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Heterostructure for photocathode

IPC classes for russian patent Heterostructure for photocathode (RU 2335031):
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FIELD: physics.

SUBSTANCE: invention may be used in structures of photocathode in optoelectronic systems, secondary emission photocells, detector modules of ionising radiations, systems of images recognition, etc. According to invention, in heterostructure for photocathode that contains diamond layer of p-type conductivity with nanodimensional topological irregularities on its surface, as nanodimensional topological irregularities auto-emissive diamond points or diamond crystalline nanoparticles are used that are regularly positioned, surface of layer, except for the said irregularities, being covered with conducting amorphous carbon or nanocarbide film. Heterostructure may be installed on wafer, in which cavity is provided.

EFFECT: possibility to obtain efficient photocathodes with expanded spectral area of radiation reception on the basis of suggested heterostructure, at that obtained photocathodes being resistant to thermal and radiation loads.

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The invention functionally can be used as the material for the device, proportional to convert optical radiation into a stream of electrons, and the action of which is based on the effect of photoelectron emission. The invention can be effectively used as a photocathode in optoelectronic systems, for example, in electro-optical converters), photomultipliers, in the detector modules of ionizing radiation, image recognition, etc...

As far border of the conversion and quantum yield are determined by the work function of electrons, while generating the most types of photocathodes for the IR spectral range using materials with a low work function. To this end, the working surface of such materials, with the aim of reducing the negative electron affinity, adsorb "electrophoretically" atoms. In particular, known analogs of this invention may be noted the materials for photocathodes of alkali halide compounds (e.g., antimony-cesium photocathodes), photocathodes based on cesium telluride, photocathodes based on the p-type gallium arsenide and gallium arsenide-gallium aluminum or gallium arsenide-indium arsenide, as well as photocathodes based on multilayer narrow-gap semiconductor heterostructures [1, 2]. It is not the remains of these photocathodes - analogues are unsatisfactory stability associated with the potential migration of cesium atoms, the relatively low values of the quantum yield for "zirovanii" metal photocathodes, and low radiation resistance photocathodes based semiconductor Homo- (hetero-) epitaxial structures and the need for forced cooling devices based on narrow-gap heterostructures.

Known field emission materials based on diamond films, the possibility of effective electron emission from which is based on a negative affinity for electrons from diamond films p-type conductivity [3]. However, they cannot be used for proportional conversion of infrared radiation in the electron flow due to the transparency of the diamond to the IR radiation. For efficient proportional conversion of light quanta (including near IR region) in the flow of electrons, the necessary materials with a high coefficient of "black" and high photoemission ability. The presence of a negative electron affinity of the diamond films of the p-type will allow nonequilibrium electrons efficiently to leave the surface of the film. Thus, if, in addition, to implement photocathodes based on diamond films, the ability to efficiently convert the photons of infrared radiation in NERV the ovesna electron-hole pairs, that is because of the negative electron affinity it will allow to count on the possibility of implementing the efficient cathodes. In this case, they can be used as photocathodes, alternative photocathodes based on the volatile alkali halide materials, or photocathodes based on narrow-gap heterostructures numerous analogs of the present invention.

Real diamond materials, especially polycrystalline diamond film, not have a negative electron affinity, which, apparently, is due to their high level of defects. Currently, however, there is an experimental material confirming a stable field emission of electrons into vacuum from monocrystalline or polycrystalline bulk diamond films p-type conductivity [4], in a certain way microstructured (having, for example, on the surface of the system of needles). For more, not less valuable advantage photocathodes based on diamond films, high resistance to ionizing radiation (the highest of all solid non-metallic materials [5]). In the present invention, due to the observed properties of diamond microstructured structures [4], we propose to use them as a prototype of the present invention.

Direct IP is the use of diamond films as a material for photocathodes in the optical range (visible and near infrared parts of the spectrum of electromagnetic radiation) is impossible, due to shirokozonnoj diamond, and therefore a high degree of transparency to electromagnetic radiation in the optical frequency range (width of the forbidden zone diamond ˜5 eV, the wavelength of the red border ˜0.4 µm).

