Microinjector and a method of manufacturing microinjector

 

(57) Abstract:

The invention is intended for inkjet printing. According to the present invention, the barrier layer chamber for liquid and a first film layer of the organic matter formed from a solution comprising a soft polyamidation. The solution of mild polymodality subjected to heat treatment at preferred mode to keep it in the solid state. When a solution of mild polymodality maintained at a temperature of 280 ~ 300oC and a pressure of 0.5-2 kg/cm2the solution of mild polymodality acquires adhesive properties. Consequently, the barrier layer chamber for liquid and a first membrane layer formed by a film of organic substances, which are based and made from a solution of mild polyamidoimide, can be tightly attached to other structural elements without reinforcing the connection layer. These characteristics increase the strength of the adhesive interaction between the locking layer chamber for heating and blocking layer chamber for liquid to prevent leakage of working fluid from the respective chambers, and provide a smooth release of the ink from the chambers of idcontainer and method of manufacturing microinjector, which is able to increase the cohesive force between the structural elements without layer that improves the connection.

In General, microinjector is a device that is designed to submit the paper for printing, the human body or vehicle of a certain amount of liquid such as ink injected fluid or oil, using a method that allows for fluid make electrical or thermal energy to the specified value so that you can cause volumetric transformation of such liquid. Therefore, a specific object can be made a specified number of such liquid.

Recently, the development of electric and electronic technology has enabled rapid progress in the development of such microinjection. As a consequence, microinjector widely used by the person at home and at work. As an example application of microinjector in a person's life can lead to an inkjet printer.

Unlike conventional dot-matrix printer ink-jet printhead is operating at a low noise, able to use when printing different colors by applying card paper using an inkjet printer. For this reason, inkjet printers are more and more widely used.

In the inkjet printer having the above advantages, built microinjector with the nozzle, the diameter of which is microns. Microinjector provides for the issuance of ink out of the injection device after converting the ink from a liquid form by increasing them up to air bubbles in accordance with electrical signals received from the external device, to the printer, thereby prints characters and images on paper.

In U.S. patent N 4490728, entitled "Thermal inkjet printer" ("Inkjet printer with a heated printing elements"), N 4809428, entitled "Thin film device for an ink jet printer head and process for manufacturing the same" ("thin-film device for an inkjet printhead and method of fabrication"), N 5140345, entitled "Method of manufacturing a substrate for a liquid jet recording head and substrate manufactured by the method (the Method of manufacturing a substrate for ink-jet recording head and the substrate manufactured in this way"), N 5274400, entitled "Ink path geometry for high temperature operation of the micro injecting device" ("the Geometry of the trajectory of ink for high temperature operation microinjector"), and N 54220627, entitled "Micro injecting device" (existing technical level.

As a rule, in microinjector used high temperature generated by the resistive heating layer in order to release ink onto the paper. Therefore, high temperature, which creates a resistive heating layer, affects the ink contained in the ink chamber for, for a long time. Happen as a result of thermal conversion of ink, and this leads to a faster reduction in the life of the device containing the ink.

In the recent past to solve this problem was proposed a new method for smooth spraying ink from the chamber to the ink out by placing the plate-like membrane between the resistive heating layer and a chamber for ink and dynamic deformation of the membrane under the vapor pressure of the working fluid, for example liquid heptane.

In case that is similar to the above, due to the fact that the membrane is located between the chamber for the ink and the resistive heating layer so that it is possible to prevent direct contact of the ink with the resistive heating layer, the ink itself are negligible thermal transformation.

In microinjector according to the previous is sledovatelno, in microinjector shall be provided cameras for keeping ink and fluid.

With this purpose in microinjector provided for locking the layer chamber for liquid and a barrier layer chamber for heating, which is formed in them and therefore limit the camera. The camera, make sure to contain the ink and the working fluid.

Typically, the barrier layer camera for ink and (blocking) layer chamber for heating have a thickness greater than 10 microns, so that the camera, respectively, are sufficient. As source material for receiving ink and the working fluid used organic substance with regard to its chemical resistance.

As described above, since the camera, which is limited to a locking layer camera for ink, and a sealing layer chamber for heating, contain chemicals, such as inks and the working fluid, the camera must have corrosion resistance.

Barrier layer chamber for heating and barrier layer camera for ink corrosion due to chemical substances, when these chemicals are in the cells for a long time. Therefore, the locking layer chamber for heating and sapira the Ana and these layers.

Therefore, the chemical substance contained in the cells derived from the cells to the structural elements, which are not resistant to this chemical. Leakage of chemicals leads to a noticeable deterioration of this indicator work microinjector as durability.

Accordingly, to overcome the above problem, a new method is proposed to prevent leakage of ink or fluid.

