Microinjector and the manufacturing method (variants)

 

(57) Abstract:

The invention is intended for inkjet printing. The proposed microinjector and a method of manufacturing microinjector, in which the structure of the main working area of the membrane is formed of two zones: zone a metal film having good properties of transmission expansion and contraction, for example area of the Nickel film and the film made of organic material having a good capacity for expansion and contraction, for example, the area of the polyimide film, and each of the two zones serve as a means of transmission of shocks for a strong push fluid up the tools for fast and accurate setting to its original state and the "hinge" for distribution (scattering) and correct voltage, to thereby prevent deformation of the membrane, such as wrinkling. In addition, the membrane having such enhanced main working parts, can withstand the load and respond well to exposure in the process. In the result, it is possible to achieve significantly improved injection characteristics. 3 S. and 14 C.p. f-crystals, 23 ill.

The present invention relates to microinjector and more precisely to microinjector, in which the structure of the membrane ucii. The present invention also relates to a method of manufacturing such microinjector.

In General, microinjector is a device that is designed to submit the paper for printing, the human body or vehicle of a certain amount of liquid such as ink injected fluid or oil, using a method in which the aforementioned liquid applied electrical or thermal energy to the specified value so that you can cause volumetric transformation of such liquid. Therefore, a specific object can be made a specified number of such liquid.

Recently, the development of electric and electronic technology has enabled rapid progress in the development of such microinjection. As a consequence, microinjector widely used by the person at home and at work. As an example application of microinjector in a person's life can lead to an inkjet printer.

Unlike conventional dot-matrix printer ink-jet printer, that is one of the types of microinjector capable of printing different colors by using chartrier gaining popularity.

Currently, the inkjet printer is usually provided with a printhead having orifices (nozzles) with the smallest diameter. In such an inkjet printhead ink, which are in the liquid state, is converted and expanded to the state of bubbles by turning on or off an electrical signal coming from an external device. After that, the ink is transformed into bubbles in such a way, forced to perform printing on the printing paper.

Various design implementation and operation of an inkjet printhead according to the prior art has been disclosed in U.S. patent No. 4 490 728, entitled "Inkjet printer with a heated printing elements", U.S. patent N 4 809 428, entitled "thin-film device for an inkjet printhead and method of fabrication"), U.S. patent No. 5 140 345 "Method of manufacturing a substrate for ink-jet recording head and the substrate manufactured in this way" (the closest analogue of the proposed group of inventions), in U.S. patent No. 5 274 400 "Geometry of the trajectory of ink for high temperature operation of jet printheads" and in U.S. patent No. 5 420 627 "Inkjet printhead".

and, which creates a resistive heating layer. In this case, if such a high temperature for a long period of time affects the ink contained in the chamber for fluid, thermal changes in the components of the ink can substantially reduce the service life of the device.

Recently, to overcome the above problems has been proposed a technique in which between the resistive heating layer and a chamber for fluid insert the membrane in the form of the substrate, the three-dimensional transformation of the membrane is called the vapor pressure of the working fluid which fills the chamber for heating. Thus, the ink contained in the chamber for the liquid, slowly climbing out of it.

In this case, it is possible to avoid direct contact between the ink and the resistive heating layer, as between chamber for liquid and a resistive heating layer inserted membrane. Thereby, it is possible to minimize thermal changes in the ink.

In the above-described conventional ink-jet printing head, the membrane expands and contracts due to pressure of steam generated by the working fluid contained in the chamber to heat and, thus, there is transposase in the chamber for fluid, so that the ink can be printed on the outside of the paper to print. In this case, the above transformation of the volume of the membrane occurs simultaneously across the membrane.

However, if the membrane is made of Nickel, due to the transfer parameters of shock or elastic deformation in the process of the work accomplished thus the membrane is often subjected to three-dimensional transformation. Therefore, additional transformation can take place in a certain part (membrane), which is different fragility from the point of view of structure, for example, in the part which cannot serve as a support membrane because it forms the chamber for heating, thereby invoked puckering.

Moreover, the portion that cannot serve as a support membrane due to the formation of the above-mentioned chamber for heating, represents the main working part, whereby the membrane pushes the ink up. Therefore, if such main working area has a puckering, the mechanical characteristics of the membrane is much worse.

In addition, if the membrane is made of polyimide, for example, referring to voltage or aethanol plasticity and can to some extent counteract deformation, such as wrinkling. However, characteristics such as transmission parameters impact and functional elasticity, extremely worse. Thus, the main part of the membrane is not able to respond quickly to the formation of the vapor pressure generated in the chamber to heat, and thereby violated smooth ejection of ink.

Thus, the General characteristics of the printing inkjet printhead worsen.

Therefore, the aim of the present invention to provide an microinjector, in which the voltage acting on the fragile part of the membrane, such as the main working part is distributed (scattered) so that you can advance to prevent membrane damage, such as wrinkling.

