Node plate nozzle microinjector and method of its manufacture

 

(57) Abstract:

The invention relates to a manufacturing device for inkjet printing. The proposed site plate nozzle microinjector and the method of manufacture of this node, in which the pattern in which the formed area of the holes is immersed in the electrolyte, in which NiH2/SO3/H NiCl2H3BO3C12H25SO4/NaS and deionized water are mixed in a predetermined ratio. After this several times serves a current having a given density, to thereby form a nozzle plate having multiple holes. Thus obtained plate nozzle has a different roughness on the inner and outer surfaces, which eliminates crosstalk and the formation of air bubbles. 2 C. and 21 C.p. f-crystals, 6 ill.

The present invention relates to microinjector and, more precisely, to the node plate nozzle microinjector, in which the inner and outer surface of the nozzle plate perform with different roughness, without resorting to complicated process, and method of manufacturing site of the nozzle plate such microinjector.

In General, microinjector is a device that is intended for the liquid, for example, ink injected fluid or oil, using a method that allows for fluid make electrical or thermal energy to the specified value so that you can cause volumetric transformation of such liquid. Therefore, a specific object can be made a specified number of such liquid.

Recently, the development of electric and electronic technology has enabled rapid progress in the development of such microinjection. As a consequence, microinjector widely used by the person at home and at work. As an example application of microinjector in a person's life can lead to an inkjet printer.

Unlike conventional dot-matrix printer ink-jet printer, that is one of the types of microinjector capable of printing different colors through the use of cartridges, and its benefits include less noise and improved print quality. For this reason, the inkjet printer is gaining popularity.

Currently, the inkjet printer is usually provided with a print head that converts the ink is in a liquid state, in the state luogo ink, turned into bubbles in such a way that expands and is forced to perform printing on the printing paper.

Various design implementation and operation of an inkjet printhead according to the prior art has been disclosed in U.S. patent N 4490728, entitled "Thermal inkjet printer" ("Inkjet printer with a heated printing elements"), U.S. patent N 4809428, entitled "Thin film device for an inkjet printhead and process for manufacturing the same", ("thin-film device for an inkjet printhead and method of fabrication"), in U.S. patent N 5140345 "Method of manufacturing a substrate for a liquid jet recording head and substrate manufactured by the method (the Method of manufacturing a substrate for ink-jet recording head and the substrate produced by this method"), U.S. patent N 5274400 "Ink path geometry for high temperature operation of the inkjet printheads" ("the Geometry of the trajectory of ink for high-temperature operation of an inkjet printhead") and in U.S. patent N 5420627 "Inkjet printhead" ("Inkjet printhead").

Typically, such conventional ink-jet printhead includes a nozzle plate having a nozzle with a micro diameter extrusion of ink. In this case, the nozzle plate serves as an ink passage for final extrusion of ink on SNM account specifies the print quality. Therefore, the choice of substances for the formation of the nozzle plate or the size or shape of holes in it, as a rule, takes into consideration the characteristics of the ink.

In such an inkjet printhead, typically, the outer surface of the nozzle plate perform smooth to ensure a lower roughness. Thus the surface tension between the nozzle plate and the ink is increased, and the contact angle between them becomes greater, thereby it is possible to prevent crosstalk, in which ink droplets turned into bubbles and ready to release, spill over to the next adjacent hole.

However, with respect to the outer surface of the nozzle plate, while reducing the surface roughness of the problem of cross-distortion can be easily solved. If it decreases the roughness of the inner surface of the nozzle plate, the surface tension between the inner surface and the ink increases. Thus, the contact angle between the nozzle plate and the ink becomes larger. In the ink, which should be released in the direction of the hole, stick the inner surface of the nozzle plate instead be transformed into pusy the Nile, thus disrupted the smooth flow of ink.

In that condition, when the ink is not smooth and thus the ink contained in the chamber for ink, not enough, in case of reduction of the printhead at high speed driving in the ink chamber for a large number of air bubbles. Back then, the air bubbles prevent the passage of ink drops through the hole in the plate, thereby creating the problem lies in the fact that the ink is impossible to squeeze on the printing paper. As a result, the print quality in General is greatly reduced.

