Gas laser

FIELD: physics.

SUBSTANCE: laser has a gas pumping loop in which there are series-arranged discharge gap formed by two extended electrodes, diffuser, heat exchanger, cross flow fan with an impeller and an extra channel. The inlet opening of the extra channel lies on the pressure side of the fan. The distance between the electrodes is between 0.05 and 0.25 times the external diametre of the impeller. The extra channel is in form of a convergent tube with an outlet hole directed towards the impeller of the fan on the suction side of the fan.

EFFECT: design of a compact TE-type gas laser with efficient laser gas pumping, stable operation and high pulse repetition rate.

4 cl, 1 dwg

 

The invention relates to the field of quantum electronics, in particular to gas lasers of THE type with a high pulse repetition rate, such as excimer, nitrogen, CO2-lasers.

Known patent RU 2334325 describing a gas laser in which to increase the pulse repetition rate is made additional gas channel. However, it is not possible to increase the flow velocity of the gas in the discharge gap and substantially increase the frequency of the pulse laser generation.

Known patent RU 2132104 describing a gas laser with high pulse repetition rate. In this laser, with a relatively small diameter fan the electrode gap, there is an additional channel, the inlet of which is located in the outlet port of the fan. Part of the gas flow passes through the channel, increasing the pulse repetition rate. However, this solution has a low efficiency.

The objective of the invention is to provide a compact gas laser with high repetition rate pulse generation.

The gas laser of THE type contains getprotocol circuit with successive it bit by a gap formed by two extended electrodes, diffuser, heat exchanger, diametrically fan impeller, the additional the first channel, the inlet of which is located on the discharge side of the fan, the distance between the electrodes is from 0.05 to 0.25 outer diameter of the impeller, an additional channel is made confused, with the outlet directed to the fan impeller to the suction side of the fan. High pulse repetition rate laser provides high speed and uniformity of gas flow in the discharge gap. To increase the velocity of the gas in the discharge gap is possible, increasing the rotational speed of the impeller or increasing its diameter. But with the increase of frequency of rotation of the impeller increases significantly the negative impact of acoustic waves and vibrations on the character of the discharge pump and, accordingly, the laser radiation. A significant increase in the diameter of the wheel relative to the distance between the electrodes displays fan of the optimal mode of operation and does not lead to an increased rate of flow ("Quantum electronics" t, No. 9 (2000), s-786, "Design of high power KrF lasers with pulse repetition frequency up to 5 kHz"). More confused, directed to the impeller of the fan channel can improve the efficiency of the fan and increase the speed of the gas flow even with a relatively small distance between the electrodes, comprising from 0.05 to 0.25 external diameter of dimethyldodecylamine. The channel is made confused and towards the fan impeller to the suction side of the fan, so part of the flow from the discharge side of the fan gets in close located to the discharge side of the fan to high speed and low loss of pressure. The energy part is formed by an additional channel of the recirculation stream is transmitted to the main flow passing through the bit period, which increase the speed of the main flow. In addition, optimally formed more confused the channel removes the particles, the speed of which is directed at an angle to the main gas stream, but corresponds to the direction input of the additional channel. In the formation of the main flow involving particles, the speed of which is directed to the bit period, which increases the uniformity of flow in the discharge gap. The increase in velocity of the gas stream due to the energy of the particle stream, formed more confused by the channel, and due to the high uniformity of the gas flow in the discharge gap can increase the pulse repetition rate and improves the stability and efficiency of the system. The introduction of additional confused channel directed to the fan wheel, allows you to increase the speed of gas flow through the main time is adny period without increasing the diameter of the impeller. This allows to increase the pulse repetition rate without increasing the dimensions of the gas laser.

The distance between the electrodes in the amount of height narrowing more confused channel is from 0.1 to 0.4 the outer diameter of the impeller. Authors conducted experiments showed that the optimal ratio between the diameter of the fan wheel, the height of the discharge gap and a minimum width of confused an additional channel are above ratio. When such ratios reach the maximum speed of the gas flow in a given bit interval.

More confused the channel is made to be cooled. The vortex formed in the zone of the impeller for any diametrically fan, has a relatively low heat transfer with the main thread, which is the cause of the temperature gradient in the gas flow through the bit period. At high pulse frequency electrode is located in the zone of flow of gas adjacent to the vortex, is heated to a higher temperature and, therefore, more susceptible to erosion. The introduction of an additional channel and its cooling helps to equalize the temperature of the gas flow through the electrode gap, which increases the light output and reduce the rate of erosion of the electrode. It positively takes a severe toll is placed on the stability of the laser. Additional cooling constructive can be done, for example, in the form of cooling channels in the walls more confused channel.

