Method to form ordered nanostructures on substrate

FIELD: nanotechnologies.

SUBSTANCE: invention relates to the field of nanotechnologies and may be used to make ordered nanostructures, used in micro- and nanoelectronics, optics, nanophotonics, biology and medicine. The proposed method may be used to manufacture single-layer and multilayer nanostructures, also the ones containing layers of different composition, and also two-dimensional, three-dimensional ordered structures of various materials. According to the method, the substrate and the initial substrate, containing nanoparticles, are arranged to form a space between them. The substrate is sprayed in the specified space in the form of a cloud of drops, every of which contains at least one nanoparticles. Creation of a substrate in the form of a sprayed cloud of drops is done by means of ultrasound exposure, when the source of ultrasound effect is located relative to the substrate with the possibility to arrange a sprayed cloud of drops in the specified space. Control of motion in the specified space and drops deposition onto the substrate is carried out through their exposure to external electric and/or magnetic fields.

EFFECT: wider class of materials, which could be used to form ordered nanostructures, higher accuracy of nanoobjects reproduction, stability of nanostructures formation process in one technological space.

5 cl

 

The invention relates to the field of nanotechnology and can be used for the fabrication of ordered nanostructures used in micro - and nanoelectronics, optics, including nanophotonics, biology and medicine.

More specifically, the method relates to a method of forming a complex mosaic paintings of the nanoparticles on the substrate.

It is known that the substance may have a brand new property, if you take this substance in very small part. Carefully purified nanoparticles can be arranged with the formation of ordered structures, and such strictly organized nanostructures often exhibit properties that are unusual for this substance. Type of organization of nanoparticles and formed the structure depend on the synthesis conditions, the diameter of the particles, the type of external influence on the structure.

Currently in electronics one of the main technologies for the production of nanostructures - lithography. For industrial purposes at the present time the most widely used method of microlithography, which allows to form on the surface of the flat substrate nanostructured objects ranging in size from 50 nm. This method is widely used in modern microelectronics. Known methods of forming the structures in microlithography, comprising applying to the substrate a positive electronicist, conduct exposed the I picture, manifestation, the additional layer of material, removal of the resist with a regulated process parameters (RU 2072644 C1, 27.01.1997, H05K 3/06) [1]. The method allows to reduce the dimensions of the elements forming nanostructures and allows you to fabricate nanostructures with dimensions of elements or gaps between them is 0.1-0.5 μm due to it is regulated in the way of options, the process of lithography.

However, the process of microlithography requires high temperatures, high vacuum and chemical processing. This immediately eliminates the use of biological and organic materials (due to their damage and destruction), which is important not only in biology and medicine, but also in areas of technology that have used only inorganic materials. Today the market of organic LEDs is about $ 3 billion and, according to experts, the market for organic nanophotonics by 2015 will increase 10 times. This shows a very broad and rapidly growing segments of the market of new technologies whose development the implementation of this method can be very effective. Thus, one of the major objectives of development of modern technologies before nanotechnology is the development of new, low-impact methods of creating micro - and nanostructures, excluding the application of high temperature and aggressive environments.

The technical result, which directed the present invention, is that the proposed method allows to extend the class of materials from which to form ordered nanostructures (including, but not limited to, organic materials and biological tissues and objects) to ensure fidelity nanostructures on the substrate is higher than or comparable to existing methods. The claimed method allows stably carry out the process of forming in the same process space. While the inventive method can be made of single layer and multilayer nanostructures (two-dimensional or three-dimensional), including those containing layers of different composition materials.

This technical result is achieved in that the substrate and the source substrate containing nanoparticles have with the education space between them, in that space spray the substrate in the form of cloud droplets, each of which contains at least one nanoparticle, and the establishment of a substrate in the form of a diffuse cloud of droplets is realized by means of ultrasound exposure in the placement of the source of ultrasonic influence on substrate with diffuse cloud droplets in the specified space, and control of the movement of the decree is " a space and droplet deposition on a substrate is performed by exposure to an external electric and/or magnetic fields.

In the original substrate may be a filler.

The formation of ordered nanostructures on a substrate can be carried out under vacuum conditions.

The claimed method of the formation of ordered nanostructures on a substrate can be implemented, for example, using the following device. Such a device shall contain a sealed chamber containing either purified gas (including air)or cold (purification or vacuum is determined by the specific objectives, in particular the size of the resulting structures), equipped with a screen for creating an electrostatic protection module forming cloud (mist) drops containing a source of ultrasonic ultrasonic vibrations) for spraying the primary substrate for the coating module, the device for depositing the substrate on the surface of the module and device for coordinate orientation of the substrate in the chamber. When this substrate and containing nanoparticles substrate positioned in the chamber forming a space between them, with the possibility of spraying the substrate with the formation of cloud droplets in this space. Also a device for implementing the inventive method must contain a system of electrodes, providing manipulation (control of movement, moving, deposition) drops in above the space. The electrode system must be equipped with a control signal applied to the electrodes. Through this system of electrodes is the influence of external electric and/or magnetic fields into droplets containing nanoparticles. The location and configuration of the electrodes determine the orientation of the vectors of electric and magnetic field strength. The device for implementing the inventive method must also contain an optical microscope, allowing you to analyze and monitor the process of forming nanostructures on a substrate.

