Planapochromatic the microobjective with increased working distance

 

The micro has three components, the first of which contains n front of a single positive lens, the second two dvusloinye lenses, the first of which consists of negative and positive lenses, and the second glued positive and negative lenses, and the third consists of dvukratnoi of positive and negative lenses of the two negative lenses and concluded between the positive lens. The number n front of a single positive lens can take values from 0 to 3 agricultural achieve planapochromatic aberration correction in a micro with an increased working distance. 1 C.p. f-crystals, 1 Il., table 2.

The invention relates to the field of microscopy and can be used in the reflected light microscopes for measuring, researching and photographing a particularly subtle topographic structures in the bright and dark field when assessing the quality of manufacture and certification in the industrial production of microelectronic devices. In some of these microobjectives require obtaining planapochromatic aberration correction and increased working distance from the subject plane to the first surface

Well-known domestic microobjective [1] produced by LOMO, which are used in microscopy, reflected light type "DSL" for the study of topological structures. The lenses have a satisfactory image quality only for the axial point of the object. They have a non-standard height (h=94 mm rather than the usual 45 mm), a significant aberration in the off-axis image points of the object (for example, residual fragile glass is 1.3-1.7%), do not meet modern range of standard focal lengths.

Also known microobjective reflected light, for example [2]. They do not provide the desired image quality, because the residual fragile glass is 1.5-2%, and spherochromatism aberration exceed 2-3. Also known lenses [3], where eliminated these shortcomings, however, their designs do not provide the required values of working distances at a given scale. This requirement corresponds lenses [4], but their optical scheme includes optical materials not consumed in domestic production.

Closest to the claimed lens is the lens [5], which is available on LOMO. Its optical scheme includes three components, the first of which s consists of negative and positive lenses, the third consists of dvukratnoi of positive and negative lenses and trehsloinoi of the positive trapped between the two negative lenses. This micro chosen as a prototype.

He has satisfactory image quality for the axial point of the object. However, aberrations in off-axis image points of an object are significant (for example, residual fragile glass 1.7%). This lens cannot achieve planapochromatic correction. In addition, non-standard height and the discrepancy between the number of standard focal lengths make it impossible to use the newly developed models of microscopes, which reduces its consumer properties.

However, in modern microscopes reflected light when solving problems of analysis and measurement of topological structures microobjective must have planapochromatic aberration correction; coloring in the intermediate image is not allowed.

The task of the invention is the obtaining of a number of planapochromatic of microobjective with increased working distances of different magnifications, meeting modern requirements.

Optical design salaamaya is what to use as the first component front of a single positive lens allows optimal way to correct the aberration of off-axis beams, and the choice of different quantities allows correction lenses with different linear increases. The execution of the second dvukratnoi lenses of the second component in this way allows to optimally correct the secondary spectrum and spherochromatism with the increase of the working segment of the lens, which in combination with all other features allows you to get optimum aberration balancing and achieve planapochromatic correction in the microobjective with increased working distance.

Thus, the use of the combination of all these features allows to achieve the technical result consists in the possibility of achieving planapochromatic aberration correction in a micro with an increased working distance. When the working distance is increased by 30-50%.

The invention is illustrated by the drawing, which shows a schematic diagram of a micro, as well as table 1 and table 2, which are the design parameters of the specific examples executed the poses.1, the second item.2 - two dvusloinye lenses, the first of which consists of negative and positive lenses, and the second glued positive and negative lens; the third component POS.3 consists of dvukratnoi of positive and negative lenses and trehsloinoi of the positive trapped between the two negative lenses. The number of the front of a single positive lens in various versions varies and can take values from 0 to 3-X.

