Method of analysing charged particles based on energy mass and apparatus for realising said method

FIELD: physics.

SUBSTANCE: analysis based on energy and mass is carried out in superimposed radial electric field of a Hughes-Rozhansky energy analyser and the magnetic field if a Wien filter and the longitudinal electric field of the Wien filter which lies across said two fields. The Hughes-Rozhansky energy analyser and the Wien filter are merged in a single structure, the Wien filter being cylindrical. The ion detector and the distance between cylindrical plates are determined by focusing conditions of the target ions.

EFFECT: broader functionalities of charged particle energy-mass analysers.

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The invention relates to methods and devices for analysis of ion energy and mass using electric and magnetic fields and can be used to determine the elemental or isotopic composition, for example, plasma of the working substance and the study of solid surfaces tel.

The invention relates to a promising direction of development of science and technology "Nanotechnology and nanomaterials".

The main areas of application of analyzers charged particle energy and mass - energy-mass-analyzers - are: the study of solid surfaces, the study of the structure of matter and interactions in collisions of particles in gases and plasma, plasma task of Geophysics and space physics space.

There is a method of analysis of charged particle masses and device for its implementation [Guenter F. Voss. Mass spectrometer and related ionizer and methods // Patent US 6815674. - IPC H01J 49/28. - Publ. 09.11.2004].

The known method includes:

1) create a workspace mutually perpendicular electric and magnetic fields, and electric field is not necessarily homogeneous;

2) the ionization of the working (analyzed) of the gas sample by electron impact;

3) separation of ionized particles in accordance with the ratio of mass-to-charge due to the motion in electric and magnetic the m fields, perpendicular to each other;

4) registration of the ions on the detector.

Signs known way, coinciding with the essential features of the proposed method are:

1) create a workspace mutually perpendicular electric and magnetic fields;

2) separation of ionized particles in accordance with the ratio of mass-to-charge due to the motion in electric and magnetic fields;

3) registration of the ions on the detector.

The disadvantages of this method are:

1) failure analysis of charged particle beams having initial range of energies in the process of analysis by mass (for a given value of the charge of the ion) is not allocated monoenergetic particle beam;

2) the inability of the analysis of charged particle beams having initial range of angles, the lack of focus.

Known apparatus for mass analysis [Guenter F. Voss. Mass spectrometer and related ionizer and methods // Patent US 6815674. - IPC H01J 49/28. - Publ. 09.11.2004].

The device includes:

1) ionizer;

2) flat parallel electrodes to generate an analyzing electric field;

3) the system analyzes the magnetic field, the direction of which is perpendicular to the direction of analyzing the electric field;

4) detector.

Signs of the known device, coinciding with significant when what nakami of the inventive device, are:

1) parallel to the electrodes to create an analyzing electric field;

2) create the analyzing magnetic field whose direction is perpendicular to the direction of analyzing the electric field;

3) detector.

The disadvantages of the known devices are:

1) the device does not allows the analysis of charged particle beams having initial range of energies;

2) the device does not provide analysis of charged particle beams having initial variation in corners, there is no spatial focusing of the particle;

3) in the absence of the focusing device has a low aperture ratio (sensitivity).

The known method and apparatus for mass analysis [Alexandrov M., gall, L.N., Savchenko E Way Energomash-spectral analysis of the composition of substances and device for its implementation // Patent SU # 1178257. - IPC 01J 49/30. - Publ. 27.01.1996].

The known method is implemented as follows:

1) ion beam is decomposed into a spectrum of energy in the transverse relative to the direction of movement of the particles of the electric field of the electrostatic analyzer;

2) to spread out into a spectrum energy of the ion beam impinges homogeneous transverse relative to the direction of movement of the particles of the magnetic field of the magnetic analyzer;

3) detec the licensing beam carry out a spatially extended detector in two mutually perpendicular directions.

Signs known way, coinciding with the essential features of the proposed method are:

1) for the ion beam impinges transverse relative to the direction of movement of the particles by the electric field of the electrostatic analyzer;

2) on the ion beam impinges transverse relative to the direction of movement of the particles and the electric field of the electrostatic analyzer magnetic field of the magnetic analyzer;

3) carry out the detection beam spatially extended detector in two mutually perpendicular directions.

