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Control method and device of fluid medium temperature and flow rate Invention relates to instrument-making industry and can be used at control of fluid medium flow rate and temperature. According to this invention, materials, components and methods are aimed at manufacture and use of macro-scale channels containing fluid medium, the temperature and flow rate of which is controlled by means of geometrical sizes of the macro-scale channel and configuration of at least some part of the wall of the macro-scale channel and a flow of composite particles, which form fluid medium. Besides, the wall of the macro-scale channel and the flow of composite particles have such a configuration that collisions between composite parts and the wall can be preferably accompanied by mirror rebound. |
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Microsystem device for temperature control of surface of spacecraft Microsystem device for temperature control of the surface of spacecraft includes: a base made of dielectric material with a low coefficient of heat conduction with a rectangular hole; at least two rows of independent parallel control channels consisting of microactuators arranged parallel to each other along the base (as shown on fig. 1a, b);a reflecting shield placed over the microactuators; metal-coated tracks with electrical contacts on and/or inside the base for electrical contact with the microactuators; guides of the reflecting shield mounted on the base; polyimide clamps placed between the guides of the reflecting shield and the reflecting shield. Adjacent microactuators in a row are turned towards each other at an angle of 180 degrees; the number of microactuators in each row is equal to the number of rows - which is an even number, and the number of microactuators in each row is not less than 6; the microactuators are configured for angular displacement of mobile elements by an angle of not less than 30 degrees; the reflecting shield is placed over the microactuators such that the axis of symmetry of the reflecting shield is equidistant from each pair of rows of microactuators (as shown on fig. 1a, b); the free surface of the base is coated on both sides with a material with a high coefficient of reflection; force on the mobile elements of the microactuators is such that, overall for all microactuators, it is sufficient to overcome the frictional force between the reflecting shield and the microactuators. |
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Pressure sensor based on nano- and microelectromechanical system for precision measurements Sensor comprises a body, a nano- and microelectromechanicall system (NMEMS) installed in it, comprising an elastic element in the form of a membrane with a stiff centre, embedded along the contour into the support base, a heterogeneous structure formed on it from thin films of materials, a sealing contact block and connecting conductors. Radial strain resistors formed in the heterogeneous structure installed on two circumferences comprise identical strain elements in the form of squares, connected by thin-film links and connected into a bridge measurement chain. Centres of the first and second strain elements are placed along circumferences with radii determined according to appropriate ratios. Between the membrane and stiff centre, and also the membrane and support base there are roundings with a certain radius. |
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Use of composites with adjusted nanotubes for heat transmission in wells Invention relates to heat engineering and can be used for heat removal from heating units in wells. In the device containing an anisotropic nanocomposite element which is bounded thermally with a heating unit for the purpose of heat removal from the above unit along the preset direction, the anisotropic nanocomposite element forms a cable and includes heat-conducting nanoparticles introduced into the base material and adjusted in it in order to form a heat line to transmit heat from the first cable end to its second end, at that the heat conductivity in the preset direction is bigger than the heat conductivity in the direction perpendicular to the preset direction and the base material is configured so that there is contact between the heat-generating and heat-absorbing elements. The invention also includes the method of heat removal and the tool intended for use in the well. |
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Invention belongs to measuring equipment, in particular to pressure sensors on the basis of thin-film nano -and the microelectric systems (NiMEMS) intended for use in control systems, control and diagnostics of objects of long functioning. The method of manufacturing consists in polishing of a surface of a membrane, formation on it of a dielectric film and a strain gauge element with low-impedance crossing points and contact platforms between them with use of a template of the strain-gauge sensitive layer having a configuration of a strain gauge element in zones, combined with the low-impedance crossing points and contact platforms. Thus formation of the strain-gauge element with the low-impedance crossing points and contact platforms between them is carried out in areas, in which deformations and temperatures influencing them during operation meet the corresponding ratio. After formation they measure dimensions and area of elements and transitions of NiMEMS taking into account quantity, dimensions and distribution of defects, then using them they calculate the criterion of temporary stability according to the corresponding ratio. If the criterion of temporary stability is less than maximum permissible value of criterion of temporary stability, which is determined experimentally by statistical data for a concrete standard size of the sensor, this assembly is transferred to the subsequent operations. |
