Gas-discharge laser

FIELD: electrical engineering, physics.

SUBSTANCE: laser incorporates elongated solid main electrodes, each furnished with, at least, one UV-preionisation device. The gas flow zone is formed by gas flow dielectric guides and the main discharge electrode working surfaces. The said preionisation devices are arranged outside the gas flow zone to enlighten the gap between the main discharge through the gap between the main discharge electrodes and the flow dielectric guides.

EFFECT: laser efficient operation under the conditions of high pulse rate.

11 cl, 3 dwg

 

The invention relates to the field of quantum electronics, in particular to discharge THOSE lasers, such as excimer, nitrogen, CO2-lasers.

THE laser, U.S. patent No. 4240044. In this device the pre-ionizer of corona discharge is located near the side surface of one of the main electrodes at a distance from the opposite electrode is larger than the distance between the working surfaces of the main discharge electrodes. The pre-ionizer covers only a part of the discharge gap and the surface of only one of the opposite main discharge electrode, which does not allow to obtain a stable discharge.

THE laser, U.S. patent No. 6546036 in which devices corona preionization mode installed inside the discharge electrodes. As the operating surfaces of the main electrodes consist of several parts, which are located at a distance from each other, the discharge of the pump between the main electrodes is obtained heterogeneous and unstable, which does not ensure high quality of the laser radiation.

Known electrode device THE laser, RF application No. 2007100984. In this device, the internal electrodes of preionization corona discharge is connected by a conductor that allows you to get a laser pre-ionization of the gas mixture without bushings through the housing discharge chamber.

p> THE laser with high pulse repetition rate, Japan's bid No. 2004186310. In this laser preionization corona discharge are located on the four sides of the discharge gap formed by solid electrodes. However, premonitory are located in the gas flow, which increases the resistance to gas flow. Gas moving at high speed, creates local turbulence propagating in the area of the discharge pump. This prevents stable operation, high pulse repetition rate. The location of preionization directly in the zone of flow near the electrodes can lead to spurious electrical breakdown between the main electrodes through premonitory. In addition, because predominately located near the main discharge gap formed by the main discharge electrodes, the electric field in the main discharge gap is distorted by the presence of devices preionization mode, which negatively affects the quality of the volumetric gas discharge and reduces the uniformity of the beam of laser radiation in cross section. Predominately cover not only the area of the discharge volume, and the surface of the insulator located between the high voltage electrode and the housing, which requires an increase in size of the laser.

The objective of the invention is the creation of asiatrading THE laser working effectively in high pulse repetition rate.

Gas discharge laser containing a pair mounted in the housing and connected to the power source of the main solid long electrodes, the operating surfaces of which form an area of volume discharge, near the side surface of each of the main electrode, the distance to the opposite electrode is larger than the distance between the working surfaces of the main discharge electrodes installed at least one device for ultraviolet preionization mode, a means of pumping gas, radiator, window to output radiation at the gas inlet to the zone volume discharge and outlet installed dielectric guides the gas stream, at least two of which are installed with clearances on the main discharge electrodes, the device of the preionization mode located outside the gas stream formed by directing the gas flow in such position that the ultraviolet radiation from each device of the preionization mode came into the zone volume discharge through these gaps.

Ultraviolet radiation from devices preionization mode gets into the zone volume discharge with at least two opposite sides, which provides illumination of the shadow zones, which occur when using only one of the pre-ionizer, udaljenost opposite electrode by a distance the greater the distance between the electrodes. The availability of preionization mode each electrode and the fact that ultraviolet radiation from devices preionization mode gets into the zone of discharge volume and surface opposite to the main electrode, provides the ionization of the gas throughout the bulk of the discharge, including zones of the working surfaces of the main electrodes, which creates conditions for stable quality volume discharge. Because ultraviolet radiation from preionization is the volume of the gas discharge through the gap, the lighting of other parts of the laser is minimized. The level of illumination by ultraviolet radiation from devices preionization mode of insulator surfaces is reduced, which eliminates breakouts and reduces losses applied to the electrodes of energy due to the surface current leakage, ensuring the stability of the laser for a long time. Directing the gas stream to form a uniform gas flow in the zone of the discharge volume and reduce drag Gazpromenergo circuit. Device preionization mode are located outside of the main gas stream formed by directing the gas stream and the working surfaces of the main discharge electrodes, and thus, do not create obstacles to the expansion of the gas with high speed, ensure that the supports the operation of the laser with high pulse repetition frequency. Device preionization mode illuminate the zone volume discharge through the gaps, removed from the working surfaces of the main electrodes and the guide thread, so the electric field in the zone of the discharge volume is not distorted, thereby increasing the uniformity of the discharge. The presence of electrically solid dielectric guides eliminates the possibility of spurious electrical breakdown, which can be initiated by the device of the preionization mode. Finally, the proposed solution allows to obtain a spatially homogeneous volumetric gas discharge between the main discharge electrodes with a higher pulse frequency, without the formation of unwanted breakouts as on the surface of insulators and gas gaps, and to ensure stable operation of the laser with a larger resource.

