Pulsed microsystem accelerometre |
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IPC classes for russian patent Pulsed microsystem accelerometre (RU 2432578):
       
 Feedback amplifier for integral transducers / 2431849
Sixes of electrodes may be increased thanks to setting operating modes of power electrodes and displacement pickup electrodes differing in time. Important advantage of proposed invention consists in two factors: first, at increased (approx. twofold) electrode sizes processing potential increases also two times, and, second, noises in output signal decrease with increase in area of electrodes (approx.
 System to measure linear acceleration parameters / 2429492
Invention may be used to measure acceleration, acceleration variations, integration time, linear acceleration integral, and constant voltage in tests at centrifugal units. Proposed system comprises address decoder, speed discrete transducer signal recorder, contact operation recorder, interruption request unit, frequency signal registration unit, discrete output unit, analog I/O unit, controller, network interface module, analog I/O unit control circuits and indicator.
 Sensitive element of micro system accelerometre / 2426134
Sensitive element incorporates silicon monocrystal plate with asymmetric pendulum etched therein. Said pendulum is made up of two plates of equal length and thickness but varying in width. Said plates have one of their sides interconnected. Due to different width on moving plates, mass sensitive to acceleration is produced. Glass plates are soldered to both sides of silicon plate. Conducting electrodes of electrostatic moment converter are evaporated onto first plate. Electrodes of displacement capacitive converter and test electrodes are soldered to second plate.
 Accelerometer / 2421735
Accelerometer includes a convection cell in form of a rectangular parallelepiped filled with working medium, with a point heater at the centre of the bottom of the cell and a thermocouple set connected to a control unit. The vertically aligned cell has a cooler in its top part. The cooler is made from metal, for example duralumin. The thermocouple set is placed over the heater. The first differential thermocouple measures temperature of the heater relative the cooler. The second differential thermocouple measures temperature at a point on the vertical axis of the cell over the heater relative the cooler. The third differential thermocouple measures temperature difference between two points on the horizontal and lying symmetrically about the vertical axis of the cell over the heater. The working medium used is liquid heptane. The cell is made from a set of plates. The middle plate is flat-topped and is made from heat-conducting material. Side plates are made from heat-insulating material.
 Linear microaccelerometre / 2410703
Invention relates to inertial instruments and may be used in control systems of movable objects of various purpose. Microaccelerometer comprises body, cover, two inertial weights on elastic suspensions arranged in the form of rectangular plates of single-crystal silicon and arranged in one plane serially one after another along axis of sensitivity with the possibility of linear displacement. Two sensors of position for each inertial weight are arranged in the form of two pairs of radiators and photodetectors. The first of them are located in holes of cover above rectangular plates, and the second ones are arranged in body coaxially with them. At that each pair of photodetectors is connected to according comparator. Outlets of comparators are connected to keys, where a stabilised source of current is connected. Outlets of keys, via elastic suspensions, are connected to current-conducting paths of compensation converters arranged in the form of two permanent magnets on cover and body, and current-conducting paths sputtered on surface of rectangular plates, perpendicular to axis of sensitivity.
 Molecular-electronic angular acceleration converter / 2404436
Invention is characterised by that a diffusion converter is made in form of inner and outer electrodes deposited two on each disc made from dielectric material. The outer electrode is made in form of a ring with inner projections and the inner electrode - in form of a ring with outer projections. Projections of the outer ring lie equidistant between projections of the inner ring and overlap each other by 80-95% on the length. The projections lie uniformly on the entire circumference of the rings at equal distance from each other. There are seal rings between the discs made from dielectric material, where the width of said discs is not greater than corresponding dimensions of the electrode rings.
 Angular accelerometre / 2399915
Accelerometre has an inertial mass on elastic suspensions, a position sensor, a cover, a base, two permanent magnets, a comparator, a switch and a direct current source. The inertial mass is made from monocrystalline silicon in form of a disc with optical slits and is placed on the elastic suspensions in the gap between the permanent magnets. Current-conducting paths are radially deposited on the surface of the inertial mass, where the beginning and ends of the said paths are connected to each other by deposited current-conducting rings. Each of the rings is connected by current conductors through the elastic suspensions to the output of the switch, whose first input is connected to the direct current source and the second input is connected to the output of the comparator, whose input is connected to outputs of photodetectors, and radiators are connected to the direct current source. The magnets are mounted on the base and cover. The position sensor is made from two radiators and two photodetectors.
