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Reflectometer of multiple reflection based on plane mirrors

IPC classes for russian patent Reflectometer of multiple reflection based on plane mirrors (RU 2281471):

G01N21/55 - Specular reflectivity

G01M11/02 - Testing of optical properties

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FIELD: optical instrument engineering, applicable for measurement of reflection factors close to unity of various mirrors.

SUBSTANCE: the reflectometer of multiple reflection has successively installed radiation source forming a parallel beam, modulator with a drive, diaphragm of size "dx1", two plane mirrors, photodetector device, amplifier and a recorder. The reflectometer is also provided with two pentaprisms forming an optical rhomb one of which is fixed and installed in the direction of propagation of the radiation beam past the diaphragm, a carriage installed on which is the second pentaprism, guide, drive of the carriage reciprocating motion, in the extreme lower position of the carriage the outlet face of the pentaprism installed on it faces the reflecting surface of the first mirror, and in the extreme upper position the inlet face of the pentaprism is positioned at distance "h" above the reflecting surface of the second plane mirror, synchronization unit whose one of the inputs is connected to the output of the carriage motion drive, and the second one - to the output of the modulator drive, as well as an objective lens, whose diameter of the entrance pupil is .

EFFECT: enhanced precision of measurement of the reflection factor.

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The invention relates to the optical instrument and can be used to measure reflection coefficients close to unity, different mirrors, which are widely used in many interference devices and quantum generators.

It is known device [Art.: ATM and other "To the question about the measurement of high reflection coefficients". Optics and spectroscopy, 1964, .XVI 4 s-713]which contains a monochromatic light source, a flat mirror, a reflecting surface which are parallel to each other, a diaphragm separating plate, matte box and the solar cell.

A significant drawback of the above device is its low immunity, as there is no modulation of the radiation source, and in addition, no reference radiation. All this reduces the accuracy of the device.

The closest to the technical nature of the claimed invention is a device [Art.: Tagebuch, See. "Scheme with multi-cell and integrating sphere for measuring the coefficient of specular reflection at a wavelength of 10.6 µm". WMD, 1983, No. 7, pp.31-32], which contains a monochromatic light source, a modulator driven, diaphragm, flat mirrors, reflective surfaces which are parallel to each other, integrating sphere, pyroelectricity the receiver, the amplifier and recorder.

The main disadvantage of this device is the necessity in the process of changing the position of the integrating sphere and the receiver, because the measurement process is very long (20), and during this time, there is a greater likelihood of change in the characteristics of the radiation source (laser).

The task of the invention is to improve the accuracy of measurement of the coefficient of specular reflection, which is ensured by reducing the production time of a single measurement and increasing the number of measurements per unit of time, and by maintaining constant during the entire operation of the provisions of the radiation receiver.

To solve this problem is proposed reflectometer, which, as in the closest to the technical essence, contains a radiation source that generates a parallel beam, the modulator is driven, the aperture size d×l, two flat mirrors, reflective surfaces which are parallel to each other, and the reflecting surface of the first mirror formed facing the radiation source beam, photodetector, amplifier and recording device. Unlike the prototype reflectometer equipped with two pentaprisms forming optical diamond, with one of them fixed and installed hoursperday radiation beam over the aperture, short, fitted with the second pentaprism, guide, drive reciprocating movement of the carriage, while in the lowest position of the carriage exit face installed on it pentaprism facing the reflecting surface of the first mirror, and in the extreme upper position of the input face of pentaprism is located at a distance "h" above the reflecting surface of the second flat mirror, a synchronization unit, one input of which is connected with the drive output of the modulator and the lens, the diameter of the entrance pupil whichand the optical axis of the lens is located below the entrance face of the mobile pentaprism in its extreme upper position above the reflective surface of the second flat mirror and divides the distance "h" in half.

The invention consists in that, due to the presence of two pentaprism forming optical diamond, one of which is fixed and installed in the course of propagation of the radiation beam over the aperture with dimensions "d×l", and the second mounted on a movable carriage that moves in the guide rectilinear motion by means of a drive vozraste-and-forth movement, while in the lowest position of the carriage exit face installed on it pentaprism facing the reflecting surface of the first mirror, is in the highest position of the input face of pentaprism is located at a distance "h" above the reflecting surface of the second flat mirror, the radiation beam with a high frequency alternating goes through pentaprism and flat mirrors, omitting last - in lens, the diameter of the entrance pupil which. The operation of the drive modulator and drive reciprocating movement of the carriage is performed by the synchronization unit.