Device preionization mode are located on the exit side of gas from the zone main discharge volume. In this embodiment, the proposed technical solution of the gas in the zone of the discharge volume is not contaminated products works preionization and has high electric strength, since the products of the preionization mode is not carried by the main thread in the zone volume discharge. In addition, the absence of gaps between the electrodes and the guides of the input flow of gas in the discharge gap the way is there a more uniform flow in the discharge gap. Both factors contribute to a more qualitative volumetric gas discharge pump, which is essential for providing high spatial and spectral characteristics of laser radiation.

Device preionization mode are located on the side of the gas inlet zone volume discharge. With this arrangement, the clearance between the guide thread and the main discharge electrodes are located in the area coming from the pumping means into the zone volume discharge gas, electric strength which higher electric strength of exhaust gas at the exit from the zone of discharge volume, which allows you to bring the working surface of preionization the discharge gap without causing unwanted breakouts. This increases the intensity of the preionization mode in the zone of the discharge volume, which is important, for example, for CO2-lasers.

One of the devices of the preionization mode is from the gas inlet to the zone volume discharge, and the other device is the preionization mode is located on the exit side of gas from the zone of discharge volume. With such design, the area of the discharge volume is more evenly illuminated by the radiation from preionization in cross section of the discharge volume of the pump, which allows to obtain high-quality homogeneous volumetric discharge in the cross section perpendicular to the optical axis and, respectively, more than ednor is the initial energy distribution of the beam.

Device preionization mode is set in each of the lateral surfaces of the main electrodes. The location of preionization with the four sides of the zone volume discharge allows to obtain more intense and uniform illumination zone volume discharge and, accordingly, a more uniform distribution of energy in a beam of laser radiation and to increase the efficiency of the laser.

The guides are installed with a gap relative to the main discharge electrodes and side surfaces of the electrodes form an additional gas channel, where the radiating portion of the device of the preionization mode. Additional gas channel supports the emitting part of the pre-ionizer operable in mode high pulse repetition rate, removing the products of the operation of the device of the preionization mode and cooling the working area of the pre-ionizer.

The device of the preionization mode is a device of a corona discharge preionization mode that contains the inner electrode and the insulator. The device of the preionization mode based on corona discharge ensures uniform along the length of the electrodes ionizing radiation in the discharge volume of the laser when the compactness and simplicity of construction.

At least one device of the preionization mode is installed in the groove in the side surface of the main discharge electrode. This allows you reduce the shape, the dimensions of the electrode system of the laser, therefore, to reduce the inductance of the discharge circuit of the pump, which increases the conversion efficiency of electric power of the pump laser radiation, and this is essential, especially for excimer lasers.

At least one device of the preionization mode is set in the longitudinal groove in the side surface of the guide gas flow directed toward the side surface of the main discharge electrode. It helps to minimize exposure to ultraviolet radiation of other parts of the laser to eliminate the possibility of a breakdown on the surface of high-voltage insulators, which is especially important for surfaces of insulators and guides that are close to high-voltage electrode discharge pump.

At least one directing the gas stream and the insulator device of preionization mode is executed in the form of one of the dielectric element. With such design, the insulator device of preionization mode and the extended stream is designed as one element of a dielectric material, in which an internal electrode. When converted to the gas flow side of this dielectric element performs the function of directing the main gas stream, and turned to the side surface electrode side performs the function of the working surface of the pre-ionizer and the walls of the additional gas to the channel for removal of products of corona discharge. This simplifies the design of the laser and reduces the problem of heat removal from smoothly coupled with directing the flow of the working surface of the pre-ionizer.

The internal electrodes of the devices corona preionization mode are connected by conductors. In this version for preionization not required to connect an additional power supply circuit of the preionization mode, and perform high-voltage power supplies through the body, which significantly simplifies the design of the laser and makes the proposed solution is easily implemented.

The technical result of the proposed solution is the creation of a gas discharge laser, providing a high pulse repetition rate and high quality of the laser radiation.