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Method for increasing heat removal by means of microturbulisation particles Invention relates to heat engineering and electrolytic metallurgy and can be used in heat removal increasing systems to improve heat removal characteristics on different surfaces of the heat transfer device. It is achieved due to use of Taunit carbon nanotubes (CNT) as microturbulisation particles, and oxide galvanic coatings as binding medium. Attachment of a variety of microturbulisation particles to heat removal surfaces is performed by application of oxide coatings, the nanomodification of which is performed by introduction to oxidation electrolyte of Taunit CNT by means of an ultrasonic disperser. |
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Invention relates to electronic engineering and microelectromechanical systems. Electronic circuit or microelectromechanical system with radiation source of mobile charge carriers (isistor) contains at least two areas - the first areas and the second one. The first area consists of radioisotopic material emitting mobile charge carriers due to radioactive emission while the second area consists of non-radioisotopic material accepting the above mobile charge carriers introduced into the material. These two areas are either located at distance less than travel distance of the above mobile charge carriers emitted by the first area of radioisotopic material, or the first area of radioisotopic material emitting mobile charge carriers is located at surface of the second area of non-radioisotopic material, or the first area of radioisotopic material emitting mobile charge carriers in dissipated form or in the form of assembled structure inside the area of non-radioisotopic material. |
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Method of making micro-electromechanical structures and apparatus for realising said method Invention relates to instrument-making and can be used in making semiconductor micro-electromechanical devices and specifically miniature sensors of physical quantities. In the method of making micro-electromechanical structures via anodic connection (anodic welding) of a two-layer structure of a silicon plate with a cleaned glass substrate while heating in a vacuum and applying voltage, the silicon plate is first divided into crystals; pairs of silicon-glass structures are formed and placed vertically in a plate holder while being pressed to each other; the plate holder is placed in a graphite heater and heated to temperature ranging from 370°C to 400°C, after which anode voltage is applied across the glass in a range from 200 V to 500 V to form a space-charge layer in the glass adjoining the surface of the silicon. In the apparatus for making micro-electromechanical structures, a graphite table is made with sidewalls in which, like in the base of the graphite table, there are at least two heating elements in each; at the ends of two opposite walls there are current leads for applying anode voltage; at the base of the table there is a plate holder in which pairs of silicon-glass structures are placed. |
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Method of making micro-electromechanical relays Invention relates to microsystem engineering and can be used in making micro-electromechanical relays. The method of making micro-electromechanical relays involves successively forming on a substrate a contact plating consisting of a control electrode, two bottom switched contacts placed on two sides of the control electrode at a certain distance, a sacrificial layer, a top movable contact placed over the control electrode and bottom switched contacts and supports for suspending the top movable contact. The sacrificial layer is formed from at least three sacrificial sublayers in several steps using two positive photoresists with different viscosity; holes are formed for the bottom switched contacts and the supports for suspending the top movable contact by photolithography, and the sacrificial layer is heat treated at the final step. |
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In the method to produce a microelectromechanical key, being the basis of the system of protection of information-telecommunication equipment of spacecrafts during electromagnetic start with overloads from several thousands to tens of thousands of units of accelerations of free body fall, a sensitive block is formed, made of a beam and supports, adjoining under action of acceleration to the substrate with the help of contact elements, forming a signal at the same time, which indicates the threshold of the acceleration value, by which they decide on overload of equipment, conducting paths and contact sites are formed by etching via a mask on a flat semiconductor substrate, using a system of vanadium-aluminium metals, and the sensitive block is produced with the help of a double-layer system of iron-nickel metals, which deposit each other in a single process cycle of thermal evaporation in vacuum, which are then etched via the mask in the aqueous solution of hydrochloric acid to produce the specified shape of the sensitive block in one cycle. |
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Cog-wheel system includes a cog-wheel and a toothed wheel, coaxially placed relative a rotating shaft, and a fastening device between said cog-wheel and said toothed wheel to prevent relative displacement of one of them relative each other. According to the invention, the fastening device has a profiled depression, the shape of which at least partially matches the cross-section of said section and which is made on the hub of said wheel for fastening said cog-wheel and toothed wheel for rotation. |