To overcome these problems, developed a method, disclosed in U.S. patent N 5563640, entitled "Droplet ejecting device" "Device for squeezing out drops"), in accordance with this method, the outer surface of the nozzle plate are made of substances having weak adhesion with ink, for example, polysulfone, polyethersulfone or polyimide. The internal surface of the nozzle plate covered with substances having excellent adhesion with ink, for example, a film of SiO2. Thus, it is possible to support different surface tension in those cases where the ink to Sopianae problems associated with cross distortion and formation of air bubbles.

In addition, U.S. patent N 5378504, entitled "Method for modifying a phase change ink jet printing heads to prevent degradation of ink contact angles" ("Method of modifying an inkjet printhead with phase changes to prevent the decrease of the contact angles of the ink"), disclosed a technique in which the outer surface of the nozzle plate precipitated additional material coatings, characterized by durability, in order to prevent the reduction of surface tension and deterioration of the outer surface of the nozzle plate.

However, for the formation of a hole which acts as a nozzle, the nozzle plate requires a complex process, which uses expensive equipment, for example, the excimer laser. In addition, if the inner surface of the nozzle plate is formed of a film of SiO2the diameter of the hole becomes extremely small, and it is impossible to form a homogeneous (evenly distributed) film of SiO2. In addition, since this requires an additional operation of the coating used for the deposition of the covering substance on the outer surface of the nozzle plate, the whole process theplastic, which persists an additional coating operation and which requires only inexpensive equipment. In this case, due to the limited amount of electrolyte, the inner surface roughness does not exceed from 0,016 MK to 0.025 microns, and can be obtained the desired surface tension.

Therefore, the aim of the present invention is to prevent adhesion of the injected (extruding, injection) liquid on the inner surface of the nozzle plate.

Another objective of the present invention is the smooth flow of the injected fluid by preventing its slidenote.

Another objective of the present invention is to suppress the formation of air bubbles by smooth supply of the injected fluid.

Another objective of the present invention is the maintenance of different surface tensions of the injected fluid on the inner surface and the outer surface of the nozzle plate without performing complicated operations, such as film forming, and using inexpensive equipment.

The above objectives, according to one aspect of the invention achieved through a method of izgubljena for determining the area of the holes, polishing the surface of the template, the coating in the form of a nozzle plate on the surface of the pattern to partially fill the area of the holes, the separation plate of the nozzle from the template.

Preferably, the operation of the education template contained operations: forming a first metal film on a substrate on which is formed a protective film, forming a second metal film on the first metal film, etching the first and second metal films for partial exposure of the protective film.

It is advisable that the first metal film made of vanadium.

It is advisable that the second metal film made of Nickel.

It is desirable that the operation of polishing the surface of the template contained operation: remove grease and heat treatment surface of the template and the surface treatment of the template in a liquid for passivation, having given temperature. It is possible that the heat treatment of the template is performed at a temperature of from 32oC to 37oC.

Useful to the heat treatment of the template was performed for 10 to 14 minutes.

Preferably, the surface of the template was done in tempera on the seconds.

It is possible that the method further contained after the operation of the coating in the form of a nozzle plate on the surface of the template, the operation is complete coating in the form of a nozzle plate by providing the thickness of the nozzle plate using a predefined equation.

It is useful to equation has the following form:

< / BR>
where is the thickness of the nozzle plate; P1- the weight of the template before applying on it a covering in the form of a nozzle plate; P2- the weight of the template after applying to a coating in the form of a nozzle plate; S is the area covered by the nozzle plate; and - the proportion of the nozzle plate.

Preferably, the method contained after the operation is complete coating in the form of a nozzle plate of the operation of the heat treatment plate nozzle in a glass tank.

It is advisable to heat treatment performed at a temperature of 20oC to 30oC in a glass tank.