The disadvantages of this method are:

1) a small energy range ΔW of the original ion beam; for analyzing fields with cylindrical symmetry (on the main trajectory of radius R) at energy settings of W, ΔW≈W(S₂/R)<<W, where S₂- the width of the exit slit of Energianalyse;

2) increase the width of the spectrum energy of the primary beam ions leads to the necessity of increasing the field of creation of a uniform magnetic field magnetic analyzer, which increases the inhomogeneity of the magnetic field on the border of the analyzer and its size.

The device according to the patent [Alexandrov M., gall, L.N., Savchenko E Way Energomash-spectral analysis of the composition of substances and device for its implementation // Patent SU # 117827. - IPC H01J 49/30. - Publ. 27.01.1996] contains consistently located the ion source with focusing lenses, electrostatic toroidal and with a homogeneous magnetic field analyzers and spatially extended detector particles with the reader information.

Signs of the known device, coinciding with the essential features of the claimed device are:

1) an electrostatic energy analyzer;

2) magnetic analyzer;

3) the detector with the reader.

The disadvantages of the known devices are:

1) serial enable electrostatic Energianalyse and magnetic analyzer increases the size of the device and reduces its speed (sensitivity), including, and because of the presence of electromagnetic field scattering at the boundaries of the analyzers;

2) the presence of a spatially extended particle detector complicates the reading system information.

A prototype of the proposed method and device is the method and the device according to the patent [Romaniuk NI, Papp FF, Chernyshova I.V., Spent O. Way analysis of charged particle beam energy and device for its implementation (cycloidal analyzer) // Patent SU # 1756973. - IPC H01J 49/48. - Publ. 23.08.1992].

Method of analysis the prototype includes:

1) creating a transverse (radial) considers the correctly direction of the beam of charged particles, electric fields, equipotential surfaces are cylindrical surfaces;

2) create a uniform magnetic field transverse to the direction of motion of a charged particle beam and the direction of the electric field;

3) introduction of a charged particle beam in the scope of crossed radial electric and longitudinal (directed along the cylindrical condenser plates, creating an electric field magnetic field;

4) separation of a beam of charged particles having a given mass, energy under the action of the crossed radial electric and longitudinal magnetic fields;

5) registration of the particles on the detector, located at the output aperture.

Signs known way, coinciding with the essential features of the proposed method are:

1) creating a transverse (radial) direction of motion of a charged particle beam of the electric field equipotential surfaces which are cylindrical surfaces;

2) creating a magnetic field transverse to the direction of motion of a charged particle beam and the direction of the radial electric field;

3) introduction of a charged particle beam in the scope of crossed radial electric and magnetic fields;

4) registration of part of the detector, located at the output aperture. The disadvantages of the method on the prototype are:

1) the inability of the analysis of the energy beams of charged particles of different masses;

2) the inability of the analysis to the masses of particle beams having different energy.

The device prototype [Romaniuk NI, Papp FF, Chernyshova I.V., Spent O. Way analysis of charged particle beam energy and device for its implementation (cycloidal analyzer) // Patent SU # 1756973. - IPC H01J 49/48. - Publ. 23.08.1992] includes:

1) the electrodes to create transverse to the direction of motion of a charged particle beam of the electric field, which are made in the form of a pair of coaxial cylinders;

2) the system by creating a magnetic field, are made so that the direction generated by her uniform magnetic field perpendicular to both the direction of motion of a charged particle beam, and the direction of the electric (radial) field is directed along the cylindrical electrodes;

3) input and output aperture located in the area between the cylindrical electrodes.

Signs of the known device, coinciding with the essential features of the claimed device are:

1) the electrodes to create transverse to the direction of motion of a charged particle beam of the electric field, which are made in the form of a pair of coaxial cylinder is in;

2) creation of a magnetic field, are made so that the type of its magnetic field perpendicular to the direction of motion of a charged particle beam;

3) input and output aperture located in the area between the cylindrical electrodes.

The disadvantage of this device prototype is the lack of spatial focus of the analyzed beam of charged particles, which reduces the aperture ratio (sensitivity) of the analyzer.

When creating way analysis of charged particle energies and masses and devices for its implementation, United by a single inventive concept, the task was to create the result of such method and apparatus in which it would have remained all the positive qualities of the method and device according to the prototype and was provided the opportunity to analyze the flows of ions of like mass and energy, in the analysis of mass - ability to work with demoninational beam of ions having initial angular range of speeds would increase the aperture ratio and decreased its size.