Another objective of the present invention is to develop microinjector in which you can advance to prevent membrane damage, such as wrinkling, to thereby improve the mechanical properties of the main working area of the membrane.

Another objective of the present invention is to develop microinjector, in which the main working part of the membrane may have an enhanced ability to reagir is related goals, according to the first aspect of the invention, are achieved by microinjector containing:

a substrate formed therein with a protective film;

resistive heating layer formed on the protective film;

the electrode layer formed on the protective film and in contact with the resistive heating layer is able to transmit an electrical signal;

barrier layer chamber for heating formed on the electrode layer to limit the camera to heat in contact with the resistive heating layer;

the membrane formed on the blocking layer of the chamber for heating to communicating with the chamber for heating, and made with the possibility of extension-compression and oscillation in accordance with the three-dimensional transformation of the fluid contained in the chamber for heating;

barrier layer chamber for fluid formed on the membrane to restrict camera for liquid located coaxial with the chamber for heating; and

a nozzle plate formed on the blocking layer of the chamber for fluid restriction orifice connected to the chamber for liquids;

moreover, the membrane contains a film of an organic substance formed on top of just locking the flax with the chamber for heating and formed on the film of the organic substance to match the area, in which is formed a chamber for heating.

Preferably, the film of the organic matter additionally contain auxiliary film of organic matter in contact with both side surfaces of the metal film and located to overlap the upper edge of the chamber for heating.

It is advisable that the film of the organic matter was made of polyimide.

It is desirable that the metal film is made of Nickel.

It is possible that between the metal film and the film of the organic matter was formed adhesive film to enhance the adhesion interaction between the metal film and the film of the organic matter.

Useful to the adhesive film was formed from vanadium, titanium or chromium.

These objectives, according to the second aspect of the invention, are achieved by a method of manufacturing microinjector containing operations:

the Assembly of the membrane formed by the second process on the node, consisting of a resistive heating layer and the barrier layer chamber for heating and formed by the first process; and

build the bonds of the process, on the membrane,

the first process includes operations:

the formation of the resistive heating layer on the first substrate on which is formed a protective film, and forming the electrode layer on the protective film with the possibility of contact with the resistive heating layer; and

the formation of the barrier layer chamber for heating the layer of the electrode for limiting formed locking layer chamber for heating in contact with a resistive heating layer;

the second process includes operations:

education film made of organic material on the second substrate on which is formed a protective film;

the formation of the adhesion film on the film of the organic substance;

formation of a metal film on the adhesive tape;

etching the metal film and adhesive film using as a mask film of the photomask for the partial exposure of a film of organic substances; and

separation of the adhesive film and the metal film from the second substrate; and

the third process includes the steps:

education of the nozzle plate on a third substrate on which is formed a protective film;

forming lock the La barrier layer chamber for fluid from the third substrate.

Preferably, after the operation of etching the metal film and the adhesive film for partial exposure of a film of organic matter, the method further contained operation:

education auxiliary film made of organic material over the entire film of organic matter for coating a metal film; and

through the etching auxiliary film made of organic material for the exposure of the metal film.

It is advisable that the film of the organic matter formed by the method of forming a coating by centrifugation.

It is desirable that the film of the organic matter formed to a thickness of from 2 μm to 2.5 μm.

It is possible that the film of the organic matter was subjected to heat treatment specified number of times at a temperature of from 130oC to 290oC at regular intervals of time.

It is useful to have a film of organic matter was subjected processed twice.

Preferably, the heat treatment is performed respectively at temperatures of 150oC and 280oC.

It is advisable that the adhesive film is formed to a thickness of from 0.1 μm to 0.2 μm.

It is possible that a metal film is formed to a thickness of from 0.2 μm to 0.5 μm.

These objectives, according to the last aspect of the invention, are achieved by a method of manufacturing microinjector containing operations:

the Assembly of the membrane, semiliterate by the second process, on the site, consisting of a resistive heating layer and the barrier layer chamber for heating and formed by the first process;

complete the formation of membranes by means of a third process;

the Assembly, consisting of a plate nozzle, and the barrier layer chamber for liquid and formed through the fourth process on the membrane,

the first process includes operations:

the formation of the resistive heating layer on the first substrate on which is formed a protective film, and forming the electrode layer on the protective film with the possibility of contact with the resistive heating layer; and

the formation of the barrier layer chamber for heating the layer of the electrode for limiting formed locking layer chamber for heating in contact with a resistive heating layer;

the second process includes operations:
/BR>Department of film of the organic matter from the protective film; and

attaching a film of organic matter to the locking layer chamber for heating;

the third process includes the steps:

the formation of the adhesion film on the film of the organic substance;

formation of a metal film on the adhesive tape;

etching the metal film and adhesive film using as a mask film of the photomask for the partial exposure of a film of organic matter; and

the fourth process includes operations:

education of the nozzle plate on a third substrate on which is formed a protective film;

the formation of the barrier layer chamber for liquid having a chamber for the liquid in the nozzle plate; and

Department of the nozzle plate and barrier layer chamber for fluid from the third substrate.