 Method of making electrode assembly of molecular-electronic device for measuring linear and angular motion (versions) / 2394246
First version of the method involves selection of position of openings on the dielectric spacer of an electrode assembly consisting of four metal gause electrodes, shifted by perforated dielectric spacers such that there is exactly one unit of the gause electrode at the centre of the opening. The second version involves making a sandwich from foil as electrodes and a dielectric spacer with completely coaxial openings.
 Differential frequency accelerometre / 2385463
Accelerometre is enclosed in a housing formed by half-cups 1, with a two-membrane elastic element 3 wedged in between along the perimetre, and the said elastic element is filled with a liquid inertial mass 4. The element 3 is connected to two non-magnetic high-conductivity screens 5, which move relative flat spirals 8 and 9 made on dielectric bases 6 and 7 connected into LC self-excited oscillators 11 and 12 using jumpers 10. Connectors 14 and 15 serve for power input and output of output frequencies of the LC self-excited oscillators 11 and 12. Deformation of the elastic element 3 under the effect of acceleration is converted to differential change of output frequencies, while deformation due to thermal expansion of the liquid 4 is converted to inphase change of these frequencies.
 Micromechanical linear accelerometre / 2379694
Invention is related to metering equipment and may be used to create micromechanical accelerometres and gyroscopes. Sensor comprises sensitive element (SE) of pendulum type, which is fixed to SE frame by means of elastic suspensions. With the help of supports, frame is fixed to device foundation, there are through slots provided in frame along its whole perimetre. It makes it possible to increase distance from areas of supports fixation to elastic suspension and to reduce impact of contact stresses at elastic suspension.
 Integral accelerometer sensitive element / 2246734
Sensitive element is made of conductive monocrystalline silicon and has pendulum connected with frame edge by means of flexible suspensions. Frame is connected with carrier frame by means of cantilever beam. Carrier frame is rigidly connected to base of accelerometer by means of fitting platforms. Contact tensions in frame affecting precision of the device are reduced due to introduction of carrier frame, which is rigidly connected with base.
 Micromechanical pickup / 2247323
Pickup comprises pendulum (1) and frame (2) interconnected through flexible suspension (3). The both sides of suspension (3) are provided with grooves (4) which extend over pendulum (1) and frame (2). The bottoms of groves (4) are provided with ways (6) which connect contact areas (5) on the bottom of grooves (4), pendulum (1), and frame (2).
 Integrating micromechanical gyro / 2251077
Device is used for measuring angular velocity. Integrating mechanical gyro has semiconductor substrate onto which electrodes of capacitive converters and electrodes of electrostatic dives are disposed. Electrodes are made of semiconducting material. Device also has four inertial masses made in form of plates of semiconducting material and disposed to have gaps relatively substrate to form flat capacitors with electrodes of displacement capacitive converters due to partial overlapping. Masses interact with electrodes of electrostatic drives at the surface of their plates through side gaps. Inertial masses and electrodes are disposed to form two pairs of sensitive elements which are disposed along two mutually perpendicular axes at the plane of substrate. Angular velocity is measured around axes X and Y disposed mutually perpendicular at the plane of substrate and axis Z directed in perpendicular to plane of gyro's substrate.
 Micromechanical transducer and mode of its manufacturing / 2251114
Micromechanical transducer has a monolithic body with sensitive inertial element and outlets. The sensitive inertial element is fulfilled in the form of stratified microstructure which has at least one emitting layer arranged with clearance relatively to inertial angle of that element. The stratified microstructure has arranged successively a quartz substrate, lower conductor layer with emitting layer, laying layer and upper conductor layer which may have an inertial unit of pendulum type. Mode of micromechanical transducer manufacturing includes ultrasonic cleaning of quartz substrate, putting of sensitive inertial element's layers on substrate and forming of microstructure layers with the help of photolithography and chemical pickling.
