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Process furnace or similar equipment

Process furnace or similar equipment
IPC classes for russian patent Process furnace or similar equipment (RU 2421544):
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Coating (versions), part of gas-turbine engine and protection method of part against damages related to sand effect Coating (versions), part of gas-turbine engine and protection method of part against damages related to sand effect / 2420612
Heat barrier coating consists of alternating layers of zirconium oxide, which is stabilised with yttrium oxide, and layers of material resistant to impact of molten silicates. External layer resistant to impact of molten silicates can be formed at least of one oxide chosen from the group consisting of lanthanum, cerium, praseodymium, neodymium, promethium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium, lutecium, scandium, indium, zirconium, hafnium and titanium oxides, or can be formed of zirconium oxide stabilised with gadolinium oxide. Besides, metal bonding coating can be located between the base and system of heat barrier coating.

FIELD: chemistry.

SUBSTANCE: furnace has an outer cover, a reaction chamber inside the cover, a heating system and a system for circulating the reagent gas. The outer cover of the furnace and the reaction chamber bound a first volume between the inner side of the cover of the furnace and the outer side of the reaction chamber and a second volume inside the reaction chamber. The first volume is divided into a first part which forms the heating zone which accommodates the heating system and a second part in which the reagent gas is present. The heating zone is hermetically insulated from the second part. The furnace also has a system for circulating inert gas which is made and placed with possibility of feeding inert gas into the heating zone at a rate which provides positive differential pressure relative the pressure of the reagent gas inside the second part of the first volume in which the reagent gas is present in order to prevent passage of the reagent gas into the heating zone.

EFFECT: design prevents contact between the reagent gas and the heating system, which increases reliability and longevity of the device.

13 cl, 2 dwg

 

The technical field to which the invention relates.

The present invention generally relates to heat chambers, furnaces, process cameras and similar equipment in which the gas-reactant is introduced as part of manufacturing operations. In a particular example implementation of the invention relates to furnaces for chemical infiltration from the gas phase/chemical vapor deposition (CVI/CVD furnace), in which is introduced a gas-reagent as part of the method of sealing a porous element, such as a porous preform for a brake.

The level of technology

It is well known the use of heat chambers, furnaces, process cameras and other such equipment, in which as part of technological activity, you enter a gas-reagent. In the future found in the description of the term "furnace" should be understood as a term equally applicable to the heat chambers and other process chambers of this type in General. Example in this respect may serve as infiltration from the gas phase, where represents the precursor gas reactant is introduced into the furnace, in which is placed a porous items, such as, for example, porous billet brake discs, but not limited to data elements.

Typically, traditional oven includes an outer casing of the furnace, provided it working space is about or reaction chamber, which is placed to be processed objects or elements, the system for movement of a reagent gas into the furnace and from the furnace, and a heating system for heating at least the inner part of the reaction chamber.

Gas-reagent known way to make leak (provide infiltration) into the porous structure of the porous elements. Gas-reagent can be a hydrocarbon gas, such as propane.

In one of the famous examples of the gas-reactant is introduced into the inner volume defined by the stack essentially aligned annular billet brake discs placed in the reaction chamber of the furnace. Generally speaking, the gas is forced to move from the inner volume of the stack to the outside of the stack by diffusion through a porous (for example, the fibrous structure of blanks and/or through the gaps between adjacent blanks.

By means of a heating system heats at least the inner part of the reaction chamber. Thus, due to the relatively high temperature of the billet brake discs gas-reagent undergoes pyrolysis and leaves decay product on the inner surfaces of the porous structure. In the case of a hydrocarbon gas, for example, the decay product is pyrocarbon, so the result is a carbon composite material (such as the material of the carbon-carbon).

Example of a traditional heating system for these stoves can serve as an induction heating system. In this system, the reaction chamber may be made of such material as graphite, in order to play the role of susceptor. It is also envisaged system to provide the necessary magnetic field, for example, as one or more electrical windings, functionally adjacent to at least part of susceptor. When the electric coil is supplied with sufficient AC current, the resulting magnetic field in a known manner causes induction of susceptor.

