Nanotechnological complex

IPC classes for russian patent Nanotechnological complex (RU 2522776):

G01Q70/00 - MEASURING; TESTING

B82Y40/00 - NANO-TECHNOLOGY

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FIELD: nanotechnology.

SUBSTANCE: invention relates to nanotechnology equipment and designed for closed cycle of production and measurement of new products of nanoelectronics. The nanotechnological complex comprises a robot-distributor with the ability of axial rotation, coupled with the chamber of loading samples and the module of local influence, as well as the measuring module comprising a scanning probe microscope, an analytical chamber, a monochromator and an x-ray source. The measuring module and the analytical chamber are coupled with the robot-dispenser, the monochromator is coupled with the analytical chamber, and the x-ray source - with the monochromator. The module of local influence comprises a module of focused ion beams and the first scanning electron microscope.

EFFECT: enhanced functional capabilities of the nanotechnological complex.

6 cl, 6 dwg

The invention relates to nanotechnology equipment and is intended for closed-loop production and measurement of new products nanoelectronics.

Known nanotech complex, including the loading unit of the media objects (media probes and media samples) with objects (probes and samples), the preparation unit of interest, the camera measurements, including scanning probe microscope, the transportation system, block the formation of structures and unit of local impact [1].

The main disadvantage of this complex is the lack of possibility of its operational modifications to add technological modules.

Also known nanotech complex, including robotic dispenser with the possibility of axial rotation coupled with a camera loading the samples, the module molecular beam epitaxy, ion implantation and preparation module substrates (samples) [2]. This complex is selected as a prototype of the proposed solution.

This complex has insufficient measurement and analytical capabilities.

The technical result of the invention consists in extending the functionality of nanotech complex.

This technical result is achieved by the fact that nanotech complex, including robot-adatci for axial rotation, coupled with the camera download the sample module and the local impact of the introduced measurement module comprising a scanning probe microscope, analytical chamber, the monochromator and the x-ray source, with the measurement module and the analytical Luggage associated with robotic dispenser monochromator coupled with analytical chamber, the x-ray source with a monochromator, and the module local impact module contains the focused ion beam and the first scanning electron microscope.

There is an option in which the robot dispenser and analytical camera is in the interface block.

There is also an option in which the module local impact connected with two bellows, symmetrically arranged with respect to it and attached to the frames.

There is also an option, in which the measuring module is equipped with a second scanning electron microscope and an optical microscope.

There is also an option, in which the analytical chamber contains an x-ray goniometer, equipped with scintillation x-ray detector, the fluorescent x-ray detector and a linear position sensitive x-ray detector.

Figure 1 shows the General layout of the nanotech complex.

Figure 2 presents to monovocal diagram of the loading module.

3 shows the layout of the module local impact.

4 shows a layout diagram of the measuring module.

Figure 5 presents the layout of the interface block.

Figure 6 presents a layout diagram of the analytical chamber.

Nanotechnological complex (Figure 1) contains the robot-distributor 1, mated: module load samples 2, module local impact 3, with the measuring module 4 includes a scanning probe microscope 5 (SPM), and interface block 6, connected in turn with the analytical chamber 7, a block monochromator (monochromator) 8 and the x-ray source 9 (e.g., synchrotron). The samples and their carriers with the purpose of simplification of the drawings figure 1 is - 6 is not shown.

Loading module 2 can be performed two-chamber and consist of cameras download the sample 10 (Figure 2), containing the first flange fast load 11, the first pumping means 12 and the first linear positioner 13. Chamber 10 may be connected to the storage chamber 14 samples, which is a cassette Atajanova type 15, coupled with the second linear arm 16. Luggage storage 14 can include a second pumping means 17. As a means of pumping can be used in combination of oil-free booster, turbomolecular and ion us the owls. It should be noted that the camera 14 may be mounted to the second flange quick download 18 and it can be operated without a camera 10 with the ability to load samples directly into it. Between the chambers 10 and 14 may be installed first vacuum gate 18 and the first bellows 19 and between the camera 14, the robotic dispenser 1 second vacuum gate 20 and the second bellows 21.

