Reversivble rotation electrostatic micromotor. RU patent 2513030.
 Device to convert energy of static electricity / 2504129Device to convert energy of static electricity comprises serially connected source of static electricity, spark arrester and a step-down transformer. In parallel to the primary winding of the transformer connected to the arrester there is the first capacitor connected. The output of the secondary winding of the transformer via the second capacitor is connected to the load. Frequency of resonance of the first circuit formed by the primary winding of the transformer and the first capacitor connected in parallel to the winding is approximately equal to the frequency of resonance of the second circuit formed by the secondary winding and serially connected to the secondary winding by the second capacitor. The proposed device may be used in a wide spectrum of devices using energy of static electricity, both domestic and industrial ones. |
 Electric power generator / 2492571Electric power generator has a chamber for generating electrostatic charges in a medium with dielectric substances, the chamber being made in an electrically insulating housing, a device for polarising the electric field, a device for moving the medium, first and second electrodes. According to the invention, the medium with dielectric substances is in form of a mixture of air and gaseous and solid products of thermal decomposition of carbonaceous materials fed into the chamber. The device for moving the medium has an injector, the gas stream output of which on a pipe is directed at a tangent to the side surface of the chamber. The device for polarising the electric field is placed in the pipe and is made as a device for generating a constant magnetic field with poles directed along the pipe. A metal splitter is made in the chamber. The first electrode is formed by the splitter and an inner metal cladding on the side surface of the chamber. The second electrode is formed by an outer metal cladding on the side surface of the housing. |
| Electric power generator / 2492571 Electric power generator has a chamber for generating electrostatic charges in a medium with dielectric substances, the chamber being made in an electrically insulating housing, a device for polarising the electric field, a device for moving the medium, first and second electrodes. According to the invention, the medium with dielectric substances is in form of a mixture of air and gaseous and solid products of thermal decomposition of carbonaceous materials fed into the chamber. The device for moving the medium has an injector, the gas stream output of which on a pipe is directed at a tangent to the side surface of the chamber. The device for polarising the electric field is placed in the pipe and is made as a device for generating a constant magnetic field with poles directed along the pipe. A metal splitter is made in the chamber. The first electrode is formed by the splitter and an inner metal cladding on the side surface of the chamber. The second electrode is formed by an outer metal cladding on the side surface of the housing. |
 Electrostatic actuator / 2488214Invention is related to devices of electromechanical energy conversion; it is a fast-acting high power-consuming capacitance transducer manufactured by microtecnologies and it can be used in devices where it is necessary to create high mechanical forces in short period of time, for example, in fuel injectors in combustion engine cylinders, fluid jet injectors, miniature motors for micro aircraft and microrobots. The actuator contains a body with input to supply voltage pulse, a fixed plate rigidly mounted in the lower part of the body at which surface electrode and the first layer of dielectric material are deposited in sequence, a plate movable along guides. At the surface of the movable plate there is a thin metal film with one free end. At the surface of the first layer of dielectric material there is additional deposited thin layer of another dielectric material with low roughness and ratio of dielectric permeability and thickness close to the respective parameter of the first layer of dielectric material. |
 Method to produce power / 2471284To produce power, a conductor is placed into an electrostatic field and then periodically screened against effect of this field. At the same time pulses of AC current are induced in the conductor by a variable flow of the electric field. The method is environmentally pure. |
 Method of electromechanical conversion of energy and electrostatic capacitance motor on its basis / 2471283Energy of an electric field is converted, which operates between fixed similarly charged bodies and similarly charged movable bodies mechanically connected to each other, into mechanical energy of reciprocal or rotary movement of movable bodies relative to the fixed ones. They are arranged above each other with a gap so that the electric field between the specified interacting bodies is homogeneous to the maximum, and force applied to movable bodies and intensity of this field shall be directed at the sharp angle to direction of their movement. |
 Miniature nanomotor / 2468494Proposed miniature nanomotor consists of two parts capable of measuring the relative position, on which electroconductive surfaces located in the specified direction at the specified pitch and with a gap between them and facing each other are located. Besides, according to the invention, electroconductive surfaces have the shape and position at which the angle between normal n1 drawn from arbitrary point of electroconductive surface of the first part of motor and normal n2 drawn from that point to the nearest electroconductive surface of the second part does not exceed ten degrees, and angle α between normal n1 from electroconductive surface of the first part and direction of movement of that point is not more than 89.7°. |
