Electrode device with pre-ionization by ultraviolet radiation from the corona discharge

 

(57) Abstract:

The invention relates to laser technology and is an electrode device with pre-ionization by ultraviolet radiation from the corona discharge in repetitively pulsed gas laser of THE type. The device includes a power source, a pair of main extended electrodes, corona discharge generators, located transversely to the main electrodes. The inner conductors of the corona discharge generators are conductors connecting the high-voltage electrode to the power source. The technical result of the invention: creating a low-inductance of the main discharge circuit of the electrode device, the efficiency of the laser and the provision of simple, reliable and inexpensive construction of the insulator tight current lead to one of the high voltage electrodes. 8 C.p. f-crystals, 1 Il.

The invention relates to the field of quantum electronics and can be used repetitively pulsed gas lasers TE-type.

Known electrode device with pre-ionization by ultraviolet radiation from the corona discharge in the gas laser (U.S. patent N 4555787, class 372/86, from 26.11.85). Generator crown winners inside this tube and a conductive strip on the outside of the tube. Inner conductor and a conductive strip connected to the same voltage source, and the main discharge electrodes. For isolation of high-voltage elements of the body of the laser is made of a dielectric.

Known electrode device with pre-ionization by ultraviolet radiation from the corona discharge in the gas laser (U.S. patent N 4817107, class 372/61, from 28.03.89), in which the elements of the preionization mode are a pair arranged symmetrically about the main electrodes of the tube of insulating material with the inner conductor. Tube stretch along one of the main discharge electrodes. All elements of the laser camera fixed electrodes and the corona discharge generators are made of dielectric materials such as ceramics.

Known electrode device with pre-ionization by ultraviolet radiation from the corona discharge in the gas laser (U.S. patent N 5719896, class 372/086, from 17.02.98), along which the main electrodes are tubes for the preionization mode a relatively large length. Tubes are installed with the possibility of easy replacement in case of breakage. As material is polycrystalline oxide ceramics and the external conductor is connected to the power source. Sealed high voltage input from the power source to the high voltage electrode made with insulating element of relatively large dimensions.

Known electrode device with pre-ionization by ultraviolet radiation from the corona discharge (U.S. patent N 4718072, class 372/086, from 15.05.88), in which the generator corona discharge is a dielectric tube with an inner conductor and on the dielectric tube outer conductor. The inner conductor of the generator corona discharge is electrically connected to one of the main electrodes inside the chamber of the laser, and the outer conductor of the generator corona discharge is electrically connected to the second main electrode. As tube generator corona discharge, and the insulator of the high voltage electrode have relatively large dimensions and are made of high quality dielectric material.

As analogues and prototype have the following disadvantages.

Thin dielectric tubes have a length L greater length of the main electrodes, small diameter (of the order of 0.01 L) and low tolerance for deflection (of the order of 0.0001 L). Therefore, this element relative to roads in the manufacture who is special design, excluding the Flexural deformation of the tube during installation and operation, which complicates the design.

As the generator corona discharge is installed near one of the discharge electrodes, the ultraviolet radiation non-uniformly illuminates the bit interval in a direction transverse to the longitudinal axis of the electrode.

Electric power generators, corona discharge has a high inductance, since the inner conductor with a small cross-section has a greater length and can be connected to the circuit elements only the ends of the tube. This reduces the slope rate of rise of voltage at the generator corona discharge, which leads to a decrease in the output of the ultraviolet radiation from the corona discharge.

As the generator corona discharge is located inside the discharge circuit, for this reason, the minimum cross-sectional area of the main discharge circuit is increased, and therefore, the increased inductance of the main discharge circuit, which reduces the efficiency of the laser.

To provide a low-inductance high-voltage sealed input to the high voltage electrode and its mounting is required or dielectric camera body laser or dopolnitelnyie item most preferred ceramic material value of the product increases significantly.

The objective of the invention is to increase the efficiency of the electrode devices with pre-ionization from the corona discharge in the gas laser, reducing the inductance of the main discharge circuit and the use of simple, reliable and inexpensive construction of the insulator tight current lead through the body of the gas laser from the power source to one of the main electrodes.

