Method of obtaining wear-resisting ultra-hard coatings

FIELD: production processes.

SUBSTANCE: invention refers to obtaining of wear-resisting ultra-hard coatings, namely, to forming of diamond-type coatings and can be used in metalworking, engineering industry, nanotechnologies, medicine and electronics. Preliminary there performed is product surface plasma stripping by accelerated ions in vacuum chamber at pressure of 10-3 - 10 Pa. Then adhesion layer is applied by plasma method. The thickness is 1-500 nm. The layer is made from metal that belongs to the group of aluminium, chrome, zirconium, titanium, germanium or silicone or their alloys. At the same time the product receives direct or pulse negative voltage of 1-1500 V. Then there applied is intermediate layer with thickness of 1-500 nm. It consists of carbon and metal mixture. Metal belongs to the group of aluminium, chrome, zirconium, titanium, germanium or silicone or their alloys. Intermediate layer is applied at ascending changing of carbon concentration in this mixture from 5 to 95 at.%. At the same time the product receives direct or pulse negative voltage of 1-1500 V. Then there applied is at least one layer of carbon diamond-type film by graphite cathode or laser spraying or by plasma destruction of carbon-bearing gases or carbon-bearing liquid vapours.

EFFECT: increase of adhesion, wear resistance and temperature stability of diamond-type coating.

11 cl, 1 dwg, 5 ex

 

The invention relates to the production of wear-resistant superhard coatings, namely the formation of diamond-like coatings used in electronic engineering, mechanical engineering, nanotechnology, medicine and, in particular, can be used in the manufacture of cutting, shaping, measuring instrument, details of friction and precision machinery parts, as well as other mechanisms and products that undergo friction and wear.

Diamond-like films (APT), which contains inclusions of diamond phase, are currently practical application due to its mechanical properties and optical characteristics: hardness, wear resistance, low coefficient of friction with respect to most structural materials, high thermal conductivity, low absorption in the visible region of the spectrum and high refractive index. In various embodiments of the practical implementation of the APC act either as an environment for the implementation of the required elements, or as coatings for various purposes: protective, thermally conductive decorative etc.

Known methods for producing wear-resistant coatings for cutting tools, which on its surface is vacuum-plasma methods applied coating of titanium nitride (TiN), titanium carbonitride (TiCN), the structure of TiAlN, other complex neath the Idov and carbonitrides of titanium, aluminum, zirconium and other metals.

So, for example, from EN 2001115929 known method of vacuum ion-plasma processing tools, including pre-nitriding in a mixture of N2+Ar and application of wear-resistant coatings of nitrides of refractory elements, the coating is applied in a mixture of gases N2+Ar.

From RU 2297473, 20.04.2007 known, for example, a method of obtaining a multilayer coating for cutting tools.

The method includes vacuum-plasma deposition of a two-layer coating. The lower layer is applied when the nitrogen pressure in the chamber 8·10-4PA. As the lower layer is applied to the titanium nitride and zirconium, or titanium nitride and iron, or titanium nitride, and silicon, or nitride of titanium and aluminum. As the upper sprayed layer such as a nitride, doped with chromium. The top layer is applied when the nitrogen pressure in the chamber 4·10-3PA. In private cases, the execution of the invention, the lower layer is applied with a thickness of 25-50% of the total thickness of the coating, and the total coating thickness is 3 to 9 μm.

From RU 2305623, 10.09.2007 also known another method of producing hard coatings for sharpening knives and other cutting tools. The method comprises applying to one side of the cutting edge surface that is harder than the material of the cutting edge, the coating has a layered or laminar microstruct the Roux, located mainly parallel to the coated side of the cutting edge. The coating may contain tungsten carbide or a mixture of tungsten carbides, mainly or completely not containing metallic tungsten. Under mixtures of carbides of tungsten understand a mixture of two or more of tungsten carbides, such as WC, W2C, W3C, W12C. the Coating may be a multi-layer coating and the top coating layer contains tungsten carbide or a mixture of tungsten carbides, mainly or completely not containing metallic tungsten. However, most of these coatings having a hardness of about 2000-4000 kg/cm2have a high coefficient of friction of about 0.3 to 0.7.

There are other ways to obtain wear-resistant coatings by vacuum-plasma deposition of amorphous carbon coatings.

For example, SU 1006402, 23.03.1983 known way to produce a protective coating on the surface of glass products by applying a layer of carbon with a thickness of 100-5000 Å, which precipitated a high-frequency ion-plasma sputtering of a graphite target at an accelerating voltage of 1-10 kV, and the surface temperature of not more than 100°C. the Method can improve the acid resistance of the coating.

