IPC classes for russian patent Composition based on complex oxides of zirconium, phosphorus and calcium for coating obtaining. RU patent 2502667. (RU 2502667):
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FIELD: chemistry.
SUBSTANCE: invention can be used in chemical industry. Composition for obtaining thin film of complex oxides of zirconium, phosphorus and calcium contains ethyl alcohol, preliminarily distilled and dried to 96 wt %, zirconium oxochloride, calcium chloride and orthophosphoric acid with the following component ratio, wt %: zirconium oxochloride - 4.7-6.8; calcium chloride - 2.6-4.4; orthophosphoric acid - 0.5, ethyl alcohol - the remaining part.
EFFECT: claimed invention makes it possible to obtain thin films, possessing high refractive indices.
3 ex
The invention relates to the technology of thin-film materials based on complex oxide systems used in the rapidly developing fields of electronics and lighting industry, construction industry, including the technology of integrated circuits; as a corrosion-resistant, decorative, filter, and distributes radiation coatings.
Known composition to obtain a film of zirconium dioxide (application for invention No. 93014629/33, 6 C04B 41/65, C04B 35/48, publ. 1995.06.09)used for coating on the glass. The composition to obtain a film of Zirconia includes hydrated of oxochloride zirconium and contains 0,1...1 wt.% nitrate of cobalt. The invention allows to reduce energy consumption and improve the performance of the coating process on the basis of when the coating thickness over 100 nm.
The disadvantages of this structure should include the instability properties of the proposed film over time, due to structural transformations polymorphs of Zirconia.
Known composition to obtain a thin film based on a system of double oxides of zirconium and zinc (RF Patent 2411187, publ. 10.02.2011, C01G 25/02), which includes the preparation of film-forming solution containing ethyl alcohol, previously distilled and about Osenniy to 96 mass %, and it of oxochloride zirconium, followed by the application by centrifuging this solution on a substrate and a stepped heat treatment in the following ratio of components, mass %: oxochloride zirconium - 4,0-8,6, nitrate zinc - 3,8-7,6, ethyl alcohol - the rest.
The disadvantages of known composition include low adhesion of the film material to the substrates.
As a prototype of the selected article (L.P. Barilo, I.E. Petrovskaya, Y.S. Lutova, LN. Spivakov "Synthesis and physico-chemical properties of thin-film and dispersed functional silicophosphate materials" // Bulletin of the Tomsk Polytechnic University. Chemistry. 2011. - T. No. 3. P.41-47.), in which a method of obtaining thin-film and dispersed compositions based on complex oxides SiO2-P2O5-CaO. To obtain a thin-film oxide materials used film-forming solutions (ERP), which was prepared on the basis of 96% ethyl alcohol, tetraethoxysilane, phosphoric acid, calcium chloride given composition. Coating was obtained on the silicon substrates of centrifuging, the film formation was carried out in two stages: in the air in a drying Cabinet at 60°C in a muffle furnace at a temperature of 600°C. the resulting films have refractive indices from of 1.41 to 1.45. The disadvantage of the prototype I have is the low value of the refractive index.
The task of the claimed invention to provide a composition based on zirconium, phosphorus and calcium, providing stability to the structure, physico-chemical and target properties in a wide range of concentrations, as well as achieve high values of refractive index when using them as a redistributive radiation coatings.
