X-ray measuring and testing facility

 

The invention relates to measuring equipment. The technical result is to obtain high brightness radiation into the input aperture of the analytical units when using cheaper sources. System designed for research in x-ray radiation simultaneously on multiple analytical units, contains a source of divergent x-ray radiation, transport channels radiation to analytical facilities and equipment of these facilities for spectrometric, ray diffractometer studies, obtaining images of the internal structure of objects, x-ray lithography, etc. Radiation is transported to the quasiparallel beam generated by the x-ray "paulinae" represented by curved channels using multiple total external reflection of x-rays from their walls. Each of the "paulins" captures part of the divergent x-ray radiation source. The preferred type of source is the x-ray tube. Radiation beams directed to multiple analytical devices can be obtained also by using a total for the, the plant on the path of the original beam at an angle to its direction of propagation, each of which captures part of the cross-section of the original beam. In the particular case of the complex may contain "full" x-ray lens focusing the radiation source in the area, located at the entrance of one of the analytical units. 26 C.p. f-crystals, 10 ill.

The invention relates to techniques for research and testing of substances, materials or devices using x-rays.

Prior art Known systems for carrying out these studies and tests on several analytical facilities (see Synchrotron radiation. Ed. by K. Kunz. Moscow, publishing house "Mir", 1981, S. 80-89 [1]). In such complexes is used common to all analytical units the radiation source. The latter is a synchrotron or, in more modern complexes, cumulative ring. The output from a synchrotron or storage ring synchrotron radiation is transported to the analytical units (workstations). From the very broadband synchrotron radiation assigned to conduct Eeenie - the strip in the x-ray range). The structure of the equipment of each analytical units is determined by the specialization of its on some form of research or testing.

It is known, however, that the synchrotron radiation sources, including cumulative rings represent complex capital structures, which cost hundreds of millions of dollars. So, accumulator ring, the radiation spectrum which includes x-ray range, have a diameter of not less than 50 m ([1], S. 80).

During their operation, given the huge size, the most difficult problem is to maintain an acceptable degree of vacuum, including communicating with the drive channels transportation of synchrotron radiation to analytical facilities, remote from the periphery of the ring of tens of meters, and the experimental volume of each analytical units. Violation of vacuum in any of the analytical units may damage the devices not only drive, but also all associated devices ([1], S. 80).

The very selection of x-ray radiation and the formation of multiple beams in the number of analytical units of the focused beam emerging from synchrotron or nakopitelniy incidence and crystals. When the channels mentioned the extent necessary to adopt special measures to control and maintain the position of each of the formed beam width in the vertical plane is the unit milliradians. Thus, the displacement of the beam at a distance of 40 m 10 mm means the loss of one or two orders of magnitude of intensity, depending on the aperture of the analytical setup ([1], S. 85).

For synchrotrons and storage rings of specified dimensions is very difficult to solve also the problem of radiation protection as the personnel operating the actual synchrotron or storage, and research staff of the analytical units.

Finally, the complexes on the basis of synchrotrons or storage rings so expensive that to Finance their construction may not each state. Therefore, the number estimated units and in recent decades, States have to unite in order to build such systems. As an example, could be called the European synchrotron radiation center (Grenoble, France).

Despite the noted shortcomings of the synchrotron radiation sources at the present time are almost the only sources that allow you to plug the teachings in the desired operating range simultaneously for multiple analytical systems.

Therefore, it is very important to the creation of a complex, easily accessible to scientists and engineers, which could be obtained high brightness radiation into the input aperture of the analytical units when using cheaper sources.

The task of creating complex free from these disadvantages (giant size and extremely high cost, problems maintaining vacuum and radiation safety, the formation of multiple beams and management during transportation of radiation to the analytical units) is solved by the invention.

Disclosure of the invention Offer measuring and test facility for research in x-ray radiation simultaneously on multiple analytical units, as is known, contains a source of radiation, transport channels radiation to analytical facilities and analytical equipment installations.

In contrast to the known proposed complex as the radiation source includes a source of divergent x-ray radiation, each channel of the radiation transport to the analytical units contains an x-ray lens in the form of a set of curved channels and the Yu with the ability to capture part of the divergent x-ray radiation source and configured to convert it into a quasiparallel. As the source of the divergent x-ray radiation can be used x-ray tube, laser or plasma sources.