In U.S. patent N 519883, entitled "Ink jet printer head having two hard photo imaged barrier layers" ("Inkjet printhead with two locking layers with solid images"), disclosed a method of preventing leakage of ink contained in the ink chambers. In accordance with U.S. patent N 519883 barrier layer camera for ink contains two layers, such as the underlying barrier layer and the reinforcing layer connection. Because the connection barrier layer camera for ink and the nozzle plate is improved by the addition of reinforcing the connection layer barrier layer camera for ink to the nozzle plate, preventing the formation of a gap between the locking layer camera for ink and the nozzle plate.

However, in this case is the camera for ink must be formed of two layers, such as the underlying barrier layer and the reinforcing layer connection.

In addition, when the barrier layer camera for ink attached to the nozzle plate, reinforcing the connection layer prevents alignment of the barrier layer camera for ink and the nozzle plate relative to each other. Accordingly, there arises a problem that the barrier layer camera for ink can be accurately attached to the nozzle plate.

As described above, the barrier layer camera for ink not aligned with the nozzle plate, so that between the locking layer camera for ink and plate with holes there is some allowable deviation. Accordingly, due to some disorder of the passage for the ink may be partially obstructed. It is not possible to carry out smooth production of ink.

In the General specifications printing inkjet printhead noticeably worse.

The present invention was made to overcome the above problems inherent in the prior art. The first aim of the present invention is to develop microinjector and method of manufacturing microinjector, in which increased strength of adhesion is the Second objective of the present invention is to develop microinjector and method of manufacturing microinjector, in which due to the increased strength of the adhesive interaction can be prevented leakage of working fluid from the chambers of the fluid chambers for heating.

The third objective of the present invention is to develop microinjector and a method of manufacturing microinjector, in which the strength of the adhesive interaction can be increased without reinforcing the connection layer.

The fourth objective of the present invention is to develop microinjector and method of manufacturing microinjector, in which the barrier layer chamber for heating can be easily attached to the rest of the structure due to the fact that eliminated the need for reinforcing the connection layer.

The fifth purpose of the present invention to provide an microinjector and method of manufacturing microinjector, in which the ink is smoothly released from the cells to the liquid.

To implement the above objectives of the present invention developed microinjector containing:

plate base with attached protective film;

resistive heating layers formed on the protective film;

the electrode layer formed on the protective plank the camera for heating, located on the electrode layer and designed along with the resistive heating layer to limit the chambers for heating;

the membrane includes a first layer film made of organic material and the second layer film made of organic material, placed in a stack on the blocking layer of the chamber for heating, and the membrane is made with the possibility of fluctuations in the volume change of the working fluid fills each of the chambers for heating;

barrier layer chamber for fluid, located on the membrane and designed along with the membrane to restrict cameras for liquids with ensuring their alignment relative to the chambers for heating;

a nozzle plate having multiple nozzles, the respective chambers for liquid located on the blocking layer of the chamber for liquids;

moreover, the barrier layer chamber for fluid is formed by heat treatment of solution hard polyamidoimide, the first layer film made of organic material is formed by heat treatment of a solution of mild polyamidoimide, and the second layer film made of organic material is formed by heat treatment of solution hard polyamidoimide, and barrier layer chamber for heating obra formula solution hard polymodality has the following form:

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It is advisable that the structural formula of the solution of mild polymodality has the following form:

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It is desirable that the solution of mild polymodality was made from a composition in which dianhydride with 3,3,4,4 - tetracarboxy-diphenil-oxide, is added to the mixture of diamine is P, with 1,3-bis-(4-aminophenoxy) benzene, and aminobutanol (substance) at a given ratio.

It is possible that the structural formula of the diamine P has the following form:

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Preferably, the structural formula of the dianhydride has the following form:

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It is useful to barrier layer chamber for heating was performed with the possibility of entering into contact with the first membrane layer formed by a film made of organic material, and the barrier layer camera for liquids was made with the possibility of entering into contact with the second layer of the film of the organic matter.

To implement the above objectives of the present invention according to another aspect of the invention, a method of manufacturing microinjector containing:

the Assembly containing the resistive heating layer and barrier layer chamber to heat produced in the first procedure, with a membrane formed sovanny in the third procedure, with a membrane formed in the second procedure,

the first procedure includes:

the formation of a layer of the electrode on the protective film of the first plate basis to ensure contact of this layer with the resistive heating layer after the deposition of the resistive heating layer on the first basis, in which there is a protective film;

the coating solution hard polymodality on the resistive heating layer and the electrode layer while rotating the first substrate with the formation of the first layer of organic matter on the resistive heating layer and the layer of electrode;

converting a first layer of a solution of organic matter in the locking layers chamber for heating after drying and heat treatment of the first layer of a solution of an organic substance;

the etching barrier layer chamber for heating to exposure of the resistive heating layer with the restriction of the chambers to heat the resistive heating layer and a sealing layer of cells to heat;

