Pulse-periodic te-laser

FIELD: electricity.

SUBSTANCE: laser includes gas-filled chamber with the main discharge electrodes installed in it, charging circuit and discharging circuit. Charging circuit includes pulse voltage source and peaking capacitors. Discharging circuit includes peaking capacitors and the main discharge electrodes, at least one corona pre-ioniser in the form of dielectric tube with inner and outer electrodes. Outer electrode of pre-ioniser covers part of surface of dielectric tube and is connected to the main discharge electrode. At that, outer electrode of corona pre-ioniser is current lead of charging circuit.

EFFECT: improving efficiency of pre-ionisation and stability of operation.

6 dwg

 

The invention relates to the field of quantum electronics, in particular to discharge a pulse-periodic lasers.

Known gas discharge laser JP 200252567 (A), in which the device of corona preionization mode is set so that the entire main discharge current passes through the working area of the corona discharge. The voltage on the discharge gap of the pump is reduced relative to the voltage of the power source to the value of the voltage drop in the zone of corona discharge. Therefore, the energy stored in the capacitors, not spent effectively and the laser has a low efficiency. In addition, the resource of the electrodes is reduced, because the discharge of the pump is formed at a relatively sharp edges of the electrode in contact with the dielectric.

Known electrode system THE laser EN 2340990 (C1), the device corona preionization mode which contains a dielectric tube with an inner electrode and covering a portion of the surface of the dielectric tube outer electrode. The radiation from the open part of the surface of the device of the preionization mode falls within the bit period. However, the intensity of the preionization mode is determined by the capacity of the pre-ionizer, the capacitance value of the pre-ionizer is limited by the design of the pre-ionizer and cannot be optimized.

The objective of the invention is to provide a pulse is but-periodic discharge THE laser with stable emission and high efficiency.

Periodic-pulsed THE laser contains a gas-filled chamber defined in the main discharge electrodes, a charging circuit including a source of pulsed voltage and oboritelnye capacitors, the discharge circuit including oboritelnye capacitors and the main discharge electrodes, at least one corona pre-ionizer in the form of a dielectric tube with internal and external electrodes, the external electrode covers a part of the surface of the dielectric tube and connected to the main discharge electrode, the external electrode crown of pre-ionizer is a current conducting wire of the charging circuit.

During operation of the charging circuit is pulse charging botricello capacitor from a source of pulsed voltage. This creates a growing tension between the main discharge electrodes, and between the outer and inner electrodes of the pre-ionizer. Upon reaching the pre-ionizer of the corresponding electric field intensity lights corona discharge, on the working surface of the dielectric tube occurs corona discharge plasma. Since the external electrode of the pre-ionizer covers part of the dielectric tube and is a current conducting wire for charging obostriteliv capacitors, and on the other side of the dielectric tube formed by the lazma corona discharge, having electrical conductivity, the charge current obostriteliv capacitors goes through the external electrode of the pre-ionizer, and through the corona discharge plasma. The current flowing through the plasma corona discharge, enhances the glow of the plasma from the working zone of the pre-ionizer, thereby increasing the degree of ionization of the gas in the discharge gap at the stage of forming the main discharge. This increases the efficiency of the laser and the quality of the generated radiation.

The impedance of the external electrode of the pre-ionizer is correlated with the impedance of the plasma corona discharge of the pre-ionizer so that a corona discharge plasma is not more than 5% of the current charging circuit. To create the optimum light intensity of corona discharge on the surface of the dielectric tube crown of pre-ionizer enough through the plasma corona discharge did not occur more than 5% of the current charging circuit. At higher values of current through the plasma corona discharge efficiency of the preionization mode is not increased, and the loss of energy to maintain the plasma increase.

The external electrode of the pre-ionizer is integrated with the main discharge electrode. The external electrode of the pre-ionizer can be executed integrated, for example, with the high voltage electrode, it reduces constructive inductance bit contacts the RA and improves efficiency when working with gas mixtures, requiring relatively fast pumping, such as excimer lasers.

Oboritelnye capacitors installed inside the chamber. Installation obostriteliv capacitors inside the chamber allows to significantly reduce the inductance of the discharge circuit and consequently to increase the efficiency of the laser.

