Device for re-loading of the material in the crucible

 

(57) Abstract:

The invention relates to growing silicon single crystals by the Czochralski method, in particular to devices for re-loading of material into the crucible, and can be used on plants growing single crystals of silicon, equipped with a gateway device to provide semi-continuous growing crystals. The inventive device includes a tank rigidly associated with locking ring supporting elements placed in the bottom of the tank, and the attachment of the tank to the transfer mechanism, in which the retainer ring is placed outside the tank. When tank is provided with a bottom opening, and the attachment of the tank is made in the form of serially connected flexible rods passing through the side surface along a rectilinear generatrix of the tank with two opposite sides with the formation of the suspension above the upper base of the tank, and the lower end of each extreme traction is connected with the possibility of movement with the respective supporting element. Improved device for re-loading of the crucible provides a regulated discharge of the material with PE is kralickova, in particular, to devices for re-loading of material into the crucible, and can be used on plants growing single crystals of silicon, equipped with a gateway device to provide semi-continuous growing crystals.

When growing silicon single crystals by the Czochralski silicon ingot is pulled from the silicon melt on a seed crystal required orientation. To prevent oxidation of the melt and burn the graphite parts of thermal node in the working chamber, in which is conducted the melting of the silicon and pulling the ingot from the melt, create an inert atmosphere. Semi-continuous method of growing silicon single crystals provides for the discharge from the working chamber of the installation of the grown ingot of silicon and re-loading the crucible with residue melt a new portion of material. To ensure the re-loading of the crucible without breaking the sealing of the working chamber and without cooling of the crucible used the devices for re-loading of material into the crucible through which re-loading of the crucible directly in the working chamber.

A device for re-loading of material into the crucible, which Yelsk. The special technology of electronic materials. 1993, S. 165). The rod is a polycrystalline silicon of a certain size.

The device operates in this way. An ingot of silicon single crystal, stretched on a seed crystal from the crucible, is separated from the melt, move out of the working chamber and, after locking, unloaded from the top of the camera. In the upper chamber the material to re - download the crucible, a polycrystalline silicon using the mount connected to the transfer mechanism, which can be used a mechanism for moving the seed. After locking the polycrystalline silicon rod is moved into the working chamber, is mounted above the crucible and lowered to the surface of the melt in the crucible. The core begins to melt, thereby populating the crucible.

However, with such devices it is impossible to re-download crucible of material in the form of crushed pieces of polysilicon or rejected previously grown ingots, and impossible when reloading to produce ponteginori melt.

The closest is the device length of re-loading of the material in the crucible,rvoir to the transfer mechanism (US, patent 4394352, 1987, M CL 30 In 15/02). Supporting elements made of tantalum and capable of withstanding at room temperature, the weight of the load. When the temperature of the supporting elements are deformed.

The known device operates in this way. An ingot of silicon single crystal, stretched on a seed crystal from the crucible, separated from the melt, move from the working chamber into the chamber sluicing and, after locking, unloaded from the top of the camera. In the upper chamber and injected tank re-load: as pieces of polysilicon cylindrical shape, between which optionally lay alloying material; with the help of the mount connecting the tank with the transfer mechanism, which can be used a mechanism for moving the seed. After locking the tank is moved into the working chamber, is placed over the crucible and lowered by a certain distance to the crucible so that the end face of the tank was in the immediate vicinity of the melt. At elevated temperatures supporting elements begin to deform, allowing re-boot to get into the crucible with the melt.

Despite the fact that it ustroile material. This load depends on the material properties of the supporting elements, the temperature in the working chamber and in the presence of residual deformation of tantalum elements becomes unmanageable. In some cases, this may lead to an emergency situation. For example, when the deformation of the supporting elements at a height of more than the required boot material when injected into the crucible causes splashing of the melt.

The objective of the invention is to improve devices for re-loading of the crucible by additional supply tank bottom and the locking ring, and the connection of the supporting elements with flexible rods associated with the transfer mechanism that provides a regulated loading of the crucible.

The problem is solved by the proposed device for re-loading of the material in the crucible, including the tank, supporting elements, placed in the bottom of the tank, and the attachment of the tank to the transfer mechanism, which is further provided with a locking ring placed outside the tank and rigidly connected with it, while the tank is provided with a bottom opening, and the attachment of the tank vypolnjajushej tank with two opposite sides with the formation of the suspension above the upper base of the tank, and the lower end of each extreme traction is connected with the possibility of movement with the respective supporting element. While the hull is made of two parts, mainly of two equal symmetrical parts. The tank can be made in the form of a cylinder, better, with solid walls.