The technical result is achieved in that in the method of analysis of charged particle energies and masses, including the analysis of the energy in the electric field of a cylindrical capacitor - Energianalyse Hughes-Rozhanskyi, analysis by mass in crossed electric the magnetic fields of the filter Wine, according to the invention the analysis of energy and mass are combined in the radial electric field of Energianalyse Hughes-Rozhanskyi and magnetic field filter Wine and transverse thereto a longitudinal electric field filter Wine, and the rotation angle of the analyzed ions is not equal to π/2^0,5(about 127°), as in the famous Energianalyse Hughes-Rozhanskyi, and is determined by the conditions of the focusing of charged particles under the action of a new set of three electromagnetic fields.

The technical result is achieved in that the device for the analysis of charged particle energies and masses, with Energianalyse Hughes-Rozhanskyi and filter Wines, according to the invention the filter Wine is made cylindrical, Energianalyse Hughes-Rozhanskyi and filter Wines are arranged so that magnetic poles of the filter Wine cylindrical cover plate Energianalyse Hughes-Rozhanskyi and plate filter Wine, creating an electric field in the form of flat circular electrodes placed on both sides relative to Energianalyse Hughes-Rozhanskyi and magnetic system filter Wine, and the ion detector is located at the turning point of the trajectory angle

φ=π/ω,

where ω is the parameter that determines the angle at which the target ions are focused on the equilibrium path, 1/rad,

and cylindrical electrodes is accomplished with the distance between them, equal to

where γ is a parameter that determines the angle at which non-target ions maximum depart from the equilibrium path, 1/rad.

The advantages of the inventive energy-mass analyzer in comparison with the prototype is the possibility of analysis of ion beams as energy and mass and in the analysis of mass - work with demoninational streams of charged particles with initial angular range of speeds, a large aperture of energy-mass analyzer, which provided that the analysis of energy and mass are combined in the radial electric field of Energianalyse Hughes-Rozhanskyi and magnetic field filter Wine and transverse thereto a longitudinal electric field filter Wine, Wine filter is cylindrical, Energianalyse Hughes-Rozhanskyi and filter Wines are so that the magnetic pole filter Wine cylindrical cover plate Energianalyse Hughes-Rozhanskyi and plate filter Wine, creating an electric field in the form of flat circular electrodes placed on both sides relative to Energianalyse Hughes-Rozhanskyi and magnetic system filter Wine, and the ion detector is located at the turning point of the trajectory on the corner

φ=π/ω,

where ω is the parameter that determines the angle at which the target ions are focused equally on the spring path, 1/happy

and cylindrical electrodes made with the distance between them is equal to

where γ is a parameter that determines the angle at which non-target ions maximum depart from the equilibrium path, 1/rad.

Implemented the claimed device new features, including the ability to work both as energy and mass analyzer, when the operation of the mass analyzer to diagnose simonoenergeti ion beams with initial angular range of speeds, allows to consider the proposed device in a new quality - energy-mass analyzer Wine-Hughes-Rozhanskyi.

The inventive method of analysis of charged particle energies and masses and device for its implementation are illustrated by the drawings, is shown in figure 1-4.

1 schematically shows the inventive device and given designations analyzing fields and geometric elements necessary for the implementation of the method: E₀- the electric field strength on the equilibrium path of radius R;_r=BR/r, E_r=-E₀R/r.

Figure 2 shows a side view (along arrow a in figure 1) of the claimed device.

Figure 3 shows the dependence of the radial deviation of the trajectories of the ions on the magnitude of the azimuthal component of the velocity. Accepted. The initial variation of the speed is missing.

Figure 4 shows the dependence of the radial deviation of the trajectory of the ions from the initial values of the radial and Z-components of the velocities of the ions at ε=E₀/E_z0=1; E₀E_z0- tension radial and longitudinal analyses of electric fields. Accepted.

The device comprises (see Fig 1, 2) input the diaphragm 1, the axially symmetric system 2 create a radial magnetic field B_rtwo axially symmetric cylindrical electrode 3 to generate a radial electric field E_rtwo flat electrode 4, intended to create a uniform, directed along the axis of the cylindrical electrodes (along the Z-axis) of the electric field E_zthe output aperture 5 and the detector charged particle beam 6.

Below is a brief theoretical justification of the feasibility of the method and a device for this application.