From RU 96110601, in particular, a method of obtaining coatings based on diamond-like material is a, including plasma-chemical deposition of carbon from the stream of carbon-containing active particles generated in the plasma by microwave discharge mode electron cyclotron resonance source of carbon-containing reagent on a substrate made from an active zone of the plasma, as a source of reagent use a pair of halogenated hydrocarbons, for example dichloromethane.

From RU 2240376, 20.11.2004 known another way to get superhard amorphous carbon coatings in vacuum. The product is placed in a vacuum chamber. The vacuum chamber. Treat the surface with accelerated ions. Applied on the treated surface a layer of material providing adhesion of subsequent layers. Trigger pulse arc discharge on graphite cathode and receive pulsed stream of carbon plasma from a variety of cathode spots, which move along the surface of the cathode. Then condense the carbon plasma in a given area on the surface of the product to obtain superhard amorphous carbon coating. Keep the temperature of the products in the range from 200 to C by adjusting the pulse repetition frequency of electric arc discharge. Use of a pulsed stream of carbon plasma with an average energy of ions 25-35 eV and the ion concentration of 1012-1013cm-3 . The axis specified stream of carbon plasma is placed at an angle of 15-45° to a given surface. In the coating support changing the product temperature Δt in the range of 50-100K. This technology will eliminate coverage of high internal stresses of compression, resulting in warping of the substrate and peeling of the coating when it reaches a certain thickness.

Amorphous carbon coatings have high hardness close to that of natural diamond (2000-9000 kg/cm2), and a low friction coefficient of about 0.1 to 0.05. Thanks to this combination of mechanical properties of carbon coatings have been called diamond-like and are widely used in machinery, metallurgy, medicine, nanotechnology.

The number of known methods of obtaining diamond-like coatings. In particular, known methods for producing diamond-like coatings by plasma decomposition of carbon-containing gases or vapours carbon-containing liquids.

So from SU 1070949, 15.06.1993 a method of obtaining diamond-like coatings, including cathodic sputtering of graphite and condensation of the stream of carbon plasma in vacuum on the surface of the substrate, the condensation is carried out by a pulsed flow compensated current-free carbon plasma with a density of 1018-1019cm-2with-1and odlokw Elektroizolit.

From RU 94034306 known another method of obtaining a continuous thin film of diamond-like structure, comprising applying it to the substrate from plasma by microwave discharge in ECR mode in the atmosphere of the working gas or mixture of gases when applying a negative electrical bias to the substrate, outside the ECR zone, the pressure is chosen in the range of 10-4-10-1Torr, the flux density applied to the area of ECR power of 0.2 to 5 W/cm2and the substrate is chosen from a group of materials with a threshold of thermal stability lower than the room temperature and placed it at a distance from the ECR zone of at least one of its characteristic linear dimension.

From RU 2105082, 20.02.1998 known way to obtain a diamond-like coating in the plasma of low pressure, including the degradation of hydrocarbons in the cell penning and deposition of ions of a hydrocarbon product, with pre-exercise etching the surface of the product ions of the inert gas by applying a positive potential value of 0,3-3,0 kV three anode plates, put the sublayer by filing two anode plate negative potential value of 0.3-0.9 kV and the Central grounding the anode plate in an inert gas environment, and the degradation of hydrocarbons and the deposition is carried out at a feed three anode plates of positive potential value of 0.3 to 3.0 kV.

And the C EN 2118206, 27.08.1998 a method of obtaining doped diamond-like coatings. The method includes creating a plasma in the vacuum chamber by evaporation of a silicon-containing hydrocarbon and the beam of particles of alloying material by applying a high frequency voltage on polictial while before beginning the process chamber is pumped out to a pressure of not higher than 1·10-5Torr, served on the; an anode and polictial voltage, providing the steady-state deposition process and heating of the ceramic leak for supplying silicone oil to 500-800°C, is fed into the chamber argon prior to the occurrence of steady state burning plasma, incubated for 5-10 min, and then Salyut substrate from the plasma flow and increase the pressure of argon in the chamber up to 8·10-4-2·10-3Torr, after which include the submission of a silicon-containing hydrocarbon with the simultaneous inclusion of source particles of alloying material and after 3-4 min insulation substrates stop.