For convenience, which allows reloading without having to remove the seed from the transfer mechanism, the suspension flexible rod wound in a clamp connected to the transfer mechanism.

This attachment includes at least three serially connected flexible rod.

In the proposed invention adjustable disclosure bottom part of the tank is under the influence of its own weight material load when the movable connection of the supporting elements with flexible rods associated with the transfer mechanism. The device to reload the move to install crystal growth with a closed bottom, which is held in closed condition by means of supporting elements. If flexible rod stretched, the supporting elements is pressed against the bottom and securely hold the bottom closed. When the device to re-boot room with adjustable speed. At the contact of the locking ring with an emphasis install the crystal growth stops movement of the tank, and due to the fact that the mechanism continues to move down, loosened the tension of the flexible rods. This leads to a weakening movably associated supporting elements. In the bottom under the influence of the weight of the load is opened, allowing the load to be released.

The invention is illustrated by drawings, which depict:

in Fig. 1 - downloaded the device to reload the crucible out of the setup for growing a single crystal ingot;

in Fig.2 - the bottom of the tank.

in Fig. 3 - loaded device to reload the crucible of the apparatus for growing a single crystal ingot;

in Fig.4 is a device for re-loading of the crucible in an apparatus for growing monocrystalline ingots after loading the crucible.

As shown in Fig. 1-4, a device for re-loading of raw material in the crucible includes a tank 1 for downloadable material 2, the Tank 1 is equipped with an opening bottom, which may consist of one or several parts. In a preferred embodiment of the invention the opening of the Nam is tel 5 and 6, respectively (Fig.2). At the end of the tank 1 is placed supporting elements 7 and 8, movably connected with flexible rods 9 and 10 respectively. These thrust 9 and 10 pass through the side surface along a rectilinear generatrix of the tank 1, with each of them is with one of the two opposite sides of the tank. The upper end of each of the rods 9 and 10 is connected with one end of flexible rod 11 directly or through the element 12. The tank 1 is equipped with a locking ring 13. placed outside the tank 1 and is rigidly associated, for example, by means of the uprights 14 and 15. Flexible rod 11 forms above the upper base of the tank 1 suspension, by means of which the tank 1 is attached to the transfer mechanism 16. As the transfer mechanism 16 use a regular mechanism for moving the seed crystal 17 and the grown ingot. The suspension is combined with the transfer mechanism 16 directly or through the yoke 18. The tank 1 may be in the form of a straight prism, in an advantageous embodiment, the tank 1 is made in the form of a cylinder, which may be solid, made of refractory material such as molybdenum or niobium. If necessary, flexible rod 9 and 10 can be composite, consisting of several segments. The mechanism Perama 20 and device for locking (Fig.3 not shown). In the working chamber 20 posted by crucible 21 with the melt 22, the heater 23 and the screen 24. In the lower part of the upper camera 19 posted by protruding element 25. Depending on the design of the facility for growing single crystals protruding element 25 can be placed in the upper part of the working chamber 20.

The device operates in this way.

In the tank 1 device to re-boot of the material in the crucible is placed downloadable material 2 so that the melt 22. If necessary, together with polyctenium, which is used as rods, pieces of polysilicon any shape, for example pieces rejected previously grown ingots, in the lower part of the tank load the ligature. After locking with the upper camera 19 installation for growing single crystals unload the grown ingot. In the upper chamber for growing crystals on the seed holder 17 is suspended yoke 18 without removing the seed crystal 17, and the clamp 18 is slid suspension flexible rod 11 of the tank 1 and material 2 so that the crucible 21. Suspension flexible rod 11 can be placed directly on the transfer mechanism 16, but in this case, the holder of the seed and the seed crystal 17 must be removed. Flexible rod 11 across the bearing parts 3 and 4 of the bottom in the closed state, In this state, the reservoir 1 with the load 2 via the transfer mechanism 16 after sluicing enters into the working chamber 20. The tank 1 with the load 2 is lowered to the crucible 21, placed in the middle of the heater 23 and the screen 24 up until the retainer ring 13 does not come into contact with a protruding element 25 of the upper chamber 19 (Fig.3). Further lowering of the transfer mechanism 16 causes the strain relief flexible rod 11, and a flexible rods 9 and 10, since the movement of the tank 1 is stopped by the locking ring 13. Because the supporting elements 7 and 8 are movably connected with the corresponding flexible shaft 9 or 10, with the weakening of the tension they cease to maintain the bottom in the closed state. This leads to the fact that under the action of the weight load of the bottom 3 and 4 open. When this material 2 enters the melt 22 (Fig.4). Because depower 11 is controlled and adjusted by means of the transfer mechanism 16, the discharge of material 2 from the tank 1 is manageable.