Performed gas clean channel connecting the outlet area of the gas from the discharge gap with the output part more confused channel. The electrodes are optimized to create a uniform electric discharge, but have bad streamlined for gas flow form. At the gas outlet of the discharge gap can be formed stagnant zone. For removal of the products of the discharge of stagnant zones and exclusion of spurious missileís zone exit gas from the discharge gap is made canal linking the zone and the zone of narrowing confused channel directed to the fan impeller. The speed of the gas flow in the zone of narrowing more confused channel is significantly higher than in the stagnant zone, therefore, due to the ejector effect is the outflow of contaminated products discharge of gas from the stagnant zones. This increases the dielectric strength of the gas in the zone exit gas from the discharge gap, increasing the pulse repetition rate and has a positive effect on the stability of the laser.

The technical result of the proposed technical solution is the creation of compact gas laser of THE type with effective the active pumping of the laser gas, stable operation and high pulse repetition rate.

The drawing shows a cross section of the laser camera on the proposed technical solution.

In the drawing in a sealed gas-filled chamber of the laser 1 is set to the main electrodes 2, 3, forming the main discharge gap 4, the diffuser 5, the heat sink 6, the inlet of the fan 7 fan 8, the outlet 9. The elements 10, 11 form the more confused the channel 12, is curved so that its entrance is located on the discharge side of the fan 9, and the output is in the area of the gas inlet into the impeller 8 of the fan. In elements 10, 11 are made cooling channels 13. The area of the exit gas from the discharge gap 4 and the narrow part of the additional confused channel 12 is connected by channel clearing stagnant zones from the products of the discharge 14. The clean channel 14 covers the working surface of the pre-ionizer 15. In place of the rotation of the installed flow guide 16. To output radiation has a window (not shown). The main discharge electrodes 2, 3 are connected to a power source (not shown).

The design made the following geometrical relations. The distance between the electrodes and the diameter D of the impeller 8 are in the ratio a=(0.05÷0.25)D. the distance between the electrodes and the sum of the height of the narrow b more confused channel the diameter D of the impeller are in the ratio (a+b)=(0.1÷0.4)D.

The electrodes 2, 3 is fed high-voltage high-current pulse. In the discharge gap 4 occurs volumetric discharge of the pump, which leads to the generation of the laser pulse. For operation in the frequency mode, the products of the discharge between pulses are removed from the discharge gap by the flow of the working gas generated by the fan 8 in getprocessor circuit.

The fan wheel 8 rotates and creates a flow through the discharge gap 4. The distance between the main electrodes 2, 3 is from 0.05 to 0.25 with respect to the outer diameter D of the impeller 8. Getprotocol circuit with such a large differential flow sections requires a relatively high pressure from the fan. An additional channel is made in the form of a curved confused channel, so part of the gas flow with low losses and high energy is returned to the impeller, increasing the velocity which are in direct contact with the main gas stream and, accordingly, the flow velocity of the gas in the discharge gap.

The height b of the additional narrowing confused channel, the distance between the electrodes and the diameter D of the impeller are in the ratio (a+b)=(0.1÷0.4)D. In the specified size range is achieved the greatest performance technical solutions. For example, on the layout of the laser with the distance between the electrodes a=14 mm, height is th narrowing confused channel b=6.5 mm and a diameter of the impeller 110 mm speed of the gas flow in the discharge gap is 2.9 times higher than the circumferential velocity of the outer diameter of the impeller. In the same conditions, but without more confused channel the flow velocity of the gas in the discharge gap exceeds the circumferential velocity of the outer diameter of the impeller 2.2 times.

Uniform temperature flux in the region of the discharge gap, provide cooling channels 13, contributes to a more stable operation of the laser, which has a positive impact on the beam quality and the resource electrode.

Slowly relaxing products discharge in the area of the electrode 2 and the pre-ionizer 15 is pumped through the channel 14 cleaning, which eliminates spurious high voltage breakdowns.

1. The gas laser of THE type containing getprotocol circuit with successive it bit by a gap formed by two extended electrodes, diffuser, heat exchanger, diametrically fan impeller, an additional channel, the inlet of which is located on the discharge side of the fan, characterized in that the distance between the electrodes is from 0.05 to 0.25 outer diameter of the impeller, an additional channel is made confused, with the outlet directed to the fan impeller to the suction side of the fan.

2. A gas laser according to claim 1, characterized in that the distance between the electrodes in the amount of height narrowing more confused channel composition is employed, from 0.1 to 0.4 the outer diameter of the impeller.

3. A gas laser according to claim 2, characterized in that further confused the channel is made to be cooled.

4. A gas laser according to any one of claims 1, 2, 3, characterized in that the gas clean channel connecting the outlet area of the gas from the discharge gap with the output part more confused channel.



 

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