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Microelectromechanical rocket engine Microelectromechanical rocket engine is made in the form of a structure, from semiconductor silicon crystals, arranged one above another, in one of which there is a combustion chamber with a fuel element, and comprises a unit of fuel ignition with metal conductors. The combustion chamber with the fuel element is made in the form of nanocrystalline porous silicon with depth of not more than 60 mcm, pores of which are saturated by hydrogen and doped potassium nitrate. In the second plate there is a nozzle arranged symmetrically to the nanocrystalline porous silicon and coupled with it via metal conductors. |
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Method of producing highly porous coating based on silicon and manganese double oxides Invention relates to the technology of producing highly porous coatings based on double oxide systems used in the fast growing fields of electronics and lighting engineering, production of catalyst materials, as functionally sensitive, decorative, filter and radiation redirecting coatings. The method involves preparing a film-forming solution, followed by deposition thereof onto the surface of substrates, drying, annealing and cooling. The freshly prepared film-forming solution is held for 8-13 days at temperature of 6-8°C; drying is carried out at temperature of 60°C for 30-40 minutes, followed by nonlinear heating to 800-900°C in an air atmosphere; in the first 15-20 minutes, the rate of heating is maximum and is equal to 22°C/min; in the next 17 minutes, the rate of heating is kept at 18°C/min; and then for 12 minutes, the rate of heating is 12°C/min; in the last 40-20 minutes, the rate of heating is kept at 0.5°C/min; and holding is carried out at 800-900°C for 1 hour, with gradual cooling in natural cooling conditions of a muffle furnace, with the following ratio of components of the film-forming solution, wt %: tetraethoxysilane 22.4-21.6, hydrochloric acid 1.3·10-4-1.2·10-4, distilled water 3.2-1, metal salt MnCl2·4H2O 0.8-6.6, ethyl alcohol (98 vol. %) - the balance. |
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Method of making planar waveguide of zinc oxide in lithium niobate Method of making a planar waveguide of zinc oxide on lithium niobate involves preparing a film-forming solution, holding said solution for 1 day at room temperature, depositing the solution on polished lithium niobate, drying, annealing and gradually cooling in natural cooling conditions of a muffle furnace. The lithium niobate is pre-treated with 96% ethyl alcohol solution. The lithium niobate with the deposited film-forming solution is dried at 60°C for 1 hour, followed by annealing at 400°C in an air atmosphere at heating rate of 14°/min for 1 hour and at 870-1050°C at heating rate of 35°/min for 2-5 hours, with the following ratio of components of the film-forming solution, wt %: zinc nitrate crystalline hydrate 5.2-9.9%; salicylic acid 4.6-4.8%; 96% ethyl alcohol solution - the balance. |
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First, the appropriate planar integral circuit is created; for that purpose, contact platforms are formed on reverse side of the base; then, the first conducting layer is created; after that, circuit of a sensitive element of the converter is formed and a sacrificial layer is removed, and the method is completed with formation of the converter housing and formation of whiskers. Besides, at formation of the converter housing in a closed volume of the housing, gas medium with specified parameters is created, and formation of a whisker is performed due to supply of pulses of the specified shape to electrodes. As specified parameters of the medium, for example, pressure and/or dew point are used. Pulses in the form of half-period of sine wave of the specified amplitude and frequency are supplied to electrodes. |
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Method of manufacturing at least two types of electromechanical devices with different released states after removal of temporary layer consists in the following. Substrate is taken; the first conductive layer is formed on at least art of substrate. On at least part of the first conductive layer, the first temporary layer is created. On top of the first temporary layer, conductive movable elements are created each one of which has deformable layer made capable to move in gap after the said temporary layer has been removed. On top of substrate, flexion regulators are created. These regulators are made with possibility to support conductive movable elements after the first temporary layer has been removed. In this process, at least part of at least one flexion regulator is connected with part of deformable layer of movable element and is located above it so that the mentioned part of deformable layer connected with at least one of flexion regulators is located between the mentioned at least one flexion regulator and substrate. The first temporary layer is made with possibility of removal to release electromechanical devices and create by means of flexion regulators the gaps of various depths between the first conductive layer and movable elements. |
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Mould and method of its making Mould for formation of a moth eye structure on the surface comprises a base from glass or plastic, an inorganic sublayer, a buffer layer, containing aluminium, an aluminium layer and a porous layer of aluminium oxide, having on the surface a tilted structure of moth eye with multiple grooves, the size of which in two dimensions visible in direction of the normal line to the surface makes at least 10 nm and less than 500 nm. The method includes the following stages: (a) the mould base is provided from glass or plastic, an inorganic sublayer, a buffer layer, containing aluminium, and an aluminium layer, (b) the aluminium layer is partially anodised for formation of the porous layer of aluminium oxide with multiple grooves, (c) the porous layer of aluminium oxide is exposed to etching, increasing grooves in the porous layer in size, and (d) the porous layer of aluminium oxide is anodised for growth of grooves. |
