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Method for alloying metals in films

IPC classes for russian patent Method for alloying metals in films (RU 2276206):
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The invention presents a method of production of strongly nestled superconductive massive bodies made out of MgB2 having the density close to the theoretical value. At that the method includes the following stages: a mechanical activation of a crystalline boron with formation of the activated powders; formation of a porous workpiece out of the indicated powders; assembly of the porous workpiece out of boron and the massive forerunners of the metallic magnesium in a container and its pressurization in an aerosphere of a noble gas or with low oxygen content; the thermal treatment of boron and magnesium assembled as stated above, at the temperature above 700°C during a time interval exceeding 30 minutes. As a result of it the liquid phase of magnesium infiltrates through the activated powders of the crystalline boron. Mechanical activation of the crystalline boron is conducted by comminution of flakes of the crystalline boron with the help of a repeated crushing at compression under a heavy pressure. The technical result of the invention is simplification of the method of production of strongly nestled products out ofMgB2 with improved characteristics.

FIELD: production of special alloys in the form of coatings or self-carrying articles, possibly in metallurgy, machine engineering, material investigation and other branches of industry.

SUBSTANCE: method comprises steps of spraying and simultaneously displacing in space metal and alloying element to nano-dispersed state in low-pressure plasma and their co-deposition in the form of sub-layers at alternating repeating crossing of plasma fluxes; depositing each layer in the form of "island" type coating with particle size of metal and(or) alloying element less than critical size when particle is in liquid state at co-deposition. Invention provides significantly lowered temperature (about 100°C) of alloying - formation of solid solution.

EFFECT: lowered temperature of alloying process.

1 tbl, 1 ex

 

The invention relates to the field of production of special alloys in the form of coatings or self-supporting products and can be used in metallurgy, mechanical engineering, materials science and other fields.

A method of processing materials (USSR author's certificate No. 1055784, CL 30 In 31/20, op. 23.11.1983. Bull. No. 43), in which the doping is performed by coating the surface of diffusant in the form of successive layers of different elements or their alloys thickness of 10-1000 nm and subsequent irradiation of pulsed laser irradiation power of 108-1011W·cm-2with the formation of the doped layer. The disadvantage of this method is the need for heat treatment to obtain the doped alloy is a solid solution.

Also known is a method of obtaining single-crystal carbon film (provisional patent of the Republic of Kazakhstan No. 4275, CL 30 In 30/02, 35/00, op. 14.03.1997. Bull. No. 1), in which the doping is carried out by sputtering a cathode target of solid carbon, the acceleration of carbon ions and their deposition on a heated substrate, and at the same time additionally sprayed alloy material. In this way, as the previous one, for the doping of the material, heating the substrate.

Closest to the claimed technical essence is a way of increasing the critical current above which Roudnice doping (patent of Russian Federation №2172043, CL H 01 L 39/00, 39/24, op. 10.08.2001, bull. No. 22), in which the doping is carried out simultaneously with a shift in space spraying of the base metal superconductor and the alloying element does not interact with the basis of the superconductor, nano-dispersed state in the plasma of low pressure and coprecipitation them while maintaining the nano-dispersed state of the alloying element layer subatomic size of alternately repeating the crossing of the plasma flow.

The method involves the use of the alloying element does not interact with the metal superconductor, which does not allow to obtain solid solutions, i.e. to carry out doping as such. Use this method to obtain solid solutions with the alloying metal is only possible when heating the coating to a temperature to melt or close to it.

The objective of the invention is to develop methods of doping, which allows to obtain a metal film, alloy different elements.

The technical result from the combined effect of the characteristics proposed in the invention, is to reduce the temperature of the alloying - formation of solid solution.

The technical result is achieved in the way of alloying metal in films, including simultaneous with a shift in space metal sputtering and leyroy the element in nanodispersed in the plasma of low pressure and coprecipitation their subclone alternately repeating the crossing of streams of plasma, in which the deposition of each subslot are in the form of islet coating particles of metal and/or alloying element is less critical, in which the particle is in a liquid state during coprecipitation.

The essence of the invention is as follows.

In the proposed method, when reducing the size of metal particles and/or alloying element is less than the critical size is significantly reduced its melting point, sometimes the difference compared to compact the metal reaches a hundred degrees. Therefore, the coprecipitation of metal particles and/or alloying element of small size, when they are in liquid form, in the form of adjacent and contiguous Islands, accompanied by their fusion and the formation of a solution. Coalescence of liquid particles (one or more) increases the size of the drops more critical size and particle in the solid state. The repeated processes leads to the formation of a film of a solid solution of the alloying metal at very low temperatures. The method is implemented upon receipt of niobium-doped tin and aluminum, tantalum, doped with lead and other solid solutions.