Thus, it provides a comparison of the signals from the two beams: one running around the track including a multi-pass cell of the two flat mirrors, and another, also running around the highway, but with the exception of multi-pass cell of the two flat mirrors. Drives and synchronization unit, one input of which is connected with the output of the carriage drive and the second drive output of the modulator, operate with a frequency of about 1 Hz, which provides a measurement for 1 and thereby increases precision reflectometer, moreover, that the photodetector does not change its position. The instability characteristics of the radiation source, the photodetector device and the external environment is reduced in such a short time interval to a minimum.

Thus, the combination of the above features allows you to solve the problem.

The invention is illustrated in the drawing.

The reflectometer includes a radiation source 1, which is Mering parallel beam of radiation 2, aperture 3 size "d×l", the modulator 4 actuator 5, a fixed pentaprism 6, the pentaprism 7 mounted on the carriage 8, moving in guides 9 with a drive reciprocating movement of 10, the synchronization unit 11, flat mirrors 12 and 13, a lens 14, a photodetector 15, amplifier 16, and the recording device 17.

The device operates as follows.

The radiation source 1 generates a parallel beam 2 which passes through the aperture 3 size "d×l" and overlaps with a certain frequency modulator 4 with a drive 5.

After the diaphragm 3 parallel beam having a cross-section dimensions "d×l", is directed to a fixed pentaprism 6 and then the pentaprism 7 mounted on the carriage 8, moving in rectilinear guides 9 with a drive 10 reciprocating movement (composed of, for example, a crank mechanism). The pentaprism 6 changes the direction of the beam by 90° and directs it to the pentaprism 7. The parallel beam emerging from pentaprism 7, gets on the top half of the lens 14, which focuses the radiation on the photodetection device 15, which produces a reference electrical signal j₀, amplified by amplifier 16 and fixed by the registration device 17. When the carriage 8 at the bottom the m position parallel beam of radiation, out of pentaprism 7, is directed to a multi-pass cell, consisting of two flat mirrors 12 and 13. Having "n" moves and reflected from the upper edge of the mirror 13, the beam again falls on the lens 14, but on the lower half, which again focuses it on the photodetector 15, after which the information signal J_namplified by the amplifier 16 and is registered by the registration device 17. It should be noted that irradiated the upper and lower parts of the lens 14 are arranged symmetrically with respect to its optical axis at a distance h from each other, which provides an identical energy distribution of the radiation focused by lens 14 onto a photosensitive area photodetection device 15 spot.

The synchronization unit 11 provides control of the actuator 5 of the modulator and actuator 10 of the carriage so that when the slit of the modulator 4 in front of the diaphragm 3, the carriage 8 were either at the extreme top or extreme bottom positions, i.e. so that when the output face of the mobile pentaprism 7 opposite the reflective surface of the mirror 12 (extreme bottom position) or in front of the lens (extreme top position) parallel beam passed through the slit of the modulator 4 and the diaphragm 3 with the dimensions "d×l".

Thus, in the inventive izobreteniya the constant position photodetecting device, quick obtaining and comparing the reference j₀and information J_nsignals, which provides a more accurate measurement of the reflectivities of the mirrors, since the persistence of the operation of the radiation source, radiation detector, as well as ambient conditions (ambient temperature, pressure, humidity) is required within a very short period of time (about 1C).

The reflectometer multiple reflections containing consistently established a radiation source that generates a parallel beam, the modulator drive, aperture size "d×l, two flat mirrors, reflective surfaces which are parallel to each other, and the reflecting surface of the first mirror formed facing the radiation source beam, photodetector, amplifier and recording device, characterized in that it has two pentaprisms forming optical diamond, with one of them fixed and installed in the course of propagation of the radiation beam over the aperture, a carriage, on which the second pentaprism, guide, drive reciprocating movement of the carriage, while in the lowest position of the carriage exit face installed on it pentaprism facing the reflecting surface of the first mirror, and in the extreme upper position of the input is I face pentaprism is located at a distance "h" above the reflecting surface of the second flat mirrors, the synchronization unit, one input of which is connected with the output of the carriage drive and the second drive output of the modulator and the lens, the diameter of the entrance pupil whichand the optical axis of the lens is located below the entrance face of the mobile pentaprism in its extreme upper position above the reflective surface of the second flat mirror and divides the distance "h" in half.