Thus, receipt of the above mentioned technical result is ensured by the invention by eliminating the use of synchrotron or storage ring as a source of radiation and the use of such a source, in particular, the standard x-ray tube and x-ray lenses for selection of radiation and forming a narrow quasiparallel beam transporting x-ray radiation to analytical facilities.

In addition, the complex may further comprise an x-ray lens in the form of a set of curved canals using multiple total external reflection of x-rays from their walls, installed with the ability to capture part of the divergent x-ray radiation source and possibility of its focus, and analytical setting made with the possibility of placement of the object of research with a combination of the desired part with the area of focus x-rays.

When using the proposed the t can be performed with various types of anode, in particular, microfocus, "through", rotating, difficult, tungsten. The use of x-ray tube in which the anode is made of microfocus or "through", it is advisable to obtain the radiation diverging in a large solid angle; tube with a complex anode - to ensure the possibility of obtaining different spectral lines of the radiation, respectively, the chemical elements forming part of the anode; a tube with rotating anode - to ensure the possibility of obtaining a large capacity due to improved heat dissipation; tube with a tungsten anode for receiving the broadband x-ray radiation.

In cases where the source is a divergent x-ray radiation the proposed set contains the x-ray tube with a rotating or complex or tungsten anode, it may further comprise at least one monochromator installed on the way of quasiparallel beam generated by the x-ray lens, with the ability to highlight and reflect part of the beam in the direction of the analytical setup. In these cases, quasiparallel beam generated by a single x-ray lens is used to provide x-ray izluchaet of the proposed complex, is intended for carrying out spectrometric studies, it provides a means for placing the sample, the detector is excited in the sample radiation, connected to the output of the detector spectrometric tract and is connected to the output of the last means of processing and displaying information. Such an analysis unit is housed by the output focal region, which is part of the complex x-ray lens that is installed with the ability to capture part of the divergent x-ray radiation source and possibility of its focus. This analytical setting must be made with the possibility of combining the desired part of the sample to the focal region of the specified lens.

Analytical facilities to which is transported quasi parallel beam of radiation, there are, in particular, the following:

If such an analysis unit is designed for carrying out spectrometric studies, it contains the x-ray lens in the form of a set of curved canals using multiple total external reflection of x-rays from their walls, which is installed and executed with a possibility is the group of the desired part with the area of focus x-ray radiation. In addition, this analytical system includes a detector excited in the sample radiation, connected to the output of the detector spectrometric tract and is connected to the output of the last means of processing and displaying information.

If the analytic setting as part of the proposed complex, which is transported quasi parallel beam of radiation, is designed to perform ray diffractometer studies, it provides a means for placing the sample and its orientation relative to the direction of propagation of the beam, the detector of the radiation diffracted by the sample, and a means for mutual positioning of the detector and the sample, and also connected to the output of the detector means of processing and displaying information.

If the analytic setting as part of the proposed complex, which is transported quasi parallel beam of radiation, is used to obtain images of the internal structure of the objects that it contains means for positioning the object and the detector has passed through the object radiation with a means of viewing and recording images.

If the chalk radiation, is intended for x-ray lithography, it contains the means for placing the mask and set for him a means for placing the substrate coated on its surface with a layer of resist.

Brief description of drawings the invention is illustrated by drawings, showing: - Fig.1 - composition and arrangement of the main parts of the proposed complex; - Fig.2 - distribution of x-ray radiation with multiple total external reflection from a separate channel of the x-ray lens; Fig.3 is a schematic illustration of the x-ray lens for focusing divergent radiation ("full" lens); - Fig.4 is a schematic illustration of the x-ray lens for converting divergent radiation in quasiparallel ("Pawlenty"); - Fig. 5 - the composition and the positioning of the analytical equipment installation, intended for carrying out spectrometric studies, when the radiation source is transported to the installation of the "full" x-ray lens focusing divergent radiation source; - Fig.6 - the same, when to the analytic setting is transported quasiparallel radiation, formeterol transported quasiparallel radiation, intended for implementation of ray diffractometer studies;
- Fig. 8 - composition and the positioning of the analytical equipment installation, which is transported quasiparallel radiation, intended to produce images of the internal structure of the object;
- Fig. 9 - the composition and the positioning of the analytical equipment installation, which is transported quasiparallel radiation intended for x-ray lithography;
- Fig. 10 is a variant of the "geometry" of the location of the component parts of the proposed complex when using monochromators for "splitting" quasiparallel beam into pieces to be transported to multiple analytical systems.

