The moving device

 

The invention relates to nanotechnology, namely, devices, providing micromovings in three dimensions, for example, as a scanner probe microscopy. The invention is aimed at improving the precision of the movement. This is ensured by the fact that the moving device comprises a base attached to it one end of a block move in one dimension (Z), at the other end through which the connecting element is mounted unit move in two mutually perpendicular coordinates (X, Y) in the plane perpendicular to the z coordinate of the moving Device provided with the guides on the Z coordinate, which are associated with the base and the connecting element by its edges along the Z-axis, while the stiffness of the connecting element on the Z-coordinate exceeds the rigidity of the block move in one dimension. It is possible that the rail guides on the coordinate Z had axial symmetry. You can run rails on the Z coordinate in the form of elastic elements. It is also advisable execution of elastic elements, at least in the form of two flat springs attached on the periphery of the base, and the Central parts of the connection element in such a way Thu the base and the connecting element. It is possible to install the coupling element with tension along the Z axis relative to the base, exceeding Z move. In the case of incompressible media appropriate, at least two flat springs to perform at least two holes. There is also an option, in which two flat springs are perforated so that their elastic fragments contain Z-shaped elements, working on the curve. 7 C.p. f-crystals, 9 Il.

The invention relates to nanotechnology, and more specifically to devices, providing micromovings three coordinates. For example, the moving device can be used as a scanner in scanning probe microscopy.

You know the moving device (piezodrive), containing the holder with a cylindrical piezoelectric element, on the inner surface of which is coated with a continuous electrode, and on the outside of several groups of electrodes [1].

The disadvantage of this device is that it cannot select the desired range of movement, which reduces its functionality.

Known also piezodrive, consisting of a set piezotronic of the same diameter with parallel ends and a continuous electrode on the outer and second base free ends [2].

The disadvantage of this device lies in the absence of the specified drive movement in the plane perpendicular to the axis piezotronic, which limits its functionality and does not allow you to use as piezoscanner in probe microscopy. The second drawback is the reduction of the resonant frequency of piezo technology in a plane perpendicular to its longitudinal axis, which leads to an increase in the amplitude and increases the measurement error.

It is also known the moving device (piezoscanner) in three dimensions, consisting of a base with a fixed one end of a block move in one dimension (Z), at the other end through which the connecting element is mounted unit move in two mutually perpendicular coordinates (X, Y) in the plane perpendicular to the Z coordinate [3].

The disadvantage of this device lies in the fact that the fixing unit move in two mutually perpendicular coordinates (X, Y) on the connector directly mounted on the unit moving in one dimension (Z), increases non-functional movements along the axes X, Y and reduces accordingly the accuracy paremski the result of the invention is to reduce non-functional movements of the device and improving its accuracy.

This result is achieved in that the moving device, consisting of a base, attached to it one end of a block move in one dimension (Z), at the other end through which the connecting element is mounted unit move in two mutually perpendicular coordinates (X, Y) in the plane perpendicular to the Z coordinate, characterized in that it introduced the guides on the Z coordinate associated with the base and the connecting element by its edges along the Z-axis, while the stiffness of the connecting element on the Z-coordinate exceeds the rigidity of the block move in one dimension. One of the embodiments of the invention is that the guides at the coordinate Z have axial symmetry. You can run rails on the Z coordinate in the form of elastic elements. It is also advisable execution of elastic elements at least in the form of two flat springs attached on the periphery of the base, and the Central parts of the connection element in such a manner that their planes perpendicular to the z axis. There is a variant in which the elastic guides secured pivotally on the base and the connecting element. It is possible to install the connecting alih environments appropriate, at least two flat springs to perform at least two holes. There is also an option, in which two flat springs are perforated so that their elastic fragments contain Z-shaped elements, working on the curve.

In Fig.1 shows a device moving with the guides in General.

In Fig.2 - option guides with axial symmetry.

In Fig.3 is a variant of the guides, made in the form of elastic elements.

In Fig.4 - guides in the form of flat springs.

In Fig.5 - hinge guides.

In Fig.6 shows the installation of the elastic guides with tension.

In Fig.7 shows a liquid variant of the elastic guides.

In Fig.8 is a variant of the Z-shaped rails.

In Fig.9 shows the block diagram of the device move.

The moving device comprises a base 1 mounted thereon one end of a block move in one dimension (Z) 2, the other end of which by means of the coupling element 3 fixed block move in two mutually perpendicular coordinates (X, Y) 4 in the plane perpendicular to the z coordinate Should be noted that the block 2 may consist of n elements, interconnected (not shown) and is able to modify its tube [4, 5]. At the end of the block 4 is fixed to the holder of the object 5, such as a sample or probe, in the case of using the device moving in a scanning probe microscope (SPM) as piezoscanner. In the moving device entered the guides 6 on the Z coordinate associated with the base 1 and the connecting element 3 by its edges along the z axis.