In other words, to achieve the above objectives and other advantages of the present invention, the structure of the main working area of the membrane is designed in such a way that it has two zones: the zone of a metallic film having good properties of transmission expansion and contraction, for example the area of the Nickel film, and the area of the film is organic in shaukatullah two zones serve as a means of transmission of shocks for a strong ejection of ink up tools for fast and accurate setting to the initial state (position) and as a "hinge" for distribution (scattering) and correct voltage, so as to prevent wrinkling of the membrane. In addition, the membrane having such enhanced main working parts, can withstand the load and respond well to exposure in the process. In the result, it is possible to achieve significantly improved injection characteristics.

The above objectives and other advantages of the present invention will become more apparent from the detailed description of preferred embodiments of the invention with reference to the accompanying drawings, in which:

- Fig. 1 is a representation in isometric showing the inkjet printhead according to the first variant implementation of the present invention;

- Fig. 2 - section of the inkjet printhead shown in Fig. 1;

- Fig. 3 is a top view of a membrane according to the first variant implementation of the present invention;

- Fig. 4 is an image showing the first operation of an inkjet printhead according to the first variant implementation of the present invention;

- Fig. 5 is an image showing the second opisarainia, showing the first operation of the membrane according to the first variant implementation of the present invention;

- Fig. 7 is an image showing the second operation of the membrane according to the first variant implementation of the present invention;

- Fig. 8 image in isometric showing the inkjet printhead according to the second variant of implementation of the present invention;

- Fig. 9A-9D is a cross section illustrating a process of manufacturing an inkjet printhead according to the third variant of implementation of the present invention;

- Fig. 10A-10D is a cross section illustrating the process of manufacturing membranes according to the third variant of implementation of the present invention;

- Fig. 11A and 11B is a cross section illustrating the process of manufacturing membranes according to the fourth variant of implementation of the present invention; and

- Fig. 12A-12E - section, illustrating the process of manufacturing membranes according to the fifth variant of implementation of the present invention.

Below the present invention will be described more fully with reference to the accompanying drawings showing preferred embodiments of the invention.

As shown in Fig. 1 and 2, an inkjet printhead g is inferred from the SiO2and on the protective film 2 is formed of a resistive heating layer 11, heated by electric energy supplied from an external device, and the resistive heating layer 11 formed layer 3 of the electrode for supplying electric power from an external device on the resistive heating layer. Layer 3 of the electrode connected with the common electrode 12, and the electric energy flowing from the electrode layer 3 is converted into heat energy through resistive heating layer 11.

Meanwhile, the camera 4 for heating, fenced blocking layer 5 camera for heating, is formed on the electrode layer 3 so as to cover the resistive heating layer 11, and thermal energy generated by the resistive heating layer 11, is fed into the chamber 4 for heating.

At this point, the camera 4 for heating filled with working liquid, which is easily formed by vapor pressure. After this, the working fluid evaporates quickly under the action of thermal energy coming from the resistive heating layer 11. In addition, the pressure of steam generated in the evaporation of the working fluid is transferred to the membrane 20 formed on the blocking layer 5 camera for heating.

and located coaxial with the chamber 4 for heating, the camera 9 for liquid filled out the appropriate amount of ink.

In this case, the hole 10 that functions as a nozzle, is formed in the blocking layer 7 camera for liquid so that it covers the camera 9 for liquid and serves as an ink passage for the issuance of ink drops. Hole 10 is formed by punching the plate 8 of the nozzle so that it is on the same axis with the camera 4 for heating and Luggage 9 for the liquid.

In the above construction, the membrane 20 has a structure in the form of deposited layers, in which the film 21 made of organic material formed over a sealing layer 5 camera for heating in order to close the chamber 4 for heating. On the film 21 of the organic matter formed by the adhesion (adhesive) film 23, be be placed coaxially with the chamber 4 for heating so as to correspond to the zone in which is formed a chamber 4 for heating, and the adhesive film 22 is formed of a metal film 24. That is, the metal film 24 is located in the main working area of the membrane 20, corresponding to the location of the camera 4 for heating. In addition, as the lower part of the membrane 20 formed film 21 made of organic material, prikleennie strong impact ink, contained in the chamber 9 for the liquid formed over the metal film 24. Simultaneously, the film 21 of the organic matter quickly changes in volume status, which maintains excellent ability to expand and compress in order to distribute and relieve the tension on the metal film 24.

Preferably, the film 21 of the organic matter is made of polyimide having excellent ability of extension, compression, and excellent ductility. In this case, the film 21 of the organic substance attached to the locking layer 7 camera for liquid formed on the membrane 20. In General, barrier layer 7 camera for liquids made of polyimide having good resistance to ink. As described above, the film 21 of the organic substance made of the same polyimide, and barrier layer 7 of the chamber for the liquid. Consequently, it is possible to provide a strong adhesion between the film 21 of the organic matter and blocking layer 7 of the chamber for the liquid.