Embodiments of the invention
The proposed complex (Fig.1) contains the x-ray tube 1, which is a common x-ray source for analytical systems (workstations) 5, each of which has a part of the apparatus corresponding to the specialization of the analytical units in certain types of studies, measurements or tests. In the solid angle corresponding to the generated x-ray tube 1 radiation hosted several (Chi is coy tube 1 in the solid angle 3 and converts it interprets diverging radiation beam 4 quasiparallel radiation. Focal region of the x-ray lens 2 from their input ends, possibly combined with each other and with the center of the output aperture of the x-ray tube 1.

The output beam 4 of each of the lenses 2 is directed to the input aperture of the corresponding analytical units 5. Analytical units 5 are from the x-ray lens 2 at a distance selected from the convenience of placement (so that the distance between the beams in the area of analytical units was enough for equipment and personnel).

X-ray lens 2, is configured to convert a divergent x-ray radiation in quasiparallel, together with their quasiparallel beam 4 form channels for transporting the x-ray radiation from the source (x-ray tube 1) to analytical units (workstations) 5.

In the particular case of the complex may also contain one or more x-ray lenses 6, focusing perceived divergent radiation of the x-ray tube in a small area located at the specified location at the entrance of specialized analytical units 8, requiring such a nature affecting investigated.1 corresponds to the solid angle 7. If necessary, the complex without focusing lenses 6 directly in the radiation field of x-ray tube, is equivalent to the above-mentioned effect can be obtained by incorporating in the composition of the analytical units 5 lenses, similar to the one of the lenses 2, but oriented oppositely to her. This lens converts the quasiparallel beam 4 x-ray radiation in a focused beam.

Protection of personnel analytical units from direct x-ray tube 1 is provided by a screen 9, with holes the size of the cross section of the beams 4, 7. A protective shield 9 can be as near analytical units 5, 8 (this case is shown in Fig.1) and near the output ends of the x-ray lens 2, 6. Since the length of the beams 4 can be several meters or more, in the first case, the size of the screen 9 is significantly greater than in the second. However, in the second case, we should expect a larger impact of manufacturing inaccuracies of the protective screen on the likely impact on staff direct radiation x-ray tube 1.

The major elements of the proposed complex, using which it is possible to achieve a technical result, composing is to control the x-ray emission (focusing divergent radiation, forming parallel flow of divergent radiation, focusing parallel rays and others), was represented by a set of curved as desired channel 10 (Fig.2) transport of radiation in which the radiation undergoes multiple total external reflection from the walls 11. The process of multiple total external reflection of individual quantum x-ray radiation propagating through one of the channels 10 of the x-ray lens shown in Fig.2 the broken line 12. These lenses were made in the form of multiple capillaries or polycapillaries passing through the holes or slots of the support structure installed at a certain distance along the length of the lens (see C. A. Arkad'ev, A. I. Kolomiytsev, M. A. Kumakhov and other Broadband x-ray optics with a large angular aperture. Advances in physical Sciences, 1989, vol 157, issue 3, S. 529-537 [2]; U.S. patent 5192869 (publ. 09.03.93) [3]). The lens generally has the shape of a barrel (i.e., narrowed to both ends), if it is intended for focusing divergent radiation, or polubochki (i.e., narrowed to only one of the ends), if it is intended to convert the divergent radiation in quasiparallel or for focusing such IZLUChENIYa execution, spread accordingly, the terms "full" lens and Paulina". Appropriate terminology is used below in the description of the invention.

