Device for machining of semiconductor plates

FIELD: production of pieces of electronics, applicable, for example, in operations of cleaning of semiconductor plates with the aid of brushes and mega sound.

SUBSTANCE: the device has loading and unloading holders, mechanisms of their vertical motion, mechanism for extraction of the plate from the holder, mechanism for loading of the machined plate in the holder, mechanism of horizontal motion of the plates, machining unit actuating the centrifuge installed in the process bath, brush. The mechanism of vertical motion of the unloading holder is installed at an angle to the horizontal plane in the direction of the plates feed, and the mechanism for extraction of the plates from the holder and the mechanism for loading of machined plates in the holder are made in the form of a suction cup with a vacuum table installed on a carriage for longitudinal motion, the suction cup of the mechanism for extraction of the plates from the holder is installed for turning on the carriage through a preset angle, the carriage is fastened at the same angle to the horizontal plane as the mechanism of vertical motion of the unloading holder, besides, the mechanism of horizontal motion of plates is made in the form of two manipulators for turning in the horizontal plane, each manipulator is provided with a carrier in the form of a ring with an inner tapered surface.

EFFECT: enhanced reliability of device operation and quality of machining, simplified construction.

2 cl, 9 dwg

 

The invention relates to the production of electronic devices and can be used, for example, on the operations of cleaning semiconductor wafers using brushes and MegaSpace.

Widely known various devices for processing semiconductor wafers [1-3], which contains one or more blocks wafer handling, unloading and loading device, conveying in a horizontal plane mechanisms, behaviors.

However, the known devices are used to transport the plate to the position of the handle or by using belt [1] or using a vacuum grippers, manipulators [2]. This leads to the possible contamination of the wafers after processing, which is unacceptable in the manufacture of electronics products with higher requirements, for example, in the manufacture of LSI and VLSI. In addition, in the known devices plate installed in the slots of the cassette, do not have a clear position and when removing them from the cassette and transporting wafers in a working position there are no precise coordinates of their location. This leads to the need to use additional devices for precise coordination of the plates, for example optical sensors [3], which complicates the device and does not provide reliable positioning. Way to set the position of a semiconductor wafer using the magnitude of the efforts of the vacuum suction [4] does not allow us to accurately calculate the magnitude of this force depending on the chaotic situation of the plates, and therefore does not provide accurate positioning. In addition, the known device [5] have large dimensions due to the bulkiness of vehicles between the processing units located downstream, and the availability of separate arms and manipulators for transferring and retaining plates, and a separate unit for setting the position of the floating plates and additional vehicles, connecting this unit with other units. All this complicates both the design of the device, and the algorithm it reduces the reliability.

Known the closest to the technical essence and the achieved result is a device for processing semiconductor wafers [6], containing the loading and unloading of the cassette, the mechanisms of their stepper vertical movement, the release mechanism of the wafer from the cassette and move them to a working position, a processing unit, including, for example, a centrifuge, installed in the processing bath brush. Thus, the mechanism of the extraction plates of the cassette is made in the form of two rollers of the adjusting mechanism located on the opposite side interacting with the lever for engagement of the bottom plate and its transportation to the working position. The lever contains a plot arc shape for centering plates.

Shortcomings know what these devices are, it requires the use of additional retrieval mechanism of the cassette plates that are installed in it randomly, and the design of the lever does not provide a reliable centering of the plates when they are working position. In addition, the movement of the plates between the different processing units established in the course of the technological process, as well as loading the wafers into the cassette after processing by using other advanced vehicles, for example, made in the form of holders, hooks, manipulators. It also complicates the design of the device and reduces reliability.

The purpose of the proposed invention is to improve the reliability of the device and the quality of processing, simplifying the design.

This objective is achieved in that the device containing the loading and unloading of the cassette, the mechanisms of their vertical movement, the release mechanism plate from the cassette loading mechanism of processed wafers in the cassette, mechanism for horizontal movement of the plates, the processing unit including a centrifuge, installed in the processing bath, brush, mechanism for vertical movement of the unloading cassette is installed at an angle to the horizontal plane in the direction of the feed plate, and the mechanism for retrieving wafers from the cassette loading mechanism is bratanich wafers in the cassette is made in the form of a suction Cup with vacuum table mounted on the carriage with the possibility of longitudinal movement, while the suction Cup mechanism retrieve plates from the cassette mounted on the carriage can be rotated at a given angle fixed at the same angle to the horizontal plane and the vertical movement mechanism of the unloading cassette, in addition, the mechanism of horizontal movement of plates designed as two manipulators can be rotated in a horizontal plane, each of which is supplied by the carrier in the form of a ring with an inner conical surface, having a radial cut α≤25° and the diameter of the larger diameter vacuum suction cups and table table centrifuge, and technological tub equipped with an additional device for measvalue cleaning plates with measvalue head mounted on the body of the bath, with the symmetry axis of the brush and measvalue head pass through the axis of symmetry of the bath at an angle to each other.