Preferably, the metal film 24 made of Nickel having a very good ability to expand and shrink. Thus, the metal film 24 made of Nickel, in volume. Therefore, the ink contained in the chamber 9 for the fluid can be quickly pressed in the direction of the hole 10.

In this case, between the film 21 of the organic substance and the metal film 24 is formed adhesive film 23, which helps to increase strength of the adhesive interaction. Thus, it is possible to provide a strong adhesive interaction between the film 21 of the organic substance and the metal film 24 made of different materials.

Preferably, the adhesive film 23 is made of vanadium, titanium or chromium.

In the devices according to the prior art in that case, if the membrane was made of Nickel, in the main working area of the membrane was puckering, thereby significantly deteriorating the mechanical properties of the membrane.

If the membrane is made of polyimide, the main working part of the membrane is not able to respond quickly to the steam pressure generated in the chamber to heat, thereby significantly deteriorating the overall quality print.

To overcome these problems, in accordance with the present invention for forming the main working area of the membrane 20 use what osobnosti to expansion and contraction, formed in the main working area of the membrane 20, and then at the bottom of the membrane 20 formed film 21 made of organic material having excellent ductility. Thus, the load which is created by the steam pressure in the chamber 4 for heating and which acts on the metal film 24, is transferred to the film 21 made of organic material that has very good capacity for expansion and contraction, and hence is distributed (scattered) and removed. Thus, the membrane 20 is able to react quickly to the vapor pressure of the working fluid, and thus there is no wrinkling of the membrane 20. As a result, the print quality in General is considerably increased.

As shown in Fig. 4, if the layer 3 of the electrode is supplied with the electric signal from the external power source, the resistive heating layer 11 which is in contact with the layer 3 of the electrode will receive electrical energy and thereby rapidly heated to a high temperature, component 500oC or higher. In this process, electrical energy is converted into thermal energy, which gives a temperature of approximately 500oC to 550oC.

After that obtained by such converted the 11. Then the working fluid that fills the chamber 4 for heating, evaporates quickly with the formation of the vapor pressure of a specified value.

After that, the vapor pressure is supplied to the membrane 20, located on the blocking layer 5 camera for heating, and therefore, the membrane 20 is attached energy P impact with the specified value.

In this case, as shown in Fig. 4, the membrane 20 is rapidly expanding, as shown by the arrows, and bend it to round shape. Therefore, the ink 100 contained in the chamber 9 for the fluid are subjected to a strong impact, bubbling away due to this strike and ready for release.

As described above, the membrane 20 according to the present invention is made of two films: metal film 24 having a great ability to convey the impact, and the film 21 made of organic substances intended for scattering and tension on the metal film 24. Consequently, it is possible to eliminate the distortions that have taken place in the conventional membrane, such as wrinkling.

Metal film 24 made of Nickel, has a weight per unit area of larger magnitude compared to the weight per unit area of the film 2 is strong shock ink, contained in the chamber 9 for the fluid according to the equation expressed as follows:

P = mV (where P is the impact force, m is the mass of the film and V is the volume of the film).

In addition, the film 21 made of organic material, which is made of polyimide, has the ability to expand and shrink, which exceeds the similar ability of the metal film 24 made of Nickel. As shown in Fig. 6, voltage 2that occur in the metal film 24 can be absorbed by a voltage1with subsequent dispersion and removal.

In this state, as shown in Fig. 5, when the disconnection of the electrical signal applied from an external power source, the resistive heating layer 11 is cooled quickly, and the steam pressure in the chamber 4 for heating decreases rapidly. Therefore, the internal cavity of the chamber 4 to heat quickly vacuumized. After that, the vacuum provides the application a strong energy B counter (buckling) corresponding to the above-mentioned blow to the membrane 20, as a result, the membrane 20 is compressed to its original status.

As shown in Fig. 5, the membrane 20 is rapidly compressed in the direction indicated by the arrows, so that the internal is ready for extrusion due to the expansion of the membrane 20, converted due to their own weight, in turn, in oval and round shapes (drops) and popped on the printing paper. Thus, the printing paper is quick print.

The membrane 20 according to the present invention consists of a metal film 24 with a very good ability to expand and shrink, and the film 21 made of organic substances intended for scattering and tension on the metal film 24. Consequently, it is possible to prevent deformation such as shrinkage that occurred in the membrane according to the prior art. In addition, it is possible to achieve a rapid return of the membrane 20 in the original condition in which it is displaced in the direction of the camera 4 to heat, and can provide a very good response of the membrane to influence in the process.

