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Coordinate table

Coordinate table
IPC classes for russian patent Coordinate table (RU 2254640):
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FIELD: nanotechnology; devices affording part displacement in three coordinates (X, Y, Z) in scanning probe microscopy.

SUBSTANCE: proposed coordinate table designed to ensure precise repeatability of part positioning in the course of its rearrangement, for instance to displace specimens, specimen holders, probes, and other components has platform that mounts first carriage by means of displacement device incorporating first guides; second carriage with base; and specimen holder for displacement in first and second relatively perpendicular coordinates. Newly introduced are second guides secured on first carriage, third guides installed on second carriage, as well as third carriage mounted by means of third guides on second carriage and provided with ferromagnetic insert and specimen holder. Displacement device incorporating first guides is made in the form of three-coordinated piezoengine; second carriage is mounted on second guides; platform also mounts first magnet for displacement and fixation in third coordinate perpendicular to plane of first and second coordinates. Second carriage mounts second magnet for interacting with first magnet and with ferromagnetic insert of third carriage. Second guides can be made in the form of three first spherical supports. Third carriage may have three second spherical supports. Third guides are made in the form of posts each provided on its first end with smooth surface and on second end, with two V-like disposed smooth surfaces. Posts are installed for displacement and fixation in third coordinate on second carriage and are disposed for engaging through first ends three first spherical supports and through second ends, second spherical supports. Three posts may be installed on second carriage so that intersection lines of their V-like disposed smooth surfaces are set at certain angle or in parallel. Second magnet is mounted for displacement and fixation in third coordinate.

EFFECT: enlarged displacement range in all three coordinates for fast replacement of specimens and probes and retention of their original position.

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The invention relates to nanotechnology, and more specifically to a device that provides movement of the object along the three coordinates (X, Y, Z) and reproducible positions of an object when it is reinstalled. For example, the device may be used to move samples of sample holders, probes, and other elements in scanning probe microscopy.

Known compound table, consisting of a base, carriage and guides with rollers along the X, Y coordinates [1].

The first disadvantage of this device is the impossibility of a quick withdrawal of the carriage and platform, which makes it difficult to sample replacement. The second drawback is related to the complexity of the design guides with rollers, which does not allow to create a compact device. The third disadvantage is the inability to move the carriage along the third coordinate z

Known compound table, where the platform and the carriage is made in a single piece, and the guides are thin bridges in the form of flat springs [2].

The disadvantage of this device is the inability to remove the carriage and platform, slow speed coordinate table and the inability to move the carriage along the third coordinate z

Also known compound table comprising a platform, on which by means of four flat prog the n attached to the first carriage for movement in the first coordinate (X). Inside the first carriage also using the four flat springs secured to the second carriage can move along the second coordinate direction (Y)perpendicular to the coordinate x of the Flat spring in this device act as guides. The first and the second carriage are interoperable with the first and second piezodriven, and with the first and second spring supports mounted on the platform coordinate table.

The first disadvantage of this device is the small stroke of the carriages of a coordinate table associated with the use of piezoprivod and flat springs. The second drawback is the lack of the possibility of replacing the object with its original position, which is required when using a coordinate table in complex technological devices, such as scanning probe microscopes (SPM). The third disadvantage is the inability to move the carriage along the third coordinate z

The specified device is selected as a prototype of the proposed solution.

The objective of the invention is the creation of a coordinate table, allowing you to use it, for example, in scanning probe microscopy to move samples and probes in three dimensions, with the possibility of quick change of samples and probes, preserving their original inogo position.

The technical result of the invention is to increase the range of movement of the object two-dimensionally in the sample plane (X, Y), the ability to move objects on the coordinate Z perpendicular to the sample plane, and to provide accurate repeatability of the provisions of the object when it is reinstalled.