The aim of the present invention is to provide a radiation resistant and stable photocathode with an extended spectral region receiving radiation including near IR region.

For efficient use of diamond microstructured films photocathodes we offer a heterostructure that includes layers of diamond microstructured films and diamond-like carbon film [6]. This design, in our opinion, will allow you to get the photocathodes for a wide optical range of electromagnetic radiation, including visible and near (...6,0 0,9 µm) IR range. Indeed, the ability to effectively use this design for the development of IR photocathodes based:

- on the possibility of autoemission electrons from the diamond microstructured films of p-type conductivity [4], which allows to calculate the effective output of nonequilibrium electrons;

on the technical capabilities of the deposition on the surface of a microstructured diamond films (micro) nanoscale films with high ratios of "black" and satisfy your high is satisfactory adhesive properties [6];

- high resistance of the diamond film to a dose rate of ionizing radiation (radiation resistance) [5].

Thus, it becomes possible to realize the photocathode, working effectively in a wide spectral region (including the near IR region). The objective is achieved by designing heterostructures consisting of diamond microstructured film of p-type conductivity (in the particular case of the film surface on which are formed regularly spaced automatisee tip) and a film made of a material that efficiently absorbs electromagnetic radiation at optical and IR ranges, for example, diamond-like carbon or nanocarbon materials.

There are two options of design implementation photocathode on these materials.

Option 1.

Heterostructure containing a layer of diamond p-type conductivity, with nanoscale topological inhomogeneities on the surface, the surface of which, except the surrounding areas of these inhomogeneities, is covered with a conductive amorphous carbon or nanocarbon film, of a thickness of less height of these inhomogeneities.

Option 2.

Heterostructure for option 1, characterized in that the surface of heterogeneous phase region is made of diamond nanocrystals integrated the s (embedded) in a conductive amorphous carbon or monocarbide phase and is situated on the substrate, in which the cavity area that includes a statistically significant number of the above-mentioned diamond nanocrystallites.

The result is a design photocathodes, in which, in the direction of application of the field decreases the potential barrier, and therefore, in this direction sharply increases the probability of autoemission nonequilibrium electrons.

To implement based on diamond and carbon films efficient photocathodes in the optical range, including the infrared range, in full compliance with the proposed options 1 and 2 structures, it is proposed to do the following set of process procedures.

For option 1. To take the diamond film and at least one of its surfaces micro (nano) structured (for example, by forming it of a system of needles); on the surface of the thus formed diamond coating, except at least the local areas of nanoscale diamond needles by emitting the electrons, causing carbon or nanocarbon film. However, these microheterogeneity can be formed as follows: on the surface film of diamond apply a mask (for example, vanadium/aluminum), then using a photo-or electron lithography on a given pattern formed in the photoresist circles (or rings), then we perform the etching su is th the surface of the mask (aluminum and vanadium), which was opened after removal of the exposed areas (i.e. stay away from the mask only mentioned circles or rings of V/Al), then we perform the gas-phase etching of the surface layer of the diamond masked by aluminium sections in the form of circles (rings) - to the depths ˜0,5...1,0 μm, then the deposited diamond-like carbon or nanocavity layers of a thickness of less height above heterogeneity (˜0.15...0.3 microns). At the end of this set of procedures received heterostructure (surface - of a thickness of ˜0,15 0,30...mkm - heterogeneous phase region)consisting of diamond-like carbon phase (due to the high ratio of black performing the function of detecting the infrared image and proportional to its transformation into a nonequilibrium electron-hole pairs) and diamond needles with submicron (in the case of a mask in the form of a circle) in diameter, or tubes with submicron nanometer diameter and the thickness of the walls (in the case of a mask in the form of a ring) and height ˜ 1 micron.

Micro- (nano-) structure of the diamond film may be made by dry plasma-chemical etching (for example, in a mixture of argon and oxygen) its surface [7, 8], masked by a given pattern film of aluminum.