Figure 1 shows the cross section of the laser, in which predominately corona discharge established by the exit gas from the zone of discharge volume, and placed in the grooves of the electrodes and the guides of the stream.

Figure 2 presents the cross-section of the electrode of the laser system of figure 1

Figure 3 presents the cross-section of the electrode of the laser system in which predominately corona discharge is established from the gas inlet to the zone volume discharge, and on the output side and is made with the integrated performance of preionization and guides flux is A.

In figure 1, 2 the main electrodes 1, 2 is connected to the power source 3, is installed in a sealed enclosure formed by a metal chamber 4 and the insulating cover 5. As can be seen from the figures, the pre-ionizer of corona discharge 6 is installed in the recess of the main electrode 1, the distance from the electrode 2 is larger than the distance between the electrodes 1, 2. The external electrode device of the preionization mode 6 is the core electrode 1 and the outer electrode device of the preionization mode 7 is the main electrode 2. The pre-ionizer of corona discharge 7 is installed in the recess of the electrode 2, the distance from the electrode 1, is larger than the distance between the electrodes 1, 2. The guides thread 8, 9 are installed with clearances S1 and S2 relative to the electrodes 1, 2. The guides 8, 9, 10, 11 and surfaces of the main electrodes 1, 2 to form the zone of formation of a homogeneous high-speed gas flow. The guides 10, 11 form a wall confuser input gas stream into the zone of discharge volume, the guides 8, 9 form a diffuser at the exit. Device preionization mode is made of dielectric tubes 12, 14 with the internal electrodes 13, 15 and installed in such a position relative to the electrodes and directing flow to through the gaps S1 and S2 to provide full illumination of ultraviolet radiation zone volume discharge D, located between the workers what poverhnosti main discharge electrodes 1, 2. The electrode 1 high and is mounted on the insulating cover 5, the electrode 2 is grounded and low-inductance connected to the power source through getpropecia the conductors 16, 17. Installed in the housing means of the circulation of the laser gas mixture in the form of impeller diameter fan 18 and the radiator cooling the gas mixture 19. Channel F runs along the working surface of the pre-ionizer 7 and connects the zone Gazpromenergo circuit with different gas pressure. The window 20 is used to output laser radiation from the gas discharge chamber.

The device of figure 1, 2 is as follows. When turning on the laser pumping means 18 generates a gas flow in a closed getprocessor the path of the laser. The guides 8, 9, 10, 11 set as the walls of the cone-confused transition and form in the zone of the discharge volume D between the electrodes 1, 2 of the uniform stream with velocity 10 m/s When applying a high voltage pulse between the internal electrode 13 and the electrode 1 and between the internal electrode 14 and the electrode 2 devices preionization mode 6, 7, on the working surfaces of preionization formed by the corona discharge plasma. Ultraviolet radiation from the plasma corona discharge through the gaps S1 and S2 between the guide thread and electrodes covers the bit period and surfaces of the electrodes 1, 2, ionizing the gas in the zone of yameogo discharge D. Then the voltage applied to the main electrodes 1, 2 from the power source 3. In the discharge gap, the gas which is ionized by the radiation of the corona discharge occurs volumetric gas discharge pumping. Area volume discharge D is fully illuminated by radiation from preionization with two sides that provides high-quality homogeneous volumetric discharge and uniform distribution of energy across the beam of laser radiation.

Subsequent pumping pulse is the repetition of the above sequence of processes. Because ultraviolet radiation from preionization 6, 7, is the volume of the gas discharge through the gaps S1 and S2, the lighting of other parts of the laser is minimized. The level of illumination by ultraviolet radiation from devices preionization mode of the dielectric surfaces of the guides 8, 10 is reduced, which eliminates breakouts and reduces losses applied to the electrodes of energy due to the surface current leakage, ensuring the stability of the laser for a long time. Device preionization mode illuminate the zone volume discharge D through the gaps, removed from the working surfaces of the main electrodes and the guide thread, so the electric field in the zone of the discharge volume is not distorted, which positively affects the homogeneity of the discharge. The presence of electrically durable dial krichesky guides eliminates the possibility of spurious, competing with the discharge of the pump, electrical breakdown between the electrodes and preionization. It is particularly important that eliminates parasitic breakdown by demolished downstream worked in the previous pulse pumping gas volume, dielectric strength which is reduced by the products of the discharge pump. This allows to increase the pulse frequency at the same speed gas flow. Device preionization mode are located outside of the main gas stream formed by directing the gas stream and the working surfaces of the main discharge electrodes, and thus, do not create obstacles to the expansion of the gas at high speed, which provides the laser with high pulse repetition frequency. Directing the gas stream is made with smooth, paired with the working surface of the electrode surface and thus form a uniform gas flow in the zone of the discharge volume, and reduce resistance Gazpromenergo circuit. All this allows for a smaller velocity of the gas stream to obtain a higher pulse frequency, which is important, because the power required to generate a gas flow, proportional to the flow velocity in the third degree. Thus, the proposed design of the laser ensures efficient operation of the laser with high quality RA is the number of mode high pulse repetition rate.