 Method of electromechanical conversion of power / 2458451Energy of an electric field is converted, which operates between a fixed charged body and two similarly charged movable bodies mechanically connected to each other, into mechanical energy of reciprocal movement of movable bodies. For this purpose movable charged bodies are alternately screened from the fixed body by electrostatic screens connected with it, providing for the possibility of linear reciprocal travel of screened bodies inside electrostatic screens, which, when screened, are moved across the direction of electric field acting between the fixed and screened movable body. |
 Electric energy generation method, and capacitive electric field generator using above mentioned method / 2454783Electric energy is generated with capacitive electric field generator which includes two electrets of capacitor, which are either pre-charged or which are under action of field of charges, which are electrically connected in parallel through load and adjustable voltage source. Capacitance of one or both capacitors is measured by increase in or decrease of dielectric permeability of capacitor dielectric by polarisation of smaller part of dielectric, which is equally spaced from armatures of condenser, in the direction perpendicular to the main capacitor field; for that purpose, control electric field oriented across the main field of capacitor is applied to that part of dielectric, and control of capacitor capacitance and value of the generated voltage respectively is performed by increase in or decrease of voltage of control electric field, which is supplied from adjustable voltage source. |
 Capacitive motor - agitator / 2453978Invention relates to electric engineering, power energy and electric machine-building industries, and may be used as low-power motors and stirring devices for various dielectric liquids and during research of electro static forces in electric statics. The proposed capacitive motor contains dielectric body with movable element being located inside the motor, metal electrodes coupled with the power source and installed at an angle with regard to the normal to the surface of dielectric movable element and metal electrodes. There is an air clearance between the above dialectical movable element and metal electrodes. At the same time, according to the invention, a liquid dielectric is used as a movable element, which is submersed to the tank made from dielectric material. The liquid dielectric may be represented as electrorheological suspension. Besides, in addition, the proposed capacitive motor may contain a heater ensuring possibility to use it is a filter. |
 Capacitive electro-mechanical transformer / 2306662Capacitive electromechanical transformer is disclosed, comprising two capacitors of alternating capacity, electrically and mechanically connected in counter-phase, in which flexible electrodes are manufactured of non-stretching current-conductive film, forming a corrugated surface, which by one set of edges touches ferrielectric surfaces, and by other set of edges is attached to the surface of moveable rigid electrode. |
 Electro-static electro-generator of current / 2307444Electric generator contains floating means, electrodes and dielectric element positioned between electrodes, made in form of meshed vessel, which is filled with powder or granules with their possible movement. |
 Electro-static electro-generator of current / 2307445Electric generator contains frame made of blades, electrodes and dielectric element positioned between electrodes, made in form of meshed vessel filled with granules with their possible movement. |
 Electro-static electro-generator of current / 2307446Electro-generator contains electrodes and dielectric element positioned between electrodes made in form of meshed vessel filled with granules with their possible movement; upper electrode is made in flexible metallized tubular form. |
 Electro-static electro-generator of current / 2307447Electric generator is suspended on support and contains electrodes and dielectric element positioned between electrodes, made in form of meshed vessel filled with granules with their possible movement. |
 Electrostatic electro-generator of current / 2307448Electric generator contains floating means, body of which is filled with closed plastic vessels, electrode and dielectric element positioned between electrodes, made in form of meshed vessel filled with granules with their possible movement. |
 Electrostatic current electro-generator / 2307449Electric generator contains electrodes and dielectric element positioned between electrodes and made in form of meshed vessel filled with granules with their possible movement; generator is provided with floating means with ballast, held in the point of intersection of middle-frame with central stringer. |
 Method for reverse of capacity motor / 2312451In the method for reverse of capacity motor, angle of inclination of electrodes relatively to normal line drawn to surface of mobile element is changed simultaneously, phases are alternated and high voltage of alternating current, fed to motor electrodes, is regulated. |
| Working substance for electrostatic motors / 2314632 As components of working substance, dibutyl phthalate is used in ratio of 30-40% and oleic acid in ratio of 60-70%. Production of working substance occurs by mixing its component substances. |
 Capacitive electromechanical current generator / 2317631Proposed capacitive electromechanical current generator has variable capacitors with solid ferroelectric plates and movable flexible electrodes in the form of set of rollers made of flexible electricity conductive material; disposed on ferroelectric plates on side of rollers, in parallel with the latter, at certain interval and same pitch, are insulating strips made of low dielectric constant material; position of strips of one capacitor is offset with respect to that of other capacitor. |
FIELD: electricity.