It is possible that the nozzle plate was applied in the form of a coating method of electroplating processes using a liquid electrolyte.

It is desirable that the electrolyte was made of NiH2/SO3/H NiCl2H3BO3C12H25SO4/NaS and deionizer the corresponding ratio of the components: 280 g/l to 320 g/l NiH2/SO3/H, 18 g/l to 22 g/l NiCl2from 28 g/l 32 g/l H3BO3and from 0.03 g/l to 0.08 g/l C12H25SO4/NaS.

Preferably, the electrolyte was made of 300 g/l NiH2/SO3/H, 20 g/l NiCl2, 30 g/l H3BO3and 0.05 g/l C12H25SO4/NaS.

Preferably, the current used in the process of electroplating processes, was applied for 40 - 60 minutes at a density of 0.1 a/m2, 25 to 35 minutes at a density of 0.2 a/m2, 18 - 22 minutes at 0.3 a/m2, 18 - 22 minutes at a density of 0.4 a/m2, 8 to 12 minutes at a density of 0.1 a/m2.

It is advisable that the current was applied for 60 minutes at a density of 0.1 a/m230 minutes at a density of 0.2 a/m220 minutes at a density of 0.3 a/m220 minutes at a density of 0.4 a/m2and within 10 minutes at a density of 0.1 a/m2.

Preferably, the nozzle plate was applied in the form of a coating with a thickness of 15 microns to 25 microns.

The above objectives, according to the second aspect of the invention, reach through node plate nozzle microinjector containing a nozzle plate in which a number of holes for injection of ink pass through the inner surface and is open in the direction of the external Pavi is the area of the holes and the surface of which is polished by heat treatment, in the electrolyte, made of NiH2/SO3/H NiCl2H3BO3C12H25SO4/NaS and deionized water, mixed in a predetermined ratio, and by filing a current having a given density, and roughness of the resulting inner surface above the roughness of the outer surface.

Preferably, the inner surface roughness ranged from 1.0 microns to 1.5 microns.

It is advisable that the roughness of the outer surface ranged from 0.008 MK to 0,0016 MK.

To implement the above objectives of the present invention the template (master plate), which defines the area of the holes is immersed in the electrolyte, in which NiH2/SO3/H NiCl2H3BO3C12H25SO4/NaS and deionized water are mixed in a predetermined ratio. After this several times consistently serves the electric current density and thus on the surface of the template to form a coating of the nozzle plate having multiple holes.

In this case, the surface of the template polished by heat treatment and surface treatment. Thus, the outer surface of the nozzle plate, which knosti the resulting plate nozzles perform rough due to the implementation of the ionization of the electrolyte, formed from NiH2/SO3/H NiCl2H3BO3C12H25SO4/NaS, in order to maintain an extremely high roughness.

The result is the surface tension of the ink in contact with the inner surface becomes smaller in comparison with the surface tension of the ink in contact with the outer surface.

The above objectives and other advantages of the present invention will become more apparent from the detailed description of preferred embodiments of the present invention with reference to the accompanying drawings, in which:

- Fig. 1 to 4 are images showing the manufacturing process of the node plate of the nozzle according to the present invention;

- Fig. 5 is an implementation option node nozzle plate according to the present invention; and

- Fig. 6 is a cross section showing the operation of the node plate of the nozzle according to the present invention.

Hereinafter the present invention will be described in more detail with reference to the accompanying drawings showing preferred embodiments of the invention.

Defined, all terms mentioned in the description, database is the individual in the art or with the usual practice, moreover, the terms should be defined taking into account consideration of the total content of the description of the present invention.

As shown in Fig. 1, on a silicon substrate 201 by means of chemical deposition from the vapor phase to form a first metal film 203, preferably made of vanadium, and silicon substrate 201 has already been formed and the protective film 202 made of SiO2. In this case, the first metal film 203 serves to provide a strong anchoring on the protective film 202 of the second metal film 204, which is described below.