Module local impact 3 can contain the first vacuum chamber 22 (Fig 3) with third pumping means 23 mounted on the first module of the active vibration protection 24 (see, for example [3]). As a means of pumping it is possible to use a combination of ion and titanium sublimation pumps. The camera 22 from different sides docked third bellows 25 with a cover 26 mounted on the first frame 27 and the fourth bellows 28, fixed on the second frame 29. The frames 27 and 29 can be combined in one element. Between the camera 22 and the robotic dispenser 1 can be installed third vacuum shutter 30. In the upper part of the chamber 22 has a module focused ion beam (PHIL) 31, the first raster electron microscope (REM) 32 and a detector of secondary electrons 33, a secondary ion mass spectrometer (Sims) 34 and ionization gauge Bayard-Alpert 35. These modules are also described in[4, 5, 6, 7, 8]. The camera 22 may be located two - or three-coordinate is tol 36 on the basis of platinizing engines [9] with the means of capture samples 37.

Measuring unit 4 may include a second vacuum chamber 38 (Figure 4) with the fourth pumping means 39 mounted on the second module of the active vibration protection 40. As a means of pumping 39 you can use a combination of ion and titanium sublimation pumps. The camera 38 can be connected with camera interchangeable probe heads 41 with cassette 42 (replaceable probe head is conventionally not shown), which is coupled with the arm 43. As the arm 43 depending on the type of cartridge 42 may be used by third linear positioner or manipulator rotation. Detail the camera interchangeable heads, see [10]. The camera 41 is associated with the fifth pumping means 44, consisting of a combination of oil-free and ion pumps. The camera 41 is set fourth linear manipulator 45. Between the chambers 38 and 41 can be installed in the fourth vacuum shutter 46 and the fifth bellows 47, and between the chamber 38, the robotic dispenser 1 - fifth vacuum stopper 48 and the sixth bellows 49. The camera 38, containing SPM 5, can be installed a second scanning electron microscope 50, a detector of secondary electrons 51 and the optical microscope 52. SPM 5 shows the relative, it may contain a sample holder (not shown), the coordinate table 53 with the sample holder 54, the sample holder can be mounted on the camera 38, etc. in Detail the interchangeable camera heads 41, and that the same possible options high vacuum SPM, includes grips the specimen holder described in[10, 11, 12, 13, 14].

The interface block 6 contains a third vacuum chamber 55 (Figure 5) with the sixth pumping means 56, consisting of a combination of oil-free, turbomolecular and magnetic discharge pumps. Between the chamber 55 and the robotic dispenser 1 can be installed sixth vacuum stopper 57 and the seventh bellows 58, and between the chamber 55 and an analytical chamber 7 seventh vacuum shutter 59 and the eighth bellows 60. The camera 55 can be installed fifth linear manipulator 61, coupled with a module coup 62. This may be necessary if the process equipment come from different sides of the specimen, and the specimen during use of the complex must be turned. Module coup may contain, for example, a linear manipulator, with the possibility of capture of the sample and its rotation (not shown).

In addition, the pointing device 61 provides the coordination for the height of the robot of the distributor 1 and the analytical chamber 7.

Analytical chamber 7 includes a fourth vacuum chamber 64 (6), which is an x-ray goniometer 65 with holder substrate 66, which ensures its swing around the axes X,Y, rotation around its axis and moving the Z coordinate [15]. The camera 64 is supplied scintillation x-ray detector 67 [16], fluorescent Ren is hanowski detector 68 [17] and linear position sensitive x-ray detector 69 [18]. The detector can be installed 69 instead detector 68. The chamber 64 is also provided with the first 70 and second 71 units of high-precision automatic slots [19], monitor the intensity of the primary beam 72 [20] and block replacement filters 73. The flange of the input x-ray 74 is connected with the eighth vacuum gate 75. This shutter has a 76, transparent to x-rays. The camera 64, there is an observation window 77, necessary to monitor the goniometer 65. In addition, the camera 64 may have additional flanges for the possible installation of additional equipment (not shown). The camera 64 is associated with sedmimi pumping means 78, consisting of a combination of oil-free, turbomolecular and magnetic discharge pumps. Through the shutter 75 analytical chamber 7 is connected to the monochromator 8, paired with the eighth means pumping 79 consisting of a combination of oil-free, turbomolecular and magnetic discharge pumps. The camera 64 may be mounted sixth linear manipulator 80 (shown conventionally) to match the connection unit 6. All these modules can be installed on frames, which are to simplify the drawings are not shown. Through, for example, vacuum ninth gate 81 monochromator 8 is connected to the x-ray source, which can be used synchrotron 8 [21]. All elements of the analytical chamber and the monochromator described in detail in [22].