the second procedure includes:

the coating from a solution of mild polymodality on the second base plate, on which there is a protective film, while rotating the second substrate with the contraction in the solution of the organic substance in the first layer film made of organic material after drying and heat treatment of the second layer of a solution of an organic substance;

the coating solution hard polymodality on the first layer film made of organic material during the rotation of the second substrate with the formation of the third layer of organic matter on the first layer film made of organic material;

converting the third layer of a solution of organic material in the second layer film made of organic material after drying and heat treatment of the third layer of a solution of an organic substance;

the separation of the first and second film layers of the organic matter from the second base;

the third procedure contains:

education nozzle plate having a nozzle, the third plate base, covered with a protective film;

the coating from a solution of mild polymodality on the nozzle plate during the rotation of the third substrate with the formation of the fourth layer of a solution of an organic substance;

converting a fourth layer of a solution of organic matter in the barrier layer chamber for the liquid after drying and heat treatment of the fourth layer of a solution of an organic substance;

the etching barrier layer camera for liquids with exposure of the nozzle plate to limit the chambers for fluid sealing layer of cameras for zhidkosti;

the first, second and third treatments are preferably performed separately from each other.

Preferably, the structural formula of the solution of hard polymodality has the following form:

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It is advisable that the structural formula of the solution of mild polymodality has the following form:

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It is desirable that the solution of mild polymodality was made from a composition in which dianhydride with 3,3,4,4 - tetracarboxylic added to the mixture of diamine is P, with 1,3-bis-(4-amino-phenoxy) benzene, and aminobutanol (substances) in a predetermined ratio.

It is possible that the structural formula of the diamine P has the following form:

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It is useful to have the structural formula of the dianhydride has the following form:

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Preferably, in the operation of the locking Assembly layer chamber for heating with a membrane pressure was about 0.5-2 kg/cm2.

It is expedient to provide for the operation of the locking Assembly layer chamber for heating the membrane temperature was maintained in the range of 250-350oC.

Preferably, in the combination operation of the nozzle plate with the first plate base having a membrane, the nozzle plate was placed on Mei nozzle plate with the first plate base, with the membrane, the nozzle plate was placed on the membrane, and the temperature was maintained in the range of 250-300oC.

It is useful to transform operations of the second layer of a solution of an organic substance in the first layer film made of organic material, the drying temperature was maintained in the range of 80-100oC.

Preferably, in the conversion of the second layer of a solution of an organic substance in the first layer film made of organic material drying the second layer of organic matter was performed for 15-20 minutes.

It is advisable to transform operations of the second layer of a solution of an organic substance in the first layer film made of organic material temperature at the heat treatment was maintained in the range of 170-180oC.

It is desirable that the conversion of the second layer of a solution of an organic substance in the first layer film made of organic material, the heat treatment time was about 20-30 minutes.

It is useful to transform operations fourth layer of a solution of organic matter in the barrier layer chamber for fluid temperature drying was maintained in the range of 80-100oC.

Josemari for liquid drying time of the fourth layer of organic matter was about 15-20 minutes.

It is advisable to transform operations fourth layer of a solution of organic matter in the barrier layer chamber for fluid temperature at the heat treatment was maintained in the range of 170-180oC.

Preferably, in the conversion of the fourth layer of the organic matter in the barrier layer camera to fluid heat treatment time was about 20-30 minutes.

In other words, to implement the above objectives of the present invention developed microinjector, in which in the formation of barrier layer chamber for liquid solution of mild polymodality made from a composition in which dianhydride with 3,3,4,4 - tetracarboxylic added to the mixture of diamine is P, with 1,3-bis-(4-amino-phenoxy) benzene, and aminobutanol (substances) in a predetermined ratio.

The solution of mild polymodality is solid under the action of heat under certain conditions, however, he has great strength of the adhesive interaction at a given temperature and pressure, for example at a temperature of 280-300oC and a pressure of 0.5-2 kg/cm2. Accordingly, the locking layer chamber for liquid, made from a solution of mild Phnom case even if the ink impinges on the boundary between the blocking layer chamber for liquid and other design elements, it is possible to prevent leakage of ink from the chambers for the liquid. In addition, a solution of mild polymodality can be used for other structural elements, such as membrane and barrier layer chamber for heating. When the membrane is formed from a solution of polymodality as a key element of the membrane, the membrane can be tightly attached to the locking layer chamber for heating, and thus is not separately formed reinforcing layer connection. Consequently, it is possible to prevent leakage of the working fluid which fills the chamber to a heating chamber for heating.

Preferably barrier layer chamber for heating is formed from a solution of a rigid polyamidoimide, which reacts and mixed with a solution of mild polymodality in order to form intimate contact with the membrane.

As a result, microinjector according to the present invention the injection characteristics are improved noticeably.