Also known lens, in which the walls of adjacent channels of the transport of radiation in contact with each other along the entire length, and the channels have a variable length cross-section, varying according to the same law, and that the full cross section of the lens (V. M. Andreevsky, M. V. Gubarev, P. I. Zhidkin, M. A. Kumakhov, A. V. Noskin, I. Yu. Ponomarev, Kh.Z.Ustok. X-ray waveguide system with a variable cross-section of the sections. The IV-th All-Union Conference on Interaction of Radiation with Solids. Book of Abstracts (May 15-19, 1990, Elbrus settlement, Kabardino-Balkarian ASSR, USSR, pp. 177-178) [4]; U.S. patent 5570408 (publ. 29.10.96) [5]). Full lens and Pollensa" with such channels is shown schematically in Fig.3 and Fig.4, respectively.

"Full" lens (Fig.3) has channels, curved in such a way that the continuation of their left and right from respective ends converge in the left 13 and right 14 focal areas, the size of which is of the order of the diameter of a single channel. The curvature of the channels located closer to the periphery of the "full" lens, more than channels that are closer to its optical axis 15, which coincides with the longitudinal axis of symmetry. To ensure focus the divergent x-ray what s happening in the other focal areas.

"Pollensa" shown in Fig. 4, when applying divergent radiation to the left converts it into quasiparallel radiation coming out of the right side. Bending channels, different at different distances from the optical axis 15 "Pawlenty", provides the intersection of the extensions of their left ends of the focal area 16 "Pawlenty", which should coincide with the location quasiconcave source of divergent x-ray radiation; the output end (right in Fig.4) channels Pawlenty parallel. When applying quasi parallel x-rays on the right in Fig.4 the end "Pawlenty" it focuses at the focal area 16 located at the left end.

Due to the use of the source (x-ray tube that produces x-ray radiation directly, any means for selecting the x-ray radiation range of the radiation source in the described complex is not required. The selection of radiation and its distribution channels transportation to the analytical facilities also does not require any special tools or techniques: it is enough to position the lens 2, 6 in the area of the radiation output of tube 1 at a distance that provides the proximity of Foch special funds to maintain the desired trajectory generated rays (x-ray beams 4, 7) on the way to analytical units 5, 8; enough to provide mutual mechanical stiffness of the x-ray tube 1 and the lens 2, 6. Properties of x-ray tube 1 and x-ray lens 2, 6 stable and allow you to do without any tweaks right after the initial installation.

Because the length of the beam transported quasiparallel radiation, i.e., the distance between the output ends of the x-ray lenses and analytical units, does not exceed a few meters (this distance is enough for convenient placement of equipment and analytical facilities and staff), the attenuation and scattering of x-rays is small. Therefore, the transport of radiation is possible in an air environment, without taking any measures to vacuum, allowing any problems associated with maintaining the vacuum in the proposed facility does not exist.

Radiation protection implemented by the screen 9, is structurally very simple and at a low power x-ray tube 1 (which, as will be shown below, it may be acceptable) can be ensured even conventional building designs.

Unlike synchrotron, which p is anawak, radiation x-ray tube can be both continuous and pulsed with the desired parameters of the latter. Working with continuous radiation in the proposed complex, can conduct research, for which the pulsed radiation is unacceptable (for example, due to the fact that at the same continuous pulse average intensity pulsed radiation possible manifestations of nonlinear effects in the environment, caused by very high intensity pulse).

Analytical units as part of the proposed complex can be designed to solve a large number of very diverse fundamental and applied problems. This is diffractometry and topography of simple, complex and protein crystals; this is x-ray fluorescence analysis using a focused x-ray beams; it is obtaining images of the internal structure of various objects, including biological, including for medical purposes; this is the analysis of new materials and medicines, the analysis of "chips", the properties and quality of the surfaces, and so on

If the analytical setting, which is part of the proposed complex, designed for the performance of ctor 19 excited in the sample radiation, connected to the output of the detector 19 spectrometric tract 20 and is connected to the output of a last resort 21 processing and displaying information. This analytical setting 8 is placed from the output focal region 22 "full" x-ray lens b, which is part of the complex (see also Fig.1) that is installed with the ability to capture part of the divergent x-ray radiation source 1 and the possibility of its focus. The means 17 for placing the sample should provide the possibility of combining the desired part of the sample 18 with the output focal region 22 (the right in Fig.1, figs.5) "full" lens 6. Information about the elements of a spectrometer channel 20 (amplifiers, rejector overlays, multichannel amplitude analyzer and other ), and the tool 21 processing and information display is shown, in particular, in the book: R. Woldseth. Applied spectrometry x-ray radiation. Moscow, Atomizdat, 1977 [6], Chapter 2. The main area of application of spectrometric studies is the determination of the elemental composition of the sample with the assessment of the quantitative content of various chemical elements.