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Mould and method of its production Inventions relate to mould intended for moulding antireflection structure on moulded product. Proposed mould comprises flexible polymer film, layer of cured resin arranged thereon and layer of porous aluminium oxide made on aforesaid layer. Porous aluminium oxide layer has reverse prominent surface structure. Said structure has multiple recesses. Size of said recesses, if seen in perpendicular direction to said surface, varies between 10 nm and 500 nm. Flexible roller-shaped mould can be arranged on substrate outer surface. Said mould is used to form antireflection structure on polarisation plate. For this, said plate is displaced relative to mould. Note here that prior to forming said structure, polarisation plate axis is properly arranged parallel with roller perimetre, roller length making 2πr, where r is roller radius. |
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Method to manufacture an integral micromechanical relay with a movable electrode in the form of a structure with a piezoelectric layer, comprising a substrate, coated with a dielectric layer with a lower (fixed) electrode and a movable electrode, consisting serially of a lower current-conductive layer, a dielectric layer with high elastic properties, a medium current-conductive layer, a piezoelectric layer, an upper current-conductive layer, arranged on the surface of the above substrate is realised on the surface of silicon plates. Development of an integral micromechanical relay with a movable electrode in the form of a structure with a piezoelectric layer is carried out in a single process cycle with simplified manufacturing technology compatible with technology of production of integrated circuits, in which formation of a movable electrode is possible in the form of a cantilever or in the form of a beam and includes the following operations: formation of a film Si3N4 on the surface of the silicon substrate by the method of SiN4 pyrolysis; sputtering of a TiN layer and formation of a "lower electrode" structure by the method of projection photolithography and plasma-chemical etching of the TiN layer; deposition of a layer of PSG (phosphate-silicate glass) by the method of chemical deposition from a gas phase and formation of a sacrificial layer on its basis by the method of liquid chemical etching; sputtering of the first TiN layer; deposition of the dielectric layer Si3N4; sputtering of the second TiN layer; deposition of the piezoelectric layer of lead zirconate titanate (LZT); sputtering of the third TiN layer; plasma-chemical etching of the layers: the third TiN layer, the LZT layer, the second TiN layer, the Si3N4 layer, the first TiN layer with formation of a movable multilayer electrode and opening of the sacrificial layer of PSG, liquid chemical etching of the sacrificial PSG layer with formation of an air gap between a fixed and a movable electrodes. |
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Method to produce gas-absorbing structure Gas-absorbing structure represents a layer of an active metal or alloy with a developed surface, connected to a bearing layer, providing for mechanical strength of a gas absorber and possibility to install it into different devices. |
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Composite micromechanical component from silicon with metal and method of its production Invention relates to producing composite micromechanical component including deep ion-beam etching, electrotyping and forming. Proposed method comprises the following steps. Making substrate including top and bottom silicon layers with interlayer of silicon oxide arranged there between, selective etching of, at least, one cavity in top layer to confine component silicon part pattern, and further etching of said cavity in interlayer. Besides, proposed method comprises growing metallic layer from one section of said cavity to make metallic part in component cross-section to isolate silicon part of micromechanical component from destructive mechanism strains and separated said component from substrate. |
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Screen comprises optical regulators corresponding to each pixel. Optical regulator is composed of two superimposed flat polarisers, one being a solid fixed polariser common for all pixels. Second polariser features area overlapping pixel area to turn relative to first polariser about fixed axis normal to their planes. Aforesaid turn may be actuated by microelectromechanical drive or stylus generating local magnetic or electrical field parallel to screen surface at its writing end. Screen may be used as optical switch. |
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Mems devices with support structures and methods of their production Devices MEMS are produced as follows. Electrode layer is applied onto substrate.Temporary layer is applied on said electrode layer. Said temporary layer is perforated. Moving layer is applied on said temporary layer. Support structures are made above moving layer and, partially, in temporary layer perforation. Moving layer section extends between, at least, two support structures. Temporary layer is etched out to form cavity between moving layer and electrode layer. |
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Proposed miniature nanomotor consists of two parts capable of measuring the relative position, on which electroconductive surfaces located in the specified direction at the specified pitch and with a gap between them and facing each other are located. Besides, according to the invention, electroconductive surfaces have the shape and position at which the angle between normal n1 drawn from arbitrary point of electroconductive surface of the first part of motor and normal n2 drawn from that point to the nearest electroconductive surface of the second part does not exceed ten degrees, and angle α between normal n1 from electroconductive surface of the first part and direction of movement of that point is not more than 89.7°. |