The above objectives and other advantages of the present invention will become more apparent upon study of the detailed description prepay an image in ISO inkjet printhead according to the present invention;

Fig. 2 - cross microinjector according to the present invention, illustrating the first operation when microinjector;

Fig. 3 - cross microinjector according to the present invention, illustrating the second operation when microinjector;

Fig. 4a-6f - building microinjector according to the method of manufacturing microinjector of the present invention;

Fig. 7a-7f - making process microinjector according to the present invention.

Next, an inkjet printhead and a method of manufacturing an inkjet printhead according to the present invention will be described in detail with reference to the accompanying drawings.

As shown in Fig. 1, microinjector according to the present invention, the protective film 2 made of SiO2located so that it is glued to the upper surface of the substrate 1 made of silicon. Resistive heating layers 11 are placed in a predetermined position on the upper surface of the protective film 2, and these resistive heating layers 11 is supplied electric power from a power source (not shown) to heat the resistive heating layer 11. Layer 3 elektrotechnichesky energy to the resistive heating layer 11 from the power source. In addition, the electrode layer connected to the common electrode 12. Electrical energy, which is supplied from layer 3 of the electrode on the resistive heating layers 11, is converted into thermal energy with the formation of high temperature using resistive heating layer 11.

In addition, the camera 4 for heating is limited to a locking layer 5 camera for heating, located on top of the layer 3 of the electrode over the resistive heating layer 1 so as to cover the resistive heating layers 11. The heat that is generated each resistive heating layer 11, is passed into the chamber 4 for heating.

Camera 4 for heating filled with the working fluid, which contributes to the formation of vapor pressure. The working fluid evaporates quickly under the action of heat transferred from the resistive heating layer 11. In addition, the pressure of steam generated by evaporation of the working fluid is fed to the membrane 20 formed on the blocking layer 5 camera for heating.

Camera 9 for fluid restricted blocking layer 7 camera for liquid over the membrane 20 in such a manner that it is coaxial with the chamber 4 for heating. Camera 9 for liquid filled with the specified quantity is designed holes, the respective chambers 9 for the fluid, and these openings function as nozzles 10, serving to release the ink out of the chambers 9 for the liquid. Such nozzle 10 is made in the blocking layer 7 camera for liquids, which limits the camera 9 to the liquid, and the nozzle plate 8 so that these openings are coaxial with the chambers 4 for heating and cameras 9 for the liquid.

According to the present invention, the barrier layer 7 camera for a fluid made from a solution of mild polyamidoimide having the structure shown below.

*The structural formula of the solution of mild polymodality

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When a solution of mild polyamidoimide, have shown above structure is at a certain temperature and a certain pressure, it has the ability to convert into a substance with strong adhesive properties.

Accordingly, when the barrier layer 5 camera for heating combined with a membrane 20, a barrier layer 5 of the chamber for heating turns into a substance with strong adhesive properties under certain temperature and pressure in order to keep a large force of connection between the membrane 20 and this layer without reinforcement Sz organic material and a second layer 22 of a film of organic matter. The second layer 22 of a film of organic matter in contact with the locking layer 7 camera for liquids, made from a solution of a rigid polyamidoimide, which are capable of reacting with a solution of mild polymodality. The solution is hard polymodality has the structure shown below.

*The structural formula of the solution of hard polymodality

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Since the barrier layer 7 camera for a fluid made from a solution of mild polyamidoimide, and the second layer 22 of the membrane 20, which is formed by a film of an organic substance made from a solution of a rigid polyamidoimide, barrier layer 7 camera for liquid is provided over long time tightly attached to the second layer of the membrane 20 formed by the film of the organic matter. The education gap is prevented due to the tight connection, so that prevents leakage of ink contained in the chamber 9 for the liquid.

On the other hand, the first layer 21 of the membrane 20, which is formed by a film of an organic substance made from a solution of mild polymodality as barrier layer 7 of the chamber for the liquid. This leads to saving in a long time large power connection is which form a membrane.

In addition, the reason why the first layer 21 of a film of organic matter formed from a solution of mild polyamidoimide, is that the barrier layer 5 camera for heating, which is in contact with the first layer 21 of a film of organic substances may be formed from a solution of a rigid polymodality well reacts with a solution of mild polymodality.

Since the barrier layer 5 camera for heating is made from a solution of mild polyamidoimide, and the first layer 21 of the membrane 20, which is formed by a film of an organic substance made from a solution of a rigid polyamidoimide, barrier layer 5 camera for heating is tightly attached for a long period of time to the first layer 21 of the film of the organic matter of the membrane 20. Due to the tight connection prevents the formation of the gap, and thereby prevents leakage of the working solution contained in the chamber 4 for heating.