Similar reviewed the analysis is one of the "paulins" 2 (Fig.1). It is enough to Supplement the installation 8 shown in Fig.5, "Pawlenty" 23 (see Fig.6, which shows the result of such additions installation 5). The role of the output focal region "full" lens performs focal area 24 "Pawlenty" 23.

If analytical setting 5 as part of the proposed complex, which is transported quasi parallel beam of radiation, is designed to perform ray diffractometer studies, it contains (Fig. 7) the means 17 for placing the sample 18 and its orientation relative to the direction of propagation of the beam 4, the detector 19 of the radiation diffracted by the sample, and means 25 for mutual positioning of the detector 19 and the sample 18, and is connected to the output of the detector 19, the means 26 for processing and displaying information. A means 25 for mutual positioning of the detector and the sample and the means 17 for placing the sample and its orientation relative to the direction of propagation of the beam are required to provide high angular accuracy, and they are increasing mechanisms. The main field of application of such analytical install razlagaemogo complex, to which is transported quasi parallel beam of radiation, is used to obtain images of the internal structure of the objects it contains (Fig.8) the means 17 for placing the object 18 and the detector 27 has passed through the object radiation. In the simplest case, such a detector is used conventional x-ray film to protect it from exposure to light packaging. This film acts as a registration tool image, and after developing, is also the function of a means of visualization. Other schemes produce images that are applicable in the analytical facilities of the proposed complex, as described, for example, in European application EP 0742150 (publ. 31.07.96) [7].

If analytical setting 5 as part of the proposed complex, which is transported quasi parallel beam of radiation, is intended for x-ray lithography, it contains (Fig.9) the means 28 for placement of the mask 29 and set for him a means 30 for placement of the substrate 31 is coated on its surface with a layer of resist 32. More complex schemes, see, for example, in U.S. patent 5175755 (publ. 29.12.92) [8].

A number of other examples of the structure of the analytical units, including using the and European patent EP 0555376 (publ. 18.03.98)[10].

If the material of the anode is used tungsten, using monochromators is possible to select various wavelengths as the emission of tungsten is very broadband and intense.

If used as the anode difficult target, made of several chemical elements, the monochromators will selectively filter certain wavelengths of the characteristic radiation of complex anode.

Select the type of source of divergent x-ray radiation is determined, in particular, the problem to be solved. Thus, the radiation of laser and plasma sources lying in the soft x-ray range, can be used in research in biology, medicine, microscopy, etc. in Addition, such sources and x-ray tube of sufficient power, can be used in complexes containing analytical units (workstations), with which solved the problem of x-ray lithography (both contact and projection) and LIGA technology.

Depending on the type of x-ray tube, you can use different "geometry" of the location of the anode, x-ray lenses and analytical units.

Rasstonovka lens, forming a beam of radiation only for this analytical units, is one of the possible. In this geometry, it is advisable to use, for example, tubes with "through" or microfocus anode. These tubes emit almost half-space, so the solid angle of radiation can have a large number of "paulins and full of lenses."

In Fig. 10 shows a different geometry, more characteristic x-ray source in the form of a tube (conventionally shown with position 1) with a rotating anode. Using this tube, the source of radiation is linear. The tube has two output window. X-ray optical devices can "pick up" only radiation coming from these two views. To enable the work of a large number of analytical units on the path formed by the x-ray "Pawlenty" 2 quasiparallel beam 4 is located at different angles a few (5 - 10) monochromators 33 that "intercept" the different parts 34 of the cross-section of the original beam 4 exiting "Pawlenty" 2, and direct the reflected portion 35 of the initial beam 4 to analytical units 5. As monochromators 33 can be used, the Type of monochromator and the angle of its orientation relative to the direction of the x-ray beam, coming out of Pawlenty determine the desired degree of collimation difragirovavshej on the beam.