![Method of producing dicyclopentene (tricyclo-[5.2.1.0<sup>2,6</sup>]decene-3)](http://img.russianpatents.com/img_data/976/9760123-s.gif)
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Method of producing dicyclopentene (tricyclo-[5.2.1.02,6]decene-3) Invention relates to a method of producing dicyclopentene (tricyclo-[5.2.1.02.6]decene-3), involving hydrogenation of dicyclopentadiene in a solution with hydrogen in liquid phase using fine catalysts of the platinum group at atmospheric pressure and moderate temperature of (30-80°C), followed by separation of the end product. The method is characterised by that hydrogenation is carried out in a toluene solution in the presence of an additive - functionally substituted aromatic compounds which are capable of being adsorbed on the surface of the catalyst, such as p-oxydiphenylamine, hydroquinone, β-naphthylamine, p-phenylenediamine, 2,6-di-tert-butyl-4-methylphenol, in amount of 1-5 wt % in terms of the catalyst used, and separation of the desired dicyclopentene is carried out by distilling toluene at low or atmospheric pressure. |
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Anti-friction polymer composition Composition contains the following in wt %: graphite - 3-15, complex of copper with tetraethyl thiuram disulphide - 0.5-3, nanodispersed mixed copper-manganese oxides (with copper: manganese ratio of 1:3-2:1) - 0.03-0.5, polyamide - the balance. The invention enables to obtain a composition with frictional coefficient of 0.1-0.14, wear intensity 6.2-8.7 mg/km at a load of 5 MPa and sliding speed of 0.8 m/s. |
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Invention may find application in electronics, mechanical engineering, nanotechnology, electron microscopy, and medicine. The invention is aimed at reducing the size, to expand the functionality by providing opportunities to manipulate the micro-and nano-objects, the possibility of deformation and processing of micro-and nano-objects, the possibility of compatibility the of the proposed system of manipulation of micro-and nano-objects with existing systems of surveillance, research and nano-manipulation, as well as to improve operating speed and simplify the technology of serial production, which is ensured by the fact that the device in accordance with the invention comprises two flat elements, at least one of which is made heat-sensitive and consists of two tightly interconnected layers, one of which is made of an alloy with the effect of the shape memory with pseudoplastic deformation of strain, and another - of an elastic material. The flat elements are connected at one end; a grip to hold the object of manipulation is formed on the other end. In the manufacture of the device a layer of an alloy with shape memory effect is pre-manufactured, and pseudoplastic deformation of strain is inserted in it, and then it is connected with the elastic layer, and the connecting of layers is carried out at a temperature below the martensitic transformation in an alloy with a shape memory effect. |
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Interferometric optical display system having wide-band characteristics Display has light transmitting apparatus and apparatus for providing interference during reflection of light transmitted through the light transmitting apparatus. The apparatus for providing interference during light reflection has an absorbent material and a movable reflecting layer. The absorbent material lies on part of the light transmitting apparatus. The movable reflecting layer lies on the absorbent material. The absorption coefficient (k) of the absorbent material is lower than the threshold value for light wavelength values in the operating optical range of the apparatus for providing interference during light reflection. The refraction index (n) of the absorbent material increases with increase in the light wavelength in the operating optical range of the apparatus for providing interference during light reflection. The apparatus for providing interference during light reflection are adapted to reflect wide-band white light in the operating optical range. |
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Thermal micromechanical actuator and method of making said actuator Invention relates to microsystem engineering and can be used in designing and manufacturing micromechanical devices, having elastic, flexible deformable actuating elements which enable electric signal-to-displacement conversion and/or temperature change-to-displacement conversion for microrobotic systems. The thermal micromechanical actuator comprises a silicon monocrystalline wafer with orientation [100], having a mesostructure consisting of parallel trapezoid inserts joined by polyimide interlayers formed by a polyimide film, a heater and a heater metal coating. According to the invention, the polyimide film is made from a polypyromeltitimide layer adjacent to the parallel trapezoid inserts, which is reinforced with carbon nanotubes with functional carboxylic groups and concentration of not more than 11×10-3 g/cm3 and a non-reinforced polypyromeltitimide outer layer. |
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Basic element having multiple conducting zones Basic element has multiple conducting zones which are electrically insulated from each other by continuous oxidised zones. The multiple conducting zones have a substrate where the basic element is formed. Each continuous oxidised zone has through-holes such that the connected areas between the conducting zones are completely filled with the material of the continuous oxidised zones. Each oxidised zone is formed by an oxide which is a result of oxidation of part of the basic element, having multiple through-holes formed in it. |