After that, the second metal film 204, preferably formed of Nickel, is formed on the first metal film 203 by means of chemical deposition from the vapor phase. The first metal film 203, which is intended to improve the adhesion, already formed on the protective film 202. Consequently, it is possible to provide a more durable fixation of the second metal film 204 on the protective film 202.

The second metal film 204 is formed on the protective film 202 so that the node 100 of the nozzle plate, which is obtained by the method of coating, subsequently, may well be separated from the template 200.

Then plait the eat etched using the film of the photomask as a mask, while the protective film 202 may be partially opened for exposure (exposed). After that, the remaining film of the photomask is removed using chemicals, to thereby complete the fabrication of the template 200 for job zone 10' holes.

Then, the surface of the second metal film 204 degrease using anti-grease fluid, and the template 200 is immersed in a tank for heating and subjected to heat treatment at a temperature of preferably from 32oC to 37oC for 10 to 14 minutes.

After this heat treatment, the template 200 is dipped in the liquid for chemical passivation for surface treatment. Therefore, the surface of the second metal film 204, which forms the left side surface of the template 200 is polished to provide a lower roughness.

Preferably the surface of the template 200 is performed at a temperature of 22oC until the 27oC and for 10 to 20 seconds.

Subsequently, if the template 200 is ready to contribute to the education of the node 100 of the nozzle plate according to the present invention, the template 200 is immersed in an electrolyte, in which NiH2/SOa rate. Thus, the nozzle plate 8 of the present invention is formed in the form of a coating on the surface of the template 200.

Preferably the electrolyte is prepared in the following ratio of components, from 280 g/l to 320 g/l NiH2/SO3/H, 18 g/l to 22 g/l NiCl2from 28 g/l 32 g/l H3BO3and from 0.03 g/l to 0.08 g/l C12H25SO4/NaS, and more preferably this ratio, 300 g/l NiH2/SO3/H, 20 g/l NiCl230 g/l H3BO3, 0.05 g/l C12H25SO4/NaS.

In this case, the electrolyte, in which are immersed the template 200 that contains the specified material (target substance) to cover plate 8 with holes, for example, of Nickel.

Next, the specified material and the template 200 is connected to an external power source. In this case, the specified material is connected to the positive pole "+", while the template 200 is connected to the negative pole "-".

After that, include a power source so that multiple times sequentially apply the current density as specified on the material and on the template 200.

Preferably the current is served for 40 - 60 minutes at a density of 0.1 a/m2, 25 to 35 minutes at a density of 0.2 a/m2, 18 - 22 P> and more preferably within 60 minutes at a density of 0.1 a/m230 minutes at a density of 0.2 a/m220 minutes at a density of 0.3 a/m220 minutes at a density of 0.4 a/m2and within 10 minutes at a density of 0.1 a/m2.

When this operation supply current specified material attached to "+", dissolves quickly and is ionized, and the ionized specified material is accelerated by the use of the electrolyte in the quality of the environment and faced with the template 200 is connected to the " - " in order to form the nozzle plate 8 made of Nickel, the template 200, as shown in Fig. 2. The nozzle plate 8 is formed in the form of a coating by gradually filling zone 10' holes on the template 200. When this process is complete, the inner surface 13 of the plate 8 of the nozzle becomes greater roughness.

Meanwhile, the thickness of a plate 8 of the nozzle, applied in the form of a coating, can be adjusted using the following equation:

< / BR>
where is the thickness of the nozzle plate; P1- the weight of the template before applying on it a covering in the form of a nozzle plate; P2- the weight of the template after applying to a coating in the form of a nozzle plate; S - area of the coating in the form of a plate sabnani you can adjust the thickness of the plate 8 of the nozzle, required for a real product. Preferably the thickness of the coating formed by the plate 8 of the nozzle ranges from 15 microns to 25 microns.

After the formation of the nozzle plate having the desired thickness, the worker turns off the power source, thereby stopping the coating process in the form of a plate 8 of the nozzle.

