Te-laser electrode system

FIELD: physics.

SUBSTANCE: present invention pertains to quantum electronics, particularly to electrode systems of gaseous TE-lasers. In the electrode system of TE-laser with corona preoinisation, the inner conductors of the corona preionisation devices are only connected between themselves. The outer conductors of the corona preionisation devices are connected to the main discharge electrodes.

EFFECT: provision for effective preionisation of the discharge gap, which does not require a high voltage lead through the case to the electrodes of the preionisation device.

5 cl, 2 dwg

 

The invention relates to the field of quantum electronics, in particular to electrode systems THE gas lasers, such as nitrogen, CO2, excimer.

A device of corona preionization mode THE laser, U.S. patent No. 6654402 in which the unit corona preionization mode formed by the insulating tube, the inner and outer electrodes, use electrical circuit with capacitor corona preionization mode, providing a lower voltage between the outer and inner electrodes of the preionization mode. However, to ensure that the system uses extra high-voltage elements of the voltage divider and is used sealed high voltage input power supply to the electrodes of the preionization mode through the housing of the laser, which complicates the design and reduces its reliability.

A device of corona preionization mode THE laser, U.S. patent No. 5337330. The device of corona preionization mode is an insulating tube with inner and outer electrodes. When voltage is applied between the inner and outer electrodes of the device on the outer surface of the tube formed by the corona discharge, ultraviolet radiation which ionises the gas in the zone of the discharge gap formed by the main electrodes.

However, when the device is corona Ave is in Dionisii voltage, applied to the electrodes of the preionization mode, is equal in magnitude to the high voltage applied to the main discharge gap. The high level voltage on the inner electrode device of the preionization mode reduces the reliability of high-voltage insulation electrical connection of the inner electrode of the pre-ionizer and significantly complicates the design of the dielectric tube.

The objective of the invention is to provide a reliable, efficient and cost-effective electrode system THE laser with corona pre-ionization.

Electrode system THE laser containing a pair of main extended electrodes connected to the power source and forming the bit period, and the device corona preionization mode containing insulating tube with inner and outer electrodes, the outer electrode device is connected to one of the main electrodes, installed a second device corona preionization mode containing insulating tube with internal and external electrodes, the external electrode of the second device corona preionization mode is connected to the second main electrode, the internal electrodes of the devices of the preionization mode electrically shorted by at least one conductor.

The device of the preionization mode based on corona discharge operates at a sufficient level n is pagenote electric field between the inner and outer electrodes. When the corona discharge plasma is distributed on the surface of the insulating tube, increasing the area of the outer plates and accordingly the capacitance of the capacitor formed by the pre-ionizer. When connecting the internal electrodes of the preionization mode capacity tubular capacitors of preionization are connected in series. When the uniformity of constructions of preionization the tension between internal and external electrodes of the device of corona preionization mode, half the voltage applied to the main electrodes. This half voltage sufficient for the occurrence of corona discharge on the surface of the tube. With such a substantial decrease in voltage dimensions high voltage insulator accordingly reduced, and the construction becomes simpler. In addition, as the internal electrodes of the devices corona preionization mode electrically shorted with each other, then there is no need to connect an additional power supply circuit of the preionization mode, and perform high-voltage power supplies through the housing, which prevents the occurrence of spurious breakdowns, increases reliability and simplifies the design of the electrode system.

The conductor connecting the internal electrodes has an insulating sheath. This eliminates the occurrence of spurious breakdowns with Explorer who, connecting the internal electrodes of the devices corona preionization mode, on the structural elements of the electrode system.

The insulating tube of the first device corona preionization mode, the insulating sheath of the conductor connecting the internal electrodes of the devices of the preionization mode, the insulating tube of the second device preionization mode form a single insulating element. That is, in the insulating element there are no gaps. This provides more reliable protection from breakdowns due to the lack of connection insulators while maintaining the quality of the preionization mode bit interval.

The external electrodes of the devices corona preionization mode are side surfaces of the main electrodes. This simplifies the design and reduces the dimensions of the electrode system while maintaining the quality of the preionization mode.

Established more than two devices preionization mode, the internal conductors are shorted together. Another embodiment is the location of more than two devices corona preionization mode that provides a more intense and uniform illumination of the discharge gap by ultraviolet radiation from the corona discharge.