SUBSTANCE: invention relates to the sphere of electrical engineering. Reversible rotation electrostatic micromotor consists of a power supply source, control system and an angular rate sensor; it has a rotor actuated by a microactuator system and each microactuator includes a moving element with two elastically attached moving electrodes of low bending stiffness, a silicone substrate with a conducting electrode and a dielectric film with high dielectric capacity applied in-series. There are the following alternatives. Microactuators are located at the lower plane of the rotor ring; at the upper plane of the rotor ring there are applied conducting layers which are connected by respective contacts to mobile electrodes. Microactuators are located at the lower plane of three rotor rings; at the upper plane of the rotor rings there are applied conducting layers which are connected by respective contactsto mobile electrodes. Microactuators are located at the lower and upper planes of the rotor ring while conducting layers are applied at the external and internal lateral sides of the ring. Microactuators are located at the lower and upper planes of two rotor rings while conducting layers are applied at the external and internal lateral sides of the rings.
EFFECT: improving accuracy and expanding functionality of microelectromechanical systems due to use of reversible rotation micromotor as an angular shift micro- and nanopositioner, reversible high energy-consuming rotation microdrive in step-by-step mode and quasi-steady-state mode.
4 cl, 8 dwg
The proposed device refers to microelectromechanical systems (MEMS), in particular to micromechanical devices with mobile deformable elements. Can be used to build micro - nanopositioners Microsystems movement and transportation of various purposes, performing movements in micro - and nano-scale, but also engines with micro-size, robotics, including microrobotics systems for medical purposes.
Famous walking linear electrostatic motor (US patent №580383, Intern'l Class: H02K 41/00, publ. 16.10.1997), consisting of a flat stator with capacitive structure, formed by a metal layer and a layer of dielectric material, moving rotor, performs translational motion by a group conducting a deformable petals forming a contact with a layer of dielectric material stator by rolling forward. The movable part of the engine parallel and separated from the stator. The disadvantage of this engine is the presence of considerable friction losses guides on a layer of dielectric material stator and the wear of the material.
Known electrostatic micro-, nano-motor (RF patent №2374746, IPC H02N 1/00, publ. 27.11.2009), containing the power supply at least two plates, placed relative to each other with a gap and with the possibility of changing due to electrostatic effects of their spatial orientation relative to each other. The disadvantage of this micro-, nano-motor is low accuracy and a small performance during rotation.
There are also known electromechanism (patent RF # 95323, IPC VW 3/00, publ. 27.06.2010)consisting of a body of a polymeric material, which has the shape of a rectangular parallelepiped, at the bottom of which fixed metal substrate, substrate coated with the layer of dielectric with a high value relative permittivity, the electrodes are made curved U-shaped outer surface made with the possibility of contact with the dielectric layer. Rectangular surface electrodes made with the possibility of contact with the inner surface of the enclosure and connected to the system power and control, which is connected with a metal substrate. The disadvantage of this electromechanism is a low power, no possibility of moving, rotating, which leads to the impossibility of its use in the systems of transportation and transportation carried out by micro-size particles in the measurement scale.