The analyzer is a combination of Energianalyse Hughes-Rozhanskyi (YR) with radial analyzing electric field E₀and filter Wines, "collapsed" into a cylinder with a radial magnetic field B_rthat is created between the plates of Energianalyse YR (forming a cylinder) and longitudinal (along the cylindrical plates along the Z-axis) of a uniform electric field E_z(see figure 1, 2); let us call it e the ergo-mass analyzer Wine-Hughes-Rozhanskyi (VUR).

The equations of motion of a single ion in the energy-mass analyzer VUR in a cylindrical coordinate system have the form:

where m is the mass of a charged particle, e is the electron charge, C is the speed of light.

Find conditions on the parameters, E_zE₀in which ion included in the scope of the analyzing field at the point with radius R with velocity V_φ0at V_z0=V_r0=0, it remains on the trajectory of radius R in the future with the passage of the analyzer.

From equation (1) implies that

The tension of the radial electric field E₀thus determines the energy of the charged particles W₀moving along a circle of radius R.

Using equation (3), define the azimuthal velocity

such that the movement along the Z-axis was absent. From equations (4) and (5) is the ratio:

which shows that at fixed E₀and ions of different masses will remain on the main path (radius R), if

For positioning on the main trajectory of the ion mass m_iyou must change the E_zin accordance with equation (7) - see figure 2.

In dalnas the m detail will be considered as still not implemented in this configuration, electromagnetic fields and electrodes, the most sophisticated analysis to the masses.

Select ion of mass m₀for which, according to (7), the selected E_z0. We introduce the parameter ε=E₀/E_z0and variables χ=r/R, ξ=z/R, τ=ω₀t, ω₀=s₀/(m₀C) (ω₀- lavrovskaya frequency). We write the equations (1-3) in dimensionless form for a particle of mass m≠m₀having energy.

The constant in equation (10) is:when τ=0, mass m and energy W. in Addition,

Then the ratio of the energies obtained in the form:

As for m₀, W₀from (8) it follows that if τ=0 the derivativewhen the condition {τ=0, m, W} get

Then the constant in (10) is equal to:

and from equation (10), we obtain the following relationship:

Consider the case where the deviation of W from W₀and m of m₀small. The initial variations of the velocity dχ/dτ and dξ/dτ at time τ=0 is also small. Equations (8-10) in this case will describe the trajectory near the main path:

W=W₀+δW, m=m_{0 +δm,}

_χ=1+χ*.

_{At the moment τ=0 in the first order of smallness with,and derivative dχ*/dτ, dξ/dτ from equations (8-12) will receive:}

_{Given that the first order of smallness}

_{equations (13) and (14) recorded:}

_{The initial conditions for equations (15), (16) have the form:}

_{χ*(0)=0, ξ(0)=0,}

_{System (15-16) two linear second-order equations will reduce to a single linear equation of the fourth order:}

_{The initial conditions for equations (17) have the form:}

_χ*(0)=0;

_{Enter the function. For it will get homogeneous equation:}

_{whenρ'(0)=U;}

_{Decide to (19) the characteristic equation:}

_;

_{The General solution of equation (19) has the form:}

_{ρ(φ)=C1e^γφ+C2e^-γφ+C3cos(ωφ)+C4sin(ωφ).}

The constant of integration C₁C₂C₃With₄determine from the initial conditions (20):

Taking into account these results for the ion trajectories we obtain the following equation:

We introduce the notationwhich will get the following expression:

As can be seen from equation (21), ion crosses the trajectory of radius R (about χ*=0) if b₁=0 and b₂=0, which can be carried out (see figure 3) at specific values of the quantities δm/δW and U/V, namely whenandConsider particles that satisfy these conditions. Then their paths will get the following equation:

Whenreturn to χ*(φ)=0 (radius R) is atIn the case ofthe selected particles are focused in the following angle:

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The focus points of ions withparticles withdepart from the provisions χ*(φ)=0 at the maximum distance equal to. This means that the receiver of ions in the energy-mass analyzer should be placed at the turning point of the trajectory of the ion on the angle φ₁=π/ω, where the target ions with δm=δW=0 focus, and ions with δm≠0 maximum depart from the main trajectory χ*(φ)=0.