Then the template 200, which is formed by coating in the form of a plate 8 of the nozzle is removed from the electrolyte and is inserted into the glass tank. After that, the nozzle plate 8 is subjected to heat treatment.

Preferably the heat treatment plate 8 nozzles performed at a temperature of 20oC to 30oC. Thus, the nozzle plate 8 attach the appropriate mechanical strength.

After that, the plate 8 of the nozzle is immersed in deionized water, purified within approximately 5 minutes and dried.

The above process of formation plate 8 of the nozzle according to the present invention generally corresponds to the method of the electrotype. This method of electrotype is simple and well-known as a way that does not require expensive equipment and sophisticated technology. Therefore, if the nozzle plate is made substantially improved.

After completing the above process, the drying operation begins the formation of the barrier layer 7 camera for ink on the nozzle plate 8.

As shown in Fig. 3, a film of an organic substance, for example, a polyimide layer 7 with a thickness of 30 MK precipitated on the plate 8 of the nozzle. After that, the polyimide layer 7' precipitated protective mask layer 20, made of aluminum and having a thickness of 0.8 MK to 1 MK.

Next, a layer of photoresist (not shown) are precipitated on the protective mask layer 20, which then form a pattern using the photoresist layer as a mask. In this case, since the configuration of the resulting camera for ink is formed on the photoresist, the exact configuration of the camera for ink can be obtained on the protective mask layer 20, when the operation of forming the image will be completed.

After that, the photoresist layer is removed using chemicals, and the polyimide layer 7' is formed figure, using the protective mask layer 20 formed on the pattern as a mask. In this case, as described above, due to the fact that the exact configuration of the camera for ink has already been received on the protective mask layer 20, after soversheni the layer camera for ink, including the area around the camera for ink.

As shown in Fig. 4, the protective masking layer is removed using chemicals, and the nozzle plate 8, combined with a sealing layer 7 camera for ink, intended to define the boundaries of the ink chamber 9 is separated from the template 200, using chemicals such as hydrogen fluoride.

When such a separation process is completed, the node 100 of the nozzle plate in which are formed a number of holes for injection of ink is completely ready. In this case, the holes 10 are passed through the inner surface 13 of the plate 8 of the nozzle and, thus, are open towards the outer surface 14.

As described above, the surface of the template 200 is polished by means of heat treatment and surface treatment. Therefore, the outer surface 14 of the plate 8 of the nozzle, which is in contact with the surface of the template 200 and finally separated by the above separation process, can save significantly smaller roughness, preferably from 0.008 MK to 0,0016 MK.

The inner surface 13 formed of a plate 8 of the nozzle is obtained rough due to the use of the electrolyte, containing what I exceptionally large roughness, preferably from 1.0 microns to 1.5 microns.

As shown in Fig. 5, the node 100 of the nozzle plate that includes a barrier layer 7 camera for ink, which defines the boundaries of the camera for ink feature so that he was facing the printing paper, thereby completing the formation of the structure of an inkjet printhead.

In this case, next to the camera 5 to the ink channel is formed 300 ink, designed for generation of the trajectory of ink, and ink is supplied from an external device, proceed through the channel 300 ink supply, as shown by the arrows. Thus, the camera 9 to the ink filled in the ink.

In Fig. 5 shows only as not limiting the invention of example, one possible implementation of the node plate of the nozzle.

The printer head includes a host 100, the nozzle plate 8 and substrate 1, on which is located the node 100 of the nozzle plate 8. The node 100 of the nozzle plate 8 is formed by means of the method according to Fig. 1 to 4, as described above. The node 100 of the nozzle plate 8 includes a channel 300 ink supply, the number of chambers 9 for ink, which is adjacent the heating element 11. Near to the channel 300 ink posted barrier layer 7 camera for car nozzle 8 is indicated by the reference number 14. The holes of the nozzle plate 8 is indicated by the reference number 10.

The following explains the principle of operation of an inkjet printhead, which uses the node 100 of the plate 8 of the nozzle according to the present invention.