After unloading the material tank 1 by using the transfer mechanism 16 raise the upper part of the working chamber 20 and, after locking, the upper camera 19 installation for growing monocrystals growing single-crystal ingot, the clamp 18 with an empty tank 1 is discharged from the upper chamber, conduct its locking and begin the process of growing the single crystal. In case after re-boot and melting loading of the melt in the crucible 21 is insufficient, then reload again.

Thus, the proposed device provides a regulated material under repeated loading of the crucible.

1. Device for re-loading of the material in the crucible, including the tank, supporting elements, placed in the bottom of the tank, and the attachment of the tank to the transfer mechanism, characterized in that it further comprises a retaining ring placed outside the tank and rigidly connected with it, while the tank is provided with a bottom opening, and the attachment of the tank is made in the form of serially connected flexible rods passing through the side surface along a rectilinear generatrix of the tank with two opposite sides with the formation of the suspension above the upper base of the tank, and the lower end of each extreme traction is connected with the possibility of movement with the respective supporting element.

2. The device according to p. 1, aliciausername of two equal symmetrical parts.

4. Device according to one of paragraphs. 1-3, characterized in that the tank is made in the form of a cylinder.

5. Device according to one of paragraphs. 1-4, characterized in that the tank is made with solid walls.

6. Device according to one of paragraphs. 1-5, characterized in that the suspension flexible rod wound in a clamp connected to the transfer mechanism.

7. Device according to one of paragraphs. 1-6, characterized in that the fastening Assembly includes at least three serially connected flexible rod.

 

Same patents:

The invention relates to the field of obtaining single crystals of semiconductor materials and can be used to obtain silicon single crystal by Czochralski method

The invention relates to the production of nonlinear optical single crystal triborate lithium (LBO)

The invention relates to the field of production of semiconductor materials and can be used to produce silicon in the form of plates floating method

The invention relates to methods of obtaining crystals by the Czochralski method using recharge melt the source material

Laser substance // 2066352
The invention relates to the field of quantum electronics and can be used in the development of lasers in the infrared range

The invention relates to techniques for registration and spectrometry of ionizing radiation, in particular for scintillation materials

The invention relates to the field of scintillation materials used for registration and spectroscopie ionizing radiation
Colored crystal // 2026897
The invention relates to the field of growing single crystals and is industrially applicable in the manufacture of jewelry

The invention relates to the field of artificial crystals and can be used in the jewelry industry in the manufacture of inlays in jewelry, simulated emerald, aquamarine, sapphire, amethyst

The invention relates to a method of regeneration of the ion exchanger in counter-flow filters and can be used in the treatment of water and aqueous solutions in the energy, chemical and other industries

The invention relates to installations for ion exchange water purification and can be used in the field of water treatment

The invention relates to chemical recovery units (hereinafter simply referred to as chemical regenerators) and, in particular, to the gutter to drain melt intending to discharge from chemical regenerator melt, which is formed therein during operation and contains fireproof chemical products

The invention relates to techniques for water purification by the method of ion exchange and can be used in boiler plants
The invention relates to the field of chemistry and can be used to create an additive in the solution for the regeneration of the filters used for the purification of aqueous solutions and suspensions

The invention relates to methods and devices designed for loading of bulk materials, and can be used in chemical, oil refining and other industries, for example, in the reactor primary reformer

The invention relates to the production of nitrous oxide

The invention relates to the technological systems of sewage treatment, namely wastewater containing substances that cause the coloration of the wastewater, such as various organic dyes, petroleum products, phenols, etc

Dosing site // 2173211
The invention relates to the dispensing of chemicals in the oil gathering system and waste water

The invention relates to an electrodeionization device for and method of removing ions from aqueous solution in the device for EDI, which, in particular, contains many compartments diluting and concentrating compartments, and a continuous phase of the first ion exchange material with the dispersed phase of the second ion exchange material

FIELD: water-supply engineering.

SUBSTANCE: invention concerns water-supply means for feeding power plants and boiler installations provided with ion-exchange water-desalting filters. Preparation of purified sodium chloride solution followed by reuse thereof as regeneration solution for Na-cationite filters is accomplished by passing regenerate through electrolyzer, then settling catholyte to precipitate hardness salts, neutralizing solution with hydrogen chloride formed in electrolysis process, and passing neutralized solution through supplementary Na-cationite filter. pH value of as-electrolyzed solution is maintained not below 11.0.

EFFECT: prevented discharge of chlorides into water objects and reduced expenses on water treatment due to reduced consumption of reagents.

2 cl, 1 tbl, 2 ex

Up!