The closest adopted for the prototype, is the electrostatic engine with deformable petal between the rotor and the dielectric layer on the stator (US patent №5898254, Intern'l Class: H02N 1/00, publ. 16.10.1997), representing capacitive structure formed by a metal layer and a layer of dielectric material, moving rotor, performs translational motion, by means of a conducting deformable petals forming a contact with a layer of dielectric material stator by rolling forward. A layer of dielectric material has nonlinear polarization of the electric field, previously applied dielectric layer has a high value relative permittivity. A disadvantage of this device is considerable friction from the guides of the rotor and strong wear layer of dielectric material stator through the guides.
The objective of the invention is to expand the functional capabilities of fast-acting reversible high-energy electrostatic micro rotation due to use it as an angular step of micro-, nanopositioner, in a single step and quasistability rotational modes of motion, and reduce the wear surface of a dielectric film, consisting of a dielectric material of high permeability.
Technical effect used in the solution of a technical problem is to change the electrical capacitance of the capacitor formed by microactuators with a flexible conductive electrodes and a conducting layer stator, due to the deformation of a flexible electrodes that result from the roll forward of the electrodes on the surface of the stator, thereby resulting in a rotation of the rotor micro, which are no guides in contact with the surface of a dielectric, thereby reducing wear material dielectric films. This technical effect is achieved by the famous reversing electrostatic micro rotation, containing the power supply and control system, the speed sensor, the rotor is actuated by the system microactuators, according to the invention, part of the rotor is made in the form of a flat ring, each of microactuators, located on the lower plane of the ring rotor, includes a movable item with elastically connected two flexible electrodes of low Flexural rigidity, on the top plane of the ring rotor deposited conductive layers, which are connected with the appropriate flexible electrodes contacts, and the stator is made consisting of a silicon substrate, which is consistently applied conductive layer and dielectric film high dielectric constant.
On the second version reversing electrostatic micro rotation, containing the power supply and control system, the speed sensor, has a rotor driven system microactuators, in this part of the rotor is made consisting of three flat rings on the top plane of the rings of rotor deposited conductive layers, which are contacts to flexible electrodes, and each of microactuators is located on the lower planes of the three rings of rotor.
By the third variant reverse electrostatic micro rotation, containing the power supply and control system, the speed sensor, has a rotor, with a part of the rotor is made consisting of a flat ring, on the internal and external side faces of the rings of rotor deposited conductive layers, which are contacts to flexible electrodes, the rotor is driven by a system of microactuators, which are located on the upper and lower surfaces of ring rotor.
On the fourth draft of reversing electrostatic micro rotation, containing the power supply and control system, the speed sensor, has a rotor, with a part of the rotor is made consisting of two flat rings, conductive layers deposited on the external and internal side faces of the rings, which are contacts to flexible electrodes, the rotor is driven by a system of microactuators, which are located on the upper and lower surfaces of the two rings of rotor.
The invention is illustrated in the following description and the accompanying drawings.
Figure 1 shows the design of the first version reversing electrostatic micro rotation and the rotation with positive angular velocity.
Figure 2 presents an integral part of the micro - microactuator.
Figure 3 shows microactuator from the opposite side.
Figure 4 shows a reverse electrostatic micro rotation in the first pass, when flexible electrodes are non-state.
Figure 5 presents reverse electrostatic micro rotation in the first performance in rotation with negative angular velocity.
Figure 6 shows the second option reversible electrostatic micro rotation during movement with a positive angular velocity.
7 shows the reverse electrostatic micro rotation in the third performance in rotation with positive angular velocity.
On Fig the design of reverse electrostatic micro rotation during movement with a positive angular velocity.
Reverse electrostatic micro rotation (Fig 1), containing the power supply system and control system (PSCS - power system and control system) 1, the angular rate sensor 2, has a rotor 3-driven system microactuators 4. Each of microactuators 4 is located on the lower plane of the ring rotor 3, and includes a movable component (part of the rotor 3) (figure 2) with elastically connected two flexible electrodes (petals) 5A, 5B low Flexural rigidity, silicon wafer - stator 6, which consistently applied conductive layer 7 and dielectric film high dielectric constant 8. On the top plane of the ring rotor deposited conductive layers 9a, 9b, which are connected with the appropriate flexible electrodes 5A, 5B contacts 10A (shown in figure 2), 10B (shown in figure 3).