The proposed planapochromatic the microobjective with increased working distance as follows: lenses POS.1 build an enlarged virtual image of the object, bringing with it a minimum of monochromatic aberrations of the pivot point. Are aberration of off-axis image points of the subject - negative meridional and the sagittal curvature, chromatic aberration of magnification and position. Then lenses POS.2 wrap the image, aligning the monochromatic and chromatic aberrations are almost a third orders, building it up for the equivalent focal plane of the third component. Short-focus the third component acts as a strong negative reverse telephoto lens, giving to the installed in accordance with the modern concept of the lenses work together with F'=160 mm

As examples of specific performance calculated kit planapochromatic of microobjective with increased working distances, different values of tricks (linear increase). The number "n" in front of a single positive lens is different for lenses of different magnification. So, when n=0 the obtained lens with a linear magnification of 10 times, a numerical aperture of 0.20 and a working distance of ~20 mm for n=1 the obtained lens with a linear increase of 20 times, the numerical aperture of 0.35 and a working distance of ~ 16 mm for n=2, the obtained lens with a linear magnification of 50 times, the numerical aperture of 0.50 and a working distance of ~10 mm for n=3 the resulting lens with a linear magnification of 100 times, a numerical aperture of 0.65 and a working distance of ~ 5 mm, the Use of n>3 is impractical due to the increase of the longitudinal dimensions of the lenses and the impossibility of fulfilling the requirements of standardization.

From the materials presented in table 1 and table 2, it is seen that in planapochromatic of microobjective with increased working distances achieved a high degree of aberration correction across the field of view. So for the field of view 2U'=20 mm, the number of acted is0.80, for 2U'=25 mm the number of the g>0.85, which is not achieved in the known analogues and the prototype. Chromatic difference of magnification lenses offer close to zero, whereas in the prototype it is 1.7%.

As a result of implementation of the proposed technical solution obtained planapochromatic microobjective with increased working distances, with a fairly simple design, suitable for implementation in the conditions of mass production. Information capacity in comparison with analogues increased by 1.5-2 times, hence, efficiency and productivity in terms of production cycle - research, measurement and certification, for example, microelectronic devices, can be significantly increased.

The lenses implements all the standard requirements, determine in accordance with modern requirements of the regulation pupil, the applicability of optical materials, prerequisites for the implementation of specialized research methods. The application of uniform length tube "infinity" provides additional benefits and ease of use of the lens with the other, has a different type of optical correction.

Sources of information 1. USSR author's certificate 666507, M CL G 02 In 21/02.

2. P IS G 02 IN 21/02, 1978.

Claims

1. Planapochromatic the microobjective with increased working distance, containing three components, the first of which contains n front of a single positive lens, the second two dvusloinye lenses, the first of which consists of a negative and a positive lens, the third consists of dvukratnoi of positive and negative lenses and trehsloinoi of the positive trapped between the two negative lenses, wherein the second duskianna the second lens component glued positive and negative lenses.

2. The lens under item 1, characterized in that the number n front of a single positive lens takes values 0-3.

 

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SUBSTANCE: method involves preliminary measurement of instrument errors of lens units and calculating therefrom variation value of one of the air spaces and turning angles of each of lens unit about the axis of the external cylinder of the lens unit. Axial shift and turning of all lens units is carried out. The optical and mechanical axes of the lens are superposed via radial shifting of all lens units. The lens has, inside the cylindrical opening of the housing with a supporting end plane and an outer threaded base cylinder, lens units in a common cylindrical holder capable of axial displacement relative the supporting end plane, and a spacer adjustment ring and a spring for elastic axial closing of the common cylindrical holder. The lens is provided with a cylinder bushing with a recess directed along the axis of the cylindrical opening of the housing; the bushing is rigidly connected to the common cylindrical holder of the lens units in a radial direction and elastic closing in the axial direction by a spring. The bushing can move along the axis of the cylindrical opening of the housing and turn about that axis. The cylindrical opening of the housing has an eccentricity Δk relative the outer threaded base cylinder of the lens, and the inner opening of the common cylindrical holder of the lens units has an eccentricity Δo relative the outer cylinder of the common cylindrical holder.

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