Other traditional heating system is resistive heating, where an electric current passes through a resistive element, which is heated. The use of resistive heating usually involves the use of a resistive element in addition to design, defining the reaction chamber.

To increase thermal efficiency as in the case of induction heating systems, and in the case of resistive heating system around the outer part of the reaction chamber may be provided with insulation.

However, the gas-reagent introduced into the reaction chamber, tends to leak or diffuse from the reaction chamber into the space between ameesha within the furnace, but outside of the reaction chamber.

In particular, in the process CVI/CVD gas-reagent is a precursor deposited decay product (such as a carbide or carbon deposition). If the gas-reagent will reach the insulation or heating systems, these structures can be formed and accumulated precipitation, which causes deterioration in performance, reliability and/or durability.

Disclosure of inventions

In light of the foregoing, in the CVI/CVD furnace, it is desirable to essentially isolate the heating system (and the corresponding insulation if any) used in the furnace of a reagent gas.

With this aim, the present invention involves the task area in the casing CVI/CVD furnace in which the heating system (including related insulation when available) essentially isolated from contact with the gas-reagent used in the CVI/CVD process.

In one aspect, the isolated zone (sometimes called herein a "zone heating") in the casing of the furnace physically isolated element walls located within the casing of the furnace so as to define the zone of heating.

In an additional aspect, the present invention involves introducing a flow of inert gas in the zone of heat to a slight positive pressure differential relative to the pressure the Yu of a reagent gas inside the reaction chamber. This differential pressure is additionally hinders the penetration of a reagent gas into the zone of heating.

Brief description of drawings

The present invention can be better understood by consideration of the accompanying drawings, where

figure 1 is a schematic view of the cross section of the process furnace of the present invention, which uses an induction heating system; and

figure 2 is a partial view of the cross-section, illustrating an alternative use of resistive heating system, as provided in the present invention.

The implementation of the invention

To simplify the description of the invention first will be described an example of an induction heated furnace. Next, with reference to figure 2 will illustrate the applicability of the present invention to a furnace, using resistive heating.

Generally speaking, the furnace 10, is used to process CVI/CVD, includes an outer casing 12 of the furnace, separating the inner part of the furnace 10 from the external environment, and to set it a certain amount.

Within the volume of the furnace 10 is provided susceptor 14. As is well known in the art, susceptor, as a rule, is a design, which is heated in the presence of a magnetic field created by an alternating current. Susceptor 14 in a CVI/CVD furnace can in order to contain, for example, one or more walls 16, a floor 18 and the upper element 20, which together define another volume or reaction chamber within the total volume inside the furnace 10. Be processed objects such as porous billet brake discs, placed in a volume of 21 set by susceptor 14.

System for heating of the furnace in the General form shown under the reference symbol 22. For example, in the case of an induction heated furnace heating system 22 is one or more conventional electrical windings connected to the external power supply appropriate power. It is assumed that the electrical winding of this type are well known to experts in the art and therefore not illustrated and not described in detail.

To increase the efficiency of heating of susceptor 14, on the outer part of one or more surfaces of susceptor 14 provides insulation 23. Does the insulation commonly used in the art, such as thermal insulation material with a ceramic base or isolation of carbon fibers, particularly carbon fibers, forming sequentially stacked layers.

In susceptor 14 includes one or more holes 24 for the inlet gas (for simplified what I image in figure 1 shows one hole 24 for the inlet gas). Gas-reagent, such as hydrocarbon gas, is introduced into the furnace 10 through a pipe 26, which crosses the wall 12 of the furnace from the outside. The pipe 26 at least coincides with the hole 24 for the intake of gas and may attach to him or about him by any suitable means, such as bolts or by welding. In a General sense, it is preferable that the boundary between the pipe 26 and susceptor 14 was only a small trickle of a reagent gas or not there is any leakage. The flow of a reagent gas through the pipe 26 shown in figure 1 by the arrow labeled A.