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Measuring element of motion parameter sensor for high-sensitivity inertia measurements Measuring element of a motion parameter sensor based on molecule-electron transfer principle is in form of two or more non-conducting plates separated by a gap, having through-holes with electrodes deposited on one or both plates and placed in a working fluid. The electrodes lie in said gap and when flowing through the measuring element, the liquid successively passes through the through-holes in one plate, the gap with electrodes and the through-holes in the second plate. |
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Invention refers to devices that are based on nanotechnology such as nanodiodes and nanoswitches. The essence of the invention: a switching device with the nanocathode contains the support structure that serves as a supporting surface, the first electrically conductive structure that serves as the second surface and is located at some angle in relation to the supporting surface, at least one nanocathode of electrons that is formed on the second surface, the second electrically conductive structure, a non-conductor located between the first and the second electrically conductive structures. The first electrically conductive structure, the non-conductor and the second electrically conductive structure form a nanoswitch that in the activated mode causes breakage of the non-conductor so that the route of current electricity goes through the non-conductive material and between the first and the second electrically conductive structures. |
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Optically addressed spatial light modulator and method Optical device has a first electrode layer. An electrically insulating first barrier layer is placed over the first electrode layer. A photoconductive layer is placed over the first barrier layer. A carrier confining layer is placed over the photoconductive layer, where said carrier confining layer defines a volume and has a plurality of carrier traps distributed over the entire said volume. An electrically insulating second barrier layer is placed over the carrier confining layer. A light blocking layer is placed over the second barrier layer for blocking light of a selected wavelength band. A reflective layer is placed over the light blocking layer for reflecting light within the selected wavelength band. A birefringent or dispersive layer is placed over the reflective layer. An optically transmitting second electrode layer is placed over the birefringent or dispersive layer. |
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Protective housing of electromechanical microsystem, which contains intermediate wiring translator Invention refers to measurement equipment and can be used for example in microgyrometres, microaccelerometres, and pressure microsensors. At that, protective housing is formed with the wall made from electrical insulating material and forming a closed chamber. The above wall has inner surface oriented inward the chamber and outer surface being in contact with environment. Internal electric contacts located on inner surfaces and external electric contacts located on outer surfaces are electrically connected in pairs to each other. The first surface of flat electromechanical microsystem is fixed on internal wall of housing, and the other one includes electrical contacts of this microsystem. The first end of wire connection made from conductive material is fixed on electric contact of microsystem. Intermediate translator is made from electric insulating material, fixed at least on internal wall and contains the tracks made from conductive material; at that, one such electroconductive track is electrically connected at least to one internal electric contact and to the other end of wire connection. |
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In the disclosed method of stabilising nano- and micro-electromechanical system of a thin-film tensoresistor pressure sensor, the tensoresistors are heated with pulsed electric current after sealing the inner cavity of the detecting element of the sensor while simultaneously applying onto its receiving cavity the maximum allowable measured pressure and the minimum allowable operating temperature, as well as the maximum allowable measured pressure and the maximum allowable operating temperature. Thermal stabilisation is carried out at temperature which is 1.05 times higher than the maximum allowable operating temperature. The initial output signals during stabilisation are measured at high supply voltage. The rate of change of the initial output signal is controlled based on the ratio of the rate of change of the adjusted values of the initial output signals during the last and the second last measurement of the initial output signal during thermal stabilisation, respectively. |
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Method of laser deposition of nanoparticles from solutions Invention relates to the field of electrical engineering and nanotechnology, in particular, to production of electronic engineering and quantum electronics materials using technology of localised application of metal layers or nanostructures on surfaces of various types to produce elements and devices. The method of laser deposition of nanoparticles from solutions onto a substrate consists in its placement into a solution or application of a solution onto its surface. At the same time deposition is carried out from a colloid solution that consists of liquid, viscous phase (glycerine) and metal nanoparticles (for instance, Ni, Cu, Ti) and/or their oxides (NiO, CuO, TiO2), capacity of laser radiation is varied in the range from the threshold capacity that makes 1-1.5 W to 4 W, laser radiation is focused at the side of the solution at the interface of substrate and solution, and radiation is scanned along the above specified surface with various speed. |