Film 21 made of organic material, which is made of polyimide, has the ability to expand and shrink, which exceeds the similar ability of the metal film 24 made of Nickel. As shown in Fig. 7, the film 21 made of organic material helps to absorb voltage4that occur in the metal film 24, a voltage3a head according to another variant implementation of the present invention on the film 21 made of organic material, component of the membrane 20, is additionally formed auxiliary film 22 made of organic substances which come in contact with the side surfaces of the metal film 24 and which overlaps the upper edge of the chamber 4 for heating.

In this case, the auxiliary film 22 of the organic matter serves to further strengthen the ability of the film 21 of the organic matter to the extension and compression. Therefore, the film 21 of the organic matter can more smoothly release the tension on the metal film 24.

With such a construction of another embodiment of the invention, the auxiliary film 22 made of organic material, optionally formed on the film 21 of the organic substance attached to the locking layer 7 camera for liquid formed on the membrane 20. In this case, like the film 21 made of organic substances, auxiliary film 22 of the organic matter is made of the same polyimide, and barrier layer 7 of the chamber for the liquid. In the auxiliary film 22 of the organic matter can be further firmly glued to the locking layer 7 chamber for the liquid.

Further information will be RA is The first method consists of three independent processes. Items made using these three processes, for example, a node of the resistive heating layer 11 and the barrier layer 5 camera for heating, the membrane 20 and the node of the plate 8 with holes and blocking layer 7 camera for liquids and so on, are connected to each other in the Assembly process in the corresponding position by the operation of placing (alignment), which will be performed later. As a result, you get completely ready inkjet printhead.

If we consider the first method, the first process, as shown in Fig. 9A, a metal, such as polycrystalline silicon, is then precipitated onto the silicon substrate 1, on which is formed a protective film 2 made of SiO2. After this, the polycrystalline silicon is etched using a film of the photomask (pattern film (not shown), so that the protective film 2 may be partially exposed, thereby forms a resistive heating layer 11 on the protective film 2.

After that, a metal, such as aluminum, are precipitated on the protective film 2 so that it covers the resistive heating layer 11. Subsequently, the aluminum is etched with use of the film of the photomask in such a way which is layer 3 of the electrode, which is in contact with both side surfaces of the resistive heating layer 11.

Then the organic substance such as polyimide is precipitated on the electrode layer 3 so as to cover the resistive heating layer 11. After that, the polyimide is etched using the film of the photomask, so as to expose partially the surface of the resistive heating layer 11 and layer 3 of the electrode thus formed barrier layer 5 camera for heating, which limits the area of education of the camera 4 for heating. Thus ends the first process.

Then there is a second process that is intended for the formation of the membrane shown in Fig. 9B. The second process will be explained in more detail with reference to Fig. 10A-10D.

As shown in Fig. 10A, organic material, preferably polyimide, is then precipitated onto the silicon substrate 200, on which is formed a protective film 201 made of SiO2thus formed film 21 made of organic material.

Preferably the film 21 of the organic matter precipitated by way of formation of the coating by centrifugation at which you can easily adjust the thickness of the thin film. Ptii film 21 made of organic material is subjected to heat treatment approximately two times when the temperature is preferably from 130oC to 290oC at regular intervals of time. In the film 21 of the organic matter is very high toughness (impact strength) across the surface, which provides a strong anchoring of the adhesive film 23. Preferably the heat treatment of the film 21 made of organic substances play, respectively, at temperatures of 150oC and 280oC.

As shown in Fig. 10B, on the film 21 of the organic matter precipitated metal material, preferably vanadium, titanium or chromium, and so on, and perform deposition by spraying, so as to form the adhesion film 23. Preferably the adhesive film 23 is formed with a thickness of from 0.1 μm to 0.2 μm.

Subsequently, the adhesive film 23 by spraying precipitated metal material, preferably Nickel, to thereby form a metal film 24. Preferably the metal film 24 is formed with a thickness of 0.2 μm to 0.5 μm. Preferably the metal film 24 is subjected to annealing at a temperature of from 150oC to 180oC. This annealing is intended to give the metal film 24 a very high strength (toughness) and mechanical resistance.

As another option, the implementation of the first method of manufacturing an inkjet printhead according to the present invention, the above-described operation, in which the metal film 24/adhesive film 23 is etched to partially expose the film 21 of the organic matter can be added to the operation, contributing to the strength of the film 21 of the organic matter in the extension and compression.

- Added operations, as shown in Fig. 11A, the film 21 made of organic material by means of chemical deposition from the vapor phase precipitated organic material, preferably a polyimide 22', so as to cover the metal film 24/adhesive film 23.

As shown in Fig. 11B, the polyimide 22' is subjected to the cross-dressing until then, until exposed surface of the metal square is continuous with both side surfaces of the metal film 24/adhesive film 23.

Formed in this way supporting film 22 made of organic material firmly adheres to the film 21 made of organic material, and this allows to improve the ability of the membrane 20 to the extension and compression.

When the membrane 20 is made entirely using the above processes, as shown in Fig. 10D, the finished membrane 20 is removed from the substrate 200, on which is formed a protective film 201, and the removal is performed by using chemicals, such as hydrogen fluoride (HF). This completes the second process.

