Light homogenisation device and method of its fabrication

FIELD: optics.

SUBSTANCE: proposed method aims at producing light homogenisation device comprising at least one substrate (1) that features at least one optically functional surface with large amount of lens elements (2) that, in their turn, feature systematic surface irregularities. At the first stage aforesaid lens elements (2) are formed in at least one optically functional surface of at least one substrate (1). At the second stage at least one substrate (1) is divided into at least two parts (3, 4). Then at least two aforesaid parts of substrate (1) are jointed together again, provided there is a different orientation of at least one of aforesaid parts (4). The said different orientation of one of at least two parts allows preventing addition of light deflections caused by aforesaid systematic surface irregularities after light passage through separate lens elements.

EFFECT: higher efficiency of light homogenisation.

16 cl, 8 dwg

 

The present invention relates to method in accordance with the restrictive part of paragraph 1 of the claims, as well as to the device in accordance with the restrictive part of paragraph 11 of the claims.

The method and apparatus of the aforementioned type is known from DE 10139355 A1. The disadvantage of such devices manifests itself by the fact that the surface of lens elements have a surface roughness that is too great for certain uses, for example, for lithographic use in the manufacture of microcircuits. In particular, this kind of lens elements have, in most cases, systematic non-uniformity of the surface, which again appear on each of these lens elements. These microscopic irregularities of the surface or uneven surface may cause the actual surface structure of the desired calculated surface deviates by several tens of nanometers or more. On the basis of the fact that such homogenizers, as a rule, the light that passes through the individual lens elements, naprashivaetsa in the working plane, are summarized also caused by non-uniformity of the surface of the interference intensity distribution in the working plane. In most cases, gomogenizirovannogo type of individual beams, passed through a separate lens elements, thus naprashivaetsa in the working plane, which is equal individual lens elements contribute their share at the same place in the working plane. Because of this, due to naplastovanija passed through the individual lens elements of the light in the working plane is not averaged systematic, all lens elements of the periodic and irregular. In contrast, the intensity distribution of the homogenized light is manifested in the working plane, as shown, for example, schematically and exaggeratedly 7.

The task of the invention is to create a device of the above type, by which the light can more effectively gomogeniziruetsya. Next should be established method for manufacturing such devices.

Regarding the way this is achieved through a method of the aforementioned type with distinctive signs of paragraphs 1 and/or 7, and regarding the device through the device of the aforementioned type with a distinctive signs of paragraph 11. The subsequent dependent claims relate to preferred embodiments of the invention.

In accordance with paragraph 1 provides that, at one stage of the method, at least one substrate is divided, at IU is e, in two parts, with the next stage of the method, at least two, at least two parts, at least one substrate at a different orientation, at least one of the parts are reunited. Through a different orientation, at least one of at least two parts can be prevented by the fact that caused by systematic non-uniformity of the surface deflection of light, after passing through the individual lens elements of the parts are added.

For example, in accordance with paragraph 2 after cutting, at least one of the parts can be rotated before it is connected to at least one other part. In addition, for example, in accordance with paragraph 3, the rotation can be rotated through 180. Through such rotation, thus, under certain circumstances, the effect, which is called systematic non-uniformity of the rotatable part, becomes exactly the opposite, so that it is destroyed by the effect, which is caused when light passes through at least another of at least two parts. Thus, it is possible to achieve a very homogeneous intensity distribution in the working plane.

In accordance with paragraph 4 of the rotation can occur around an axis, which is the th parallel to the average direction of propagation homogenizing light.

In accordance with paragraph 5 it is possible that at least one substrate is divided into more than two parts, in particular four, or eight, or sixteen parts, or also on the number of parts not in accordance with the degree of two. Than neodnorodnoe falling on the light homogenizer, the more likely it is that the substrate must be decomposed into more parts, and then some of these parts with a different orientation should again be placed in the assembled substrate, or some of these parts must be rotated. Due to the large number of differently oriented parts and with a relatively large source of heterogeneity can also be achieved efficient homogenization.