A method of obtaining diamond-like carbon films, including preliminary pumping chamber to a pressure of 10-6Torr, the inlet inert gas to a pressure of 10-1Torr, creating a plasma and the coating film. When this hot cathode is heated by an alternating current, the substrate serves potential from a source of DC voltage value of 300 and naked In ewout it to 200°C (US 5185067, publ. 1993). The disadvantage of this method is the low quality of the coatings, especially when the increase of its thickness above the 1-2 micron. The reason for the decline in quality are high tension elastic and graphitization coating, high resistivity (especially at a small thickness), which limits the scope of their use.

Similar methods of obtaining diamond-like coatings by plasma decomposition of carbon-containing gases or liquids are also known from RU 2297471, 20.04.2007, EN 2186152, EN 2205894, EN 95120059, EN 2099283, EN 2171859, EN 96110601, EN 97110930, EN 2254397, 20.06.2005. However, the microhardness obtained by such methods, the carbon coating is not high enough - usually

up to 4000 kg/cm2.

The disadvantage of this method is the low adhesion of the resulting coating thickness more than 1 μm.

Known methods of forming the diamond-like carbon coating in vacuum, which vacuum arc or magnetron cathode sputtering of graphite (EN 97108626, EN 2240376, EN 2003115309, EN 2002119440).

These methods, in particular, is known to EN 2005136792, 27.05.2007, a method of obtaining a superhard coatings, namely, that carry out a preliminary preparation of the product by treating the surface in a vacuum chamber with accelerated ions, applying to the treated surface of the layer of material by the method of electricpower the vacuum sputtering of a graphite cathode of the cathode spot with getting diamond-like carbon coating, wherein pre-processing the surface of the product is carried out in a vacuum chamber by argon ions with energies up to 1000 eV and at a pressure of argon gas (2-6)·102PA, then using electric arc evaporator with separation of the plasma flow is applied sublayer on the basis of the metals belonging to the group of Ti, Cr, Zr, further cause the composite layer of the metal-carbon in the same way that the previous layer, after which the product is applied diamond-like film with the help of the generator of the carbon plasma at a pulse current of 3-5 kA, and the duration of discharge is 0.2-0.5 MS, and the duration of pause of at least 10 MS, then form a protective sublayer of the combined nuclear-molecular flows from metals belonging to the group of Al, Ti, Si, Zr and carbon with changing mass % of the metal from 0 to 8, and complete the process by applying to the product a pure metal layer.

The sublayer is applied with a thickness of 0.04 to 0.06 micron, the composite layer is applied with a thickness of 0.1 μm, the diamond-like film is applied with a thickness of 0.10 μm, a metal layer with a thickness of 0.1 μm.

A disadvantage of the known methods of obtaining high-strength carbon diamond-like coatings is insufficient adhesion of applied coatings to various tool steels when the coating thickness more than 1 μm due to the high internal stresses in the diamond-like plank is. This in turn leads to insufficient wear resistance and thermal stability of the coatings, especially on tool steels.

The technical objective of the claimed invention is to improve the operational characteristics (adhesion, wear resistance and thermal stability) of the coatings; the technical result is to increase the efficiency of the tool and other products, improving the quality of materials processing such a tool.

The goal of the project is achieved by a method of obtaining a superhard multilayer diamond-like coating on the products, including pre-plasma cleaning of the surface of the product in a vacuum chamber with accelerated ions at a pressure of 10-3-10 PA, the application of plasma by the method of the adhesive layer of a thickness of 1-500 nm of metal selected from the group comprising aluminum, chromium, zirconium, titanium, germanium, or silicon, as well as their alloys, while application to the product of a constant or pulsed negative voltage 1-1500, applying the transition layer thickness of 1-500 nm, consisting of a mixture of carbon and metal belonging to the group containing aluminum, chromium, zirconium, titanium, germanium or silicon and their alloys, when the change in the increasing concentration of carbon in the mixture is from 5 to 95 at.% the simultaneous application of the product constant or pulsed negative voltage 1-1500, and applying at least one layer of diamond-like carbon films using cathode sputtering of graphite, or laser ablation of graphite, or plasma decomposition of carbon-containing gases or vapours carbon-containing liquids.

Thus, for example, a layer of diamond-like carbon film is applied with a thickness of 0.2 to 10.0 μm, and when the sputtering of graphite in the formation of the layer of diamond-like films carry out magnetic separation of carbon plasma.