Example. When alloying with niobium sample preparation produced by simultaneous sputtering targets of niobium and tin or aluminum in plasma the bottom of the CSOs pressure and deposition of sputtered metal on moving relative to the plasma flow is not heated substrate from polikor (Al 2About3). Film coating was formed to a thickness of 600-1200 nm at 1200 successive intersections of the substrate generated by the magnetrons flows metals, which ensured the growth of coatings on insular type. The temperature of the substrate during the formation of the samples did not exceed 100°C. Used niobium containing 99.95 wt.% the main element, tin - 99.99 wt.% and aluminum - 99.99 wt.% respectively. The ratio of the concentrations of metals in the samples was changed speed sputtering targets planar magnetron sputtering systems. In the process of sputtering targets maintained constant power to each of the spray devices. The ratio of precipitated components controlled by weighing - in quantity sprayed and deposited metal during the formation of the coating.

The manifestation of the alloying process becomes observable when the appearance of a solid solution of metals as a result of mixing, which is possible only when the merging of small particles of different metals, as is the case with conventional melting.

The table shows the results of forming a film systems for island type with a decrease in the estimated thickness of the layers (referred to the entire area of the substrate) and, consequently, the size of the particles forming the Islands.

Table.
The thickness of the alternating subsoil metal films and the lattice parameters of the phases
Sample number Nb-Sn 21,1 at. % Sn Sample number Nb-Al 28,2 at. % Al
The thickness of subsoil, nm The lattice parameter, nm The thickness of subsoil, nm The lattice parameter, nm
Nb Sn Nb Sn Nb Al Nb Al
1 27 10 0,3347±0,0009 a=0,5831 6 24 9 0,3331± 0,0006 0,4075± 0,0015
c=0,3182
2 13 5 0,3328±0,0008 a=0,5831 7 12,5 4,6 0,3318± 0,0003 0,4054± 0,0008
c=0,3182
3 4,3 1,7 0,3366±0,0012 a=0,5793 8 1,6 0,3316± 0,0005 -
c=0,3182
4 2,2 0,85 0,3380±0,0004 - 9 2,2 0,8 0,3303± 0,0005 -
5 1,0 0,4 0,3346±0,0004 10 1,0 0,3 0,3272±0,0007

Solid solution is a substitution in the crystal lattice of atoms in a matrix of metal atoms of the alloying metal. The lattice parameter of the solid solution is interpolated linearly from the lattice parameter LEGIROVANNOGO metal) depending on the number of atoms of the alloying element. In the solid solution of the alloying element rentgenograficheski not found.

In this regard, the samples No. 1-3 in the system niobium-tin and No. 6, 7 in the system niobium-aluminum presents a separate rentgenograficheski phases, with each of its crystal lattice-valued or more distorted interatomic distances, and the phase boundary. That is, the system presents a mixture of formations of niobium and tin, niobium and aluminum.

In the formation of solid solutions by joint precipitation of particles of small size may some the e intermediate state, in which the alloying element does not form a separate phase (samples No. 4, 8, 9)fixed rentgenograficheski, but there is no solid solution that follows from the lack of linear dependence of the lattice parameter (sample No. 4) and the presence of superstructure reflections with parameter 2-2,5 nm, x-ray analysis of samples No. 8, 9 when the lattice parameter corresponding to pure niobium. Aluminum is present in the latter case, in a clustered form, not recorded x-ray analysis. Therefore, the lattice parameters of the alloying elements in samples 4, 8, 9 are not shown in the table.

Upon reaching sizes of particles (in our case, they are expressed through the average thickness of the alternating subsoil) critical size and less it forms a solid solution with a lattice that is different from the lattice parameter LEGIROVANNOGO metal, but regularly changing with changes in the concentration of the alloying element.

As can be seen from the table, only in sample No. 5, upon reaching the estimated thickness of subsoil 1.0 nm of niobium and 0.4 nm at the tin in the system niobium-tin is the spontaneous formation of solid solution with a lattice parameter 0,3346±to 0.0004 nm, corresponding to the concentration of 21.1 at.% the tin. Similarly, in sample No. 10, upon reaching the estimated thickness of subsoil 1.0 nm of niobium and 0.3 nm of aluminum in the system niobium-aluminum is th is spontaneous formation of solid solution with a lattice parameter 0,3272± 0,0007 nm, corresponding to the concentration of 28.2 at.% aluminum, i.e. alloying niobium aluminum at a temperature of about 100°C. Alloying niobium tin and aluminum are the traditional methods allows to obtain solid solutions at very high temperatures, and the concentration of the alloying elements during cooling tin only about 2 at.% and up to 9 at.% aluminum.

Doping of tantalum lead, carried out similarly showed that when reaching the estimated thickness of subsoil tantalum 0.8 nm and lead 0.3 nm also happens doping of tantalum with the formation of solid solution, which confirms the presence of, at least, lead in the form of particles smaller than a certain critical value at which the lead presents the liquid phase at a temperature of less than 120°C.

Thus, examples of implementation of the method and the results show a significant reduction in the temperature of the alloying - formation of solid solution.

Method of alloying metal in films, including simultaneous with a shift in space spraying of metal and the alloying element in nanodispersed in the plasma of low pressure and coprecipitation their subclone alternately repeating the crossing of streams of plasma, characterized in that the deposition of each subslot are in the form of an islet covered with the I particle size of the metal and/or alloying element is less critical, when the particle is in a liquid state during coprecipitation.

 

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