In addition, the first layer 21 of the membrane 20 formed with a film made of organic material, made from a solution of mild polymodality as barrier layer 7 of the chamber for the liquid. When the barrier layer 5 camera for heating connected with membraneless temperature and pressure to maintain the great effort of the connection between the membrane 20 and this layer without reinforcing the connection layer.

Preferably, a solution of mild polyamidoimide, which forms a barrier layer 7 chamber for liquid and a second layer 22 of a film made of organic material, made from a composition in which dianhydride with 3,3,4,4-tetracarboxylic added to the mixture of diamine is P, with 1,3-bis(4-aminophenoxy) benzene, and aminobutanol (substances) in a predetermined ratio.

Below shows the structure of the diamine P:

*the structural formula of the diamine P*< / BR>
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Below shows the structural formula of the dianhydride:

the structural formula of the dianhydride *< / BR>
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In microinjector according to the prior art reinforcing the connection layer is formed through a separate process with the aim of increasing the contact force between the locking layer chamber for liquid and other design elements. The result was markedly increased the number of operations making microinjector.

As described above, the barrier layer 7 camera for liquids formed from a solution of mild polyamidoimide, which is able to turn into a substance with cohesive properties under certain conditions. In addition, barrier layer 7 camera for liquids is now in contact with other components in a long time. In the result, it is possible to reduce the number of operations performed (to avoid unwanted operation) of the process.

As described above, according to the present invention, the membrane 20 is attached to the locking layer 5 camera for heating through the use of the ability of a solution of mild polymodality and mortar hard polymodality to react with each other), so that the durability of microinjector can be increased. In addition, can be prevented leakage of working fluid from the chambers for heating.

On the other hand, in U.S. patent N 5417835, entitled "Solid state ion sensor with polyimide membrane" ("Solid-state ion sensor with a membrane made of polyimide"), discloses a sensor that uses the power connection polyimide, a similar solution polymodality according to the present invention.

From the point of view of the use of force connection (adhesion forces) polyimide present invention similar to the above patent for the preceding technical level. However, the present invention differs from the above technical level in relation to the processing of polyimide to obtain the adhesion forces, the use of polyimide and design the I from the prior art.

Below will be explained the operation described above microinjector according to the present invention.

As shown in Fig. 2, first, when the layer 3 of the electrode is supplied electric power from a power source, a resistive heating layer 11, which is attached to the layer 3 of the electrode, to obtain electrical energy. In this case the heating layer 11 is instantaneously heated to a high temperature exceeding 500oC. In this state, the electrical energy is converted into thermal energy with a temperature of 500-550oC.

After this thermal energy is transferred to the chamber 4 for heating, connected to the resistive heating layer 11, while the working fluid that fills the chamber 4 to heat due to heat evaporates quickly with the formation of the vapor pressure of a specified value.

As described above, the barrier layer 5 camera for heating, limiting the camera 4 for heating, is formed from a solution of a rigid polymodality. The first layer 21 of a film of organic matter that comes in contact with the locking layer 5 camera for heating, is formed from a solution of mild polyamidoimide, which has the desirable ability to join(working fluid) from the cells to heat, since the barrier layer 5 cameras for heating has a tight contact with the first layer 21 of a film of organic matter.

The steam pressure is fed to the membrane 20, which is located on the surface of the barrier layer 5 camera for heating, and therefore, the membrane 20 will be applied impact force P of the given value.

In this case, the membrane 20 is rapidly expanding outwards, curving, as shown by the arrows. Therefore, the ink 100 which fill the chamber 9 for the fluid formed on the membrane 20 will be applied shock force A, so that the ink 100 are in the condition in which they may be ejected.

Barrier layer 7 camera for fluid is formed from a solution of mild polymodality. When the barrier layer 7 chambers for liquid attached to the membrane 20, the barrier layer 7 camera for liquid turns into a substance with cohesive properties, as pressure is applied to the locking layer 7 camera for liquid at a given temperature. Consequently, the barrier layer 7 camera for liquids can be firmly attached to the membrane 20 without reinforcing the connection layer.

As shown in Fig. 3, when the supply of electric power from unidesa thus, what is the vapor pressure in the chamber 4 for heating decreases rapidly. Therefore, the camera 4 for heating is in a vacuum state. When it comes to the membrane 20 will force exerted B the reaction, the corresponding vacuum pressure resulting from the vacuum state in the chamber 4 for heating. Accordingly, the membrane 20 instantly shrinks back to its original state.

In this case, the membrane 20 is rapidly compressed by the force transmission In the reaction in the direction of the camera for liquids, as shown by the arrow. Therefore, the ink 100 that were ready for release due to the expansion of the membrane 20, is converted due to their own weight in water droplets and then popped on the printing paper. Printing on paper is ink drops with injection from microinjector.

Below will be described a method of manufacturing an inkjet printhead according to the present invention.