Next will be explained the third process of the first method of manufacturing an inkjet printhead according to the present invention.

In the third process, as shown in Fig. 9C, a metal material such as Nickel, precipitated by the method of electrolytic deposition on a silicon substrate 300, on which is formed a protective film 301 made of SiO2. Then the Nickel is etched using the film of the photomask, so as to partially expose the protective film 301. Thus, the receiving plate 8 nozzles for forming zone in which is formed a hole 10.

After that, the plate 8 of the nozzle precipitated organic veselinka photomask, to partially expose the protective film 301 and the nozzle plate 8. Thus, a barrier layer 7 camera for liquid serving to limit the area in which is formed a chamber 9 for the liquid.

When a node consisting of a plate 8 of the nozzle, and the barrier layer 7 chamber for liquid, will be fully manufactured using the above-described processes, the finished site, consisting of a plate 8 of the nozzle, and the barrier layer 7 camera for fluid removed from the substrate 300, on which is formed a protective film 301, and removing perform using chemicals such as hydrogen fluoride (HF). This completes the third process.

After the above-described first, second and third processes are completed, all nodes which are produced by each process, are collected in a single node.

That is, the membrane 20 formed by using the second process, is mounted on the node, consisting of a resistive heating layer 11 and the barrier layer 5 camera for heating and formed using the first process, and the membrane is mounted node, consisting of a plate 8 of the nozzle, and the barrier layer 7 chamber for liquid and formed using the third process. This structural element which is also a node of the resistive heating layer 11 and the barrier layer 5 camera for heating. Hole 10 in the node, consisting of a plate 8 of the nozzle, and the barrier layer 7 chamber for fluid, combined with a situation in which also are the camera 4 for heating and structural element formed by a metal film 24 and the adhesive film 23.

All nodes that are manufactured using the first and third processes are collected in a single unit through the operation of placing in the exact position and Assembly. The result can be obtained fully finished jet printhead shown in Fig. 9D.

Meanwhile, the inkjet printhead according to the present invention can be produced by a second method different from the above first method.

Compared with the first method the second method, which will be explained below, simultaneously exhibiting many of the structural elements formed of the metal film 24 and the adhesive film 23, and a variety of cameras for heating in the same position.

In the second method, similarly to the first method performs the first process shown in Fig. 9A. That is, on the silicon substrate 1, on which is formed a protective film 2 made of SiO2form the resistive unit's electric is active heater layer 11 to form the electrode layer 3, made of aluminium. After this barrier layer 5 camera for heating, made of polyimide, is formed on the electrode layer 3, which includes a resistive heating layer 11, in order to limit the area in which is formed a chamber 4 for heating.

Further explained, as are the second and third processes for the formation of the membrane.

Unlike the second and third processes of the first method the second and third processes of manufacturing membranes according to the second method are as follows. Film 21 made of organic material, no metal film/adhesive film attached to the node consisting of a resistive heating layer 11 and the barrier layer 5 camera for heating, and structural element formed by a metal film 24 and the adhesive film 23, is formed on already attached to the film 21 of the organic matter.

The second and third processes of the second method will be explained in more detail with reference to Fig. 12A-12E.

As shown in Fig. 12A, organic material, preferably polyimide, is then precipitated onto the silicon substrate 200, on which is formed a protective film 201 made of SiO2the sama is TBA precipitated by way of formation of the coating by centrifugation, when you can easily adjust the thickness of the thin film. Preferably the thickness of the film 21 of the organic matter ranges from 2 MK to 2.5 MK.

Then the film 21 made of organic material is subjected to heat treatment approximately two times when the temperature is preferably from 130oC to 290oC at regular intervals of time. In the film 21 of the organic matter is very high toughness (impact strength) across the surface, which provides a strong anchoring of the adhesive film 23. Preferably the heat treatment of the film 21 made of organic substances play twice respectively at temperatures of 150oC and 280oC.

As shown in Fig. 12B, using chemicals such as hydrogen fluoride, the finished film 21 made of organic material removed from the substrate 200, on which is formed a protective film 201. After this remote so the film 21 of the organic substance attached to the node, which consists of a resistive heating layer 11 and the barrier layer 5 camera for heating and the resulting execution of the first process.

Subsequently, as shown in Fig. 12C, on the film 21 of the organic matter,Reva, atomisation precipitated metal material, preferably vanadium, titanium or chromium, etc. to thereby form an adhesive film 23. Preferably the thickness of the adhesive film 23 is from 0.1 μm to 0.2 μm.

After that, the adhesive film 23 by spraying precipitated metal material, preferably Nickel, to thereby form a metal film 24.

Preferably, similar to the first method, the thickness of the metal film 24 is from 0.2 μm to 0.5 μm. Preferably the metal film 24 is subjected to annealing at a temperature of from 150oC to 180oC, so that the metal film 24 could buy very good toughness (impact strength) and mechanical resistance.