Apply absorbing optical radiation coating of conductive carbon or NanoCare the Noah films by using plasma thermal, or magnetron-thermal method of application [9].

For option 2. Apply on the surface of the substrate (including a substrate coated with a functional layer, such as carbon layer) nanocrystallite of the diamond. Then through the use of thermal plasma, or magnetron-thermal method of application [9] precipitate carbon or nanocarbon film. Then by the method of etching liquid or gas-phase plasma ICP (method indutsirovanno-coupled plasma) etching to form in the substrate cavity until lying on her heterophase structure.

Thus, mentioned in the second embodiment, the functional surface layer (the thickness is less than 0.3 μm, the characteristic thickness of the absorption of infrared radiation in the black carbon layer), as in the first embodiment represents a heterogeneous phase region (side by side phase of diamond and phase carbon or carbide, for example, Mos-carbide molybdenum).

This option greatly simplifies the method of manufacturing a heterostructure for photocathode, reducing it almost to the deposition of carbon or nanocarbon film on the surface of the substrate with pre-applied on a given pattern by the powder of diamond nanocrystallites. The deposition process may be, for example, that using ultrasound in isopropyl alcohol have implemented the e diamond nanocrystallites in the photoresist; perform photolithography on the photoresist and get the needed pattern of photoresist on the substrate; conducting annealing, burning the photoresist; the resulting structure of the deposited diamond-like carbon or nanocavity layer.

In the second design option, in addition to the diamond substrate can be used in any other, for example of silicon. As the latter will be the absorbing medium, the area of the substrate under the working layer is subject to subsequent removal. Thus, the active region of the heterostructure to the photocathode will be in the form of a membrane on the substrate. The procedure of forming the cavity may be: is masked with aluminium front (with the already formed heterostructure for photocathode) and the back side of the substrate; on the backside photolithography is performed on the aluminum and it reveals a square (circle, for example) over an area of the substrate to be removed by etching, is performed (for example, by ion-linked etching) etching "well" in the thickness of the substrate until the aforementioned heterogeneous phase region (or, if the layer of polycrystalline diamond grown on silicon substrate, Watervliet well up to the diamond layer). The cross-sectional area referred to "the well" has to significantly exceed the area of nanosized topologies the Oh heterogeneity with its surroundings. For example, when density of nanocrystallites diamond ˜1012cm-2the cross-sectional diameter of the well must be substantially greater than 10 nm (an area larger than 100 nm2so that the cross section of the well was statistically significant number of discontinuities ˜1000...10000 units (for reasons of minimizing electrical noise). I.e. the diameter of the well must choose greater than 1 μm, it is achievable within current technological capabilities, for example, on the structures of the SOI (silicon on insulator). For the most tasks diameter wells will be sizes ˜0,5...100 mm

The positive effect in the inventive structures when implementing the above methods of their realization is achieved by the following causal events:

photons, absorbed carbon (or monocarbide) film with a high ratio of black in the range 0.4...6,0 µm, give birth to it nonequilibrium electron-hole pairs;

- born non-equilibrium electrons in tandem external electric field potential difference tunneling in free space through the potential barrier of the "triangular" shape formed by the superposition of energy affinity nanoscale thickness of the carbon film, and the film diamond and keen in the direction of the "pull" of the electric field near the diamond NAS the size of the tip.

The combination of these reasons leads to the possibility proportional to convert optical images into a picture image in photoelectrons.

An example of the construction of the photocathode and the method of its implementation.