Typically, the gas-reagent produced (using the normal ways of moving gas, such as fans, suction blowers, etc. which are not shown) or in any other way from the working space through one or more holes 28 to release gas as shown by arrows C. Further, the gas-reagent leaves or is forced to exit from the furnace 10 through one or more editions of furnace 30, as generally shown by arrows C.

In accordance with the exemplary embodiment of the present invention, the internal volume of the furnace defined by the casing 12 may be divided in such a way as to define the boundaries of the above-mentioned zone heating. For example, as seen in IG, provided by circular "bar", or wall 32, which runs in the radial direction between the inner surface of the casing 12 and the outer surface of susceptor 14. The wall 32 is stationary fixed by means of conventional methods of fixation, suitable for operating conditions within the furnace 10. More specifically, the wall 32 is sealed (for example, by welding or the use of physical sealing elements) as its inner edge and the outer edge in the radial direction so that as a consequence turned out completely gas-tight seal preventing the passage of gas. It is desirable that the wall 32 contains an Assembly of layers, for example, in the form of a stack of rigid and/or flexible ceramic layers.

Inert gas, such as argon or nitrogen, is fed to the heat through the pipe 34 for supplying an inert gas, as shown in figure 1 by the arrow D.

The flow (flow) D inert gas may be regulated traditional valve 36. With this adjustment of the valve 36 can receive a stream D of gas, which will support in the area of heating a predetermined pressure P1 (designated schematically by the sensor 38 pressure).

Parallel to this, another pressure sensor 40 measures the pressure P2 in another part of the amount specified in the casing 32 PE and, which contains a gas-reagent (sometimes called herein a "zone of reagent").

Defined this way, the pressure values P1 and P2 can be transferred together to the valve controller 42 (preferably automatic valve controller), so that D flow of inert gas maintained given a positive differential pressure in the zone of heat relative to the rest of the volume in the casing 10 of the furnace. For example, supported the differential pressure can be from about +0.5 to approximately +5 millibars in favor of zone heating, and more specifically from about +1 to about +2 millibar in favor of zone heating. This slight positive pressure in the zone of heating also prevents any leakage or other receipt of a reagent gas into the zone of heating.

As mentioned above, preferably the automatic detection of the pressures P1 and P2. For example, the differential pressure between the pressures defined by each of the sensors 38, 40 pressure, can automatically be calculated at regular intervals and transmitted to the valve controller 42. There's this result can be used to automatically regulate the flow of inert gas in the zone of heating.

It should be understood that the flow of inert gas, in addition, can be controlled. This unusually high consumption inert the gas to maintain the required pressure in the district heating should be taken as a sign of a gas leak in one piece design zone heating, in particular through the wall 32. This definition can be used for alarm as perceived by the user, or it can be used as a signal to trigger the control system to automatically start the response.

The application of the present invention in relation to the furnace, which instead is heated using resistive heating system, essentially no different from the use in the case of inductively heated furnace. Figure 2 is a partial cross-sectional view illustrating an example of the placement of elements in a resistive heating system, however, in principle, apply the same ideas, as explained above. It is part of the volume defined by the casing 12' of the furnace, where the resistive heating system, separated by ensuring the permanence from the rest of the volume of the casing 12' of the furnace where the gas-reagent. Reaction chamber 14' is located in the casing 12' of the furnace, there are objects to be processed. Then one or more resistive elements 25 can be placed in contact with the outer part of the reaction chamber 14' or at least near it. The resistive elements 25 can have different traditional designs. In one typical example, the resistive elements pre whom are elongated elements.

As in an induction heated furnace, to increase thermal efficiency of the furnace may be provided in the insulation layer 23'.