 Device for determining engagement coefficient of wheel with airstrip covering / 2259569
Device has measuring cart and registration block. Measuring cart has measuring wheel, blocking sleeve, reducer, measuring element and measuring cart frame. Measuring wheel by blocking sleeve is mechanically connected to reducer, registration block has computer and control panel, which is connected to first input of computer, and output of measuring element via flexible cable is connected to second input of computer. Measuring cart additionally has independent load, free drive sleeve, direct current generator, force keys block, active load block, first and second angular speeds sensors, launch resistance, accumulator battery, voltage adjuster, contactor, following wheels.
 Micromechanical linear acceleration detector / 2265856
Detector can be used for producing micromechanical accelerometers and gyros. Detector has pendulum-type sensitive element 1 fastened to frame 3 of sensitive element by means of flexible suspensions 2. Frame 3 is fastened to base of the device by means of rests 4. The frame is made in form of meander having n curves. Internal and external curves of meander are similar and symmetrical relatively longitudinal and lateral axes of symmetry of sensitive element. Width of frame is constant. Non-stability of null is reduced due to reduction in influence of contacts stresses and hazardous effects onto flexible suspension of sensitive element at uniform deformation of the frame.
 Road vehicle antilock system / 2271284
Propose antilock system contains control device, remote controlled engine, transmission with driving wheels including clutch, gearbox, propeller shaft, final and differential drives, and vehicle wheels furnished with tachometers. Transmission contains at least two pairs of driving wheels. Gearbox is remote controlled by control device. Interaxle differential is connected to gearbox. Final and differential drives of all driving pairs of wheels remote controlled by control device are connected to interaxle differential, and steerable pairs of wheels are furnished with wheel angular position pickup connected to control device. Control device is made for setting additional pairs of wheels into active state in case of slipping or locking of one of wheels belonging to active pair.
 Capacity transformer of movements / 2272298
Device has positive and negative sources of supporting voltages, synchronization pulses generator, check connection adder, differential measuring capacitors, first and second operation amplifiers, synchronous detector and lower frequencies filter. Full cycle of device operation is performed during one period of synchronization pulses: during first semi-period measuring capacitors are charged by algebraic totals of bearing voltages with voltage of check connection, signal is demodulated and filtered from bearing frequency. At second semi-period measuring capacitors are charged, and filter of lower frequencies is switched to mode of memorizing cell.
 Linear acceleration micro-mechanical detector / 2284528
Detector can be used for creating micro-mechanical accelerometers and gyroscopes. Detector has pendulum-type sensitive element 1 which is attached to frame 3 of sensitive element by means of elastic suspensions 2. Frame 3 is attached to base of device by means of rests 3. Frame is made in form of meander having n curves 5.
 Mechanical and thermodynamic values emission meter / 2291449
Meter includes two electrodes arranged in vacuum one opposite to other and mutually spaced by distance d. At least one electrode is movable and it is made in the form of metal plated zone on elastic plate mounted on support. Both electrodes are flat and they have specific dimensions L1, L2 satisfying to relation h≪d<L1≤L2≪R where h - specific value of electrode roughness degree; R - curvature radius of electrode surface.
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FIELD: physics. SUBSTANCE: asymmetrical detecting element with low working mass (imbalance of the pendulum mass relative the axis of oscillation) and large surface area of power electrodes enable to prevent breakdown of the gas gap between movable and fixed electrodes by reducing pulse voltage to an allowable value. EFFECT: earthing power electrodes in non-operational cycles eliminates noise due to the effect of residual charges on electrodes, which consequently increases accuracy. 1 dwg
The invention relates to measuring technique and can be applied in the integrated accelerometer with electrostatic force compensation. Known ballistic accelerometer [1] and the torque sensor. The downside of it is the complexity of manufacturing, since the torque sensor requires a core of magnetic steel. In addition, the device has a large size and weight, mainly in order exceeding the size of the integrated accelerometers Also known integral sensing element pulse accelerometer [2]containing sensitive to accelerations pendulum, made in silicon wafer and coupled with her elastic suspensions, and the electrostatic system of power mining. The device is inaccurate, because it is the drift of the output signal resulting from mass transfer between the electrodes when the DC power from sources of reference voltages. Closest to the claimed device is a pulse microaccelerometer [3], containing a mobile node, implemented in the form of the electrode of the pendulum in the wafer of crystalline silicon and connected to the plate elastic suspensions, on both sides of a silicon wafer rigidly welded plates that bear a fixed