A method of manufacturing an inkjet printhead according to the present invention includes three operations that are performed separately. The node containing the heater 11 resistance and barrier layer 5 camera for heating, the membrane 20 and the node containing the nozzle plate 8 and saphirre this by making them relative to each other, thus is making microinjector.

As shown in Fig. 4, in accordance with the method of the present invention in the first operations of the first metal 11', for example polycrystalline silicon, is then precipitated from the vapor phase on the plate 1 base, which is coated as a protective film 2 of SiO2. After the polycrystalline silicon 11' will be covered by the photomask 30, perform an operation on which the photomask 30 is exposed to radiation (exhibit), using the source 40 of ultraviolet radiation and the lens 50. At this point on the photomask 30 formed elements 30' figure, which correspond to the shape of the resistive heating layer 11 in the plane. Then, the ultraviolet radiation emitted from a source 40 of ultraviolet radiation passes through the elements 30' pattern, to form a pattern (configuration) resistive heating layer 11 on the polycrystalline silicon 11'.

As shown in Fig. 4b, after the photomask 30 is removed from the base 1 by means of chemical substances, the base 1 is placed in a chamber 60 for the manifestation filled with developer. At the time of development basics 1 silicon part of the framework 1, which was not to be who I et contact with the developer. The rest of the framework 1, which was subjected to ultraviolet radiation is removed from the base 1 by the developer. Accordingly, the protective film basics 1 in the end is formed of a resistive heating layer 11 having the same shape as the pattern of the photomask.

As is shown in Fig. 4c, by using vapour deposition, such as sputtering, on the protective film 2 is precipitated metal, such as aluminum, so that it covers the resistive heating layer 11 on the base 1 is formed of a metal layer 3'.

As shown in Fig. 4d, after the metal layer 3' is covered with a photomask 31, a metal layer 3' is exposed to ultraviolet radiation using a source 40 of ultraviolet radiation and the lens 50. At this point on the photomask 31 is formed desirable elements 31' figure, which take the form of layer 3 of the electrode. Ultraviolet radiation emitted by the source 40 of ultraviolet radiation passes through the elements 31' picture for the formation of the configuration of the layer 3 of the electrode on the metal layer 3'.

As shown in Fig. 4e, after the photomask 31 is removed from the metal layer 3' with khimicheskoi 3', placed in a chamber 60 for the manifestation filled with developer. In the development process of the metal layer 3', the part of the metal layer 3', which was not exposed to ultraviolet radiation, remains on the substrate 1 due to the form of figure 31', while the remainder of the metal layer 3', which was subjected to ultraviolet radiation is removed from the metal layer 3' by the developer. As shown in Fig. 7a, the electrode layer 3 is formed on the metal layer 3' so that the layer 3 of the electrode is in contact with only the edge of the resistive heating layer 11.

After washing basics 1 with distilled water, as shown in Fig. 4f, on the resistive heating layer 11 and the electrode layer 3 by using a device (not shown) for applying the coating are coated from a solution of 400 hard polyamidoimide, while the substrate 1 rotates with the centrifuge 70. The speed of rotation of the centrifuge 70, on which the substrate 1, is regulated by the controller 80.

Thus, a solution of 400 hard polymodality distributed uniformly on layer 3 of the electrode due to centrifugal force. A solution of 400 hard polymodality flow in a wavy form b is STV, preserving uniform thickness, covering thus the resistive heating layer 11 and the electrode layer 3.

As shown in Fig. 4h, then, after the base 1 with an educated her the first layer 5' of the solution of the organic matter will be removed from the centrifuge 70 and displaced into the reservoir 90 for heating, the tank 90 for heating is drying of the first layer 5' of solution of organic substances and heat treatment of this layer. In the first layer 5' of the solution of the organic matter is transformed into a barrier layer 5 cameras for heating.

In the case of the type described above, because the barrier layer 5 camera for heating is formed from a solution of 400 hard polyamidoimide, barrier layer 5 camera for heating comes into tight contact with the first layer 21 of the membrane 20 formed by the film of the organic matter, which is made from a solution of mild polyamidoimide, during Assembly of microinjector. The solution is hard polyamidoimide, which forms a barrier layer 5 of the chamber for heating, has such a structure as described and shown above.

As shown in Fig. 4i, after the barrier layer 5 cameras for heating will be applied photomask 32, the barrier layer 5 cameras ecologo radiation and a lens 50. At this moment

the photomask 32 is formed of the desired elements 32' of the figure, which have the shape of a camera 4 for heating. Ultraviolet radiation emitted by the source 40 of ultraviolet radiation passes through the elements 32' figure for the formation of configurations of chambers 4 for heating a locking layer 5 camera for heating.

