Device of orientation of sample for nanotechnological complex

FIELD: nanotechnology.

SUBSTANCE: invention relates to the field of nanotechnology, and can be used in automated transport systems of transmission and positioning of the sample in vacuum and controlled gaseous environment. The device comprises means of gripping the sample and the mechanism of moving it, the sample carrier in the form of a ring shaped along the outer circumference. The means of gripping comprises a platform, two pairs of rollers arranged pairwise on opposite edges of the platform and made with the elements of interaction with the carrier sample and the drive of movement of the rollers along the horizontal axis. The mechanism of moving the means of gripping comprises a U-shaped frame connected to the drive of movement along the vertical axis, mounted on the bottom of the device. The U-shaped frame covers with its lugs the platform of the means of gripping of the sample, and the rotation drive of the means of gripping around the horizontal axis and the rotation drive of one of the rollers is mounted on them separately.

EFFECT: device enables to perform independent functions of orientation and rotation of the sample with the working surface up or down, the function of the mechanism of inter-operational transfer of the sample from one chamber of the cluster to another without rotation and orientation of the sample.

8 cl, 8 dwg

 

The invention relates to the field of nanotechnology and can be used in automated transport systems transfer and positioning of the sample in vacuum and a controlled gas environment.

A device for stacking and orientation of the cylindrical sleeve (1), containing the capture tool bushing: housing and lever spring clamp. There is also a mechanism of orientation of the bushings on the clamping elements in the form of a spring-loaded needle and a rotating roller for rotation of the sleeve at the time of the search database.

The function of this device is limited. For example, it is impossible to perform if necessary technological revolution products by 180°.

It is also known transfer device and the orientation of the workpieces (2). It has a head with attached captures blanks, as well as the transfer mechanism and orientation of workpieces, performs the function of a coup by 180° when moving the workpiece from one fixed position processing to another. During this revolution of the workpiece is interrelated function of their orientation on the position of the processing. This device is used as a prototype. It has a major drawback, namely the inability to perform independently orientation and the coup of the product in accordance with the terms of the technological process, which limits its functionality.

T is khnicheskie result of the invention consists in expanding the functionality of the device.

The technical result is achieved by the fact that the specimen orientation for nanotechnological complex containing the capture tool sample and the mechanism for moving the tool in the orientation of the sample, the latter is equipped with a media sample with elements of orientation, and the capture tool includes a platform mounted to rotate around a horizontal axis, and two pairs of rollers arranged in pairs at opposite edges of the platform. Thus the rollers are made with elements of interaction with the media sample. The capture tool also has the drive movement of the rollers along the horizontal axis, and the mechanism for moving the gripper includes a U-shaped frame connected to the drive movement along the vertical axis, which is mounted on the base of the device. U-shaped frame your eyes covers the platform of the gripper sample and separately installed: drive rotation of the gripper around the horizontal axis and the rotation drive one of the rollers.

The media sample is made in the form of a ring, formed on the outer circumference which mates with the elements of the interaction of the rollers in the form of the response profile, with the sample mounted on the first flat side of the carrier, and the orientation elements of the sample on the second flat side is the La.

Transfer drive rollers contains lead screw with right and left screw cuts, coupled with the right and left chassis nuts connected by rods with the respective pair of rollers, each of which is mounted on the guide located on the platform along the horizontal axis, with one of the pairs of rollers is spring-loaded thrust.

The platform is equipped with two half-shafts mounted in the lugs of the U-shaped frame, the actuator rotation of the gripper around the horizontal axis is associated with one of the axes with angular gear rotation, and the rotation drive of one of the videos made in the form of contactless transmission of rotation, and the leading part is installed on the shaft of the drive and driven part fixed to the roller axis.

The platform also contains an orientation sensor sample, coupled with guide grooves on the second flat side of the carrier and the sensor of the extreme angular positions of the platform during its rotation around the horizontal axis.

When this sensor orientation of the sample is made in the form of a cylindrical roller with an axis of rotation coincident with axis orientation of the sample, and the roller is mounted on the first flexible contact plate orientation sensor, in turn, the second rigid contact plate orientation sensor mounted on the platform

The sensor of the extreme angular positions of the platform is made in the form of the contact group, including a two-position rotary contact mounted on the axis of the platform, and both paired fixed contact mounted on the eyelet of a U-shaped frame.

When this thrust spring of the pair of rollers are made of a composite in the form of a telescopic connection of the two parts, and both parts of one rod coupled by means of compression springs.