This technical result is achieved by the fact that in the coordinate table comprising a platform, on which by means of the device moving from the first guide mounted to the first carriage, the second carriage base and the object holder can be moved in first and second mutually perpendicular coordinates entered the second guides mounted on the first carriage, the third guides fixed to the second carriage, the third carriage mounted by means of third rails on the second carriage containing ferromagnetic liner and the object holder, the moving device with the first guide made in the form of three-coordinate of piezophiles, a second carriage mounted on the second guide on the platform installed the first magnet to move and fixation on the third axis, perpendicular to the plane of the first and second coordinates, the second carrier has a second magnet with the opportunity to interact with the first magnet and ferrum gnanam liner of the third carriage.

There is a variant in which the second guides are made in the form of the first three spherical supports.

There is also an option, in which the third carriage has three second spherical bearing, third rails are constructed in the form of racks, the first ends of which are made on any smooth surface, and the second ends of the two V-shaped spaced smooth surfaces, while the rack is installed with the possibility of moving and fixing the third coordinate of the second carriage and are interoperable with the first ends of the first three spherical supports, and the second ends with the second spherical bearings.

A possible variant, in which the three racks are installed on the second carriage so that the line of intersection of the V-shaped spaced smooth surfaces are at angles to each other or parallel to each other.

There is also a variant in which the second magnet is mounted for moving and fixing the third coordinate.

Figures 1 and 2 show views of a coordinate table side and top. Figure 3 shows the use case of a coordinate table in the composition of the SPM.

Compound table contains the platform 1 (Fig 1), on which are fixed the first rails 2, and the first, second, and third actuators along mutually perpendicular first (X), the WTO is the second (Y) and third (Z) coordinate, respectively. Drives and guides 2 in this particular case is made in the form of piezophiles 3 (piezoscanner). For example, it may be a three-sectional-split piezotube. (See details in[4, 5, 6]).

In addition, the platform 1 is fixed to the first magnet 4 that is located with the opportunity of moving and fixing the third coordinate z can be used, the screw 5 is mounted at the end, for example, using an adhesive bead 6 of the first magnet 4. There is a variant in which the first magnet 4 is mounted on the screw 5 with the possibility of shifts in the plane of the first and second coordinates. To ensure the plane-parallel displacement of the first magnet 4 in the XY plane on the screw 5 may be made of two elastic hinge 7. A slight movement on the Z-coordinate in this case is negligible. Additional motion of the magnet 4 may be provided with an adhesive bead 6 on the basis of plastic glue (for example, GED-1).

On piezoscanner 3, which includes guides 2, the first carriage 8 with an opening 9. On the first carriage 8 is fixed (e.g. glued) second guides 10, which may be in the form of the first three spherical supports, e.g. made of steel SHKH15. The second guide 10 is installed, the second carriage 11 with a base 12 and the second magnet 13. For this mouthbut used third rails 14, fixed to the second carriage 11. The second magnet 13 is located with the opportunity to interact with the first magnet 4 and can be installed in the hole 15, the second carriage 11 with the sleeve 16. The fixing of the magnet 13 in the sleeve 16 may be carried out by means of a glutinous seam 17 and the fixing sleeve 16 in the carriage 11 is by means of set screw 18. There is an option in which the third rails 14 is in the form of racks 19 with smooth surfaces 20 on their first ends located with the opportunity to interact with the second guide 10. The second ends of the struts 19 may be made in the form of V-shaped smooth surfaces 21. Rack 19 can be installed in the through holes of the second carriage 11 with the formation of the grooves 22 and secured by means of set screws (not shown), glue, etc. Grooves 22 form a limited space to move the carriage 11 and the second guide 10. Smooth surfaces 20 and 21 on the first and second ends of the struts 19 may be formed, for example, plates of polikor glued to the first and second ends of the uprights 19 (not shown).