To solve this problem in an electrode device with pre-ionization by ultraviolet radiation from the corona discharge containing a pair of main extended electrodes installed in a sealed enclosure connected by conductors to the power supply, generators, corona discharge, each of which contains a tube of dielectric material, the outer surface of which is in contact with a conductive element electrically connected to the first main electrode inside the tube is a conductor connected to a second main electrode,

the corona discharge generators are installed transversely to the longitudinal axis of the main electrodes, conductors located inside the dielectric tube, electrically connected in parallel and are the power conductors of the primary is with the first main electrode, is a member of the corps, generators, corona discharge enshrined in the element body tightly,

a second electrode attached to the corona discharge generators,

generators, corona discharge is established in the form of at least one row located along the main discharge

the corona discharge generators are installed in two rows with the same step, and in the longitudinal direction of one row offset from the other by 1/2 step

the outer surface of the generator corona discharge in the direction of propagation of corona discharge, that is, along the longitudinal axis of the tube, has a developed surface,

on the outer surface of the dielectric tubes of the generator corona discharge are covering the closed conductive ring,

the dielectric tube generator corona discharge are made of ceramics

the outer surface of the dielectric tube generator corona discharge has a shape with a small aerodynamic resistance in the direction transverse to the longitudinal axis of the electrodes and the longitudinal axis of the tube.

The corona discharge generators are installed transversely to the longitudinal axis of the main electrodes, the wires inside the dielectric trusedale short of the dielectric tube, what is more simple to produce, cheaper. The inner wire of the corona discharge generators also perform the function of conductors from the power source to the second electrode. As the generator corona discharge is structurally integrated with the conductors to the second electrode, in comparison with the prototype of the cross-sectional area of the main discharge circuit can be reduced, educated low-inductance circuit increases the efficiency of the laser.

A conductive element electrically connected with the first main electrode is an element of the housing, the corona discharge generators attached to it tightly. A second electrode attached to the corona discharge generators. The fastening of the electrodes does not require complicated bulky design electrical insulator electrodes from the body, which in the case of manufacturing the ceramic insulator significantly reduces the cost of construction. Because of the smaller base surface on which there is a fastening and sealing a ceramic insulator, substantially increases the reliability of the insulator during Assembly and operation, since the bending stress, undesirable for malopara materials, such as ceramics, are missing.

Generators, corona discharge is of azrad installed in two rows with the same step, moreover, in the longitudinal direction of one row offset from the other by 1/2 step. This allows a more uniform along the length of the main discharge gap pre-ionization, which contributes to a more uniform concentration of charged particles in the discharge zone, and, as a consequence, the process provides a more uniform volumetric discharge pump. Furthermore, the presence of a large number of short conductors electrically connected in parallel, creates a low-inductance conductors connecting the power source with a high voltage electrode for rapid deposition of energy in the main discharge. This electrode allows the system to operate for a long time with high efficiency in gas mixtures, requiring large energy deposition for short periods of time.

The outer surface of the generator corona discharge in the propagation direction of the corona discharge has a developed surface. On the outer surface of the tube corona discharge are covering the conductive ring. When applying a pulse voltage between the inner wire of the generator corona discharge and related dielectric tube element on the outer surface of the dielectric trubk the breakdown of the main discharge gap occurred before as corona discharge will reach the end of the dielectric tube, it is necessary to increase the path of corona discharge. This is achieved by the development of the surface of the dielectric tube, and the formation of the conductive rings on the outer surface of the dielectric tube. In the latter case, the corona discharge on each conductive ring will stop and with a characteristic time delay to start again. This increases the time to junk the full overlap of the electric discharge surface of the insulator while maintaining a low inductance path.

The dielectric tube made of ceramics. Ceramics, for example aluminiumoxide ceramics, is one of the best materials used in generators, corona discharge, because ceramics are chemically resistant to a wide range of laser gases, including to the action of gases containing halogen-free, and has the necessary insulating properties. This allows the use of the proposed design in excimer lasers.