Oboritelnye capacitors are installed outside the chamber and connected with the main discharge electrode two rows of high-voltage inputs. Installation obostriteliv capacitors out of the camera when connecting them with the main discharge electrode two rows bushings ensures a high level of preionization mode and to increase the service life of the laser. Two rows of high-voltage inputs in serial connection in the charging circuit allow to pass charging current through the primary electrode and partially through the plasma corona discharge preionization mode. When a short duration pulse current is displaced in the surface layer of the conductor. Therefore, when charging the capacitors, the current flows in the surface layer of the main discharge electrode. The thickness of the surface layer depends on the pulse width and electrode material in a pulsed gas laser can be fractions of a millimetre. For example, the thickness of the skin layer in copper at pulse duration of about 10 MS is approximately 0.2 mm, because when the supply voltage is agenia on the main discharge electrode on the working surface of the device by the crown preionization mode burning plasma corona discharge, which is a conductor, the portion of the current flowing through the plasma corona discharge, enhancing the glow of the plasma corona discharge, which increases the efficiency of the preionization mode. During the main discharge part of the current also goes through the corona discharge plasma, if this continues burning plasma and the main discharge gap is illuminated by ultraviolet radiation from the plasma during the discharge. It makes a bit more stable, improves the quality of the laser radiation.

The main surface discharge electrode between the rows bushings from the crown of the pre-ionizer has a layer with a high electrical conductivity. The main surface discharge electrode between the rows bushings charging circuit has a layer with a high electrical conductivity by containing corona pre-ionizer. This allows to reduce the resistance and increase the current of the surface layer of the electrode from the working surface of the pre-ionizer relative to the current flowing between the rows bushings from the side not containing the pre-ionizer (underlying electrode surface).

The main discharge electrode between the rows bushings from the side not containing the pre-ionizer, has a developed surface. The development of the surface of the main discharge electrode between rows high elitnyh inputs from the outside, does not contain the pre-ionizer, increases the resistance of this area when a short pulse, as due to the skin effect, the current flows through a longer path. This creates the conditions for the passage of a larger current through the corona discharge.

A second corona pre-ionizer, an external electrode which is integrated with the second main discharge electrode. Additional pre-ionizer allows you to more evenly illuminate the bit period and, accordingly, to get more high quality main discharge and the output radiation.

The technical result of the invention is the creation of a periodic-pulsed THE laser with high efficiency preionization mode and stable operation of the laser.

Figure 1 shows the cross section of the laser with oboritelnye capacitors located inside the chamber.

Figure 2 presents the electrical circuit of the laser depicted in figure 1.

Figure 3 presents the cross-section of the pre-ionizer.

4 shows a cross section of the laser capacitors located outside of the laser camera.

Figure 5 presents the electric circuit of the laser depicted in figure 4.

Figure 6 presents the electric circuit of the laser preionization installed near each of the main discharge electrodes.

On Phi is .1 in the chamber of the laser, formed by the housing 1 and the insulating cover 2, installed high-voltage electrode 11 and the ground electrode 14 forming the discharge gap 12. The pre-ionizer of corona discharge 6 1, 2, 3 includes an internal electrode 9 connected to the grounded electrode, the dielectric tube 8 and the external electrode 7, partially covering the dielectric tube 8 and is connected on the one hand with the high voltage electrode, and on the other side with the charging capacitor. Surface and the dielectric tube 8 is the working surface of the pre-ionizer 6. On the surface and between the edges b and is formed with a corona discharge plasma, which is the radiation source for the preionization mode gas in the discharge gap 12 between the main discharge electrodes 11 and 14. The external electrode 7 is connected with the high voltage electrode 11 along the edges, and with capacitor 5 along the edge b. A source of pulse voltage 4 is connected to the input 10 to the high voltage electrode 11, and input 3 to the condenser 5. The charging circuit of figure 1, 2 includes a condenser 5, a source of pulse voltage 4, the high-voltage electrode 11, the conductors 3, 10, 7, and conductors 7 is an external electrode of the pre-ionizer 6. The discharge circuit of figure 1, 2 includes a condenser 5, a high-voltage electrode 11, the ground electrode 14, the discharge gap 12, the conductors 7, 15. T is aproved 7 is an external electrode of the pre-ionizer 6.

When generating the pulse high-voltage source 4 in the charging circuit, the current flows in the charging obostriteliv capacitors 5. However, the foreign 7 and the internal electrodes 9 of the pre-ionizer 6 creates an electric field sufficient to education on the working surface and the dielectric tube 5 between the edges b and c, corona discharge. Part of the charging current goes through the external electrode of the pre-ionizer 7, part of the current goes through the plasma on the surface of the insulator 5. The charging current flowing through the plasma corona discharge, enhances the glow of the plasma and, thus, increases the efficiency of the preionization mode.

After reaching to the main discharge electrodes 11, 14 breakdown voltage between the electrodes ignites the discharge and the current flowing in the discharge circuit. Similarly to the above, part of the current goes through the corona discharge plasma of pre-ionizer that enhances the glow of the preionization mode and at the stage of combustion of the main discharge. Due to the additional illumination stability of the main discharge increases, which positively affects the characteristics of the laser radiation.