As shown in Fig. 5, if the layer of electrode (not shown) is supplied with the electric signal from the external power source, electric energy is supplied to heating element 11, which is connected with the electrode layer, and the heating element 11 is heated rapidly to a high temperature, component 500oC or higher. During this process, the electrical energy is converted into heat energy, and a high temperature of 500oC to 550oC.

Then, thermal energy is transferred into the chamber 4 for ink, which comes in contact with the heating element 11, and the ink 400, filling the chamber 4 for ink, fast heat up and turn into bubbles.

In this case, if thermal energy is continuously supplied to the chamber 4 to the ink into the ink bubbles 400 change rapidly in volume and expanding. Thus, transformed into bubbles ink 400 is forced out through the opening 10 of the plate 8 of the nozzle and ready on the mu weight and can be removed on a printing paper, thus was made the process quick print.

As described above, the inner surface 13 of the plate 8 of the nozzle is made rough due to the use of the electrolyte, made of NiH2/SO3/H NiCl2H3BO3C12H25SO4/NaS, and supported a large roughness of 1.0 MK to 1.5 MK. Thus, the surface tension between the inner surface 13 of the plate 8 of the nozzle and the ink 400 may be substantially reduced. Thus, it is possible to prevent slidenote ink 400. Therefore, ink can be smoothly filed out of the channel 300 ink in the chamber 9 to the ink. In addition, the camera 9 to the ink may be filed with a sufficient amount of ink, thereby preventing the formation of air bubbles.

Meanwhile, the outer surface 14 of the plate 8 of the nozzle in contact with the polished surface of the template 200 and eventually separates from the surface, while retaining the smaller the roughness of from 0.008 MK to 0,0016 MK. In addition, can be greatly increased surface tension (between the outer surface 14 and ink 400. In the result, it is possible to solve the problem of crossover distortion when CERN">

In the construction according to the preceding technical level to solve problems such as crosstalk or the formation of air bubbles, required the formation of the film, which was used expensive equipment, and thereby the efficiency generally declined.

On the contrary, in accordance with the present invention, the nozzle plate 8, in which the inner surface 13 and the outer surface 14 have different roughness formed by applying low-cost way electrotype. Therefore, these above-mentioned problems, as crosstalk or the formation of air bubbles, can be solved without performing complicated operations, such as operation of crust.

Meanwhile, in a situation where the ink 400 produced, in suspension electric signal from the external device, the heating element 11 is cooled quickly. Then turned into bubbles ink 400, which remain in the chamber 4 for ink, quickly compress and create a restorative force to restore them to their original state. Created thus regenerating force provides rapid decline divinorum quickly re-fill the chamber 9 to the ink.

Thus, in the inkjet printhead repeat the above processes of injection of ink and refill the electrical signal, thereby is printed on the printing paper.

As described above, in accordance with the present invention, the nozzle plate perform so that its inner and outer surface had a roughness, and this is achieved through the use of the method of the electrotype, low cost. Thus, feedback from the process as a whole increases, and can be problems such as the emergence of crossover distortion and the formation of air bubbles.

Although in this description the invention is explained mainly from the point of view of its use in an inkjet printhead, however, the present invention can be adapted to Micronesia in medical devices and device for fuel injection, which can be applied microinjector.

The present invention has been described with reference to the above-mentioned variations in its implementation. However, it is clear that in light of the above description for specialists in this area obviously many Altinia modifications and variants within the inventive idea and scope of the attached claims.

1. A method of manufacturing a node plate nozzle microinjector, characterized in that it contains operations education template for determining the area of the holes, polishing the surface of the template, the coating in the form of a nozzle plate on the surface of the pattern to partially fill the area of the holes, the separation plate of the nozzle from the template.

2. The method according to p. 1, characterized in that the operation of the education template contains the operations of forming a first metal film on a substrate on which is formed a protective film, forming a second metal film on the first metal film, etching the first and second metal films for partial exposure of the protective film.