conductive electrodes of two types: the electrodes, d is tcheka movements and the power electrodes of the electrostatic torque sensor, the trigger latch, a shift register, a reversible counter, a stable frequency generator and the first key device, the electrodes of the motion sensor included in the input iconic device, three outputs which are connected with the electric circuit of the accelerometer, the first output is connected to the synchronization input of the counting trigger, and with the input of the zero of the shift register and carries information about the location of the pendulum in the neutral position, the second output iconic device carries information about the position of the pendulum to the left relative to the neutral position and is connected with the input set to zero trigger latch with the input of the installation unit in the trigger latch is connected to the third output iconic device that carries information about the position of the pendulum to the right relative to the neutral position, to the input of the receive data shift register connected to the output of the frequency divider, the outputs of the trigger latch is connected with the inputs of the control mode of the reversible counter and simultaneously with the control inputs of the first key device, the key outputs of the devices connected to the voltage reference. Known accelerometer has the following disadvantages: 1 - is the electrical breakdown of the gas between the movable and stationary power electrodes, as for testing acceleration of more than 1 g at the Azora 15·10 -6m requires a voltage of about 30 C. To medium nitrogen critical breakdown tension equal to Ekr=5000 V/m are much smaller than the required size for power testing. In real structures the movable pendulum, insulated silicon oxide, breaking the electric field and is welded to the stationary electrode. Accordingly, the accelerometer becomes inoperative; 2 - in the famous diagram of the accelerometer to measure the free movement of the pendulum on a stationary power electrodes there is zero residual potentials, which leads to noise in the information signal. The task of the invention is to eliminate these shortcomings. The problem is solved in that in the pulse Microsystem accelerometer, containing a mobile node, implemented in the form of the electrode of the pendulum in the wafer of crystalline silicon and connected to the plate elastic suspensions, on both sides of a silicon wafer rigidly welded plates that bear a fixed conductive electrodes of two types: the sensor electrode displacement and force the electrodes of the electrostatic torque sensor, trigger latch, a memory register, a reversible counter, a stable frequency generator and the first key device, the electrodes of the motion sensor included in the input zakovorotnaya, three outputs which are connected with the electric circuit of the accelerometer, the first output is connected to the synchronization input of the counting trigger, and with the input of the zero of the shift register and carries information about the location of the pendulum in the neutral position, the second output iconic device carries information about the position of the pendulum to the left relative to the neutral position and is connected with the input set to zero trigger latches, and with the input set to the unit trigger latch is connected to the third output iconic device that carries information about the position of the pendulum to the right relative to the neutral position, the outputs of the trigger latch is connected with the inputs of the control mode of the reversible counter, the key input device is connected to the source reference voltage, which in accordance with the invention, the electrode-pendulum is made asymmetric with respect to the axis of swing, in addition, in the inventive accelerometer entered the second key device, the first and second inverters, the digit shift register, counting the trigger, the first and second control inputs of the second key device connected to the unit and zero outputs of the flip-flop latches the input push installation to zero countable trigger connected to the output of overflow reversible counter, the synchronization input of the counting trigger connected to the PE the new release of the iconic device, and the output of the counting trigger connected to the input push installation in the storage mode trigger latches, the outputs of the second key device are connected together and connected to ground, in turn, the first and second outputs of the second key device is connected with the first and second power electrodes of the torque sensor output stable frequency generator is connected to the counting input of the reversible counter and simultaneously with the synchronization input of the shift register, the first output of the shift register is connected to the enable input write memory register and the second output with the input set to zero reversible counter to the input of the receive data shift register connected to the output of the divider frequency, the outputs of the reversible counter are connected respectively to the inputs of the receive data memory register. The figure 1 shows the diagram of the inventive accelerometer. It consists of the following nodes: 1 - conducting asymmetric electrode-pendulum; 2 - power electrodes of the torque sensor; 3 - electrode sensor movements; 4 - character device; 5 - second key device; 6 - the first key device; 7 and 8, the first and second inverters; 9 - counting trigger; 10 - trigger-latch; 