In the process according to the invention pre-plasma surface cleaning products perform accelerated ions of inert gases such as argon, neon, krypton, xenon, or gases such as oxygen, nitrogen, hydrogen, freon, hydrocarbons or mixtures thereof, and during the pre-plasma treatment to the product fail continuous or pulsed negative voltage 1-2500 Century

While applying a layer of diamond-like film is carried out in the atmosphere of gases such as argon, neon, krypton, xenon, oxygen, nitrogen, hydrogen, freons, hydrocarbons or mixtures thereof at a pressure of 10-3- 10 PA.

According to the invention, in particular, diamond-like film is performed in a multilayer film, performing at least one alternation of applying a layer of diamond-like films and processing of its ions, gases, such as argon, neo is, xenon, krypton, oxygen, nitrogen, hydrogen, freons, hydrocarbons or mixtures thereof at a pressure of 10-3- 10 PA.

The method according to the claimed invention involves as variants of its implementation, in particular, application of a layer of diamond-like film is performed with at least a single interleaved layer of diamond-like film and the metal layer from the group comprising aluminum, chromium, zirconium, titanium, germanium, silicon or their alloys, the total thickness of the layers of diamond-like film is 1-500 nm and the total thickness of the metal layers is 1-500 nm.

In addition, it provides, in particular, application of a layer of diamond-like film with additional simultaneous deposition of metal from the group of aluminum, chromium, zirconium, titanium, germanium, silicon or their alloys with concentrations of metal from 5%to 95%.

This application of a layer of diamond-like film is carried out at simultaneous application to the product of a constant or pulsed negative voltage 1-1500 Century

The claimed method according to the invention is suitable for the deposition of superhard diamond-like coating of various materials (metals, glass, ceramics, plastics), while after applying it on ceramics, glass, plastics, on the surface of these products before applying the layer (s) of diamond-like p is Enki pre-applied layer of oxides or nitrides of aluminum, zirconium, chromium, titanium, silicon, germanium or mixtures thereof of a thickness of 1-100 nm.

The invention is illustrated by a drawing which shows the structure of the obtained multilayer diamond coatings. On the original product 1 is applied to the adhesive layer 2, the next is applied transition layer metal-carbon 3, which is applied to the diamond-like film 4.

Technology of application of diamond coatings consists in the following. The product is pre-cleaned of dirt, dust and the like, is placed on a stand-alone holder in a vacuum chamber in which are located the source (or multiple sources) carbon plasma, plasma source (or multiple sources) metal ion and plasma source (or multiple sources) gas ions. When reaching a vacuum of the order of 10-10-3PA product is subjected to a preliminary plasma treatment. As ions are used gases argon, neon, xenon, krypton, oxygen, nitrogen, hydrogen, freons, hydrocarbons or mixtures thereof at a pressure of 10-3- 10 PA. During pre-treatment the product is supplied as a continuous or a pulsed negative voltage 1-2500 Next Century on a clean surface plasma method put a layer of a metal from the group comprising aluminum, chromium, zirconium, titanium, silicon, germanium and their alloys thickness of 1-500 nm while p is ilozhenii to the product of a constant or pulsed negative voltage 1-1500 Century Next, a plasma method is applied transition layer thickness of 1-500 nm, consisting of a mixture of metal (aluminum, chromium, zirconium, titanium, silicon, germanium and their alloys) with variable carbon concentration, increasing from 5 to 95 at.%. Applying the transition layer is carried out with the simultaneous application of the product constant or pulsed negative voltage 1-1500 Century On the transition layer plasma method (cathodic sputtering of graphite, laser ablation of graphite, plasma decomposition of carbon-containing gases or vapours carbon-containing liquid) is applied diamond-like film with a thickness of 0.2-10 microns.

To control the coefficient of friction of diamond-like film is applied in the atmosphere of gases: argon, neon, xenon, krypton, oxygen, nitrogen, hydrogen, freons, hydrocarbons or their mixtures at a pressure of 10-3-10 PA. To reduce internal stresses in diamond-like film deposition is carried out in the form of multilayer coatings with alternating deposition of diamond coatings and processing of the coating layer ions, gases: argon, neon, xenon, krypton, oxygen, nitrogen, hydrogen, freons, hydrocarbons or their mixtures at a pressure of 10-3-10 PA. To improve the wear resistance and temperature resistance application of diamond-like film on the product carried out in a multilayer coating with alternating NAS is the basis of diamond-like films and applying a layer of metal: aluminum, chromium, zirconium, titanium, silicon, germanium and their alloys. The thickness of the diamond-like film layer 1-500 nm. The thickness of the metal layer 1-500 nm. The number of such layers may be from 2 to 1000.