The source parameters of ultrasonic treatment must spraying to ensure a given droplet size. Ultrasonic treatment can be carried out by bulk or surface acoustic wave (ultrasonic wave can be formed, for example, using a piezoelectric transducer). Given the size of the droplets is achieved by setting the frequency of the alternating electric voltage, and the desired speed has been reached, the formation of droplets is achieved by setting the amplitude of the applied voltage. In particular, knowledge of the speed of formation of drops needed to calculate the thickness of the formed nanostructures, and, accordingly, to determine the time of their formation.

The parameters of voltage, p is given to the electrodes, i.e. the characteristics of the generated electric and/or magnetic fields are determined by the desired pattern ordering of nanostructures. Job control signals (voltages)applied to the electrodes, in accordance with the ordering of nanostructures allows you to create in the space of the location of the cloud droplets electric and/or magnetic field with the desired characteristics. The impact of such electric and/or magnetic fields on the drops leads to the flow of droplets containing nanoparticles, deviant and build upon deposition on a substrate in accordance with the orientation in space of the vectors of the electric and/or magnetic fields.

For precise fixation of the nanostructure substrate material must be chemically resistant to the entire substrate.

Various liquid and solid reagents may be introduced into the source substrate to the flow of the necessary chemical reactions with activation of the nanoparticles.

It should be noted that the drops of the source substrate after spraying must have electric charge and/or magnetic moment in order to further control their movement and deposition on a substrate using an electric and/or magnetic fields. The original substrate from which it is fabricated nanostructure, D. who should be able to spray using ultrasonic waves (to be a solution, the suspension or emulsion, including, for example, organic materials and biological tissues or cultures, or, for example, be a molten metal or a semiconductor). Thus, in order to give the substrate the possibility of its sputtering, the substrate may contain in addition to the nanoparticle filler (for example, water and/or alcohol in an arbitrary concentration).

The formation of ordered nanostructures on the claimed method can be carried out as follows. In a given space camera recorded the substrate, the source substrate containing nanoparticles is applied to the surface of module the formation of cloud droplets. When the application of the appropriate voltage to the piezoelectric transducer impacts arising ultrasonic wave to the substrate leads to its spraying with the formation of cloud droplets, each of which may contain one or more (at least one) of the nanoparticles. The camera creates an electric and/or magnetic field with the specified characteristics, which leads to the flow of charged droplets, their deviation and forming by deposition on a substrate in accordance with the orientation in space of the vectors of the electric and/or magnetic fields. For this purpose, the electrode system serves the appropriate opravlyaushi the signals, the parameters which define the desired pattern of ordering of nanostructures. The use of electric and/or magnetic fields into droplets containing nanoparticles to control their movement in space clouds and their deposition on the substrate eliminates the use of a mask during formation of the nanostructures, which, in turn, helps to organize the process of forming in one process chamber in one step, i.e. increases the flexibility of the method (due to the possibility of creating various structures with making new masks, and by changing the parameters of control signals and eliminates the cost of creating the mask). Drops are deposited on a substrate in accordance with the desired pattern of ordered nanostructures. Volatile components of the cloud or are chemically inert relative to the material of the nanostructures and gradually evaporate from the substrate into the surrounding space, or none remains (in the case of molten metals or semiconductors).

Thus, the establishment of a substrate in the form of a spray or cloud droplets containing at least one nanoparticle, by means of ultrasonic treatment is a gentle and environmentally friendly, allowing you to extend the class of materials from which to form orderly nanostruct the s with high fidelity nanostructures on the substrate. Motion control and droplet deposition the influence of external electric and/or magnetic fields allows you to control the movement and deposition of droplets and, thus, contained nanoparticles bearing an electric charge or magnetic moment. The class of such particles is very wide and includes solutions, suspensions and emulsions of organic and inorganic materials and biological tissues or cultures, including molten metals or semiconductors. The use of electric and/or magnetic fields on drops to control their movement in space clouds and their deposition on the substrate eliminates the use of a mask during formation of the nanostructures, which, in turn, helps to organize the process of forming in one process chamber in one step. The claimed method allows to form a multilayer ordered structure that is made possible with the introduction into the chamber of a substrate coated with a layer of ordered nanostructures for forming the next layer, in this painting the ordering layer of nanostructures may be different. The claimed method can be obtained two-dimensional, three-dimensional ordered structure of various materials.

The claimed method of the formation of ordered nanostructures on a substrate allows to obtain Opera ocenie nanostructures with high-fidelity picture of the ordering of the nanoparticles in the structure.

1. The method of formation of ordered nanostructures on a substrate, wherein the substrate and the source substrate containing nanoparticles have with the education space between them, in that space spray the substrate in the form of cloud droplets, each of which contains at least one nanoparticle, and the establishment of a substrate in the form of a diffuse cloud of droplets is realized by means of ultrasound exposure in the placement of the source of ultrasonic influence on substrate with diffuse cloud droplets in the specified space, and motion control in the specified space and droplet deposition on a substrate is performed by exposure to an external electric and/or magnetic fields.

2. The method according to claim 1, characterized in that the source substrate is injected filler.

3. The method according to claim 1, characterized in that the source substrate is injected solid and liquid reagents.

4. The method according to claim 1, characterized in that the formation of ordered nanostructures on a substrate is carried out in vacuum conditions.

5. The method according to claim 1, characterized in that the source substrate injected liquid or solid reagents.



 

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