Deformation detecting element with dispersion structures

FIELD: physics.

SUBSTANCE: deformation detecting element with dispersion structures consists of piezoelectric plates on whose surface there is at least one interdigital converter and at least two dispersion reflecting structures, which uses the response lag time of the deformation detecting element as an information signal. The reflecting structures are on two sides of the interdigital transducers. The information signal can also be in form of the wave form or central frequency of a frequency-modulated probing signal, which ensures maximum amplitude response value of the deformation detecting element with dispersion structures.

EFFECT: higher accuracy of measuring deformation owing to use of information on the central frequency of the device.

2 cl, 1 dwg

 

The invention relates to the field of measurement technology and can be used in equipment and machinery for measuring the strain.

Known sensitive element deformation, which is a delay line surface acoustic wave (saw) (Wireless passive SAW identification marks and sensors. L.Reindl, 2-nd Int. Symp. Acoustic wave devices for future mobile communicstion systems, Chiba univ., 2004), which consists of two interdigital transducers (IDT), located on piezoplate opposite each other. The distance between pins in the IDT is equal to, λ - length of the surface acoustic wave, the duty cycle is equal to 2. As the information signal is time delayed.

The disadvantage of these sensors strain - delay lines on surfactant is a low sensitivity and precision.

Also known sensitive element deformation, representing odnogolosy resonator (Zelenka, I. Piezoelectric resonators on bulk and surface acoustic waves. M.: Mir, 1990, 584 C.)consisting of IDT structure and located on both sides of the IDT metallic whip reflecting structures. The distance between pins in the reflective structures is equal to, λ - length of the surface acoustic wave, the duty cycle is equal to 2. As an information signal BL is by our own (the resonance frequency of the resonator). The disadvantage of these resonators in relation to the measurement of the deformation is small frequency deviation and, as a consequence, the low sensitivity and precision.

The closest in technical essence to the invention is sensitive element deformation, which represents a dispersive delay line (Wireless passive SAW identification marks and sensors. L.Reindl, 2-nd Int. Symp. Acoustic wave devices for future mobile communicstion systems, Chiba univ., 2004), consisting of IDT and located on piezoplate on the one hand from IDT reflecting structures in the form of grooves with a variable period, forming a dispersion structure. As the information signal is delay time. Compared to resonators and delay lines sensitive element deformation with dispersive structures has a greater sensitivity. The disadvantage of these resonators in relation to the measurement of the deformation is small, the deviation information signal and, as a consequence, the low sensitivity and precision.

The reason that prevent obtaining the specified lower technical result when used for measuring deformations of known sensing element strain - dispersive delay lines of the prototype is the following disadvantage: the absolute value of the deviation delay time is limited by the geometrical dimensions of the piezo is armor and losses on the distribution of surfactant in the material.

The present invention is to improve the accuracy of strain measurement.

The technical result is achieved by the fact that in the sensitive element, the deformation of the dispersion structures consisting of piezoplate on the surface of which is formed of at least one interdigital transducer and at least two dispersive reflective structures, using as the information signal delay time response of the sensing element deformation with dispersive structures, thus reflecting structures are located on both sides of the interdigital transducers, and the quality of the information signal is additionally used the Central frequency of the frequency-modulated probe signal, providing a maximum value of the response amplitude of the sensing element deformation with dispersive structures.

The location of the dispersive reflective structures on both sides of the IDT allows you to use twice the acoustic energy compared to one-sided location of the dispersion of reflective structures. Additional use as an information signal, the center frequency of the frequency-modulated probe signal, providing a maximum value of the response amplitude sensitive element is deformed dispersion structures, improves the accuracy of the measurements due to the integration of the two information signals, the center frequency and delay time.

Conducted by the applicant's analysis of the level of technology found that analogs characterized by the sets of characteristics is identical for all features of the claimed device - sensitive element deformation with dispersive structures are absent, therefore, the claimed invention meets the condition of "novelty."

Currently, the authors are unknown sensors deformation of the dispersion structures that would allow the measurement of deformation with such precision that ensures the proposed construction of the sensing element deformation with dispersive structures.

Search results known technical solutions in this and related areas of technology in order to identify characteristics that match the distinctive features from the prototype features of the claimed invention, have shown that they do not follow explicitly from the prior art.

Of certain of applicant's prior art there have been no known impact provided the essential features of the claimed invention transformations on the achievement of the technical result, therefore, the claimed invention meets "developed in skomo level.

The invention is illustrated in the drawing, which shows the structure of the sensing element deformation with dispersive structures.

The sensing element deformation with dispersive structures (see drawing) consists of piezoplate 1, which is formed IDT 3 and the reflecting dispersion patterns 2. Reflecting the dispersion structure 2 made in the form of periodic system of grooves with a variable period.

Piezoplate 1 may be made of a piezoelectric material (such as quartz).