To improve the wear resistance and thermal resistance of diamond-like coating application is performed during the simultaneous application of carbon and metals: aluminum, chromium, zirconium, titanium, silicon, germanium and their alloys with a concentration of the metal in the diamond-like coating is from 5 to 95 at.%.

To ensure satisfactory adhesion of diamond coatings on ceramics, glass, plastics product pre-applied layer of oxides or nitrides of aluminum, zirconium, chromium, titanium, silicon, germanium or mixtures thereof of a thickness of 1-100 nm.

The following examples illustrate the method according to the invention, but not limit it.

Example 1

As products were selected stamps size of 50×100×50 mm3made of die steel type X12. Application of diamond coatings was carried out in two ways. In the first case, the coating was carried out in a known manner, there has been a plasma cleaning product ions of argon for 20 min, followed deposited adhesion layer of titanium with a thickness of 100 nm, the applied electric arc cathode sputtering with a simultaneous application to the product of a constant negative voltage is placed 1000, next, using pulsed cathodic arc sputtering of graphite deposited diamond-like film with a thickness of 2 μm. In the second case, unlike the first, on the adhesion layer of titanium was deposited by a plasma method, a transition layer of a mixture of titanium-carbon of a thickness of 200 nm with a variable increasing concentrations of carbon from 5 to 95 at.% and then deposited diamond-like film by the same method as in the first case. In the second case, the thickness of the diamond film was 2 μm.

In the first case, the cutting edges of the stamp was observed microscopic detachment diamond coating from the adhesive layer of titanium. In the second case (with a transitional layer of titanium-carbon with variable concentration of carbon, increasing from 5 to 95 at.%) the coating quality was satisfactory, no delaminations were observed. Test stamps coated with the coatings showed that the coating in a known manner, has peeled off in places of the greatest friction in the region of the cutting edges near the beginning of the work. The term health of the stamp increased by 20% in comparison with the stamp without coating. Microscopic examination showed that in the region of the cutting edges was observed as delamination and wear of diamond-like coatings. In the second case, the term health stamp increased 3.5 times the. After testing stamp microscopic studies have shown that detachment of the coating was not observed. However, preliminary plasma cleaning was carried out in the Annex to product constant or pulsed negative voltage 1000 V, 1500, 2500 Century

Diamond-like film was applied in an atmosphere of neon at a pressure of 10-3PA or xenon at a pressure of 10 PA or in an atmosphere of nitrogen at a pressure of 10-3PA.

Example 2

Carry out the method according to the invention analogously to example 1, but put a diamond-like film (as the product of a constant or pulsed negative voltage 1500 V) in the form of a multilayer film, by alternating layers of diamond-like film with the processing of its ions of argon gas at a pressure of 10-3PA. The number of layers of diamond-like film is 20.

Example 3

Carry out a method similar to example 1, but put a diamond film in 10 layers, alternating coats it with layers of metal aluminum, or chromium, or titanium, or silicon. The thickness of the layer of diamond film is 50 nm, the thickness of the metal layers 50 nm.

Example 4

Carry out a method similar to example 1, but with a layer of diamond film is applied with simultaneous additional layers of metal titanium, or zirconium, or silicon layers at a concentration of from to 50% (in ascending order).

Example 5

Carry out a method similar to example 1, but put a diamond-like coating on ceramics, so before applying the layer (s) of diamond films on a product previously applied layer of aluminum nitride with a thickness of 1 nm, or 50 nm, or 100 nm.

Thus, the method according to the invention allows to obtain a superhard diamond-like coating with high wear resistance, thereby increasing the time efficiency of metal-cutting tools, as well as other articles with a coating obtained by this method is the reduction of internal stresses in diamond-like coating; improved tribological properties, friction coefficient, increasing hardness.

1. A method of obtaining a superhard multilayer diamond-like coating on the product, including pre-plasma cleaning of the surface of the product in a vacuum chamber with accelerated ions at a pressure of 10-3-10 PA, the application of plasma by the method of the adhesive layer of a thickness of 1-500 nm of metal selected from the group comprising aluminum, chromium, zirconium, titanium, germanium, or silicon, or alloys thereof, while application to the product of a constant or pulsed negative voltage 1-1500, applying the transition layer thickness of 1-500 nm, consisting of a mixture of carbon and metal belonging to the group, sod is readuy aluminum, chromium, zirconium, titanium, germanium, or silicon, or alloys thereof, when the change in the increasing concentration of carbon in the mixture is from 5 to 95 at.% while the application of the product constant or pulsed negative voltage 1-1500, and applying at least one layer of diamond-like carbon films using cathode sputtering of graphite or laser ablation of graphite, or plasma decomposition of carbon-containing gases or vapours carbon-containing liquids.