In the drawings showing the proposed design of the device orientation model for nanotech complex.

In Fig.1 provides a front view of the device with the sample found on the media sample.

In subsequent figures, the sample is conventionally not shown. In Fig.2 is a top view of the proposed device.

In Fig.3 (front view) and Fig.4 (bottom view) is represented as a separate node capture tool sample.

In Fig.5 shows the axonometric projection of the version of the device orientation of the sample.

In Fig.6 given the scheme of installation of the sensor orientation of the sample and its interaction with the media sample.

In Fig.7 given the scheme of installation of the sensor the extreme angular positions of the platform.

In Fig.8 (view in plan) presents the scheme of nanotechnological complex consists of two connected together clusters of process chambers connected in Proc. of spartoi system with the specimen orientation.

Sample 1 (Fig.1) is a device on the capture tool 2 which is associated with the mechanism 3 to move the gripper 2, the sample 1 is equipped with a carrier 4, which has elements of orientation 5 (see description of Fig.3). The capture tool 2, in turn, contains the platform 6 located on opposite edges of the platform, two pairs of rollers 7 and 8 (see also Fig.2), which are communication elements 9 with the carrier 4 of the sample (see description of Fig.3), and transfer drive rollers 10 along the horizontal axis O1-O1.

Mechanism 3 to move the gripper 2 has a U-shaped frame 11 connected to the actuator 12 to move the vertical axis O2-O2which is mounted on the base 13.

In the eyes of a U-shaped frame 11 is inserted two shafts 14 located on the opposite edges of the platform 6. In the eyes of a U-shaped frame 11 installed separately drive rotation 15 of the gripper 2 around a horizontal axis O1-O1and the drive rotation 16 of one of the rollers 7. All applied in the device, the actuators can be performed using stepper motors, for example, F. Faulhaber, model AM2224-AV-12-75.

Swing drive 15 is connected to one of the axes 14 via the angular gear rotation 17, for example a conical gear, and the rotational drive 16 Sopra the Yong with one of the rollers 7, for example, using a magnetic coupling, the leading portion 18 which are mounted on the drive shaft rotation 16, and the driven portion 19 on the axis of the roller 7.

The carrier 4, the sample can be made in the form of a ring with a triangular protrusion 20 (see Fig.3) on the outer circumference, which is associated with a triangular groove 21 on the outer contour of each of the rollers. The sample 1 is mounted on the first flat side 22 of the carrier 4, and the orientation elements of the made in the form of guide grooves 23 on the second flat side 24 of the carrier 4.

The drive movement 10 (see Fig.4) rollers contains lead screw 25 with two screw cuts the opposite direction, for example the right 26 and left 27 directions that involve two right 28 and left drive nut 29. While one of the chassis screws, for example running nut 29, connected by rigid rods 30 with a pair of rollers 8, despite the fact that each of the rollers has its axis on the guide 31, which is located on the platform 6 along the horizontal axis O1-O1a pair of rollers 7 is spring-loaded on their rods, which are made integral to form the telescopic connection of the two parts 32 and 33 and the two parts are mated by means of a compression spring 34.

The platform 6 is an orientation sensor pattern 35 and the sensor extreme angular positions 36 of the platform 6 (see Fig.2, 5, 6). Orientation sensor sample 35 (see the further discussion of Fig.6) made in the form of a cylindrical roller 37 with the axis of rotation, coinciding with axis orientation of the sample Y1(see also Fig.8), and the roller 37 is mounted on the first flexible contact plate 38, while the second rigid contact plate 39 of this sensor is installed on the platform 6. The sensor extreme angular positions 36 (see Fig.2, 5, 7) is made in the form of the contact group, consisting of a two-position rotary contact 40 mounted on shafts 14 and two stationary contacts 41, mounted on the eyelet of a U-shaped frame 11.

The scheme of installation of the device orientation in the transport system of the transmission of the sample nanotech complex consists of two connected together clusters of process chambers, as shown in Fig.8.

The orientation device is located in a vacuum chamber 42, which is connected with the chambers 43 and 44, containing robots-distributors 47, each of which is associated with the process chambers 45 clusters. The device orientation is perpendicular coordinate axes orientation of the sample X1-Y1where the X-axis1collinear with a line transfer of the sample from the chamber 43 to the robotic dispenser in the vacuum chamber 42, and the Y1coincides with the axis O1-O1the location of the orientation sensor 35 of the sample (see Fig.2). Process chamber 45 containing elements of the orientation of the sample 46, for example a spherical bearing oriented along mutually perpendicular coordinate axes X 2-Y2where the X-axis2collinear line transfer of the sample from the process chamber 45 into the chamber 44 of the robot is distributor.