Let us turn to the case when b₁≠0, but the initial transverse velocities U and V, to simplify the calculations, but the demonstration effect, is equal to zero and, hence, b₂=0. For ions with a giventheir trajectories are determined by the value of δW/W Let the value of δW/W=-A_m. Various δW/W correspond to the trajectories of the two classes. When δW/W<-A_mthe value of b₁<0, and ions, not returning to χ*=0, leave when φ→∞ to -∞ for χ*. However, when δW/W>And_mthe value of b₁>0, and ions of a certain number of times back to χ*=0, and if φ→∞ goes to +∞ for χ*. You'll definitely find such value of δW/W, which lies within theand in which the trajectory of the ion withgo through χ*=0 when φ=φ₁. This means that the detector will fall ions and other, except for m₀and the masses for the separation of ions using only saariluoma the opportunities given set of electromagnetic fields is not enough.

To achieve this goal will involve the interruption of the trajectories of non-target particles on the cylindrical electrodes of the analyzer (channel walls). Find the condition under which ions with masses larger than m₀+δm (δm>0), hit the wall, before reaching the plane of the detection of particles φ=φ₁. Position the conductive cylindrical surfaces between which creates a radial electric field at distancesandConsider this ion trajectory at some, as yet unknown δW/W=-A_kwhen the trajectory lies necessarily higher thanMoreover, it concernsfor any φ=φ₀In addition, let the trajectory passes through the pointthat φ=φ₁. Then the particles with a fixed value ofnever falls on the focal plane φ=φ₁. Indeed, when δW/W<-A_kions are dying on the surfacea if δW/W>And_kthey go above the critical trajectory δW/W=-A_kand die on the surface. Ions with masses greater than the selected mass m, are also found on the electrodes.

Thus, for a fixed ratiothe ADO to determine the critical path, for what it is necessary to find values of A_kχ_cand φ₀. There are three equations:

χ*(φ=φ₁)=χ_c;

χ*(φ=φ₀)=-χ_C.

We write these equations using (21), when U=V=0:

To solve system (24-26) use the smallness of the parameter^γ/_ω; & Phi;₀<<1. Folding (24) and (26), we obtain:

Decomposing in equation (25) sin(ωφ₀) and sinh(γφ₀) up to third order for φ₀will get:

From equation (27)in turn, we obtain:

Substituting (28) and (29) into equation (24), we find:

Trajectories of particles with mass less than m (δm<0), will be located symmetrically with respect to the trajectories of ions with masses of large m (δm>0). The symmetry of the trajectories will be implemented relative to the line χ*(φ)=0. Therefore, the formula (30), determining the value of |χ_c|specifies the distance from χ*(φ)=0 to the channel walls, which killed ions with masses that differ from the m₀by an amount greater than |δm|. As a result, the mass analysis of the ions in this device and in the presence of the initial range of energies.

Now Oct the m end of the initial dispersion angle for the analyzed flow of ions. Consider the case where b₂≠0, i.eDenoting by S=U(ω²-2)+2V/ε and solving equation (21), we find that in the plane of detection when φ₁=π/ω to the value of χ*(φ₁) with b₁=b₂=0 is added to the value ofSo in the presence of angular dispersion of the ion source flow detector did not appear untargeted particles with masses m₀+Δm, where |Δm| significantly exceeded |δm|, you need to meet the conditions:

Using the fact that max|U|=max|V|=θ, where θ is the maximum angular variation of the analyzed ion stream from (31) we get the condition on the allowable angular range:

When ε=1 the values of γ and ω is approximately equal respectively to 0.75 and 1.9. Then the condition (32) is modified:

Thus, the claimed energy-mass analyzer provides diagnostics for the masses, at a certain energy and angular spread of the ions of the analyzed stream.

The inventive method is implemented as follows.

The stream of ions with a certain set of masses having different energy enters through the input aperture at the point with radius R when φ=0 in the area of energy-mass analyzer in the range of electric fields: radial the CSO E ₀and longitudinal E_z, magnetic field b, directed along the radius. In the absence of the initial angular spread of the ion with initial velocity V_φ0remains on the trajectory of radius R, if he has the energy of W₀set value of tension of the radial electric fieldsimilarly the work of Energianalyse Hughes-Rozhanskyi. Movement along the Z-axis (leaving the area of the output aperture; missing on the detector) is excluded by the joint action of the fields E_zand In specifying the speed of the ion passing to the detector,so, how does the classic filter Wines. Ion the other mass will remain on the Central main trajectory (radius R), if the electric field E_zat fixed E₀and, is chosen equal to

If the deviation of the mass m of the ion from the values of m₀small as the initial variations of the velocities U and V, then under certain values δm/δW and U/V, whenwill be observed spatial focusing of the particles (see figure 3) after turning the ion analyzer angleIn the case ofthe particles are focused at the angle equal to. The focus points ion the in particles withdepart from the equilibrium trajectory for maximum distance equal to.