However, despite the different location of the heating system in the case of resistive heating, the inside of the casing 12' applies the same General configuration as that of the induction heated furnace. It is the resistive elements of the heating system is similarly isolated from the part of the furnace containing gas-reagent, therefore, the description of the placement of the dividing wall and inert gas systems not repeated here.

Although the present invention has been described above with reference to certain specific examples are for purposes of illustration and explanation, it should be understood that the invention is not limited by reference to specific details of these examples. More specifically, a specialist in the art should easily understand that, in preferred embodiments, the implementation can be performed modifications and changes without departing from the scope of the invention described in the formula.

1. Furnace for chemical infiltration from the gas phase or chemical deposition from the gas phase, containing an outer casing (12, 12') of the furnace, the reaction chamber (14, 14')located in the casing of the furnace and is designed to be receiving processing element, the heating system (22) DL the heat, at least the reaction chamber and the circulation system of a reagent gas, intended for the introduction of a reagent gas into the reaction chamber from the outside casing of the furnace and for transmission of a reagent gas from the reaction chamber to the outside casing of the furnace,
characterized in that the outer casing of the furnace and the reaction Luggage limit first volume between the inner side of the furnace shell and the outer side of the reaction chamber and a second volume within the reaction chamber, and the first volume is divided into the first part of the forming zone heating where the heating system, and the second part, which contains a gas-reagent, the zone heating hermetically isolated relative to the second part of the gas reactant, and the oven further comprises a system (34) circulation of inert gas, is made and placed with inert gas in a zone heating with speed, providing a positive pressure differential relative to the pressure of a reagent gas inside the second part of the first volume, which contains a gas-reagent for impeding the flow of a reagent gas into the zone heating and prevent contact of a reagent gas with a heating system.

2. Furnace according to claim 1, characterized in that it contains the first sensor (38) pressure made and placed with the ability to determine pressure is (P1) in the area of heating, the system of circulation of the inert gas contains a controller (36) stream functioning in accordance with the pressure specified in the zone of heat, thus, to set the flow rate of inert gas, providing a predetermined pressure in the zone of heating.

3. Furnace according to claim 2, characterized in that it contains the second sensor (40) pressure made and placed with the ability to determine the pressure (P2) in the second part of the first volume, which contains a gas-reagent, while the flow circulation system of the inert gas is made and placed with the ability to control the flow of inert gas into the zone heating the at least partially based on the pressure (P2)defined in the second part of the first volume, thereby to obtain a predefined positive pressure differential between the zone of heating and the second part of the first volume.

4. Furnace according to any one of claims 1 to 3, characterized in that it contains the alarm device for signalling the change of a flow of inert gas required to maintain a given pressure in the zone of heating.

5. Furnace according to any one of claims 1 to 3, characterized in that the heating system is an inductive heating system.

6. Furnace according to any one of claims 1 to 3, wherein the heating system comprises a resistive heating with the system.

7. Furnace according to any one of claims 1 to 3, characterized in that the reaction chamber contains one or more elements (16) of the wall element (18) of the floor and the top element (20).

8. Furnace according to claim 7, characterized in that it contains a pipe (26) for intake of a reagent gas, located with the possibility of transfer of a reagent gas from the outside of the furnace casing to the outlet (24) for intake of a reagent gas, performed in the reaction chamber.

9. Furnace according to claim 7, characterized in that it is equipped with a hole (28) for release of a reagent gas, performed in the reaction chamber.

10. Furnace according to claim 8, characterized in that it is equipped with a hole (28) for release of a reagent gas, performed in the reaction chamber.

11. Oven according to claim 9, characterized in that it contains a release (30) of a reagent gas, made in the casing of the furnace.

12. Furnace according to claim 2 or 3, characterized in that it contains the controller for automatic control of flow depending on the pressure defined in the zone of heat, or pressure, as defined in the second region of the first volume, or according to both of these pressures.

13. Furnace according to claim 1, characterized in that it contains a separating wall (32) for separating zone heat from the second part of the first volume, and a separating wall includes at least one ceramic layer.

 

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