In accordance with paragraph 6, for example, it is possible that the substrate is divided into stripe-shaped parts, which in the first direction have fewer lens elements than in the perpendicular direction the second direction.

In accordance with paragraph 7 provides that several substrates are separated, respectively, at least two parts and then parts of different substrates are connected to the new substrate. Thus, there is a possibility purposefully to perceive the influence on the intensity distribution in the working plane, so that different substrates can have again the ranks of the properties. Through such events, as in a modular system, can be mounted device for homogenization, which has the desired properties.

In particular, in accordance with paragraph 8 it is possible that prior to Assembly of the substrate from different parts of the substrate, the intensity distribution in the working plane, which need to be achieved, analyzed, and on the basis of this analysis are selected range and orientation used for the Assembly of the parts. For example, where the device for the homogenization can be adapted to a larger device for illumination of the working plane. In this illumination device of the working plane can be, for example, also located on the back of at least one substrate, the Fourier lens, which contribute to development through the individual lens elements of the light in the working plane. Further, it can be provided by also focusing means, which contribute to the shaping of a light beam or light. For example, an illumination device of the working plane may also contain light sources such as excimer laser or the semiconductor laser device. It is possible that such a device is placed unprocessed substrate with lens elements and get through this with raw is bstrate the intensity distribution in the working plane increases. Achieved by using the raw substrate comparative intensity distribution can be compared with the desired intensity distribution, and then, on the basis of available data through a separate substrates of the individual substrates are joined as in the puzzle to get the desired intensity distribution in the working plane.

In accordance with paragraph 11 provides that the device manufactured by the method in accordance with the invention. In accordance with paragraph 12 of the device has made in the form of cylindrical lenses of the lens elements. Thus, for example, in accordance with paragraph 13 may be provided that the substrate is serving as an input surface optically functional surface and serves as the output surface of the optical functional surface, and on each of these surfaces is formed a matrix of cylindrical lenses and cylindrical axis of the matrix on the input surface are perpendicular to the cylindrical axes of the matrix on the output surface. Thus, by respectively two opposite each other crossed cylindrical lenses can be formed in one of the lens elements. In this way formed the lens elements have a higher effektivnostpukola bandwidth lenses.

In accordance with paragraph 14 it is possible that the device has two substrates, at least two, in particular four optically functional surfaces, both of the substrate located in the direction of propagation homogenizing light at a distance from each other and sequentially. Thanks to this kind of embodiment of the device homogenization homogenizing light is further improved.

In accordance with paragraph 15 may be provided that the device in the propagation direction homogenizing light is located behind the at least one substrate that serve as lenses Fourier lens means which can maplistvivat together the light passing through the individual lens elements.

Further characteristics and advantages of the present invention are clearly shown on the basis of the following description of preferred embodiments with reference to the attached image, which shows:

figure 1 is a top view of the substrate for the device in accordance with the invention,

figure 2 is a top view of the substrate after the separation, rotation, and Assembly

figure 3 is a top view of the substrate in accordance with figure 1 with other cutting planes,

4 is a top view of the substrate in accordance with figure 3 after cutting, turning and Assembly

F. g - a top view of the substrate in accordance with figure 1 with other cutting planes,

6 is a top view of the substrate in accordance with figure 5 after cutting, turning and Assembly

7 is a schematic view of an intensity distribution passing through the substrate of the light in the working plane,

Fig - type intensity distribution in the working plane of the device after cutting, turning and Assembly of the substrate.

For clarification on some of the figures caused the Cartesian coordinate system.

Figure 1 as the example shows a substrate 1, which has a number of lens elements 2. In the present embodiment applied sixty-four lens element 2, which are numbered from 1A up to 8h. It is possible to provide more or less lens elements. Under the lens elements 2 may be implied, for example, a spherical lens elements, which are made on one or both sides of the substrate 1. However, it is also possible to form on the front or back side of the substrate, the cylindrical lens, which, for example, crossed with each other. In this case, for example, on the front side of the cylindrical lens could point in the direction Y, that is, for example, in the direction from 1A to 1h. On the back side of the substrate 1 cylindrical lens could point in the direction X,that is, from 1A to 8A. Due to overlap with each other, the cylindrical lenses on the front and back sides could also be formed sixty-four presents the lens element 2.