There may be a chance at some value δW/W, when the trajectory of the ion withwill pass through the focus point particles withand in the detector will fall ions and other, except for m₀, mass. To avoid mixing of ions of different masses on the detector in the energy-mass analyzer for this application is used, similarly to the classical filter velocities Wine, abort trajectories of non-target particles (with masses that differ from the m₀by an amount greater than |δm|) on the cylindrical electrodes of the analyzer, which are located at a distance from each other equal toAs a result, the mass analysis of the ions in this device and in the presence of the initial range of energies.

If there is a finite initial dispersion of the stream of particles on the corner, untargeted particles do not arrive at the detector when the maximum angular variation of the analyzed ion flow θ, for example, for the case of equal intensities of the radial and longitudinal electric fields does not exceed the value of.

Thus, the claimed energy-mass analyzer provides diagnostics for the masses of the AK in the presence of ions of the analyzed stream energy, and angular spread. For the flow of ions of a single mass analyzer provides measurement of the ion energy distribution.

The inventive device operates as follows.

Analyzed the flow of ions included in the proposed device analyzer Wine-Hughes-Rozhanskyi through the inlet aperture 1 (1, 2) at the point with coordinates φ=0, r=R. On the charged particles begin to act inhomogeneous radial magnetic field In_rcylindrical filter Wine, which is created using the authoring system of the magnetic field 2, non-uniform radial electric field E_rEnergianalyse Hughes-Rozhanskyi, which is created by using two cylindrical electrodes 3, and a uniform electric field E_zcylindrical filter Wine, created by the system of electrodes 4. In the energy-mass analysis of the output aperture 5 and the detector (receiver ions) 6 fall ions of a given mass and energy. Figure 3 and 4 shows examples of calculations of the trajectories of the ions with the change of the azimuthal component of the velocity (figure 3) and the value of the initial radial and Z-components of the velocities of the ions (figure 4).

The receiver ions 6 is located at the turning point of the trajectory of the target ion by the angle φ=π/ω (ω, 1/rad), in which these ions are focused and ions of other masses maximally away from the main path. Cylindrical elect the odes 3 analyzer performed with the distance between them, equal to

where γ, 1/rad - the option defines the angle at which non-target ions maximum depart from the equilibrium trajectory and die on the cylindrical electrodes; ω is a parameter that determines the angle at which the target ions are focused on the equilibrium path, on which the detector is located.

1. The method of analysis of charged particle energies and masses, including the analysis of the energy in the electric field of a cylindrical capacitor in Energianalyse Hughes-Rozhanskyi, analysis by mass in crossed electric and magnetic fields filter Wine, characterized in that the analysis of energy and mass are combined in the radial electric field of Energianalyse Hughes-Rozhanskyi and radial magnetic field filter Wine and transverse thereto a longitudinal electric field filter Wine, and the ion detector is placed in the turning point of the trajectory on the corner
φ=π/ω,
where ω is the parameter that determines the angle at which the target ions are focused on the equilibrium path, 1/rad,
and cylindrical electrodes of Energianalyse Hughes-Rozhanskyi equipped with the distance between them is determined by the formula

where γ is a parameter that determines the angle at which non-target ions maximum depart from the equilibrium path, 1/rad.

2. Device is on for the analysis of charged particle energies and masses, containing Energianalyse Hughes-Rozhanskyi and filter Wines, characterized in that the filter Wine is made cylindrical, Energianalyse Hughes-Rozhanskyi and filter Wines are arranged so that magnetic poles of the filter Wine cover cylindrical electrodes of Energianalyse Hughes-Rozhanskyi and plate filter Wine, creating an electric field in the form of flat circular electrodes placed on both sides relative to Energianalyse Hughes-Rozhanskyi and magnetic system filter Wine, and the ion detector is located at the turning point of the trajectory on the corner
φ=π/ω,
where ω is the parameter that determines the angle at which the target ions are focused on the equilibrium path, 1/rad,
and cylindrical electrodes of Energianalyse Hughes-Rozhanskyi performed with the distance between them is equal to

where γ is a parameter that determines the angle at which non-target ions maximum depart from the equilibrium path, 1/rad.