To complete the formation of a structural element consisting of a metallic film 24 and the adhesive film 23, as shown in Fig. 12D, on the metal film 24 is partially form a film 30 of the photomask, and the metal film 24/adhesive film 23 is etched using the film 30 photomask as a mask. Then the rest of the film 30 photomask is removed with chemicals, so that the film 21 of the organic matter can be partially obaje is this case a structural element, consisting of a metal film 24 and the adhesive film 23 and the metal film 24/adhesive film 23) is formed in a position corresponding to the location in which is formed a chamber 4 for heating.

As described above, the second method according to the present invention the film 21 of the organic substance attached to the heating chamber 4 before the formation of the structural element of the metal film 24 and the adhesive film 23, the position of which correspond to the position of the camera 4 for heating. Thus, unlike the first method, when the membrane 20 is placed on the site, consisting of a resistive heating layer 11 and the barrier layer 5 camera for heating, it is possible to exclude an additional process of placing one of each of the multiple structural elements formed of the metal film 24 and the adhesive film 23, in respect of each of the multiple cameras 4 to heat to the appropriate position. As a result, the productivity of the manufacturing process as a whole can be significantly improved.

As another variant implementation of the second method, similar to the first method, a transaction on which the metal film 24/adhesive film 23 podvergayu auxiliary film 22 made of organic material to improve the strength of the film 21 of the organic matter in the extension and compression.

Formed in this way supporting film 22 made of organic material is in contact with both side surfaces of the metal film 24/adhesive film 23 and is firmly glued to the film 21 of the organic matter, thereby it serves to contribute to the overall expansion and compression of the membrane 20.

The following describes how the fourth process of the second method.

In the fourth process, similar to the first method, perform the process shown in Fig. 9C. On a silicon substrate 300, on which is formed a protective film 301 made of SiO2form the nozzle plate 8 made of Nickel, and so on, in order to limit the area in which is formed a hole 10.

Then on the plate 8 of the nozzle to form a barrier layer 7 chamber for liquid, which is made of polyimide, in order to limit the area in which is formed a chamber 9 for the liquid.

When using the above-described processes, the manufacturing site, consisting of a plate 8 of the nozzle, and the barrier layer 7 chamber for liquid to be completed, the node consisting of a plate 8 of the nozzle, and the barrier layer 7 camera for fluid removed from the substrate 300, on which formed is then completes the fourth process.

When the above-described first to fourth processes are completed, all nodes which are produced by each process, are collected in a single node.

In the second method, as described above, the membrane 20 is placed on the site, consisting of a resistive heating layer and the barrier layer 5 camera for heating, by means of the second and third processes prior to Assembly of all elements into a single node. In this case, the operation you want to perform, is only the installation site, consisting of a plate 8 of the nozzle, and the barrier layer 7 camera for the fluid on the membrane. Consequently, it is possible to significantly improve the performance of the manufacturing process as a whole.

In this case, the hole 10 in the node, consisting of a plate 8 of the nozzle, and the barrier layer 7 chamber for liquid, placed exactly in the position corresponding to the location in which is formed a chamber 4 for heating and structural element of the metal film 24/adhesive film 23".

All structural components made using the first to fourth processes, gather into a single unit through the operation of placing in the exact position and Assembly. Thus, it can be obtained inkjet printhead having panorama consists of two films: metal film for transmission expansion and film made of organic material for scattering and tension on the metal film. Thus, in advance it is possible to achieve prevention of deformation of the main working area of the membrane. In addition, the main working area of the membrane can be attributed to improved mechanical properties. In the result, it is possible to significantly improve the overall performance inkjet printhead.

As described above, the structure according to the present invention differs in the structure of the main working area of the membrane is formed of two zones: zone a metal film having good properties of transmission expansion and contraction for example, the area of the Nickel film and the film made of organic material having a good capacity for expansion and contraction, for example the area of a film of polyimide. Each of these two areas serve as a means of transmission of shocks for a strong ejection of ink up the tools for fast and accurate setting to its original state and the "hinge" for distribution (scattering) and correct voltage, to thereby prevent deformation of the membrane, such as wrinkling. In addition, the membrane having such enhanced main working parts, can withstand the load and respond well to exposure in the process. In the result m is use with reference to the above-mentioned variants of implementation. However, it is clear that in light of the above description for specialists in the art it is obvious many alternative modifications and variations. Therefore, the present invention covers all such alternative modifications and variations which are within the inventive idea and scope of the attached claims.