Thus, when used as a source of divergent radiation x-ray tube channels for transporting radiation to analytical units can be subdivided into the following parts:
in geometry, shown in Fig.1:
- period x-ray tube 1 (more precisely, its anode) - input end of the x-ray lens 2 or 7 (within solid angle 3);
the channels of the x-ray lens 2 or 7;
- period of the output end of the x-ray lens 2 or 7 - analytical setting of 5 or 8 (within the cross-section of the output beam 4 of the lens 2 or the solid angle 7, the corresponding output beam lens 6);
in geometry, shown in Fig.10:
- period x-ray tube 1 (more precisely, its anode) - input end of the x-ray lens 2 (within solid angle 3);
the channels of the x-ray lens 2;
- period of the output end of the x-ray lens 2 - monochromator 33 (within the cross-section 34 of the output beam 4 lenses 2);
- period of the monochromator 33 - analytical setting 5 (within the cross-section of the reflected monochromator beam 35).

The territory of the design.

In the book [1] in Fig. 15 (C. 20) curve shows the brightness of the radiation of the English synchrotron "Doris" (E=2 GeV, the current 300 mA). As seen from this figure, in the vicinity of 10 Kev, this emits synchrotron 1010photon/eV(mrad)2i.e. in a narrow solid angle of 1 mrad, and a narrow spectral range equal to 1 eV, "Doris" radiates within seconds of the order of 1010the photons. X-ray tube 1 W for the same time emits approximately isotropic 31011the photons. This is a quasi-monochromatic photons in the spectral band width of about 10 eV. Accordingly, the tube 10 kW emits 31015photons in 1 second.

Using x-ray "Pawlenty" transforming divergent radiation in quasiparallel used in the proposed complex, you get the following number of photons transported quasi parallel with an angular divergence of about 3 mrad:
N = 31015(C)C- aperture capture radiation x-ray tube "Pawlenty",
- transfer coefficient "Pawlenty".

Considering thatC=0,1 happy=0,3 received
N=2,51011fot/eV(mrad)2,
i.e. in the proposed complex x-ray tube with an average power of 10 kW, coupled with optics, gives the same spectral and angular range 25 times higher intensity than the synchrotron "Doris". This shows that the same synchrotron "Doris" radiation density in the neighborhood of 10 Kev can be obtained in the proposed complex at the power tube is only 400 watts. These and even more powerful tubes are widely used in scientific research, such as diffraction. So, Philips uses for diffraction tube with a capacity of 2.5 kW.

Currently manufactured and traded tube with a rotating anode with a capacity from 30 to 100 kW. The cost of these tubes, together with the generator is about 100 thousand dollars, which is approximately 3 orders of magnitude lower than the value of the synchrotron.

From bring the Industrial applicability
The proposed complex due to its relative simplicity and low cost compared to conventional means available for a wide range of specialists and can significantly expand the scope of application of x-ray examinations, tests and measurements, ensuring an acceptable level of brightness of the radiation into the input aperture of the analytical units. It can be assumed that in the future he will be able to find wide application in large and medium physical laboratories.

Sources of information
1. Synchrotron radiation. Ed. by K. Kunz. Moscow, publishing house "Mir", 1981.

2. C. A. Arkad'ev, A. I. Kolomiytsev, M. A. Kumakhov and other Broadband x-ray optics with a large angular aperture. Advances in physical Sciences, 1989, vol 157, issue 3, S. 529-537.

3. U.S. patent 5192869 (publ. 09.03.93).

4. V. M. Andreevsky, M. V. Gubarev, P. I. Zhidkin, M. A. Kumakhov, A. V. Noskin, I. Yu, Ponomarev, Kh.Z.Ustok. X-ray waveguide system with a variable cross-section of the sections. The IV-th All-Union Conference on Interaction of Radiation with Solids. Book of Abstracts (May 15-19, 1990, Elbrus settlement, Kabardino-Balkarian AS SR, USSR, pp. 177-178).