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Proposed transducer incorporates at least one differential capacitor made up of two fixed electrodes and central moving electrode suspended there between to be displaced by external force to be measured. Method of operating capacitance transducer comprises applying equal opposite-direction excitation voltages between fixed electrodes and central electrode to measure central electrode displacement. Note here that charge part that may be tapped off central electrode and corresponds to electro static recovery force is called recovery noise. |
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Scanning probe microscope having nanotome Scanning probe microscope with a nanotome has a basic element on which there is a die holder with a holder interfaced with a first drive, a sample holder with a sample interfaced with a second drive and a scanning unit which can be interfaced with the sample. The first drive has a single-coordinate (coordinate Y) which moves die towards the sample. The second drive has one coordinate (coordinate X) which moves the sample holder with the sample perpendicular to coordinate Y. |
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Pressure sensor of increased sensitivity on the basis of nano- and microelectromechanical system with thin-film resistance strain gauges includes housing, nano- and microelectromechanical system (NMEMS) installed in it and consisting of elastic element - membrane with rigid centre, which is fixed along the outline in support base, heterogeneous structure formed on it of thin films of materials, in which contact platforms are formed. Also, sensor includes the first radial resistance strain gauges from identical resistance strain gauges which are located in one circumferential direction on periphery of membrane. As well, the second radial resistance strain gauges consisting of identical resistance strain gauges, which are located in other circumferential direction on membrane, which are connected by means of thin-film connecting films, which are connected to measuring bridge. At that, radius of rigid centre is determined from the following ratio: Rc=0.18Rm, where Rm - membrane radius. At that, resistance strain gauges of the second radial resistance strain gauges are located in circumferential direction the radius of which is determined from the following ratio: where: r2(w) - relative radius of location of resistance strain gauges receiving maximum positive radial deformations; w - membrane thickness; m and k- polynomial coefficients; lower index i - index determining polynomial coefficient in correspondence with Table 1; upper index i - power to which variable w is raised. |
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Micromechanical capacitance thermoelectric converter Converter comprises a dielectric or a semiconductor substrate 1, where there is a fixed electrode 2, coated with a ferroelectric film 3. On the ferroelectric film 3 there is the second fixed electrode 7, coated with a dielectric film 8. A heat conducting plate 5 is fixed on heat-insulating walls 4. One of ends of a movable electrode 6 is fixed to a plate 5, and the movable part of the movable electrode is installed in parallel to the dielectric film 8 surface with a gap between them. The substrate 1 and the heat-conducting plate 5 have different temperatures. As electric voltage is applied between the electrodes, the movable electrode 6 ensures a cyclic heat exchange between the heat-conducting plate 5 and the ferroelectric film 3 by means of its movement from the heat-conducting plate 5 to the dielectric film 3. |
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Element and method of its production Invention relates to micro electromechanical and micro optoelectromechanical elements and to methods of their production. Proposed method comprises producing first package of layers including first substrate whereon first insulation layer is applied whereon at least partially conducting protective layer is applied, producing first and second recesses in said protective layer. Note here that first recesses etching depth exceeds that of second recesses and at least equals protective layer thickness. Now, partially conducting structural layer is applied on protective layer so that said structural layer adjoins at least several sections of protective layer. |
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Encased carrier system for electronic micro fluid devices Invention relates to integrated electronic micro fluid device Proposed device comprises semiconductor substrate 106 on first support 122, electronic circuit 102, 104 on first side of said substrate and signal interface with external device. Signal interface is arranged on substrate to receive electric signals from electronic circuit. Micro fluid structure 126 is arranged in semiconductor substrate to limit fluid medium and allow it to flow in and out of said structure solely on second side of substrate opposite the first side and directed therefrom. Proposed device makes adaptable carrier for producing various versions of encased systems. Distinct division is ensured between electric and chemical-fluid interfaces. |
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Method of producing mems switch Invention relates to microsystem engineering, namely, to production of MEMS switches incorporating contact system. Proposed method comprises step-by-step application of electrode layer on substrate to produce lower control electrode and lower contact. Sacrificial layer is applied onto electrode layer, its thickness making the sum of upper and lower electrodes heights. Hole is etched in sacrificial layer running to the surface of lower contact. Second sacrificial layer is made, its thickness being equal to designed gap of contact gap. Then, upper contact, moving part of the switch and upper control electrode are produced now, entire sacrificial layer is etched out. |