3. The method according to p. 2, characterized in that the first metal film is made of vanadium.

4. The method according to p. 2, characterized in that the second metal film made of Nickel.

5. The method according to p. 1, characterized in that the operation of polishing the surface of the template contains transactions fat removal and heat treatment surface of the template and the surface treatment Chabot heat treatment pattern performed at a temperature of 32 - 37oC.

7. The method according to p. 6, characterized in that the heat treatment of the template is performed for 10 to 14 minutes

8. The method according to p. 5, characterized in that the surface of the template is performed at a temperature of 22 - 27oC.

9. The method according to p. 8, characterized in that the surface of the template is performed for 10 to 20 C.

10. The method according to p. 1, characterized in that it further comprises after the operation of the coating in the form of a nozzle plate on the surface of the template, the operation is complete coating in the form of a nozzle plate by providing the thickness of the nozzle plate using a predefined equation.

11. The method according to p. 10, characterized in that the equation has the following form:

< / BR>
where is the plate thickness of the nozzle;

P1- the weight of the template before applying on it a covering in the form of a plate nozzle;

P2- the weight of the template after applying to a coating in the form of a plate nozzle;

S - the area covered by the nozzle plate;

- the proportion of the nozzle plate.

12. The method according to p. 10, characterized in that it contains after the operation is complete coating in the form of a nozzle plate of the operation of the heat treatment plate nozzle in the round 20 - 30oC in a glass tank.

14. The method according to p. 1, characterized in that the nozzle plate is applied in the form of a coating method of electroplating processes using a liquid electrolyte.

15. The method according to p. 14, characterized in that the electrolyte is made of NiH2/SO3/H NiCl2H3BO3C12H25SO4/NaS and deionized water, mixed in a predetermined ratio.

16. The method according to p. 15, characterized in that the electrolyte is made in the following ratio of components: from 280 to 320 g/l NiH2/SO3/H, from 18 to 22 g/l NiCl2from 28 to 32 g/l H3BO3and from 0.03 to 0.08 g/l C12H25SO4/NaS.

17. The method according to p. 16, characterized in that the electrolyte is made of 300 g/l NiH2/SO3/H, 20 g/l NiCl2, 30 g/l H3BO3and 0.05 g/l C12H25SO4/NaS.

18. The method according to p. 14, characterized in that the current used in the process electrotype, served for 40 to 60 min at a density of 0.1 a/m2, 25 - 35 min at a density of 0.2 a/m2, 18 - 22 min at a density of 0.3 a/m2, 18 - 22 min at a density of 0.4 a/m2, 8 - 12 min at a density of 0.1 a/m2.

19. The method according to p. 18, characterized in that the current is served within 60 min at a density of 0,UP> and for 10 min at a density of 0.1 a/m2.

20. The method according to p. 1, characterized in that the nozzle plate is applied in the form of a coating with a thickness of 15 to 25 microns.

21. Node plate nozzle microinjector containing a nozzle plate in which a number of holes for injection of ink pass through the inner surface and are open towards the outer surface, wherein the nozzle plate is formed as a result of immersion of the pattern that has the area of the holes and the surface of which is polished by heat treatment in an electrolyte made of NiH2/SO3/H NiCl2H3BO3C12H25SO4/NaS and deionized water, mixed in a predetermined ratio, and by filing a current having a given density, and roughness of the resulting inner surface above the roughness of the outer surface.

22. Site on p. 21, characterized in that the inner surface roughness is 1.0 to 1.5 μm.

23. Site on p. 21, characterized in that the roughness of the outer surface shall be 0.008 - 0,0016 μm.

 

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6 cl, 37 dwg

FIELD: printing industry.

SUBSTANCE: method to make a silicon substrate for a liquid-ejecting head, having the first surface, opposite to the second surface, includes the following stages: provision of a layer on the second surface of the silicon substrate, besides, this layer has a lower etching speed compared to silicon, when exposed to the silicon etchant; partial removal of the layer to open a part of the second surface of the silicon substrate, besides, this opened part surrounds at least one part of the layer; and moist etching of the specified layer and opened part of the second surface of the silicon substrate with application of the silicon etchant, in order to form a channel of liquid supply, stretching from the second surface to the first surface of the silicon substrate.