The choice of shape, material, dimensions of the conductor, which serves as the external electrode 7 of the pre-ionizer, it's impedance is chosen such that in the plasma were optimal current. Experiments show that the optimum value of the charging current, flowing through the zone of corona discharge, no more than 5% of the current charging the capacitor. When the discharge pump generates laser radiation of high quality with minimum energy cost. The generated radiation is output from the camera through the window 11.

Figs.4, 5 oboritelnye capacitors are installed outside the chamber. The pre-ionizer 6 is integrated with the high voltage electrode 18, the electrode 18 is a main discharge electrode and the external electrode of the pre-ionizer 6. The electrode is connected to the charging circuit using two rows of high-voltage inputs number of inputs 17 connects the electrode to the high voltage source 4, the number of inputs 16 connects the electrode with a number obostriteliv capacitors 5. Thus, the electrode 18 is a circuit conductors charging botricello capacitor 5. The high-voltage electrode 18 has a developed surface s between inputs 16 and 17. The surface d of the electrode 18 has a layer of high conductivity.

When applying a pulse voltage from the power source 4 between the high voltage electrode 18 and the internal electrode 9 of the pre-ionizer 6 there is a potential difference on the surface of the dielectric tube 8 there is a plasma corona discharge. The charge current of the capacitor 5 goes through the inlets 17, the surface layer of the high-voltage electrode 18, a corona discharge plasma on the surface the t of the insulator 5 of the pre-ionizer and inlets 15. Because the circuit operates in pulsed mode, the current is displaced in the surface layer of the electrode 18. Due to the fact that part of the current passes through the working area of the pre-ionizer, the glow from the zone of corona discharge increases, which increases the concentration of charged particles in the discharge gap 12. The capacitor 19 at the stage of charging is not involved in strengthening the preionization mode and charged from the power source directly.

When the discharge current pulse is from the capacitors 5, 19 through the inlets 16, 17, the outer surface of the electrode 18 and partially through the corona discharge plasma on the surface of the dielectric 5, maintaining the glow of the plasma. The highlight of the pre-ionizer during discharge additionally stabilizes the gas discharge laser.

On 6 premonitory corona discharge 6, 20 is installed near each of the main discharge electrodes, the internal electrodes of preionization interconnected. When voltage is applied from the high voltage source 4 between the main discharge electrodes a potential difference appears. The internal electrodes of preionization acquire potential relative to the main discharge electrodes. While on the dielectric surface of preionization is formed by the corona discharge plasma. The capacitor 5 is charged, and the current flows partly through the corona discharge plasma on the surface and dielectrics both preionization 6, 20, thereby increasing the efficiency and uniformity of the preionization mode of the main discharge gap.

Thus, the proposed solution allows you to set the optimal level of preionization mode and increase the efficiency of periodic-pulse THE laser.

1. Periodic-pulsed THE laser containing gas-filled chamber defined in the main discharge electrodes, a charging circuit including a source of pulsed voltage and oboritelnye capacitors, the discharge circuit including oboritelnye capacitors and the main discharge electrodes, at least one corona pre-ionizer in the form of a dielectric tube with internal and external electrodes, the external electrode of the pre-ionizer covers part of the surface of the dielectric tube and connected to the main discharge electrode, characterized in that the external electrode crown of pre-ionizer is a current conducting wire of the charging circuit.

2. Periodic-pulsed THE laser according to claim 1, characterized in that the impedance of the external electrode of the pre-ionizer is correlated with the impedance of the plasma corona discharge of the pre-ionizer so that a corona discharge plasma is not more than 5% of the charging current path.

3. Periodic-pulsed THE laser according to claim 1, characterized in that the external electrode of the integrated pre-ionizer is with an electrode of the discharge pump.

4. Periodic-pulsed THE laser according to claims 1 to 3, characterized in that oboritelnye capacitors installed inside the chamber.

5. Periodic-pulsed THE laser according to claims 1 to 3, characterized in that oboritelnye capacitors are installed outside the chamber and connected to the electrode of the discharge pump two rows of high-voltage inputs.

6. Periodic-pulsed THE laser according to claim 5, characterized in that the surface of the discharge electrode between the rows bushings from the side containing the corona pre-ionizer has a layer with a high electrical conductivity.

7. Periodic-pulsed THE laser according to claim 5, characterized in that the electrode surface discharge pump between rows BB-inputs from the side not containing the corona pre-ionizer, has a well-developed outer surface.

8. Periodic-pulsed THE laser according to claim 5, characterized in that a second corona pre-ionizer, an external electrode which is integrated with the second electrode of the discharge pump.



 

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