The technical result of the proposed technical solution is the creation of a simple, compact electrode system THE laser with corona pre-ionization, reliable in RA is h and does not require high voltage input through the housing to the electrodes of corona preionization mode.

Figure 1 shows the cross section of the electrode system THE laser.

Figure 2 shows a longitudinal section of the device of the preionization mode.

Figure 1 basic extended electrodes 1, 2 form a main discharge gap. The first device corona preionization mode is formed by an insulating tube 3, the internal electrode 4, the external electrode 5. The external electrode 5 is connected by conductor 6 to the main electrode 1. The second device is a corona preionization mode is formed by an insulating tube 7, the inner electrode 8 and the external electrode 9. The external electrode 9 is connected to the main electrode 2 conductor 10. The internal electrode 4 of the first device corona preionization mode is connected only with the inner electrode 8 of the second device corona preionization mode conductor 11.

On the main discharge electrodes 1, 2 is supplied to the voltage V. the Voltage V1capacitor C1formed by a first device of the preionization mode, is determined by the formula V1=VxC1/(C1+C2), where V is the voltage between the main discharge electrodes 1, 2; C1- the capacity of the first device preionization mode, one plate of which is internal electrode 4, and a second plate which is external electrode 5; C2- capacity of the second device preionization mode, a plate which has the internal electrode 8, and the second plate of which is external electrode 9. In case of equality of containers C1and C2voltage V1on the first device to the preionization mode is equal to the voltage at the second device the preionization mode and equal to the voltage on the main discharge gap formed by the main discharge electrodes 1, 2. Thus, the insulator of the pre-ionizer is significantly less voltage, which increases the reliability of the preionization mode. On the insulating surfaces of the tubes 3, 7 corona discharge occurs, the radiation which ionizes the gas in the discharge gap, creating conditions for stable ignition volume discharge in the main discharge gap. As the internal electrodes of the devices corona preionization mode 4, 8 are electrically shorted by a conductor 11 only with each other, then there is no need to connect an additional power supply circuit of the preionization mode, and perform high-voltage power supplies through the housing, which prevents the occurrence of spurious breakdowns, increases reliability and simplifies the design of the electrode system.

Figure 2. shows the connection of the internal electrodes 4, 8 devices corona preionization mode conductor 11. The conductor 11 is enclosed in an insulating sheath 12. The internal electrodes 4, 8 devices corona preionization mode connected only with each other. the ri voltage is applied to the main discharge electrodes and the insulator 12 eliminates any break with the conductor 11 on the structural elements.

The insulating tube 3, 7 and the insulating element of the conductor 11 may be a single insulating element, that is, in the insulating element there are no gaps. While this design eliminates the possibility of electrical breakdown in the joints of insulating elements, which significantly increases the reliability of the system. Insulating material can be such dielectrics, ceramics, glass and others.

Thus, the electrode system of THE laser with corona pre-ionization, in which the inner conductors devices corona preionization mode connected only with each other, provides effective pre-ionization discharge gap, which does not require high voltage input through the housing to the electrodes of the devices of the preionization mode. The system is reliable, simple and compact.

1. Electrode system THE laser containing a pair of main extended electrodes connected to the power source and forming the bit period, and the device corona preionization mode containing insulating tube with inner and outer electrodes, the outer electrode device is connected to the first main electrodes, characterized in that it further established a second device corona preionization mode containing insulating tube with internal and external electrodes, the external electrode is which devices corona preionization mode is connected to the second main electrode, the internal electrodes of the devices of the preionization mode electrically shorted by at least one conductor.

2. Electrode laser system according to claim 1, characterized in that the conductor connecting the internal electrode has an insulating sheath.

3. Electrode laser system according to claim 2, characterized in that the insulating tube of the first device corona preionization mode, the insulating sheath of the conductor connecting the internal electrodes of the devices of the preionization mode, the insulating tube of the second device preionization mode form a single insulating element.

4. Electrode laser system according to claim 2, characterized in that the external electrodes of the devices corona preionization mode are side surfaces of the main electrodes.

5. Electrode laser system according to claim 2 or 4, characterized in that you have more than two devices preionization mode, the internal electrodes are shorted to each other.



 

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