2. The method according to claim 1, characterized in that the layer of diamond-like carbon film coating is applied with a thickness of 0.2 to 10.0 μm.

3. The method according to claim 1, characterized in that during the sputtering of graphite in the formation of the layer of diamond-like films carry out magnetic separation of carbon plasma.

4. The method according to claim 1, characterized in that the pre-plasma surface cleaning products perform accelerated ions of inert gases such as argon, neon, krypton, xenon, or gases, such as oxygen, nitrogen, hydrogen, or freon, or hydrocarbons or mixtures thereof.

5. The method according to claim 1, characterized in that during the preliminary plasma treatment to the product fail continuous or pulsed negative voltage 1-2500 Century

6. The method according to claim 1, wherein applying a layer of diamond-like film is carried out in the atmosphere gas is, such as argon, neon, krypton, xenon, oxygen, nitrogen, hydrogen, freons, hydrocarbons or their mixture at a pressure of 10-3-10 PA.

7. The method according to claim 1, wherein the diamond-like film is performed in a multilayer film, that you are carrying out at least one alternation of applying a layer of diamond-like films and processing of its ions, gases, such as argon, neon, xenon, krypton, oxygen, nitrogen, hydrogen, freons, hydrocarbons or mixtures thereof at a pressure of 10-3-10 PA.

8. The method according to claim 1, characterized in that the application of a layer of diamond-like film is performed with at least a single interleaved layer of diamond-like film and the metal layer from the group comprising aluminum, chromium, zirconium, titanium, germanium, or silicon, or alloys thereof, the total thickness of the layers of diamond-like film is 1-500 nm and the total thickness of the metal layers is 1-500 nm.

9. The method according to claim 1, characterized in that the application of a layer of diamond-like film is carried out with simultaneous additional application of a metal from the group consisting of aluminum, chromium, zirconium, titanium, germanium, or silicon, or alloys thereof at a concentration of metal or silicon from 5 to 95 at.%.

10. The method according to claim 1, characterized in that the application of a layer of diamond-like film is carried out at simultaneous application to the product p is constant or pulsed negative voltage 1-1500 Century

11. The method according to claim 1, characterized in that when the coating product made of ceramics, glass or plastic, on the surface of these products pre-applied layer of oxides or nitrides of aluminum, zirconium, chromium, titanium, silicon, germanium, or mixtures thereof of a thickness of 1-100 nm.



 

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1 tbl, 1 ex

FIELD: technological processes.

SUBSTANCE: vacuum-plasma application of double-layer coating is carried out. As bottom layer nitride of titanium, silicon and iron is applied, which contains 1.3-1.5% of iron. As top layer nitride of titanium, silicon and iron is applied, which contains 0.4-0.6% of iron. Application of coating is implemented with application of three cathodes, which are installed in horizontal plane, from which two opposite ones contain titanium and silicon, and cathode installed between them contains titanium and stainless non-magnetic steel. All three cathodes are used in application of bottom layer, and bottom layer is applied using cathode that contains titanium and stainless non-magnetic steel and one cathode that contains titanium and silicon.

EFFECT: increase of cutting tool operability and quality of its processing.

1 tbl, 1 ex

FIELD: production processes.

SUBSTANCE: invention relates to methods of applying wear resistant coats onto cutting tools and can be used in metal working. The proposed method incorporates a vacuum-plasma spraying of a multi-layer coats. The lower layer of titanium, zirconium and aluminium nitride or carbonitride compounds is applied in proportion that follows, in wt %: titanium content makes 75.4 to 76.6, zirconium content makes 10.0 to 10.6, aluminium content makes 13.4 to 14.0. The intermediate layer of titanium, zirconium, silicon and aluminium nitride or carbonitride is applied in proportion that follows in wt %: titanium content makes 82.0 to 83.7, zirconium content makes 6.7 to 7.7, silicon content makes 0.7 to 1.0, aluminium content makes 8.9 to 9.3. The upper layer of titanium, zirconium and silicon nitride or carbonitride is applied in proportion that follows in wt %: titanium content makes 87.0 to 88.9, zirconium content makes 10.0 to 11.5, silicon content 1.1 to 1.5. The coat layers are applied by three cathodes arranged horizontally in one plane. The first cathode is made up of titanium and aluminium, the second one is made up of titanium and silicon alloy and arranged opposite the first one, while the third cathode is made up of titanium and zirconium and arranged between the first and second cathodes.