On the second carriage 11 by means of third rails 14 are installed third carriage 23 containing the holder 24 of the object 25 and the ferromagnetic liner 26. Moreover, the ferromagnetic liner 26 and the second magnet 13 is located with the opportunity to interact with each the m The holder 24 of the object 25 can be installed on the carriage 23, for example, using screws (not shown), glue, etc. (Also refers to the consolidation of object 25 on the holder 24). Its possible that as the object holder 25 is used directly by the third carriage 23. The ferromagnetic liner 26 can be mounted on the carriage 23 with screws (not shown), glue, etc. the Third carriage 23 can contain three second spherical bearing 27 made, for example, of steel SHKH15, mounted on the third carriage 23 and interacting with third rails 14. Rack 19 can be set so that the line of intersection 28 of their V-shaped surfaces 21 are oriented at angles to each other or in parallel.

Compound table 29 composition of SPM 30 (3) may be mounted on the plate 31 and carries the object 25 with the probe 32, fixed on piezoscanner 33. Read more the composition of the SPM, see[4, 5, 6, 7]. Figure 3 shows a variant in which the object 25 use the analyzed sample. However, there is an option where the object 25 can be used holder with a probe (not shown). On piezoscanner 33 when this will be fixed investigated sample.

The device operates as follows.

The holder 24 sample 25 is fixed on the third carriage 23, which is mounted on toiki 19. Meanwhile, the line of intersection 28 of the uprights 19 are angled to each other. After that perform supply of the probe 32 to the sample 25 and its study (see details in [5, 6, 7]). Then, if necessary, research the other zones of the sample 25 serves the sawtooth voltage on piezoscanner 3 and carry out a two-coordinate (X, Y) moving the second carriage 11 and the second guide 10. More use of sawtooth voltages for moving objects, see [8, 9]. After completion of the study sample 25 or its modifications produce exhaust probe 32 from the sample surface 25, take out the carriage 23 of the SPM and, if necessary, carry out technological impact on the sample 25, such as an etching resist, the plating layers, ion implantation, etc. [10, 11].

Next, the carriage 23 with the sample 25 can be installed on the rack 19 to perform the following technological operations using SPM. The setting error in the proposed coordinate table with the spherical bearing 27 located on ⊘14 mm, no more than 1 microns.

In that case, if the object 25 uses a probe of the SPM, the carriage 23 is removed for reinstallation or sharpening of the tip. After that, the carriage 23 return to place, keeping the position of the probe in the X, Y coordinates relative to the specimen.

When using a coordinate table in the composition of the Waco is a lot SPM described reinstall probes and samples will be carried out using vacuum manipulators [12, 13].

When the movement of the carriage 11 along the guide rails 10 by hinges 7 possible slip by coordinates X, Y of the magnet 4 after the magnet 13, which will reduce the efforts of the carriage 11 in a Central position.

The position of the magnets 4, 13 and liner 26 on the coordinate Z is chosen so that, on the one hand, was interested in moving the carriage 11, and on the other, there was her dysfunctional offset when installing the carriage 23.

In that case, if the line of intersection 29 of the uprights 19 are parallel to each other, it is possible to make accurate inertial movement of the carriage 23 along one coordinate. In this case, it by installing magnets 4 and 13 to provide a fixed position of the carriage 11 relative to the carriage 8, so that when the inertial movement of the carriage 23 on the racks 19 does not have any non-displacement surface 20 along the guides 10. The accuracy of movement of the carriage 23 will be determined by the accuracy of the location of V-shaped elements 21 and spherical surfaces 27.

The introduction of second guides mounted on the first carriage, third rails, mounted on the second carriage, a third carriage mounted by means of third rails on the second carriage containing ferromagnetic liner and the object holder, allows you to increase the range moved what I object.

The device moving from the first guide in the form of trichloranisole of piezophiles, and the use of ferromagnetic liner, the first and second magnets provide three-dimensional movement, and inertia of the moving objects.

The introduction of the third carriage containing ferromagnetic liner and installed together with the holder of the object on the second carriage, provides the possibility of removing the third carriage and the object holder, the exact fixation of the holder with the object due to the possibility of interaction between the ferromagnetic liner of the third carriage and the second magnet.

Performing second guides in the form of three first spherical bearings increases the accuracy of the plane-parallel movement of the second carriage relative to the first by reducing the influence of friction forces.