The proposed device operates as follows.

Robot-distributor 47 (see Fig.8) auxiliary chamber 43, serving, for example, process chamber 45 cluster group of technologies, including cameras pulsed laser deposition, magnetron sputtering, molecular beam epitaxy, and so on, his arm moves the sample mounted on the carrier 4 in this case, the working surface down from the process chamber in the area of the gripper 2 device (see Fig.1).

To harmonize the provisions on the vertical axis O2-O2the carrier 4 and the gripper 2 comprises a travel drive 12.

Then include the travel drive 10, the rotating lead screw 25 (see Fig.4), and using the traveling nuts 28, 29, rigid rods 30, spring-loaded telescopic rods 32, 33 move along the horizontal axis along the guide rails 31 two pairs of rollers 7 and 8. The rollers its triangular grooves 21 (see Fig.3) are paired with a triangular protrusion 20 of the ring carrier 4 and fix it in the capture tool 2.

After that, the robot-distributor goes out of conjugation with the ring carrier 4, thereby leaving the sample in the device.

Then the coup sample of 18° around the horizontal axis of the working surface up for subsequent transfer to the local cluster technologies. This enables the drive of turn 15 (see Fig.1), using the angular gear rotation 17 rotates the platform 6 of the gripper 2 on the axes 14. The angle of rotation is recorded by the sensor at angular positions 36 of the platform 6 (see Fig.2).

After this is done, the orientation of the sample relative to the coordinate axes X1-Y1the camera 42 of the device orientation (see Fig.8). Included rotation drive 16, which, through coupling 18 and 19 transmits the rotation of one of the roller 7 (see Fig.1).

The carrier 4 is rotated until the guide groove 23 on the second flat side 24 of the carrier is fixed by the orientation sensor sample 35 (see Fig.2, 3).

Next to harmonize provisions on the vertical axis About2-O2the carrier 4 and the robot-distributor 47, service of process chamber of the cluster local technologies, enables the drive move 12 (see Fig.1). After the robot-distributor 47 out of conjugation with the ring carrier 4, is included on the reverse of the transfer drive 10 and two pairs of rollers 7 and 8 out of contact with the ring carrier 4.

Next, the robot dispenser 47 (see Fig.8) auxiliary chamber 44 transports the sample in the process chamber 45 of the local cluster of technologies with a focus on coordinate axes X2-Y2the clamping elements 46 Kama is s, allowing local coordinate processing of the sample, for example, focused ion beam, scanning probe system with gas injection and so on

Thus, in the proposed device are independent functions of the orientation of the sample and the coup sample surface up or down depending on the processing technology in a particular cluster of process chambers.

In addition, in the case when there is no technological need of the coup sample and the treatment should be continued in the neighbouring cell cluster, the device may perform only the function of holding mechanism of transmission media sample from one cell cluster to another without revolution and orientation that enhances the technical and functional capabilities of the device.

Sources of information

1. RF patent N2257993, IPC B23Q, 7/08 from 22.12.2003.

2. The mechanisms. Directory edited Kozhevnikova. "Engineering", 1976, Fig.13.14.

1. The device for orientation of the sample nanotech complex, containing the capture tool (2) sample (1) and (3) the movement of the gripper (2) when the orientation of the sample, characterized in that it is provided with a carrier (4) sample with elements of orientation (5), the capture tool (2) includes a platform (6)set can be rotated horizontally around the axis and containing two pairs of rollers (7) and (8), arranged in pairs at opposite edges of the platform (6), made with elements of the interaction (9) with the carrier (4) of the sample, and the travel drive (10) of the rollers along the horizontal axis, while the mechanism (3) movement of the gripper (2) contains a U-shaped frame (11)connected to the drive movement along the vertical axis (12)mounted on the base (13), and U-shaped frame (11) by its lugs covers the platform (6) of the gripper (2), and on the lugs U-frame (11) separately installed drive rotation (15) of the gripper (2) around a horizontal axis and a rotation drive (16) of one of the rollers.