11 to the shift register; 12 - source reference voltage; 13 - generator stable frequency; 14 - reversible binary counter; 15 - the memory register. On Phi is ur 2 shows the sensing element of the accelerometer. It consists of the following elements: 1 - Cabinet plate; 2 - through etching; 3 - load unbalance sensitive mass; 4 - elastic suspension; 5 - pendulum. Electrode-pendulum 1 is made in the conductive silicon plate in one piece with elastic suspensions and is connected to ground, and stationary power electrodes 2 are made on glass plates by plating and welded with the silicon plate at the molecular level. Electrode-pendulum 1 on one of the shoulders is the load offset (see figure 2 3). On the same glass plates made electrodes of the movement sensor 3 (see figure 1, figure 3) and are connected with the inputs of the iconic device 4 (see figure 1 pos.4), which monitors the position of the electrode of the pendulum 1 relative to the neutral position. Iconic device 4 has three outputs: one output (figure 1 marked 0) carries the information that the electrode-the pendulum is in the neutral position between the electrodes of the movement sensor 3 and is connected to the input of the reset of the shift register 11 and simultaneously connected to the synchronization input of the counting trigger 9. The second output iconic device 4 (figure 1 marked with ◁) is connected with the input set to zero trigger latch 10 and carries information indicating that the electrode-pendulum 1 is to the left from the neutral line. The third exit sign device 4 (which as figure 1 marked ▷) is connected with the input set to the unit trigger latch 10 and carries information about the electrode-pendulum 1 is to the right of the neutral line. A single trigger output latch 10 is connected to the input of the summation (input +) reversible counter 14 and simultaneously through the inverter 8 to the input of the control key KL1 first key device 6. Zero trigger output latch 10 is connected to the input of subtraction (input) reversible counter 14 and simultaneously through the inverter 7 to the input of the key management CL first key device 6. Inputs receiving information of the first key device 6 are connected together and connected with the reference voltage (Uop) 12, and outputs the first key devices respectively connected to the outputs of the second key device 5, the output key V1 - exit key CL, and the output key CL - exit key KL, and simultaneously connected to the first and second power electrodes 2. The inputs of the reception information of the second key device 5 are connected together and connected to ground. Output overflow reversible counter 14 is connected to the input push installation to zero countable trigger 9. To the synchronization input of reversible counter 14 and simultaneously to the inputs of the synchronization of the shift register 11 is connected to the stable frequency generator 13 and to the input of the reception information of the shift register 11 (d) is connected to the output of the frequency divider FHT/N frequency Divider is rednaznachen for the formation of the measuring time interval, times, for example, seconds. The first output of the shift register 11 is connected to the enable input write memory register 15, and the second output connected to the input of reset the reversible counter 14. A distinctive feature of the sensitive element is the low working weight of the electrode-pendulum 1 large area electrodes 2 electrostatic torque sensor. This eliminated the breakdown of the gap between the electrodes, which ultimately resulted in a two order to extend the range of measurements, but also eliminated the noise in the output signal appearing from residual potentials on the electrodes. The principle of operation of the proposed accelerometer next. Full conversion time consists of two cycles. In the first step of the mobile node (electrode-pendulum 1) is set to forced movement from the neutral position to a shift Δα under the action of the oppositely directed moments of two forces: the electrostatic force torque sensor and inertial forces. The motion of the pendulum on the first beat is strictly measured, it is set by the driver pulse duration τ output overflow reversible counter 14. At time τ to one of the power electrodes connected to the voltage Uopand the opposite electrode is grounded. These functions are performed by the first and second key units 6 and 5, the Differential equation of motion of a mobile node is written in the following form:
where J is the moment of inertia of the pendulum;dthe absolute ratio of the gas-dynamic damping; Gythe angular stiffness of the suspension of the pendulum; Methe moment created by the electrostatic torque sensor; Mj=mjlCTthe moment created by the force of inertia, m is the value of the sensitive mass unbalance (see figure 2 3) asymmetric electrode-pendulum, j is the current acceleration, lCTthe shoulder of the electrode-pendulum (the distance from the swing axis to the center of gravity). Accordingly, the momentum moments of the forces with regard to the rigidity of the suspension is equal to