5. U.S. patent 5570408 (publ. 29.10.96).

6. R. Woldseth. Applied spectrometry x-ray radiation. Moscow, Atomizdat, 1977.

7. European application EP 0742150 (publ. 31.07.96).

8. U.S. patent 5175755 (publ. 29.12.92).

9. U.S. patent ia

1. Measuring and test facility for research in x-ray radiation simultaneously on multiple analytical facilities containing the radiation source, the channels of transportation of radiation to analytical facilities and equipment analytical units (5), characterized in that as the radiation source, it contains the source (1) divergent x-ray radiation, at least one channel for transporting radiation to the analytical units (5) formed by the x-ray lens (2) in the form of a set of curved channels (10) using multiple total external reflection of x-rays from their walls (11) together with the radiation beam (4)formed by this lens is installed and configured to capture part (3) divergent x-ray radiation source (1) and convert it into a quasiparallel beam.

2. Complex p. 1, characterized in that it further comprises an x-ray lens (6) in the form of a set of curved canals using multiple total external reflection of x-rays from their walls, which is installed and executed with the ability to capture part of the divergent x-ray is echodnou focal region (22) of the said x-ray lens (6) and configured to position the object (18) research to combine the desired part with the output focal area (22) of the said x-ray lens (6).

3. Complex under item 2, wherein the analytical unit (8), hosted by the output focal region (22) of the said x-ray lens (6), is intended for carrying out spectrometric studies and contains the detector (19) radiation excited in the sample (18) connected to the output of the detector spectrometric tract (20) and connected to the output of a last resort (21) processing and displaying information.

4. The complex according to any one of paragraphs.1-3, characterized in that it as the source of the divergent x-ray radiation includes x-ray tube (1).

5. Complex p. 4, characterized in that the x-ray tube (1) made with microfocus anode.

6. Complex p. 4, characterized in that the x-ray tube (1) made with "through" anode.

7. Complex p. 4, characterized in that the x-ray tube (1) made with a rotating anode.

8. Complex p. 4, characterized in that the x-ray tube (1) made with a complex anode.

9. Complex p. 4, characterized in that the x-ray tube (1) made with a tungsten anode.

10. The complex according to any one of paragraphs.7-9, characterized in that it further comprises at least one of the Asti (34, 35) quasiparallel beam (4), the generated x-ray lens (2), installed with the ability to capture part of the divergent x-ray radiation source and configured to convert it into a quasiparallel beam.

11. The complex according to any one of paragraphs.1-3, characterized in that it as the source of the divergent x-ray radiation contains plasma or laser x-ray source.

12. The complex according to any one of paragraphs. 1-3 and 5-9, characterized in that at least one of the analytical units (5), which is transported quasiparallel beam (4) radiation, is designed to perform ray diffractometer studies and contains a means (17) for accommodating the sample (18) and its orientation relative to the direction of propagation of quasiparallel beam (4), the detector (19) of the radiation diffracted by the sample, and means (25) for the mutual positioning of the detector and the sample, and also connected to the output of the detector (19) medium (26) processing and displaying information.

13. The complex according to any one of paragraphs. 1-3 and 5-9, characterized in that at least one of the analytical units (5), which is transported casipit means (17) for positioning of the object (18) and a detector (27) passing through the object radiation with a means of viewing and recording images.

14. The complex according to any one of paragraphs.1-3 and 5-9, characterized in that at least one of the analytical units (5), which is transported quasiparallel beam (4) radiation, is intended for x-ray lithography and contains a means (28) for placement of the mask (29) and set for him a means (30) for accommodating the substrate (31) coated on its surface with a layer of resist (32).

15. The complex according to any one of paragraphs.1-3 and 5-9, characterized in that at least one of the analytical units (5), which is transported quasiparallel beam (4) radiation, is intended for carrying out spectrometric studies and contains the x-ray lens (23) in the form of a set of curved canals using multiple total external reflection of x-rays from their walls, installed and configured to focus quasiparallel beam of radiation, means (17) positioning the sample (18) for combining the desired part with the area (24) focus x-ray detector (19) excited in the sample (18) radiation that is connected to the output of the detector (19) spectrometric tract (20) and is connected to the output of the at least one of the analytical units (5), which is transported quasiparallel beam (4) radiation, is designed to perform ray diffractometer studies and contains a means (17) for accommodating the sample (18) and its orientation relative to the direction of propagation of quasiparallel beam (4), the detector (19) of the radiation diffracted by the sample, and means (25) for the mutual positioning of the detector and the sample, and also connected to the output of the detector (19) means (26) for processing and displaying information.