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Multi-axial integral micromechanical tunnel-type accelerometre Proposed accelerometre 1 comprises substrate 1, displacement converter 2, inertial weight 3, active suspension zones 4 and 9, passive suspension zone 5, stationary electrode 6, moving electrode 7, as well as two additional suspensions with active zones 15, 16 and 23, 24, respectively, and with passive zones 17 and 25, respectively, two additional inertial weights 13 and 21, two additional stationary electrodes 11 and 19, two additional moving electrodes 12 and 20 and two additional tunnel-type converters 34 and 35 of displacement converters. Displacement converter 2 represents a tunnel contact formed by stationary electrode 6 made up of cylindrical shell rigidly secured relative to substrate 1. |
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Photonic microelectromechanical systems and structures Optical device has a substrate having a metal, a passivating layer, a conducting layer, a dielectric layer, a first optical layer and a movable second optical layer. The passivating layer lies on the substrate and provides electrical insulation for protecting other structures lying on the substrate from shorting onto the substrate. The conducting layer lies on the passivating layer. The dielectric layer lies on the conducting layer. The first optical layer at least partially transparent to and at least partially reflects incident light. The movable second optical layer at least partially reflects incident light from the first optical layer and lies between the first optical layer and the dielectric layer. A first cavity is created between the second optical layer and the dielectric layer. A second cavity is created between the second optical layer and the first optical layer. The second optical layer moves between the first and second positions, thereby modulating the reflecting power of the device in response to voltage applied between the conducting layer and the second optical layer. |
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Nanoelectronic semiconductor rectifier diode Invention can be used to rectify alternating current in radio apparatus, radio measuring devices and systems. The nanoelectronic semiconductor diode consists of double-contact regions made from doped GaAs with Si concentration of 1×1018…1×1019 1/cm3, spacers made from GaAs, and heterostructures in three alternating regions: potential barriers made from AlyGa1-yAs; where y is molar ratio of Al, with thickness between 1.70 and 8.48 nm with molar ratio Al from 0.4 to 1 and a potential well in between, having thickness of 7.91-12.44 nm, made from GaAs. The ratio of molar ratios of Al of the layers of the potential barriers lies in the range of 1.6…2.5. |
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Nanoelectronic semiconductor rectifier diode Invention can be used to rectify alternating current in radio apparatus, radio measuring devices and systems. The nanoelectronic semiconductor diode consists of double-contact regions made from doped GaAs with Si concentration of 1×1018…1×10191/cm3, spacers made from GaAs, and heterostructures in three alternating regions: potential barriers made from AlyGa1-yAs; where y is molar ratio of Al, with thickness between 1.70 and 8.48 nm with molar ratio Al from 0.4 to 1 and a potential well in between, having thickness of 7.91…12.44 nm, made from GaAs. The ratio of thickness of the potential barriers lies in the range of 1.3…5. |
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Inclining-swinging device to hybridise ics by flip-flop method Invention relates solid state micro electronics and may be used in production of hydride ICs by flip-flop method. Proposed device comprises base that has rectangular ledge with first hole for vacuum sucker and flat surface to accommodate IC with assemblage of micro contacts. Rectangular ledge flat surface has a layer of elastic incompressible material with second hole for vacuum sucker for communication with first hole for vacuum sucker. |
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Device and method for measurement of electric power Electric power measurement device comprises the following components: facilities to transform voltage into current in silicic micromechanical element, which is in power interaction with conductor; facilities to determine force of interaction between silicic micromechanical element and conductor. Force of interaction is directly proportional to product of voltage and current. The feature of proposed method for measurement of electric power is the fact that voltage is transformed into current in silicic micromechanical element, which is in power interaction with conductor. Force of interaction between silicic micromechanical element and conductor is determined. |
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Invention relates to microwave engineering and can be used in radio systems, for example in tunable radar systems. The microelectromechanical (MEM) switch has a substrate 1, made from dielectric or semiconductor material, on which there is a control electrode 2, a high frequency electrode 3 and one end of a mobile electrode 4, whose mobile part lies parallel to the surface of the control electrode 2 with a gap in between. The MEM switch also has a flexible plate 5 lying between the mobile electrode 4 and the substrate 1 and is attached on the substrate 1 by one end. The shape and dimensions of the flexible plate 5 leave the surface of the control electrode 2 and the high frequency electrode 3 open, and under the free end of the flexible plate 5 there is a depression 6 in the substrate 1 for moving the flexible plate 5. In the flexible plate 5 there are recesses whose dimensions are greater than dimensions of the control electrode 2 and the high frequency electrode 3, respectively. The length of the mobile part of the flexible plate 5 is shorter than the length of the cavity to the control electrode 2. |
Another patent 2513390.