On prepared by known methods (shaded in organic solvents, for example benzene or isopropyl alcohol, and the subsequent processing nizkoosnovnymi flow of oxygen-argon plasma) sample surface of the monocrystalline (or rough) diamond film (substrate) apply (for example, by the method of thermal spraying) two-layer film coating vanadium/aluminum, with layer thicknesses, respectively, 30 nm/5000 nm. Known methods (for example, by photolithography or electron lithography, followed by etching of the listed layers) performed the predetermined pattern on the applied coating, for example, in the form of a set of regularly spaced circles with a diameter of 0,5...1,0 μm. Then put the sample into the working chamber of the dry chemical etching, such as etching in the environment of the oxygen-argon plasma (0,2:0,8). When the plasma power ˜500 watts, time, etching ˜20 minutes on the surface of diamond films formed by the combination of micro-size particles of needles height ˜...1,0 0,7 µm with nanoscale diameter of the above-mentioned points. Then pose the CTV total magnetron sputtering and plasma-thermal deposition of reagents from molybdenum and carbon or thermal deposition of carbon on the microstructured surface of the diamond film apply a film of nanocarbon metals (molybdenum, chromium, tungsten or titanium), or diamond-like amorphous carbon having a wavelength range of 0.4...6 μm, the ratio of black ˜0,8.

To a conductive carbon film (or nanocarbon metals)deposited on diamond microstructured film, methods of microelectronic technologies (for example, thermal evaporation and photolithography on the deposited film) formed by a galvanic connection with the contact pad.

In the case of another constructive option (option 2) implementation of the photocathode (with the use of conductive carbon or monocarbide absorbing film and nano-sized diamond crystallites) on the carrier substrate, e.g. a substrate of monocrystalline silicon, the above methods gas-phase deposition cause carbon or nanocarbon film nanoscale thickness. Then, the surface of the obtained film are covered with a photoresist, is formed in the figure and is applied by drawing, for example, using ultrasound, the arrays of diamond nanocrystallites, then burn (dissolved) photoresist and through re-deposition of nanoscale thickness of the carbon film fixed nanocrystallites on the surface of the discussed patterns and then form between nanocarbon film and the contact pad galvanic connection.

The proposed design of photocathodes are made using eco-friendly CVD technology with carbon sources, with a fairly low temperature (˜70...120° (C) deposition of the active layers, which allows not only to produce them as a separate component of hybrid design photomultiplier tube or an electron-optical Converter, but also to integrate the discussed photocathodes in the finished integrated circuit and the device being thus entirely within the integral structure (schema). The materials used and the structure as a whole are radiation-resistant and heat-resistant.

Literature:

1. Salikov, VA the night vision Devices. // Special technique, 2000, No. 2, pp. 40-48.

2. Estera L/, Sainer, T., at oth. // SPIE, 1994, v.2551, p.135-143.

3. F.J.Himpsel, J.A.Kuap, J.A.van Vechten and D.E.Eastman. Phys. Rev. B, 20, 624(1979) (prototype).

4. R.J.Nemanich, P.K.Baumann, M.C.Benjamin and oth. Appl. Surface science 130-132, 694, (1998).

5. C.Davies. Proc.R.Soc. (London), A36, 507 (1974).

6. V.K.Dmitriev, V.N.Inkin, G.G.Kirpilenko, B.G.Potapov, E.A.Ilyichev, E.Y.Sheukhin. // Diamond and related materials 10 (2001), 1007-1010.

7. Honda, K., T.N. Rao, D.A. Tryk at other. J. Electrochem. Soc., 2000, 147, 659-667.

8. V.V.Dvorkin, Il'ichev E.A., Poltoratsky E.A., at other. // Diamond and related materials, 12, 2003), 2208-2218.

9. L.P.Sidorov, V.K.Dmitriev, V.N.Inkin. Patent to be publiched in Russian, 2000103496, 25-02-2000.

1. Heterostructure for photocathode containing layer of diamond p-type conductivity with nanoscale topological inhomogeneities on it n the surface, characterized in that as nanoscale topological inhomogeneities used regularly located automatisee diamond tip or diamond nanocrystallites and the surface layer, except these inhomogeneities, is covered with a conductive amorphous carbon or nanocarbon film.

2. Heterostructure for photocathode according to claim 1, wherein the heterostructure is situated on the substrate in which the cavity.

 

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