Execution of the third guide in the form of racks mounted in the second carriage and cooperating with the third carriage and the first reduces the impact of nanograv by reducing the number of surfaces of contact between the guide and the holder of the object.

Performing at the first ends of the racks on any smooth surface, and the second ends of the two V-shaped spaced smooth surfaces and their interaction with the first and second spherical bearings provide accurate reinstallation of interest.

Installation of racks on the second carriage so that the line of intersection of their smooth surfaces are at angles to each other, minimizes non-functional movement of the second carriage relative to the first.

Installation of racks on the second carriage so that the line of intersection of their smooth surfaces are parallel to each other, allows inertia to move the third carriage in the XY plane along the intersection line of smooth surfaces.

Installing a second magnet with the possibility of moving and fixing the third coordinate allows you to adjust the strength of the interaction with the ferromagnetic liner thirds of the carriage, i.e. to increase or decrease the clamping force of the third carriage to third rails that allows you to move the carriage with the holder of the object.

Literature

1. The US patent No. 5561299, Jnt.C1.6 H 01 J 37/20, 01.10.1996.

2. The US patent No. 5051594, Jnt.C1.5 G 21 K 5/10, 24.09.1991.

3. The US patent No. 5360974, Jnt.C1.5 G 21 K 5/0, 01.11.1994.

4. Patent RU No. 2199171, H 01 L 41/09, 20.02.2003.

5. Y.Kuk, P.Sulverman. Scanning tunneling microscope instrumentation. Rev.Sci. Instrum 60 (1989), No. 2, 165-180.

6. Probe microscopy for biology and medicine Vasyukov and other Sensory systems, so 12, No. 1, 1998, s-121.

7. Scanning tunneling and atomic force microscopy in electrochemistry surface. Aigaiou, Uspekhi khimii 64(8), 1995, s-833.

8. The US patent No. 5214342, Jnt. C1.5 H 01 L 41/08, 25.05.1993.

9. The decision of the extradition from 11.12.2003 on application No. 2002/26069/28(027808).

10. Sailors O.S Elianna processing. M., High school, 1990, 128 S.

11. Stepanenko I.P. Fundamentals of microelectronics. M., "Soviet radio", 1980, 423 S.

12. Patent RU No. 2158454, H 01 J 37/26, 27.10.2000.

13. The US patent No. 5157256, H 01 J 37/26, 1991.

1. Compound table comprising a platform, on which by means of the device moving from the first guide mounted to the first carriage, the second carriage base and the object holder can be moved in first and second mutually perpendicular coordinates, characterized in that it introduced the second guides mounted on the first carriage, the third guides fixed to the second carriage, the third carriage mounted by means of third rails on the second carriage containing ferromagnetic liner and the object holder, the moving device with the first guide made in the form of three-coordinate of piezophiles, a second carriage mounted on the second guide on the platform has a first magnet with the possibility of moving and fixing the third axis, perpendicular to the plane of the first and second coordinates, the second carrier has a second magnet with the opportunity to interact with the first magnet and the ferromagnetic liner of the third carriage.

2. Coordinate table according to claim 1, characterized in that the second guides are made in the form of the said first spherical bearings.

3. Coordinate table according to claim 1, characterized in that the third carriage has three second spherical bearing, third rails are constructed in the form of racks, the first ends of which are made on any smooth surface, and the second ends of the two V-shaped spaced smooth surfaces, while the rack is installed with the possibility of moving and fixing the third coordinate of the second carriage and are interoperable with the first ends of the first three spherical supports, and the second ends with the second spherical bearings.

4. Coordinate table according to claim 1, characterized in that the three racks are installed on the second carriage so that the line of intersection of the V-shaped spaced smooth surfaces are at angles to each other.

5. Coordinate table according to claim 1, characterized in that the three racks are installed on the second carriage so that the line of intersection of the V-shaped spaced smooth surfaces are parallel to each other.

6. Coordinate table according to claim 1, characterized in that the second magnet is mounted for moving and fixing the third coordinate.

 

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