2. The device under item 1, characterized in that the carrier (4) sample is made in the form of a ring with a profile (20) on the outer circumference of the mating elements of the interaction (9) rollers in the form of the response profile (21), and the orientation elements of the (5) sample fixed on the first flat side (22) of the carrier (4)made in the form of guide grooves (23) on the second flat side (24) of the carrier (4).

3. The device under item 1, characterized in that the drive movement (10) rollers contains lead screw (25) with two screw cuts the opposite direction, such as right and left, and right (28) and left (29) drive nut connected by rods (30) and (32) with the respective pair of rollers (7) and (8), each of which is mounted n the guide (31), located on the platform (6) along the horizontal axis, with one of the pairs of rollers is spring-loaded on their rods.

4. The device under item 1, characterized in that the platform (6) has two axes (14)mounted in the lugs of the U-shaped frame (11), the drive of rotation (15) of the gripper (2) around a horizontal axis is associated with one of the axes (14) using the angular transmission of rotation (17), the drive rotation (16) of one of the videos made in the form of contactless transmission of rotation, and the leading part of (18) are mounted on the drive shaft of rotation (16)and the driven part (19) is fixed on the axis of one of the rollers.

5. The device under item 1, characterized in that the platform (6) contains an orientation sensor of the sample (35), coupled with guide grooves (23) on the second flat side (24) of the carrier (4), and the sensor extreme angular positions (36) platform (6) when it is rotated around the horizontal axis.

6. The device under item 5, characterized in that the sensor orientation of the sample (35) is made in the form of a cylindrical roller (37), the axis of rotation of which coincides with axis orientation of the sample, the cylindrical roller (37) is mounted on the first flexible contact plate (38) of the sensor, and the second rigid contact plate (39) of the sensor installed on the platform (6).

7. The device under item 5, characterized in that the sensor of the extreme angular positions (6) of the platform (6) is made in the form of the contact group, includes a two-position rotary contact (40), mounted on the axis (14) of the platform (6), and two paired fixed contact (41)mounted on the eyelet of a U-shaped frame (11).

8. The device according to p. 3, characterized in that the thrust spring of the pair of rollers are made of a composite in the form of a telescopic connection of the two parts (32) and (33), both parts (32) and (33) one rod coupled by means of a compression spring (34).



 

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FIELD: technological processes.

SUBSTANCE: invention relates to robot-technical complex for contact dot welding of fuel assembly frame made of lower lattice and spacer grids connected to each other by channels. Robot-technical complex comprises industrial robot with welding tongs installed on its manipulator, system of robot control, table with device for fixation of welded parts and source of welding current. Guide beam is intended for movement of industrial robot in it with source of welding current, manipulator and welding tongs. Device for fixation of welded parts consists of support cradles for placement of fuel assembly frame, bolts for adjustment of cradles into common plane, device for pressing of spacer grids to support cradles and support plate with clamps for lower lattice positioning in horizontal plane.

EFFECT: invention makes it possible to perform contact dot welding of large articles with length of more than 1000 mm and height of more than 100 mm welded along their length in several cross sections, in particular frame of fuel assembly, to increase quality of welding and to increase efficiency of article manufacturing due to automation of its welding process.

3 dwg

Robot-articulator // 2390405

FIELD: machine building.

SUBSTANCE: invention refers to robot engineering, particularly to manipulators of industrial robots implemented in medicine as automatic articulators - imitators of lower jaw movement. The robot-articulator consists of a base of a lower and upper jaws and of progressive drives. It is also equipped with guides for progressive pairs (3) connected to the progressive drives designed for facilitation of their rotation around hinges. The hinges are installed between the base of a lower jaw (1) and guiding of the progressive pairs (3). Guides are joined with bases of lower jaw (1) and upper jaw (2). Notably, base of upper jaw (2) is connected to guiding of progressive pairs (3) by means of hinge (4) and is connected with the progressive drives designed for actuating the upper jaw. The progressive drives are secured to pole (11).

EFFECT: facilitating expanded functionality, particularly adjustment according to individual anatomical features of patient, like angle of trajectory incline of motion of temporal low jaw joints, also more accurate reproduction of trajectory of motion due to introduction of additional degrees of freedom.

2 dwg

Industrial robot // 2247020

FIELD: industrial robotics, possibly development of robots with outer magnetic systems.

SUBSTANCE: industrial robot includes rotary base provided with casing having protrusion. The last is arranged in zone without armatures.

EFFECT: enhanced efficiency of robot.

4 dwg

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