As shown in Fig. 4j, then, after the photomask 32 is removed with the barrier layer 5 cameras for heating by use of a chemical base 1, on which, according to the order in the form of a stack formed of a resistive heating layer 11, a metal layer 3' and the barrier layer 5 camera for heating, is placed in a chamber 60 for the manifestation filled with developer. In the process of manifestation of the barrier layer 5 of the chamber for heating the portion of the barrier layer 5 camera for heating, which has not been subjected to ultraviolet radiation, remains on the substrate 1 due to the form of figure 32', while the remaining part of the barrier layer 5 cameras for heating, which was subjected to ultraviolet radiation is removed from the base 1 by the developer. Therefore, as shown in Fig. 7b, a barrier layer 5 of the chamber for heating is formed on the layer 3 electroe operations of the manufacturing process of microinjector according to the present invention is thus completed.

The second operation, intended for the manufacture of the membrane 20, perform separately from the first operation.

As shown in Fig. 5, the silicon base 200 having the protective film 201 of SiO2using the device for coating coated from a solution of 500 soft polyamidoimide, the substrate 200 rotate with the centrifuge 70. The speed of rotation of the centrifuge 70, on which the substrate 200, adjust by the controller 80.

Thus, a solution of 500 soft polymodality distributed uniformly on layer 3 of the electrode due to centrifugal force. A solution of 500 soft polymodality flow in a wavy form due to its viscosity. On the base plate 200 is formed of the second layer 21' of the solution of organic substances, preserving uniform thickness.

As shown in Fig. 5b, then, after the base plate 200 formed therein a second layer 21' of the solution of the organic matter removed from the centrifuge 70 and displaced into the reservoir 90 for heating, the tank 90 for heating is drying the second layer 21' of the solution of organic substances and heat treatment of this layer. In the second layer 21' of the solution of organic substances is this operation of turning of the second layer 21' of the solution of the organic substance in the first layer 21 of a film of organic substances, it is preferable to maintain the temperature of the drying level 80-100oC and hold the dryer for 15-20 minutes. In addition, this operation is preferably to maintain the temperature of the heat treatment on the level of 170-180oC and to heat for 20-30 minutes.

In the case of the type described above, because the first layer 21 of a film of organic matter formed from a solution of 500 soft polyamidoimide, the first layer 21 of a film made of organic material comes into intimate contact with a sealing layer 5 cameras for heating, which is formed from a solution of 400 hard polyamidoimide, during Assembly of microinjector. A solution of 500 soft polyamidoimide, which forms the first layer 21 of a film of organic matter, has such a structure as described and shown above.

As shown in Fig. 5c, on the base plate 200, which has a first layer 21 of a film of organic matter, using a device for coating coated from a solution of 400 hard (indurated) polyamidoimide, with base plate 200 to rotate with the centrifuge 70. The speed of rotation of the centrifuge 70, which is the basis of 200, adjust by the controller 80.

Thus, a solution of 400 hard polyamidation 400 hard polymodality spreads in waves due to its viscosity. As a result, the first layer 21 of a film of organic substances formed by the third layer 22' of a solution of an organic substance having a uniform thickness.

As shown in Fig. 5d, then, after the base plate 200 on which the first layer 21 of a film of organic material and the third layer 22 of a solution of organic substances imposed by order in the form of a pile, removed from the centrifuge 70 and displaced into the reservoir 90 for heating, the tank 90 for heating is drying of the third layer 22' of solution of organic substances and heat treatment of this layer. In the third layer 22' solution of the organic matter is rapidly becoming the second layer 22 of the membrane 20, which is formed by a film of organic matter.

In the case described above, because the second layer 22 of a film of organic matter formed from a solution of 400 hard polyamidoimide, the second layer film 22 made of organic material comes into intimate contact with the first layer 21 of a film of organic substance, which is formed from a solution of 500 soft polymodality. A solution of 400 hard polyamidoimide, which forms the second layer 22 of a film of organic matter, has such a structure as described and Pastora 400 hard polyamidoimide, the second layer 22 of a film of organic substances can be introduced into tight contact with the sealing layer 7 chamber for liquid, which is formed from a solution of 500 soft polymodality.

In accordance with these operations, as shown in Fig. 5e, on the base plate 200 having the protective film 201 is formed membrane 20, in which the first and second layers 21 and 22 films made of organic material stacked on top of each other.

After the structure of the membrane 20 will be fully prepared by forming it as described above, the membrane 20 is separated from the plate 200 basis using a chemical such as HF.

Accordingly, terminates execution of the second operations intended for the manufacture of the membrane.

Operations manufacturing site containing the nozzle plate 8 and the barrier layer 7 camera for liquids, perform separately from the second operations.

As shown in Fig. 6a, silicon plate base 300 having a protective film of SiO2placed in an electrolytic bath 61 containing the electrolyte.