The implementation mechanism for vertical movement of the unloading cassette at an angle to the horizontal plane allows the plates to occupy a special position in the cassette under the action of gravity and does not require additional orienting devices.

The carrier is made in the form of a ring, has two functions: safely centers plates and transports on the centered plate in working position. The tapered surface of the carrier increases the accuracy of centering, as the plate on the cone centered regardless of the deviation of the diameter of the plate from the face.

Cutting ring α≤25°on the one hand, does not violate the centering plates, and on the other, allows the media after loading (unloading) of the plates on the table centrifuge leave the area of the loading (unloading).

The presence measvalue head mounted on the trough body in such a way that its axis of symmetry and the axis of symmetry of the bath being held at an angle to each other, allows on the same working position to combine the two operations: cleaning brush, and then MegaZoom. This improves water quality reduces the size of the device, eliminates the need for additional mechanisms for transporting wafers between the blocks.

Thus, the proposed set of features is new, provides a new technical effect and not obvious from the prior art. Therefore, it meets the criterion of "inventive step" and "novelty."

The invention is illustrated by drawings, which shows:

figure 1 - General view of the device;

figure 2 - mechanism of extraction plates of the cassette, the section along a-a;

figure 3 - the mechanism of the cleaning brush, incision;

<> figure 4 is a device for measvalue cleaning plates with measvalue head;

figure 5 - loading mechanism of the wafer after processing.

figure 6 - arm horizontal movement of the plates in position below the wafer;

7 arm horizontal movement of the plates in the position of the grip plates.

The device (1, 2, 5) contains the mechanism of step motion unloading 1 and boot 2 cassettes installed on platforms 3 and 4 with the possibility of vertical movement from the actuator 5 and 6, the screws 7 and 8, the guides 9 and 10.

The mechanism of step motion unloading of the cassette 1 is installed on the housing 11 at an angle to the horizontal plane in the direction of the feed plate 12. The mechanism move the feed cassette 2 is installed on the housing 13. The release mechanism of the plates 12 of the cassette 1 (figure 2) is designed as a suction Cup 14 can be rotated at a given angle using the rotation mechanism 15 mounted on the carriage 16, with the possibility of longitudinal displacement. The carriage 16 is installed on the housing 11 at the same angle to the horizontal plane, and that the mechanism of step motion unloading of the cassette 1.

The mechanism for loading wafers into the cassette 2 after processing is also executed in the form of suction cups 17 mounted on the carriage 18 with the possibility of lateral movement.

p> The processing unit of the plates includes a centrifuge 19 table 20, installed in the processing bath 21 for rotation from the actuator 22. The plate 23 of the bath 21 is mounted the mechanism for vertical 24 and 25 mechanism of longitudinal movement of the brush 26 and the ultrasonic nozzle 27, fixed to the bracket 28 can move in the vertical plane (figure 4) through the mechanism 29 and a horizontal plane through the mechanism 30. In this case the axis of symmetry of brushes and nozzles placed at an angle α to each other in the horizontal plane.

The movement of the plates 12 in the treatment area and from by using the handles 31 and 32 (figures 1, 6, 7), containing the carriers 33 and 34, made in the form of a ring with an inner conical surface 35 and having a radial notch 36 β≤25° (1, 9).

The carriers 33, 34 mounted on the rods 37 and 38 can be rotated from the actuators 39 and 40 and with the possibility of vertical movement mechanism 41, 42. The diameter D of the carriers 33, 34 is made larger than the diameter of the table 20 centrifuges 19 and vacuum tables 43, 44 suction cups 14, 17. All mechanisms and assemblies are installed on the frame 45.

The operation of the device is as follows. The cassette 1 with the plate 12 is mounted on the platform 3 of the vertical movement mechanism of the cassette. Moving the cassette 1 is carried out using p is the water 5, screw 7 and the guide 9. When moving the cassette 1 slide on additional PTFE guide 46. Since the cassette plates inclined to the horizontal plane in the direction of flow, the plate under its own weight take some of the same position in the slots of the cassette.

The suction Cup 14 of the retrieval mechanism plate is rotated at a given angle by the rotation mechanism 15 and the carriage 16 moves the suction Cup 14 in the direction of the cassette 1. The suction Cup 14 comes under the plate 12, the cassette 1 is lowered on the step and the plate is placed on the suction Cup 14 is attached to it by means of a vacuum. Then, the carriage 16 moves the suction Cup 14 to the plate 12 in its rightmost position. The mechanism 15 rotates the suction Cup 14 to the plate 12 and the plate 12 is mounted horizontally, and the vacuum at the suction Cup 14 is turned off.