EFFECT: higher operating properties of cutting tools.

1 tbl

FIELD: production processes.

SUBSTANCE: invention relates to methods of applying wear resistant coats onto cutting tools and can be used in metal working. The proposed method incorporates a vacuum-plasma spraying of a multi-layer coat. The lower layer of titanium, chromium and aluminium nitride or carbonitride compounds is applied in proportion that follows, in wt %: titanium content makes 75.0 to 77.0, chromium content makes 10.4 to 11.5, aluminium content makes 12.6 to 13.5. The intermediate layer of titanium, chromium and molybdenum nitride or carbonitride is applied in proportion that follows in wt %: titanium content makes 78.6 to 80.1, chromium content makes 6.9 to 7.6, molybdenum content makes 6.9 to 7.2, silicon content makes 0.7 to 1.0, aluminium content makes 8.9 to 9.3. The upper layer of titanium, chromium and molybdenum nitride or carbonitride is applied in proportion that follows in percent by weight: titanium content makes 81.5 to 82.7, chromium content makes 10.4 to 11.3, molybdenum content makes 6.9 to 7.2. The coat layers are applied by three cathodes arranged horizontally in one plane. The first cathode is made up of titanium and aluminium, the second one is made up of titanium and silicon alloy and arranged opposite the first one, while the third cathode is made up of titanium and chromium and arranged between the first and second cathodes.

EFFECT: higher efficiency of cutting tool.

1 tbl

FIELD: metallurgy, crystals.

SUBSTANCE: invention relates to technology of products of polycrystalline diamond, received from the mixture of methane and hydrogen in plasma discharge. It is implemented bottom layer preparation by bite on it of grooves with formation of ground, corresponding configuration of complete product. Grooves are implemented of width, constituting doubled film thickness of complete product and depth, exceeding width. It is grown on bottom layer adamantine film from the mixture of methane and hydrogen in discharge and it is separated from bottom layer in the form of complete product.

EFFECT: simplification of receiving of complete products of polycrystalline diamond.

FIELD: engineering industry, chemistry.

SUBSTANCE: gas turbine part consists of metal base made from superalloy, a lower bonding layer and external ceramic coating. Lower bonding layer is formed on the base, and includes intermetallic material containing aluminium, nickel and platinum. External ceramic coating is attached by aluminium oxide film formed on the lower bonding layer. The latter mainly consists of three-component Ni-Pt-Al system of α-NiPt-type structure with aluminium additives, and namely Ni-Pt-AI system of NizPtyAlx composition, where z, y, and x are chosen so that 0.05 < z < 0.40, 0.30 < y < 0.60, and 0.15 < x < 0.40. Forming method of thermal protective coating on metal base made from superalloy involves forming of lower bonding layer on the base and forming of external ceramic layer attached by aluminium oxide film formed on the lower bonding layer. The latter mainly consists of three-component Ni-Pt-Al system of α-NiPt-type structure with aluminium additives.

EFFECT: improving strength and resistance of ceramic material to delamination, as well as reducing mass and production cost of protective coating.

19 cl, 11 dwg

FIELD: technological materials.

SUBSTANCE: invention is related to thin-film material with single-crystal thin-film layer and method for its manufacture. Thin-film material (1) with superconducting single-crystal thin-film layer contains substrate from nickel-based alloy (2), intermediate thin-film layer (3) formed on mentioned substrate (2) and comprising at least one layer, and superconducting single-crystal thin-film layer (4) formed on mentioned intermediate thin-film layer (3), in which upper surface (10), which represents upper surface of at least one layer of mentioned intermediate thin-film layer (3) facing mentioned superconducting single-crystal thin-film layer (4) is polished.

EFFECT: thin-film material and method for its production provide for production of single-crystal thin-film layer having improved smoothness of surface, plane orientation.

8 cl, 10 dwg, 2 ex

FIELD: metallurgy.