The outer surface of the dielectric tube generators, corona discharge has a shape with a small aerodynamic resistance in the direction of the cross is terrible, the external form of tubes with small aerodynamic resistance reduces energy consumption for pumping gas. This allows efficient operation of the electrode device in lasers TE type with a high pulse repetition rate.

The technical result of the invention is an electrode device with pre-ionization by ultraviolet radiation from the corona discharge in the gas laser, providing high efficiency of preionization mode, providing low-inductance of the main discharge circuit, providing a high efficiency electrode device for gas mixtures, requiring large energy deposition for short periods of time, providing the use of simple, reliable and inexpensive construction of the insulator tight current lead to one of the main electrodes.

The drawing shows a cross section of the electrode devices with pre-ionization by ultraviolet radiation from the corona discharge.

The main electrodes 1, 2 form a discharge gap, the electrode 1 is fixed on the conductive element 3 (cover) housing 4, the corona discharge generators, each of which consists of a dielectric tube 5 and the inner and eskay plate 7, connected to the conductor 6. The conductor 6 and the conductors 3 of the electrode 1 is connected to the power source 8. On the outer surface of the tube 5 is formed the conductive ring 9, and the cylindrical protrusions and grooves, increasing the length of the surface.

When applying a voltage pulse on the role of the conductors of the element body 3 and the conductors 6, on the outer side of the tubes 5, the points of contact of the tubes 5 with the element body 3 (the most intense, the so-called triple points, which are interfaced conductor, dielectric and gas), distributed corona discharge. Ultraviolet radiation from the corona discharge ionizes the gas in the discharge gap. When the electrodes 1, 2, the voltage will rise to the breakdown value, gas discharge occurs in the ionized interelectrode region and therefore is volumetric.

Generators, corona discharge can be formed and mounted so that the distance from the outer surface of the tube 5 to the electrode 1 having a potential close to the potential of the plasma corona discharge will be less than the distance to the electrode 2, a potential which differs from the potential of the plasma corona discharge. In that the IV is the breakdown from the generator corona discharge at the electrode 2. Thus the inductance of the main discharge circuit is minimal.

The sealing tube 5 to the housing 3 and the bushing 6 in the tube 5 is carried out by soldering or any other known method.

Along with the use of the corona preionization mode according to the proposed technical solution in the design, you can use traditional methods of preionization mode, for example a dielectric tube with inner conductor along at least one of the electrodes. In this case, the intensity and uniformity of the preionization mode is higher than in the prototype, and the design of the insulator tight current lead to the high voltage electrode is simpler, cheaper and more reliable.

1. Electrode device with pre-ionization by ultraviolet radiation from the corona discharge containing a pair of main extended electrodes installed in a sealed enclosure connected by conductors to the power supply, generators, corona discharge, each of which contains a dielectric tube, the outer surface of which is in contact with a conductive element electrically connected to the first main electrode inside the tube is a conductor connected to a second main electtrical, the wires inside the dielectric tubes are conductors connecting the second electrode and the power source.

2. The device under item 1, characterized in that the conductive element is electrically connected to the first main electrode is an element of housing, generators, corona discharge enshrined in the element body tightly.

3. The device according to p. 2, characterized in that the second electrode is fixed to the corona discharge generators.

4. The device under item 1, characterized in that the corona discharge generators are installed in the form of at least one row located along the main discharge.

5. The device according to p. 4, characterized in that the corona discharge generators are installed in two rows with the same step, and in the longitudinal direction of one row offset from the other by 1/2 step.

6. The device under item 1, characterized in that the external surface of the generator corona discharge in the propagation direction of the corona discharge has a developed surface.

7. The device under item 1, characterized in that on the outer surface of the dielectric tubes of the generator corona discharge are covering the closed conductive colorvitality ceramic.

9. The device under item 1, characterized in that the outer surface of the dielectric tube generator corona discharge has a shape with a small aerodynamic resistance in the direction transverse to the longitudinal axis of the electrodes and the longitudinal axis of the tube.

 

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