surface (37) of the ceramic modules (24a, 24b, 24c), performing the function of the retaining ring in the area of the junction (33) ceramic modules (24a, 24b, 24c) composite ceramic tube (24) of the laser chamber (1).

5. The laser according to claim 1, in which the ceramic pipe (24) of the laser chamber (1) has on the inner side of rotunno niche (39), which includes at least the first electrode (2).

6. The laser according to claim 4, in which part of the inner surface of the ceramic tube (24)adjacent to the long recess (39), which established the first electrode (2)are flush with the first electrode (2) and form spaced upper and downstream from the first electrode (2) directing the gas stream or spoilers.

7. The laser according to claim 4, in which a ceramic tube (24) of the laser chamber (1) has on the inner side of the extended niche (39), which, along with the first electrode (2) is placed, at least part of the discharge region (4)and inner edge (48, 49) extended niches (39)located on both sides of the discharge region (4), form located up and downstream from the discharge region (4) directing the gas stream or spoilers, significantly altering the direction of gas flow by passing the field discharge (4).

8. The laser according to claim 4, in which on both sides of the first electrode (2) from the outside of the ceramic tube (24) in its wall made distributed along the length of the ceramic tube (24), except for its end portions (29), or cells (44)or niche (44), which at least partially immersed capacitors (14).

9. The laser according to claim 4, in which the first electrode (2) is adjacent its side edges to the inner faces of the longest niches (39) or j is carried out in close proximity to them.

10. The laser according to claim 4, in which in the long recess (39) on the inner surface of ceramic tubes (24) along with the first electrode (2) has at least one block of preionization mode (5).

11. The laser according to claim 1, in the laser chamber (1) which is near the second electrode has either one or two long ceramic container (50), each ceramic container placed additional capacitors (53), the capacitors (14) and an additional capacitor (53) are connected to each other via a gas-permeable reverse distributors (19) and connected to the first and second electrodes (2, 3) distributed along the laser chamber (1) electrical inlets (17, 18) ceramic tube (24) and electrical leads (55, 56) ceramic containers(50).

12. The laser according to claim 11, in which the outside of the laser chamber (1) is an additional power source (54), the polarity of which is opposite to the polarity of the power source (20), and the additional power source (54) is connected to the additional capacitor (53) with the ends of each ceramic container (50).

13. The laser according to claim 11, in which the time delay between the inclusions of additional power source (54) and power source (20) is equal to the time difference of the pulse charging additional capacitors (53)produced an additional power source (54) che the ez ends of each ceramic container (50), and charge time of the capacitors (14)produced a low-inductance connected thereto by a power source (20).

14. The laser according to claim 11, which faces the discharge region (4) part (51, 52) of the surface of each extended ceramic container (50) is formed near the second electrode (2) directing the gas stream.

15. The laser according to claim 11, in which the gas-permeable reverse distributors (19) is made concave toward the discharge region (4).

16. The laser according to claim 11, in which at least one ceramic container (50) has the form of either round or rectangular pipes.

17. The laser according to claim 11, in which the vicinity of the second electrode (2) has one ceramic container (50)with a surface facing the discharge region (4), has an extensive niche (57)in which the second electrode (3).

18. The laser according to any one of PP 1-6, 5, 11, in which the ceramic tube laser chamber (1) consists either of two or of three ceramic modules (24a, 24b 24c) with an airtight connection of each joint (33) between the ceramic modules (24a, 24b, 24c), containing at least one annular sealing gasket (34) from halogenating elastomer.

19. The method of generating laser radiation through the laser according to any one of PP 11-17, consisting in the implementation of the preionization mode of gas between the first and second electrodes (2, 3), impulse the second charging capacitors (14), the implementation of the discharge between the first and second electrodes (2, 3) and generation of the beam (21) laser, in which pre-include an additional power source (54) and the ends of each ceramic container (50) is produced by the pulse charging additional capacitors (53), then with a time delay equal to the difference of times of charging additional capacitors (53) and capacitors (14)include a power source (20) and provide fast pulse charging of the capacitors (14) voltage, the polarity of which is opposite to the polarity of the charging voltage of the additional capacitor (53); after a moment of simultaneous the end of the charging capacitor (14) and an additional capacitor (53) discharge between the high voltage first and second electrodes (2, 3) of opposite polarity on low-inductance discharge circuit including a capacitor (14) and an additional capacitor (53), serially connected to each other through the gas-permeable reverse distributors (19), concave in the direction of the discharge region (4).

20. The method of generating laser radiation according to claim 19, in which a time delay relative to the time of the inclusion of an additional power source (54), equal to the difference of times of charging additional capacitors (53) and capacitors (14), using a power source (20) is syshestvyut automatic pre-ionization from the first electrode (2).

21. A laser system containing a chassis (58), is hosting the first laser (59)made on any of the PP 1-18, a second laser (60), identical to the first, when the power sources of the first and second lasers are combined in a common power source (61) of the laser system, and between the capacitors (14) of the second laser (60) and a common power source (61) is added to the delay line (66), providing the delayed ignition of the discharge in the second laser (60) for a time period not exceeding the duration of the time interval between the moment of ignition of the discharge and when the threshold is reached, the generation of the first laser (59), and chassis (58) posted by the optical system (68) connection between the two lasers (59, 60)which is injected into the second laser (60) external optical signal, which represents a small fraction of the radiation of the first laser (59).

22. The method of generating laser radiation through the laser system according to item 21, which consists in the implementation of each laser (59, 60) of the gas preionization mode between the first and second electrodes (2, 3), pulse charging of the capacitors (14), the implementation of the discharge between the first and second electrodes (2, 3) and generation of rays (21) laser (59, 60), wherein
after ignition of the discharge in the first laser (59) ignite the discharge in the second laser (60) with a time delay, not exceeding the duration of the time interval between the moment of ignition the discharge and reach threshold in the first laser (59), and by using the optical communication system (68) is produced by injection to the second laser (60) external optical signal, which represents a small fraction of the radiation of the first laser (59), reducing the lasing threshold of the second laser (60).