EFFECT: simplified formation of ink supply channel and reduced time of substrate making.

12 cl, 22 dwg

FIELD: process engineering.

SUBSTANCE: method of producing said head including silicon substrate and inlet channel comprises: producing silicon substrate including isolating layers on first surface and mask layers with etching holes substrate other surface. Note here that said insulating layer is located in section extending from position opposite section between adjacent mask layer holes, and producing holes by etching section of silicon substrate so that etched section extends to insulated layer section opposite aforesaid hole. Silicon substrate located between adjacent holes is subjected to etching so that secintion on its first surface may be thinner than that on its second surface.

EFFECT: higher hardness of thus produced head and higher efficiency.

5 cl, 35 dwg

FIELD: printing.

SUBSTANCE: method for processing a substrate of head for ejecting the fluid includes the stage of providing the substrate and the stage of providing a deepened section on the rear surface of the substrate by ejecting fluid in a linear form from the rear surface of the substrate, and by processing the rear surface of the substrate by laser light which passes along the fluid and in the liquid.

EFFECT: increased mechanical strength of the substrate.

9 cl, 10 dwg

FIELD: chemistry.

SUBSTANCE: photosensitive composition contains a cation-polymerisable compound, an acid photogenerator having an anionic part and a cationic part, as well as a salt having a cationic part having anyone of a quaternary ammonium structure or a quaternary phosphonium structure, and an anionic part. The anionic part of the salt is substituted with the anionic part of the first acid obtained from the anionic part of the acid photogenerator, to form a second acid having acid strength lower than that of the first acid. The cation-polymerisable compound is an epoxy resin. The acid photogenerator is at least a compound selected from a group comprising a sulphonic acid compound and other sulphonic acid derivatives, a diazomethane compound, a sulphonium salt, an iodonium salt, a sulphonimide compound, a disulphonic compound, a nitrobenzene compound, a benzoin tosylate compound, an iron arene complex, a halogen-containing triadine compound, an acetophene derivative, and a cyano group-containing sulfatoxim. The method of forming a pattern involves preparing a substrate on which the photosensitive composition is provided. A portion of the composition is then exposed to light to cure the exposed portion. The cured portion is then heated. The liquid ejection head has a part with an outlet channel for ejecting liquid. The part with the outlet channel is formed from cured material made from said composition.

EFFECT: invention increases heat resistance of the photosensitive composition and increases accuracy of forming a pattern.

13 cl, 4 dwg, 5 tbl, 9 ex

FIELD: printing.

SUBSTANCE: invention relates to an ink-jet printer in which the operation of restoring is performed in the print head for ejecting ink, and to a method for restoring the print head in the ink-jet printer. The ink-jet printer comprises a print head that can eject ink. The device also comprises a transportation unit, which serves for transportation of a recording medium along the transportation path passing the printing position in which printing can be performed on the printing carrier by the print head. The cutter which can cut the printing carrier. The restoring unit to perform operations of restoring the print head. The control unit to control the restoring operation performed by the restoring unit based on the number of passes which is the number of times that the cut-off part of printing carrier, which is cut off by the cutter, passes the printing position.

EFFECT: proposed invention provides the systematisation of the process of restoring the print head taking into account cutting of the carrier.

14 cl, 13 dwg

FIELD: printing industry.

SUBSTANCE: in the invention the ink jet printing head is designed, comprising an element provided with an ejection port for ejecting the ink. The said ink jet printing head additionally comprises a water-repellent layer comprising a cured product of the condensed product obtained by condensation of the hydrolyzable silane compound comprising an epoxy group, and a hydrolyzable silane compound comprising a perfluoropolyether group on the surface of the said element on the side where the ejection port comes.

EFFECT: improved quality of printing.

16 cl, 8 dwg, 1 tbl

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