1. Microinjector containing substrate with formed therein a protective film; a resistive heating layer formed on the protective film; an electrode layer formed on the protective film and in contact with the resistive heating layer is able to transmit an electrical signal; a barrier layer chamber for heating formed on the electrode layer to limit the camera to heat in contact with the resistive heating layer; a membrane formed on the blocking layer of the chamber for heating to communicating with the chamber for heating and executed with the possibility of extension-compression and oscillation in accordance with the three-dimensional transformation of the fluid contained in the chamber for heating; barrier layer chamber for fluid formed on the membrane to restrict camera for liquid located coaxially aligned holes, connected to the chamber for fluid, and the membrane includes a film made of organic material, formed on top of barrier layer chamber to heat the coating chamber for heating, and the metal film located coaxial with the chamber for heating and formed on the film of the organic substance to match the area in which is formed a chamber for heating.

2. Microinjector under item 1, characterized in that a film made of organic material further comprises a supporting film of organic matter in contact with both side surfaces of the metal film and located to overlap the upper edge of the chamber for heating.

3. Microinjector under item 1, characterized in that the film of the organic matter is made of polyimide.

4. Microinjector under item 1, characterized in that a metal film made of Nickel.

5. Microinjector under item 1, characterized in that between the metal film and the film of the organic matter formed adhesive film to enhance the adhesion interaction between the metal film and the film of the organic matter.

6. Microinjector on otopleniya of microinjector, contains operations: Assembly of the membrane formed by the second process on the node, consisting of a resistive heating layer and the barrier layer chamber for heating and formed by the first process; and an Assembly consisting of a plate nozzle, and the barrier layer chamber for liquid and formed through the third process on the membrane, and the first process includes the steps: forming a resistive heating layer on the first substrate on which is formed a protective film, forming a layer of electrode on the protective film with the possibility of contact with the resistive heating layer and forming a barrier layer chamber for heating the layer of the electrode for limiting formed locking layer chamber for heating in contact with a resistive heating layer: the second process includes operations: educational film made of organic material on the second substrate on which is formed a protective film; the formation of the adhesion film on the film of organic substances; the formation of a metal film on the adhesion film; etching the metal film and adhesive film using as a mask film photochallenge from the second substrate, and the third process includes operations: the education of the nozzle plate on a third substrate on which is formed a protective film; forming a barrier layer chamber for liquid having a chamber for the liquid in the nozzle plate and the separation plate nozzle barrier layer chamber for fluid from the third substrate.

8. The method according to p. 7, wherein after the operation of etching the metal film and the adhesive film for partial exposure of a film of organic matter, the method further comprises the operations of: education supporting film made of organic material over the entire film of organic matter for coating metallic films and through etching auxiliary film made of organic material for the exposure of the metal film.

9. The method according to p. 7, characterized in that the film of the organic matter forming method of forming a coating by centrifugation.

10. The method according to p. 7, characterized in that a film made of organic material is formed to a thickness of from 2 to 2.5 microns.

11. The method according to p. 7, characterized in that the film of the organic matter is subjected to heat treatment specified number of times at a temperature of from 130 the organic substances processed twice.

13. The method according to p. 12, characterized in that the heat treatment is performed respectively at temperatures of 150 and 280oC.

14. The method according to p. 7, characterized in that the adhesive film is formed in thickness from 0.1 to 0.2 μm.

15. The method according to p. 7, characterized in that the metal film is subjected to annealing at a temperature of from 150 to 180oC.

16. The method according to p. 15, characterized in that the metal film is formed to a thickness of from 0.2 to 0.5 μm.

17. The method of manufacturing microinjector containing operations: Assembly of the membrane, semiliterate by the second process, on the site, consisting of a resistive heating layer and the barrier layer chamber for heating and formed by the first process; complete the formation of membranes by means of a third process; an Assembly consisting of a plate nozzle, and the barrier layer chamber for liquid and formed through the fourth process on the membrane, and the first process includes the steps: forming a resistive heating layer on the first substrate on which is formed a protective film, forming a layer of electrode on the protective film with the possibility of contact with the resistive heating layer the current layer chamber for heating, contact with the resistive heating layer; a second process contains operations: educational film made of organic material on the second substrate on which is formed a protective film; separating the film from the organic matter from the protective film and the stage of attaching a film of organic matter to the locking layer chamber for heating; the third process includes operations: the formation of the adhesion film on the film of organic substances; the formation of a metal film on the adhesion film; etching the metal film and adhesive film using as a mask film of the photomask for the partial exposure of a film of organic matter; and a fourth process includes operations: education of the nozzle plate on a third substrate on which is formed a protective film; forming a barrier layer chamber for liquid having a chamber for the liquid in the nozzle plate and the separation plate nozzle, and the barrier layer chamber for fluid from the third substrate.

 

Same patents:

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19 cl, 14 dwg

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6 cl, 37 dwg

FIELD: printing industry.

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12 cl, 22 dwg

FIELD: process engineering.

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5 cl, 35 dwg

FIELD: printing.

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9 cl, 10 dwg

FIELD: chemistry.

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EFFECT: invention increases heat resistance of the photosensitive composition and increases accuracy of forming a pattern.

13 cl, 4 dwg, 5 tbl, 9 ex

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