The vertical movement mechanism 41 of the first arm 31 lowers the actuator 39 of the rotation of the rod 37 with the carrier 33 down, and the actuator 39 rotates the rod 37 with the carrier at a certain angle so that the medium 33 is installed under the table 48 of the suction Cup 17 (6). Then the actuator 41 of the first arm raises the actuator 39, the rod 17, the carrier 33 up. The carrier 33 when lifting up his inner conical surface 35 communicates with a circular end plate 12 and aligning it in the desired position, removing the t table with suction cups 14 (6). (The time of the taking of the plate 12 with the table shown on Fig.7.). And the suction Cup 14, rotating away for the next plate. The actuator 39 of the first manipulator rotates the rod 17 with the carrier 33 and the plate 12 on the angle at which the center of the carrier 33 coincides with the axis of the centrifuge 19. Then the actuator 41 lowers the actuator 39, the rod 37, the carrier 33 with the plate 12 down. The time of laying plate 12 on the table depicted in Fig.6. The plate 12 is fixed on the table 20 centrifuges 19 with the help of vacuum, and the carrier 33 of the first arm goes back to its original position due to the presence of the carrier cutout 36 (1, 9). Then the cone 46 centrifuge rises (figure 3) and table 20 with the plate 12 starts to rotate from the actuator 22. Brush 26 with the vertical movement mechanism 24 and the longitudinal movement mechanism 25 is mounted on the plate 12 and starts to rotate from the actuator 47.

Simultaneously with the rotation of the brush 26 and the plate 12 serves appropriate solutions, which can then get into the tub 21 and are removed through outlet 48. After cleaning the plate 12 by the brush 26, the brush is given to the original position by mechanisms 24, 25. And instead of brushes 26 above the surface of the plate 12 is mounted nozzle 27 placed on the bracket 28 (figure 4) can move in the vertical plane through the mechanism 29 and horizontally through the mechanism 30 and the mouth of olenna on the same frame 23 of the bath, as the brush 26. Through the nozzle 27 serves deionized water or a solution made by MegaZoom. When this nozzle 27 starts scanning from the center of the plate 12 to the periphery through the mechanism 30. After measvalue cleaning nozzle 27 is given to the original position by mechanisms 29, 30. Table 20 with the plate continues its rotation from the actuator 22 at high speeds. The plate is dried, and the centrifuge is stopped, the vacuum is turned off, the cone 46 is omitted.

The carrier 34 of the second arm 32 (Fig 1, 7) down under the plate 12 and he, lifting, grabs the plate and transfers it to a certain angle and stops above table 44 of the second suction Cup 17. Then the carrier 34 is lowered down, puts the plate 12 on the table 44 and goes back to its original position. On the suction Cup 17 serves vacuum, and the plate 12 is fixed on the table. Then the plate using the mechanism 18 is inserted into the cassette 2. The vacuum at the suction Cup is turned off, and the cartridge 2 by the actuator 6, the screw 8, the guide 10 is lifted up, taking the plate with suction cups and preparing the next groove of the cassette 2 for download. The suction Cup 17 goes back to its original position.

Sources of information

1. Pat. U.S. No. 4534695, class B 65 G 25/00, pub. 1985 "a Device for transporting articles".

2. Pat. U.S. No. 4465, class B 25 J 3/00, pp.. 1984 "a Device for processing substrates for IP".

3. the ATA. Japan No. 6056864, CL H 01 L 21/68. Appl. 21.10.87, pub. 0125.15.104.97 "Device for the position when transporting semiconductor wafers".

4. Pat. Japan No. 6038447, CL H 01 L 21/68. Appl. 29.05.87, pub. 0095.07.104.97 "Method to set the position of semiconductor wafers".

5. Pat. Japan No. 6069062, CL H 01 L 21/68. Appl. 28.11.85, pub. 0149.21.104.97 "Device for automatic high-speed transporting flat articles".

6. Pat. Japan No. 6066375, CL H 01 L 21/68. Appl. 30-03 .87, pub. 02.48.20.104.97 "Method and apparatus for transporting semiconductor wafers" (prototype).

1. A device for processing semiconductor wafers containing the loading and unloading of the cassette, the mechanisms of their vertical movement, the release mechanism of the plates of the cassette loading mechanism of processed wafers in the cassette, mechanism for horizontal movement of the plates, the processing unit including a centrifuge, installed in the processing bath, brush, characterized in that the mechanism for vertical movement of the unloading cassette is installed at an angle to the horizontal plane in the direction of the feed plate, and the mechanism for retrieving wafers from the cassette loading mechanism of processed wafers in the cassette is made in the form of a suction Cup with vacuum table mounted on the carriage with the possibility of longitudinal movement, while the suction Cup mechanism extracted the I plates from the cassette mounted on the carriage can be rotated at a given angle, fixed at the same angle to the horizontal plane and the vertical movement mechanism of the unloading cassette, in addition, the mechanism of horizontal movement of plates designed as two manipulators can be rotated in a horizontal plane, each of which is supplied by the carrier in the form of a ring with an inner conical surface, having a radial cut α≤25° and the diameter of the larger diameter vacuum table suction cups and a table centrifuge.

2. The device according to claim 1, characterized in that the processing bath is additionally provided with a device for measvalue cleaning plates with measvalue head mounted on the body of the bath, with the symmetry axis of the brush and measvalue head pass through the axis of symmetry of the vacuum table at an angle to each other.



 

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