Nanotechnological complex works as follows. Through module 2 are downloading sample inside the vacuum volume. Next route option may be the following. A working sample can be moved in the analytical chamber 7. On the monochromator serves 8 x-ray radiation from the source 9, such as a synchrotron. The monochromator 8 selects the desired wavelength x-ray radiation from the spectrum of synchrotron radiation. In the analytical chamber 7 perform ray diffractometer and reflectometric measurement on a production sample, and measuring the diffuse x-ray scattering. The connection unit 6 enables the transfer of samples from the analytical chamber 7 in the robot dispenser 1 for subsequent measurements and back. Block 6 can match the height of the analytical chamber 7 and the robot-distributor 1, and also to carry out a coup samples. Through the robotic dispenser 1 depending on the processing route, a working sample can be moved in the module local impact 3, which by means of an ion beam generated by the module 31 can be made modification, for example, a method monolocale ion implantation and method of focused ion beams. The process modifikationen watch using the first RAM 32. In module 3 can also be carried out the analysis of the chemical composition of objects by means of secondary ion mass spectrometry. Next the sample through the robotic dispenser 1 can be displaced in the measuring module 4, where by SPM 5 can also modify the sample and holding measurement. The second REM 50 can also measure the surface of your sample.

In the analytical chamber 7 may be a measurement of the composition and morphology of the surface of the substrate, and the thickness of the layers formed on the substrate and the degree of defects in their crystal structure.

Supply nanotech complex additional process modules expands its technological functionality.

Literature

1. Patent RU 2308782. 2007.

2. Patent RU 2390070. 2010.

3. Patent RU2115 844. 1998.

4. Ostarkov. "Elianna processing. M., "Higher school". 125 S. 1990

5. Vdevelop and other UHV bipolar lithographic complex. Third all-Union seminar "Microlithography". Chernogolovka. 1990, p.131-132.

6. Asspirin and other Nanolithographically complex to study and modify the surface. Third all-Union seminar "Microlithography". Chernogolovka. 1990, p.137.

7. VAT and other Nanolitography in CHEM. Third all-Union seminar "Mi who relitigate". Chernogolovka. 1990, p.35-36.

8. Ionization gauge Bayard-Alpert. www.cryosystems.com

9. Patent RU 2297072. 2007.

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14. Patent RU 2161343. 2001.

15. http://www.xhuber.de/en/Products/diffractometers/xray/single_crystal/5021/5021 .rsys

16. http://www.radicon.spb.ru/

17. http://www.siintusa.com/xray-detectors/vortexME4.php

18. http://www.dectris.com/sites/mythen1k.htm

19. http://www.adc9001.com/index.php?src=hp-slits&PHPSESSID=b83f6d397f16279d156fdc3e16d8c171

20. http://www.fmb-oxford.com/product.php?product=7&tab=3

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1. Nanotech complex, including robotic dispenser with the possibility of axial rotation, coupled with the camera download the sample module and local impact, characterized in that it introduced the measuring module including a scanning probe microscope, analytical chamber, the monochromator and the x-ray source, with the measurement module and the analytical Luggage associated with robotic dispenser monochromator coupled with analytical chamber, the x-ray source with a monochromator, and the module local impact module contains the focused ion beam and the first scanning electron microscope.

2. The device according to claim 1, characterized in that between p the bot-distributor and analytical camera is in the interface block.

3. The device according to claim 1, characterized in that the module local impact connected with two bellows, symmetrically arranged with respect to it and attached to the frames.

4. The device according to claim 1, wherein the measuring module is equipped with a second scanning electron microscope.

5. The device according to claim 1, characterized in that the measuring unit is equipped with an optical microscope.

6. The device according to claim 1, characterized in that the analytical chamber contains an x-ray goniometer, equipped with scintillation x-ray detector, the fluorescent x-ray detector and a linear position sensitive x-ray detector.