Flexible electrodes 5A, 5B and conductive layer 7 form the adjustable capacitors. Flexible electrodes 5A, 5B, for example, can be run from beryllium bronze, as a dielectric film of high dielectric constant, you can use the ferroelectric niobate barium strontium modified by lanthanum.
Additional versions of the micro presents figure 6 - Fig.
In microactuator 4 (figure 2) on the conductive layers 7 and 9 is the potential difference, therefore, to contact 10A to flexible electrode 5A current is drawn, as a result of electrostatic pressure, which leads to the deformation of a flexible electrode 5A, which loose edge is applied to the surface of a dielectric film 8, and forms a stationary contact, and a fixed end drives the rotor 3. Each microactuator 4 creates time, thereby resulting in a rotation of the rotor with micro moment z3 M and with a positive angular velocity Ωz 3 relative to the fixed coordinate system x 3 , y 3 z 3 associated with the stator 6 (see figure 1, 6 - Fig). When reversing the micro, each microactuator 4 is applied potential difference on conductive layers 7, 9b (3), thus the current is fed to the second flexible electrode 5B, as a result, is driven rotor with negative angular velocity Ω z3 (figure 5).
Single-step mode of micro is the rotational motion of the rotor angular speed Ωz 3 and torque Mz 3 relative to the fixed coordinate system x 3, y 3 z 3 for one-off effect of the voltage pulse on flexible electrodes 5A or 5B of microactuators. The process of acceleration of the rotor is consistent supply voltage pulses on flexible electrodes 5A or 5B of microactuators, the necessary duration and intervals between them. As the movement of the rotor accelerates and goes on quasistability the mode in which the relative change in the average angular velocity does not exceed a specified value. Acceleration and quasistability mode can be performed with the regulation on maximum speed and without regulation. To run with the regulation on the maximum angular velocity is speed sensor 2.
Mode of operation of micro as an angular step of micro-, nanopositioner is a tact alternate rotor rotation in two alternating directions when necessary pulse duration and delay between them. This mode shows high precision rotor speed and reproducibility of parameters angular step. The step size depends on the mass of the load, the amount of voltage pulses.
1. Reverse electrostatic micro rotation, containing the power supply and control system that has the rotor driven system microactuators, characterized in that part of the rotor is made in the form of a flat ring, on the top plane of the ring rotor deposited conductive layers, which are contacts to flexible electrodes, the stator is made consisting of a silicon substrate, which is consistently applied conductive layer and dielectric film high dielectric constant, each of microactuators is located on the lower plane of the ring rotor and includes a movable item with elastically connected two flexible electrodes of low Flexural rigidity.
2. Reverse electrostatic micro rotation, containing the power supply and control system, the speed sensor, has a rotor driven system microactuators, characterized in that part of the rotor is made consisting of three flat rings, and on the top plane of the rings of rotor deposited conductive layers, which are contacts to flexible electrodes, each of microactuators is located on the lower planes of the three rings of rotor.
3. Reverse electrostatic micro rotation, containing the power supply and control system, the speed sensor, has a rotor driven system microactuators, characterized in that part of the rotor is made consisting of a flat ring, and outer side faces of the inner rings of rotor deposited conductive layers, which are contacts to flexible electrodes, each of microactuators is located on the lower and upper surfaces of the rings of rotor.
4. Reverse electrostatic micro rotation, containing the power supply and control system, the speed sensor, has a rotor driven system microactuators, characterized in that part of the rotor is made consisting of two flat rings, and on the external and internal side faces of the rings of rotor deposited conductive layers, which are contacts to flexible electrodes, each of microactuators is located on the lower and upper surfaces of each ring of the rotor.