This reflects the dispersion patterns 2 are arranged on both sides of the interdigital transducers 3, and as the information signal is additionally used form, and in the particular case of the Central frequency of the frequency-modulated probe signal, providing a maximum value of the response amplitude of the sensing element deformation with dispersive structures. The time delay response of the sensing element deformation with dispersive structures can be the ID of the sensor element of the deformation of the dispersion structures.

The formation of the IDT is implemented according to the technology of photolithography and etching [1, 2]. The formation of grooves reflective dispersive structures 2 implemented by the technology of etching through the mask [2].

The mouth of austo works as follows.

When deformation piezoplate 1 change the geometrical size of the pins (electrodes) IDT 3, the distance between the electrodes, the width and the distance between grooves reflective dispersive structures 2. In accordance with the dimensions [1, 2] change the delay time of the reflected signal and the frequency properties of the reflective dispersive structures 2.

As the probing signal when using dispersion structures are frequency-modulated signals, the structure of which corresponds to the topology reflecting the dispersion structures 2 [2]. If topology changes are reflective dispersive structures 2 will change and the structure of the frequency-modulated signals. The most commonly used linear frequency modulation (chirp) signals [2].

Upon receipt of the probe electric signal from an external source (not shown) on the IDT 3 under the action of the piezoelectric effect is generated surfactants. Formed IDT 3 surfactant is distributed in two directions from the IDT 3. Upon reaching the reflecting dispersion structures 2, the surfactant is reflected and returns to the IDT 3. The location of the dispersive reflective structures 2 on both sides of the IDT 3 allows you to use twice the acoustic energy compared to one-sided location of the dispersion trialdirector, i.e. twice to increase the amplitude response of the sensing element deformation with dispersive structures. The interaction of the probe, the chirp of an electrical signal with a dispersive reflective structures is explained in detail in [2].

If the deformation of the sensing element deformation with dispersive structures near the location of the IDT 3 and the reflecting dispersion 2 linear structures, the most significant is to change the Central frequency of the frequency-modulated probe signal (e.g., chirp), which provides the maximum value of the response amplitude of the sensing element deformation with dispersive structures. If the deformation of the sensing element deformation with dispersive structures near the location of the IDT 3 and the reflective dispersive structures 2 nonlinear, it will change the shape of the frequency modulation of the probing signal, providing a maximum value of the response amplitude of the sensing element deformation with dispersive structures. In particular, in the case of non-linear deformation of the shape of the frequency modulation of the probing signal, providing a maximum value of the response amplitude of the sensing element deformation with dispersive structures, will not be linear-frequency modulation, and elnano-frequency modulation. The shape of the nonlinear frequency modulation for each strain sensitive element deformation with dispersive structures will be a unique function of strain.

As the information signal is used, the time delay response of the sensing element deformation with dispersive structures. When the strain sensitive element deformation with dispersive structures, the time delay will not change by more than 1% of the amount of time delay in the undeformed state. If the topology of the sensor element of the deformation of the dispersion structures provides a time delay in the undeformed state is greater than the deviation of the delay times in the deformed state, the amount of time delay is an identification characteristic of this particular sensor element of the deformation of the dispersion structures. The time delay response of the sensing element deformation with dispersive structures can be the ID of the sensor element of the deformation of the dispersion structures. Thus, the delay time can provide identification of the sensitive element deformation with dispersive structures.

In addition, the information signal is used, and in private with the learn center frequency, frequency modulation of the probe signal (e.g., chirp), which provides the maximum value of the response amplitude of the sensing element deformation with dispersive structures. The two measurements can improve the accuracy of determining the deformation due to the integration of the two information signals form (e.g., center frequency) and time delay.

Form, or in a particular case the value of the Central frequency of the frequency-modulated probe signal (e.g., chirp), which provides the maximum value of the response amplitude of the sensing element deformation with dispersive structures, measured, for example, amplitude-frequency characteristic (for example, using a network analyzer Agilent EV) [2]. The delay time is measured, for example, using an oscilloscope. On the basis of the calibration dependence (shape, center frequency, delay time - warp) to change the shape, center frequency and delay time can be used to correlate the magnitude of the deformation.

Thus, the proposed sensor element deformation with dispersive structures is a precision device for measuring the strain.

Bibliography

1. Zelenka, I. Piezoelectric resonators on bulk and surface acoustic waves. M.: Mir, 1990, 584 S.

2. Mor is an D. Device signal processing on surface acoustic waves / Lane. from English. M.: Radio and communication, 1990, 416 S.

1. The sensing element deformation with dispersive structures, consisting of piezoplate on the surface of which is formed of at least one interdigital transducer and at least two dispersive reflective structures, using as the information signal delay time response of the sensing element deformation with dispersive structures, characterized in that the reflecting structures are located on both sides of the interdigital transducers, and the quality of the information signal is additionally used in the form or the Central frequency of the frequency modulated probe signal, providing a maximum value of the response amplitude of the sensing element deformation with dispersive structures.

2. The sensing element deformation with dispersive structures according to claim 1, characterized in that the delay time response of the sensing element deformation with dispersive structures is the ID of the sensor element of the deformation of the dispersion structures.



 

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