Pairing must be performed at the maximum allowable dimensions of the connecting element distance that provides the minimum non-functional movement during scanning by increasing the base of application of the forces. It should be noted that the stiffness of the connecting element 3 in the Z coordinate must be greater than the rigidity of the block move 2. A possible variant in which the guides for the Z coordinate 7 (Fig.2) have axial symmetry. In the case of small (1-10 μm) displacement in the Z coordinate appropriate as a guide for the Z coordinate to use elastic elements 8 (Fig.3), made for example in the form of rods or strips. Alternatively, where the guides are of the flat spring 9 (Fig.4) fixed at the periphery of the base 1, and the Central parts of the connection element 3 in such a way that their plane perpendicular guides 10 may be implemented using hinges 11 (Fig.3). At higher accuracy requirements in order to reduce internal backlash design of the connecting element 3 (Fig.6) can be installed with an interference fit along the Z axis relative to the base 1. To use the device moving in an incompressible media, such as liquids, it is advisable to perform in the flat spring 12 (Fig.7) holes 13. At relatively large displacements >10 μm, for example, a possible embodiment of a flat spring with a Z-shaped elastic fragments of 14, working on the curve.

For scanners in SPM, where movement along the Z-coordinate is approximately 10 μm, while the size And~10-20 mm, when using the guide of beryllium bronze without perforations their thickness may be about 0.2 mm, the Method of fastening the rails to the base 1 and the connecting element 3 is not shown. Fixation can be achieved by adhesive, welding, brazing, clamping between the washers, etc., it Should be noted that the greater the distance B (Fig.4) between the points of application of force, the more effective their use. Blocks 2 and 4 are connected to the control unit 15. It should be noted that the magnitude of the tension In (Fig.6) must be greater than the magnitude of the moving element 3 on the coordinate z

The moving device operation the e movement of the holder 5. More details of the operation of the proposed device move as piezoscanner in scanning probe microscopes can be found in[5, 6, 7, 8, 9, 10]. Use the guides on the Z coordinate associated with the base and the connecting element, reduces dysfunctional move the device and increases, respectively, the accuracy of the move. A pair of guides at the edges of the connecting element increases the effect of their use by increasing the base of application of the forces. The implementation of the coupling element with stiffness in the Z coordinate greater than the rigidity of the block move in one dimension, allows you to more effectively suppress his dysfunctional movement along the axes X, Y, which also increases the precision of the movement. Implementation guides with axial symmetry allows for a more evenly distribute the remaining non-functional movements along the axes X, Y, and also to reduce the impact of thermographs. This is especially important when using actuator probe microscopy. Use as guides elastic elements can improve the accuracy due to their simplicity and durability. Execution of elastic elements in the form of flat springs can also be manufactured in the EDM field in the form of a single element, this improves the accuracy of their production and, accordingly, the accuracy of the move. * Securing the elastic guide allows you to reduce them reaction supports and to increase their durability. Installation of the connecting element with an interference fit relative to the base reduces the internal backlash design and improves accuracy. Along with this, this arrangement eliminates the effect of cotton in the case of plastic deformation of the guides when moving the coupling element through the Central position. The implementation of the holes in the flat springs can reduce the force of impact incompressible media in the event of a work device movements. The use of Z-shaped elastic fragments, working on the curve, can improve the durability in the face of relatively large (>10 μm) movements.

Sources of information

1. U.S. patent No. 4945235, H 01 J 37/00, 1990.

2. Brochure V/O ELECTRONINTO+RG. Piezodrive PUR-9 PUR-14.

3. U.S. patent No. 5173605, G 01 N 23/00, 1992, Fig.8, 8A.

4. Product acoustoelectronics and piezoceramics. Edited Parfenova. Business world, 1992, S. 167.

5. Majewska E., etc. of the Piezoelectric ceramics. Soviet radio, 1971, S. 198.

6. A new ultra-high vacuum scanning tunneling microscope design for surfaceng microscope. Gary W. Stupian and Martin S. Leung, J. Vac. Sci. Technol. A 7 (4), Jul/Aug 1989.

8. Bulls Century A. and the other Probe microscopy for biology and medicine. Sensory systems. So 12, No. 1, 1998, S. 99-121.

Claims

1. The moving device, consisting of a base with a fixed one end of a block move in one dimension (Z), at the other end through which the connecting element is mounted unit move in two mutually perpendicular coordinates (X, Y) in the plane perpendicular to the Z coordinate, characterized in that it introduced the guides on the Z coordinate associated with the base and the connecting element by its edges along the Z-axis, the stiffness of which the Z-coordinate exceeds the rigidity of the block move in one dimension.

2. The moving device under item 1, characterized in that the guides on the coordinate Z have axial symmetry.

3. The moving device according to any one of paragraphs.1 and 2, characterized in that the guides on the Z coordinate is made in the form of elastic elements.

4. The moving device according to any one of paragraphs.1-3, characterized in that the elastic guides secured pivotally on the base and the connecting element.

5. The moving device according to any one of paragraphs.1-4, eriteria based, and Central parts of the connection element in such a manner that their planes perpendicular to the z axis.

6. The moving device according to any one of paragraphs.1, 3-5, characterized in that the connecting element is installed with an interference fit along the Z axis relative to the base in excess of Z travel.

7. The moving device under item 5, characterized in that at least two flat springs made of at least two holes.

8. The moving device under item 5, characterized in that at least two flat springs are perforated so that their elastic fragments contain Z-shaped fragments, working on the curve.

 

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