where MGthe moment of resistance of the elastic suspension; I1the pulse points on the first beat. At the end of the first stage output overflow reversible counter 14 produces a single signal, and counting the trigger 9 is forced to zero and puts both outputs of the trigger latch 11 in the mode storage unit conditions on both outputs. This leads to the fact that the keys V1 and CL first key device 6 is locked and the reference voltage source 12 from the first and second power electrodes 2 is disabled. In turn, CL and CL second key device 5 unlocked and the power electrodes 2 are connected to ground and begins the second cycle. The second one is the electrostatic torque is terminated, since both its power electrodes are connected to ground. Electrode-pendulum 1 under the action of forces of inertia and rigidity of the suspension returns to its original state. The moment of passage of the electrode of the pendulum relative to the neutral position is detected iconic device 4. The signal from the first output iconic device 4 overthrows the counting trigger 9 in one state and then the process repeats. At the second clock cycle works the same reversible counter. Duration of second stage is always less than the duration of the first stage. The sign of the measured acceleration is depicted in the reversible counter type code: the sum of the direct binary code, and when the subtraction - advanced, which corresponds to a negative acceleration. The differential equation of motion of the pendulum at the second clock cycle is
And accordingly the pulse of the torques is equal to
where T is the period movements during the two clock cycles; I2impulse torques on the second beat. The motion of the pendulum in both directions is damped, so in this case the pendulum acts as a mechanical integrator with a time constant of tn=Kd/Gy. From the law of conservation of momentum torques in a conservative system should I1=I2or
From (5) determine the pulse repetition frequency of testing:
From (6) it is evident that the characteristics of the proposed accelerometer is linear with the size of the stand in terms of frequency, equal to: Fpost=MG/(Meτ). Because the stand is a methodological component, it can subtract from the relation (6) for algorithmic processing. Estimate the value of acceleration, which can develop the electrostatic power Converter. Equating the moment of inertia to electrostatic moment, get:
where ρ is the density of the electrode material of the pendulum; uop- reference voltage; h is the gap between the movable electrode pendulum 1 and the fixed electrodes 2. Varying variables in the formula (7) shows, when a valid reference voltage (5-9 instead of 30 In the prototype) and other valid parameters of the inventive pulse accelerometer can be constructed with electrostatic development to the limits to 100 g. This object of the invention is achieved. Sources of information 1. U.S. patent No. 3877313, CL. 73/517, 1975. 2. U.S. patent No. 4483194, CL. 73/517, 1982. 3. Vavilov E Integral sensors. Publishing house of the NSTU, 2003, S. Pulse Microsystems accelerometer, containing a mobile node, implemented in the form of the electrode of the pendulum in the plate to istoricheskogo silicon and connected to the plate elastic suspensions, on both sides of a silicon wafer rigidly welded plates that bear a fixed conductive electrodes of two types: the sensor electrode displacement and force the electrodes of the electrostatic torque sensor, trigger latch, a memory register, a reversible counter, a stable frequency generator and the first key device, the electrodes of the motion sensor included in the input iconic device, three outputs which are connected with the electric circuit of the accelerometer, the first output is connected to the synchronization input of the counting trigger, and with the input of the zero of the shift register and carries information about the location of the pendulum in the neutral position, the second output iconic device carries information about the position of the pendulum to the left relative to the neutral position and is connected with the input set to zero trigger latches, and with the input set to the unit trigger latch is connected to the third output iconic device that carries information about the position of the pendulum to the right relative to the neutral position, the outputs of the trigger latch is connected with the inputs of the control mode of the reversible counter, the key input device is connected to the reference voltage, to the input of the receive data shift register connected to the output of the frequency divider, characterized in that the electrode-pendulum made asymmetrical is otnositelno axis swing, put the second key device, the first and second inverters, the digit shift register, counting the trigger, the first and second control inputs of the second key device connected to the unit and zero outputs of the flip-flop latches the input push installation to zero countable trigger connected to the output of overflow reversible counter, the synchronization input of the counting trigger is connected to the first output iconic device, and the output of the counting trigger connected to the input push installation in the storage mode trigger latches, the outputs of the second key device are connected together and connected to ground, in turn, the first and second outputs of the second key device is connected to the first and second power electrodes of the torque sensor output stable frequency generator is connected to the counting input of the reversible counter and simultaneously with the synchronization input of the shift register, the first output of the shift register is connected to the enable input write memory register and the second output with the input set to zero reversible counter, the outputs of the reversible counter are connected respectively to the inputs of the receive data memory register.
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