The problem is solved in that a composition based on complex oxides by the Sol-gel method involves the preparation of a solution of the film-forming component and ethyl alcohol in the presence of inorganic acids and their salts, providing the processes of hydrolysis and polycondensation in solution, with subsequent deposition on the surface of the substrate by centrifuging and holding step of heat treatment, the oxide coating, but unlike the prototype as a film-forming substance used oxochloride zirconium as an additive - phosphoric acid and calcium chloride in the following ratio of components, mass %:
Oxochloride zirconium - 4,7-6,8
Calcium chloride - 2,6-4,4
Orthophoria acid - 0.5
Ethyl alcohol - the rest
To obtain thin films based on a system of complex oxides of zirconium, phosphorus and calcium are preparing film-forming solution, using as solvent e is silt alcohol 96 mass %, pre-distilled, and add oxochloride zirconium in the form of hydrated ZrOCl2·8SH2O. At room temperature ZrOCl2·SH2O and CaCl2dissolved separately in ethanol with periodic stirring for 1-3 hours depending on the concentration of oxochloride zirconium. Then the solutions merge and add phosphoric acid. After maturation, the film-forming solution for 1-2 days, depending on the concentration of oxochloride zirconium, it is applied by centrifuging in a centrifuge MPW-340 with the speed of 3000-5000 rpm for poloski of silicon, then perform step heat treatment before the formation of oxides in thin film.
The most appropriate temperature for storage THEN you should consider temperature in the range of 22-25°C for 6-8 months, depending on the concentration of oxochloride Zirconia.
For the preparation of solutions used utensils second accuracy class.
Below are examples illustrating the invention.
Example 1.
To prepare 100 ml of a film-forming solution, you need to take to 6.8 g of crystalline oxochloride zirconium and dissolve it in 40 ml of 96 mass % of ethyl alcohol, then take 2.6 g of calcium chloride to dissolve it in 40 ml of 96 mass % of ethyl alcohol, then the solution is drained, add 0.3 ml of phosphoric acid is density 1,685 g/cm 3and bring to volume of 100 ml ethyl alcohol. After maturation, the solution for 24 hours THEN put on a silicon substrate by the method of centrifugation and subjected to a stepwise heat treatment at temperatures of 60°C for 20 min and at temperatures of 800°C for 1 hour, resulting in a thin film of the composition ZrO2-P2O5-CaO with a refractive index of 1.9 and a thickness of 75 nm.
Example 2.
To prepare 100 ml of a film-forming solution should take 5.5 g of crystalline of oxochloride zirconium and dissolve it in 40 ml of 96 mass % of ethyl alcohol, then take 3.2 g of calcium chloride to dissolve it in 40 ml of 96 mass % of ethyl alcohol, then the solution is drained, add 0.5 ml of phosphoric acid with a density of 1,685 g/cm3and bring to volume of 100 ml ethyl alcohol. After maturation, the solution for 24 hours THEN put on a silicon substrate by the method of centrifugation and subjected to a stepwise heat treatment at temperatures of 60°C for 20 min and at temperatures of 800°C for 1 hour, resulting in a thin film of the composition ZrO2-P2O5-CaO with a refractive index of 2.1 and a thickness of 78 nm
Example 3.
To prepare 100 ml of a film-forming solution, you must take the 4.7 g of crystalline oxochloride zirconium and dissolve it in 40 ml of 96 mass % of ethyl alcohol, then take 4.4 g chloride is calcium dissolve it in 40 ml of 96 mass % of ethyl alcohol, then the solution is drained, add 0.5 ml of phosphoric acid with a density of 1,685 g/cm3and bring to volume of 100 ml ethyl alcohol. After maturation, the solution for 24 hours THEN put on a silicon substrate by the method of centrifugation and subjected to a stepwise heat treatment at temperatures of 60°C for 20 min and at temperatures of 800°C for 1 hour, resulting in a thin film of the composition ZrO2-P2O5-CaO with a refractive index of 2.0 and a thickness of 70 nm.
Composition for obtaining thin films of complex oxides of zirconium, phosphorus and calcium containing ethyl alcohol, previously distilled and dried to 96 wt.%, and oxochloride zirconium, characterized in that it additionally contains calcium chloride and phosphoric acid in the following ratio, wt.%:
Oxochloride Zirconia |
4,7-6,8 |
Calcium chloride |
2,6-4,4 |
Phosphoric acid |
0,5 |
Ethanol |
Rest |
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