Then it is possible that the device in accordance with the invention contains more than one substrate, respectively, with one or two optically functional surfaces. Thus, for example, it is possible to place two substrate 1 sequentially, and each of the substrates on their input and output surfaces contains respectively crossed with each other, a cylindrical matrix.

The lens elements can be applied, for example, presented in figure 1, the substrate 1 by conventional methods known from the prior art. For example, counting the steps on giving for giving levels and then steps on melting for smooth surfaces. The shaping can be carried out, for example, through structural etching or by cathode sputtering. Welding can be carried out, for example, by electron beam or laser beam.

Depicted in figure 1, the substrate according to the method in accordance with the invention is divided along propagating in the Y-Z plane separates the plane 5, for example, through a cut in the far East is part 3, 4. This then part 4 of the substrate 1 is rotated around the Z-direction, i.e. around after passing homogenizing light by 180. Thus, the two parts 3, 4 are reunited with each other. It is a mutual connection can be achieved by gluing or other suitable connection methods. In figure 2, the substrate presents after cutting, turning parts 4 and re-connect the parts with each other. It is clear that the part 4 is rotated so that the previously located on the top left of the lens element 5A is now located at the bottom right.

Figure 3 shows the same substrate 1, respectively, according to a variant of the method in accordance with the invention is divided along three located in the plane Y-Z cutting plane 10 into four parts 6, 7, 8, 9. This then part 7 and part 9, respectively, are rotated around the Z-direction by 180. Figure 4 substrate in accordance with figure 3 presents after division, turning and Assembly. Obviously, part 7 located above the upper left element after Assembly is located at the bottom right. Similarly situated above the element 9 at the upper left element 7a is now at the bottom right.

Figure 5 represents the substrate 1, which is an alternative method may be cut along the six cutting PLoS the spines 11, 12, 13, 14, 15, 16. While cutting planes 11, 12, 13 are plane Y-Z, while cutting planes 14, 15, 16 are the planes X-z Due to separation of the substrate 1 along the cutting planes 11, 12, 13, 14, 15, 16 get sixteen parts, which respectively contain four lens element.

6 represents the substrate 1 after the division in accordance with figure 5 and rotation of each second part by 180 around the direction of z presented on Fig.6 image were respectively turned parts, which are at the upper left in his corner of the lens elements 3A, 7a, 1C, 5c, 3E, 7E, 1g, 5g. It is possible to rotate the other of the lens elements.

In accordance with the invention, it is possible to divide the substrate into different parts along with other cutting or separating planes. Further, it is possible to separate the substrate on unequal largest part. It is also possible in accordance with the invention to keep on storing a large number of substrates divided or as a whole, so that in accordance with specific customer requirements can be gathered desired substrates with the desired intensity distributions.

Figure 7 presents a rough, exaggerated shows the intensity distribution in the working plane of the substrate 1 before cutting, turning and Assembly. In particular, it is evident that the distribution of intensity is not completely homogeneous, and in the left area has elevation 17. Such exaltation 17 may arise from systematic asperities of the surface of the individual lens elements. For example, here we can speak about very little systematic asperities of the surface of the individual lens elements in the range of a few tens of nanometers. The invention proceeds from the fact that without exception, all the lens elements 2 contribute equally to the light distribution in the working plane. In particular, homogenizers, typically built so that passing through the individual lens elements separated beams homogenizing light in the working plane so naprashivaetsa that passes through the same segments of the individual lens elements 2 light in the same place contributes to the intensity distribution.

On this basis, depicted in Fig.7. the intensity distribution in the working plane corresponds to the intensity distribution, which makes a separate lens element in this intensity distribution.

By turning one or more parts of the substrate rotates, thus, a large portion of lens elements. Typically, the number of rotated lens elements 2 corresponds exactly to the number of non-rotated lens elements 2. Thus the m obvious from Fig the intensity distribution is obtained after Assembly separated from the other parts. The intensity distribution 17 is not rotated lens elements 2 is now compensated by the intensity distribution 17' is rotated lens elements, so it turns out the resulting intensity distribution 18, which is extremely uniform.