17. Complex p. 4, characterized in that at least one of the analytical units (5), which is transported quasiparallel beam (4) radiation is used to obtain images of the internal structure of the object and contains a means (17) for positioning of the object (18) and a detector (27) passing through the object radiation with a means of viewing and recording images.

18. Complex p. 4, characterized in that at least one of the analytical units (5), which is transported quasiparallel beam (4) radiation, is intended for x-ray lithography and contains a means (28) for RA the R layer of resist (32).

19. Complex p. 4, characterized in that at least one of the analytical units (5), which is transported quasiparallel beam (4) radiation, is intended for carrying out spectrometric studies and contains the x-ray lens (23) in the form of a set of curved canals using multiple total external reflection of x-rays from their walls, installed and configured to focus quasiparallel beam of radiation, means (17) positioning the sample (18) for combining the desired part with the area (24) focus x-ray detector (19) excited in the sample (18) radiation that is connected to the output of the detector (19) spectrometric tract (20) and connected to the output of a last resort (21) processing and displaying information.

20. Complex p. 10, characterized in that at least one of the analytical units (5), which is transported quasiparallel beam (4) radiation, is designed to perform ray diffractometer studies and contains a means (17) for accommodating the sample (18) and its orientation relative to the direction of rasprostraneniya mutual positioning of the detector and the sample, and also connected to the output of the detector (19) means (26) for processing and displaying information.

21. Complex p. 10, characterized in that at least one of the analytical units (5), which is transported quasiparallel beam (4) radiation, is designed to perform ray diffractometer studies and contains a means (17) for positioning of the object (18) and a detector (27) passing through the object radiation with a means of viewing and recording images.

22. Complex p. 10, characterized in that at least one of the analytical units (5), which is transported quasiparallel beam (4) radiation, is intended for x-ray lithography and contains a means (28) for placement of the mask (29) and set for him a means (30) for accommodating the substrate (31) coated on its surface with a layer of resist (32).

23. Complex p. 10, characterized in that at least one of the analytical units (5), which is transported quasiparallel beam (4) radiation, is intended for carrying out spectrometric studies and contains the x-ray lens (23) in the form of a set of curved canals using multiple complete the simulation of quasiparallel beam of radiation, means (17) positioning the sample (18) for combining the desired part with the area (24) focus x-ray detector (19) excited in the sample (18) radiation that is connected to the output of the detector (19) spectrometric tract (20) and connected to the output of a last resort (21) processing and displaying information.

24. Complex on p. 11, characterized in that at least one of the analytical units (5), which is transported quasiparallel beam (4) radiation, is designed to perform ray diffractometer studies and contains a means (17) for accommodating the sample (18) and its orientation relative to the direction of propagation of quasiparallel beam (4), the detector (19) of the radiation diffracted by the sample, and means (25) for the mutual positioning of the detector and the sample, and also connected to the output of the detector (19) medium (26) processing and displaying information.

25. Complex on p. 11, characterized in that at least one of the analytical units (5), which is transported quasiparallel beam (4) radiation is used to obtain images of the internal structure of the I with the means of viewing and recording images.

26. Complex on p. 11, characterized in that at least one of the analytical units (5), which is transported quasiparallel beam (4) radiation, is intended for x-ray lithography and contains a means (28) for placement of the mask (29) and set for him a means (30) for accommodating the substrate (31) coated on its surface with a layer of resist (32).

27. Complex on p. 11, characterized in that at least one of the analytical units (5), which is transported quasiparallel beam (4) radiation, is intended for carrying out spectrometric studies and contains the x-ray lens (23) in the form of a set of curved canals using multiple total external reflection of x-rays from their walls, installed and configured to focus quasiparallel beam of radiation, means (17) positioning the sample (18) for combining the desired part with the area (24) focus x-ray detector (19) excited in the sample (18) radiation that is connected to the output of the detector (19) spectrometric tract (20) and connected to the output of a last resort (21) the process is

 

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