SUBSTANCE: invention concerns metal fabrics conservation. Particularly it concerns methods of receiving protective coatings on surface in hard-to-reach pores and defects of metal products, and can be used in mechanical engineering and archaeology. Method includes preparation and vacuum degassing of product surface. After what it is implemented surface saturation of hard-to-reach pores and defects of product by organic and/or inorganic gaseous substance and polymerisation of gaseous substance in plasma out of access for air. Vacuum degassing is implemented at temperature from 200°C till 600°C. Polymerisation of gaseous substances is implemented in plasma of glow discharge of direct or alternating-current. After polymerisation of gaseous substances on product surface it can be applied protective coating made of solution or melt of organic polymer.

EFFECT: increasing of processibility and reliability of coating on surface, in hard-to-reach pores and defects of metal products.

4 cl, 1 ex

FIELD: metallurgy.

SUBSTANCE: invention concerns methods of antiwear multiple plating and can be used in machine building, motor-car, mining and petroleum industry. Method includes vacuum-plasma coating TiZr and (Ti,Zr)N. The first is applied microlayer TiZr, then it is implemented thermomechanical activation of layers surface by means if its ionic bombardment, after what it is coated layer on the basis of titanium and zirconium nitride (Ti,Zr)N. Deposition of layers TiZr, (Ti,Zr)N and ionic bombardment are repeated at least three times, at that the last is coated layer (Ti,Zr)N. Ionic bombardment is implemented by means of titanium and zirconium ions with power 0.8-1.0 keV at temperature 450-500°C. Coating of plating layers is implemented by means of evaporation of two titanic and one zirconium cathode.

EFFECT: increasing of endurance and thermodynamic stability of materials.

2 cl, 1 tbl, 1 ex

FIELD: household goods and personal effects.

SUBSTANCE: shaving block includes shaving blade and supporting structure. Shaving blade includes substrate with wedge-shaped cutting edge limited by facets and fixed to supporting structure. Facets are about 0.1 mm wide and their internal angle is less 30°. Supporting structure may be connected to handle and provided with surfaces displaced at some distance, so that they can contact with skin. Wedge-shaped edge of blade is coated with shapeless diamond layer and situated between the said surfaces so that it can contact with skin. Wedge-shaped sharpened edge is made on substrate forming internal angle less 30° and top radius less 1200 angstrem units. Shapeless diamond layer is precipitated on sharpened edge by the selected method.

EFFECT: improved efficiency of shaving, and blades strength and resistance to corrosion.

34 cl, 10 dwg

FIELD: technological processes.

SUBSTANCE: glass wafer is used with surface area of more than 30 cm2. Set of coatings is created on wafer surface, at that set of coatings includes at least one dielectric film and at least one metallic layer. Wafer is kept in vacuumised chamber. Atmosphere is maintained that contains gas selected from group that consists of inertial gas, nitrogen, oxygen and their mixtures. Elongated cathode target is sprayed, at that it contains from 1 to 99 wt % of titanium and from 1 to 99 wt % of aluminium for application of titanium- and aluminium-containing protective coating on metallic layer for protection of metallic layer against oxidation or further heating of coated wafer.

EFFECT: coating possesses high corrosion resistance; low surface resistance and preset optical properties.

11 cl, 20 dwg, 10 tbl, 8 ex

FIELD: technological processes.

SUBSTANCE: vacuum-plasma application of double-layer coating is carried out. As bottom layer nitride of titanium, aluminium and silicon is applied, in which silicon content amounts to 0.24-0.26%. As top layer nitride of titanium, aluminium and silicon is applied, which contains 0.8-0.83% of silicon. Application of coating is implemented with application of three cathodes, which are installed in horizontal plane, from which two opposite ones contain titanium and aluminium, and cathode installed between them contains titanium and silicon. All three cathodes are used in application of bottom layer. Top layer is applied using cathode that contains titanium and silicon and one cathode that contains titanium and aluminium.

EFFECT: increase of cutting tool operability and quality of its processing.

1 tbl, 1 ex

FIELD: metallurgy.

SUBSTANCE: invention relates to metallurgy field and can be used for manufacturing of high-duty cast iron with globular graphite. For receiving of magnesium-bearing nano- modifying agent is blended with water solution of polyvinyl alcohol, chloride of magnesium and iron in molar correlation (10-5):1:1, agreeably, it is evaporated specified mixture before gel formation after what it is implemented carbonation at temperature 350-500°C in atmosphere of inert gas with formation of carbon nanotube, filled by chloride of magnesium and iron.

EFFECT: invention decrease magnesium losses 1,5-2 times with introduction of nano- modifying agents into the cast iron.

6 ex, 1 tbl, 6 dwg

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