In the embodiment shown in figure 3, directing the gas stream and the insulator device of corona preionization mode is designed as one solid dielectric element 20, i.e. integrated. The dielectric element 20 is installed with a clearance relative to the main electrode 2. The inner electrode 21 of the preionization mode is located near the surface R of the dielectric element, facing to the side surface of the electrode 1. The gap serves as additional gas channel F. Similarly installed rails 22, 24, 26 with the internal electrodes, respectively, 23, 25, 27. The geometrical arrangement of the working surfaces R, which develops corona discharge preionization mode selected from the condition that the total exposure from all areas of corona discharge through the gaps provided full illumination zone volume of the gas discharge.

The sequence of operation of the laser in figure 3 is similar to the above. As the internal electrode of the preionization mode 21, 23, 25, 27 located near the side surface of the main electrode 1, 2, it is in this zone there is greatest electric field strength on the surface of the P develops corona discharge preionization mode. Since the internal electrode of the preionization mode 21, 23, 25, 27 is removed from the surface R facing the area of the main gas stream, corinnaharned it does not occur. Electric strength surface R is important because it is located between the high voltage electrode 1 and the return conductors 16. Integrated dielectric element has a solid, smooth surface, which creates optimal conditions for additional gas flow F between the side surface of the main electrode 2 and the surface of the dielectric element R, which is formed by the corona discharge plasma. The location of the devices of the preionization mode from the four sides of the zone volume discharge allows to obtain more intense and uniform illumination zone volume discharge both in the transverse and in the longitudinal cross-section area volume discharge pump. Accordingly, the energy distribution in the beam of the laser under these conditions becomes more homogeneous, and the efficiency of the laser is increased.

1. Gas discharge laser containing a pair mounted in the housing and connected to the power source of the main solid long electrodes, the operating surfaces of which form an area of volume discharge, near the side surface of each of the main electrode on the distance to the opposite electrode, is larger than the distance between the working surfaces of the main discharge electrodes installed at least one device for ultraviolet preionization, a means of pumping gas, radiator, OK is and to output the radiation,

characterized in that the gas inlet to the zone volume discharge and outlet installed dielectric guides the gas stream, at least two of which are installed with clearances on the main discharge electrodes, devices preionization are located outside the gas stream formed by the above guides the gas flow in such position that the ultraviolet radiation from each device of preionization came into the zone volume discharge through these gaps.

2. Gas discharge laser according to claim 1, characterized in that the device preionization located on the exit side of gas from the zone of discharge volume.

3. Gas discharge laser according to claim 1, characterized in that the device preionization are located on the side of the gas inlet zone volume discharge.

4. Gas discharge laser according to claim 1, characterized in that one of the devices preionization is from the gas inlet to the zone volume discharge, and the other device is preionization is located on the exit side of gas from the zone of discharge volume.

5. Gas discharge laser according to claim 2, characterized in that the device preionization installed at each of the lateral surfaces of the main electrodes.

6. Gas discharge laser according to any one of claims 1 to 5, characterized in that the guides are installed with a gap relative to the main bit is the breaking of the electrodes, and side surfaces of the electrodes form an additional gas channel, where the radiating portion of the device preionization.

7. Gas discharge laser according to claim 6, characterized in that the device preionization is your preionization corona discharge, containing the inner electrode and the insulator.

8. Gas discharge laser according to claim 7, characterized in that at least one device preionization installed in the longitudinal groove in the side surface of the main discharge electrode.

9. Gas discharge laser according to claim 7, characterized in that at least one device preionization installed in the longitudinal groove in the side surface of the guide gas flow directed toward the side surface of the main discharge electrode.

10. Gas discharge laser according to claim 7, characterized in that at least one directing the gas stream and the insulator device of corona preionization made in the form of one of the dielectric element.

11. Gas discharge laser according to claim 7, characterized in that the inner electrodes of the devices of the crown preionization are connected by conductors.



 

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