In accordance with the invention, it is possible to achieve other forms, except depicted on Fig rectangular intensity distribution 18. Here, finally, by selecting individual lens elements, or by Assembly of lens elements can be created substrates from a large number of already cut and randomly rotated.

Then there is the possibility to analyze the working environment, since the distribution of light through the substrate after the introduction of lens elements 2 is perceived in the working plane and then analyzed. Based on the analysis of the substrate can be assembled from a variety of suitable parts so that in the working plane can be obtained is very homogeneous distribution. When this analysis and compilation of produced parts can be performed using the appropriate operating computer program.

Homogeniety light can be, for example, the EC light is karnego laser or light from the semiconductor laser device.

1. A method of manufacturing a device for the homogenization of light, and the device has at least one substrate (1)at least one optically functional surface with a large number of lens elements (2)with systematic non-uniformity of the surface, and, in the first step of the method of the lens elements (2) form at least one optically functional surface, at least one substrate (1), characterized in that the following step of the method, at least one substrate (1) share at least into two parts(3, 4, 6, 7, 8, 9), and then the next stage of the method, at least two, at least two parts, at least one substrate (1) with a different orientation, at least one of the parts (4, 7, 9), connect again, and with a different orientation, at least one of at least two parts can be prevented the possibility that caused by systematic non-uniformity of the surface deviations light, after passing through the individual lens elements of the parts are added.

2. The method according to claim 1, characterized in that after cutting, at least one of the parts (4, 7, 9) turn off before it is connected at least with one other part(3, 6, 8).

3. The method according to claim 2, characterized in that regards is from exercise of 180.

4. The method according to claim 2, characterized in that the rotation of the implement about an axis parallel to the average direction (Z) distribution homogenizing light.

5. The method according to claim 1, characterized in that the at least one substrate (1) is divided into more than two parts.

6. The method according to claim 5, characterized in that the at least one substrate (1) is divided into four parts, or eight, or sixteen parts, or also on the number of parts not in accordance with the degree of two.

7. The method according to claim 1, characterized in that the substrate is divided into stripe-shaped part(6, 7, 8, 9), which in the first direction (X) have fewer lens elements (2)than in the perpendicular direction, the second direction (Y).

8. The method according to claim 1, characterized in that several substrates (1) share, respectively, in at least two parts(3, 4, 6, 7, 8, 9) and then part of various substrates connect to the new substrate.

9. The method of claim 8, wherein prior to Assembly of the substrate from different parts of the substrates analyze the achieved intensity distribution in the working plane and on the basis of this analysis, you can select the range and orientation used for the Assembly of parts.

10. The method according to claim 1, characterized in that the separation of the substrate is carried out along the boundary lines, which separates from each other adjacent the lens the ways (2).

11. The method according to claim 1, characterized in that the separation of the substrate is carried out along a plane parallel to the direction (Z) distribution homogenizing light.

12. Device for homogenizing light, having at least one substrate (1) with at least one optically functional surface with a large number of lens elements (2), characterized in that the device manufactured by the method in accordance with claims 1 to 11.

13. The device according to item 12, characterized in that the lens elements (2) are formed through the cylindrical lenses.

14. The device according to item 13, characterized in that the substrate (1) is serving as an input surface optically functional surface and serves as the output surface of the optical functional surface, and on each of these surfaces is formed a matrix of cylindrical lenses and cylindrical axis of the matrix on the input surface are perpendicular to the cylindrical axes of the matrix on the output surface.

15. The device according to item 12, characterized in that the device has two substrates with at least two optically functional surfaces, both of the substrate located in the direction (Z) distribution homogenizing light at a distance from each other and sequentially one after another.

16. The device according to item 12, characterized in that the device in the propagation direction homogenizing light is located behind the at least one substrate (1)that serve as lenses Fourier lens means which can maplistvivat together the light passing through the individual lens elements (2).



 

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