On the basis of 300 form a base layer pattern (not shown) to limit the area of the nozzle holes in the process esgotos metal, such as Nickel. The base 300 and the target plate 63 is attached to an external source 62 power so that the target plate 63 is attached to the positive electrode of the source 62 of the power supply and the base 300 is attached to the negative electrode.

When the plate-target 63 and the base 300 is energized, target plate 63, which is connected to the positive electrode of the power source, dissolves quickly ionized and forms a Nickel ions. Nickel ions that are ionized, accelerated by the electrolyte and deposited, in turn, based on the 300, which is connected to the negative electrode of the power source. Therefore, on the basis of 300 electrolytic method is applied a coating of Nickel ions so that the Nickel ions attached to the surface of the plate 8 of the nozzle and the area of the nozzle holes of the base layer template (layer with a pattern).

As shown in Fig. 6b, on the basis of 300, in which there is a plate 8 of the nozzle, using a device for coating coated from a solution of 500 soft polyamidoimide, the base 300 rotate through centrifuge 70. The speed of rotation of the centrifuge 70, which is the basis of 300, reg is Radelet on the basis of 300 due to centrifugal force. A solution of 500 soft polymodality spreads in a wave-like form due to its viscosity. Based on the 300 is formed of the fourth layer 7' of solution of organic substances, preserving uniform thickness.

As shown in Fig. 6d, and then, after the base 300 having a fourth layer 7' of solution of organic substances removed from the centrifuge 70 and displaced into the reservoir 90 for heating, the tank 90 for heating is drying fourth layer 7' of solution of organic substances and heat treatment of this layer. In the fourth layer 7' of the solution of the organic matter is rapidly converted in the barrier layer 7 of the chamber for the liquid.

This operation of turning the fourth layer 7' of solution of organic substances in the barrier layer 7 camera for liquids, it is preferable to maintain the temperature of the drying level 80-100oC and hold the dryer for 15-20 minutes. In addition, this operation is preferably to maintain the temperature of the heat treatment on the level of 170-180oC and to heat for 20-30 minutes.

In the case described above, because the barrier layer 7 camera for liquids formed from a solution of 500 soft polyamidoimide, the barrier layer is ical substances, which is formed from a solution of 400 hard polymodality in the process of assembling an inkjet printhead. A solution of 500 soft polyamidoimide, which forms a barrier layer 7 chamber for liquid, has such a structure as described and shown above.

As shown in Fig. 6e, after the barrier layer 7 chamber for liquid to be applied to the photomask 33, the locking layer 7 camera for liquid is exposed to ultraviolet radiation through the use of source 40 UV-radiation and the lens 50. At this point on the photomask 33 is formed of the desired elements 33' figure, which take the form of chambers 9 for the liquid. Ultraviolet radiation emitted by the source 40 of ultraviolet radiation passes through the elements 33' figure for the formation of the configurations of the camera 9 to the liquid blocking layer 7 chambers for the liquid.

As shown in Fig. 6f, after the photomask 33 is removed from the barrier layer 7 camera for liquids by use of a chemical base 300, which in order, in the form of a stack of superimposed plate 8 of the nozzle, and the barrier layer 7 chamber for liquid, is placed in a chamber 60 for the manifestation filled with developer. In the development process Gota UV radiation, remains on the substrate 300 due to the form of figure 33', while the remaining part of the barrier layer 7 of the chamber for the liquid, which was subjected to ultraviolet radiation is removed from the plate 8 of the nozzle by the developer. As shown in Fig. 7e, the barrier layer 7 camera for liquid is formed on the nozzle plate 8 so that the camera 9 to the liquid, respectively, are in alignment with the nozzles 10.

When these operations are completed the manufacturing site of the plate 8 of the nozzle, and the barrier layer 7 chamber for liquid, a node that contains the nozzle plate 8 and the barrier layer 7 chamber for liquid, separated from the plate 300 basis, using a chemical such as HF, in order to complete the third operation.

After the first, second and third operations are completed, perform the fifth operation to manufacture an inkjet printhead by assembling all of the elements with each other.

The membrane 20 formed in the process of performing second operations, attached to the base plate, which in the process of performing second operations imposed in the form of a stack of resistive heating layer 11 and the barrier layer 5 camera for heating. After medinaut to the membrane 20 so the camera 4 for heating, the membrane 20, the camera 9 for the liquid and the nozzle 10 are coaxially aligned relative to each other.

When the membrane 20 formed in the process of performing second operations, attached to the base plate, which in the process of performing second operations imposed in the form of a stack of resistive heating layer 11 and the barrier layer 5 camera for heating, it is preferable to maintain a pressure of 0.5-2 kg/cm2and the temperature of 250-300oC.

In this case, since the first layer 21 of the membrane 20, which is formed by a film of an organic substance made from a solution of 500 soft polyamidoimide, the first layer 21 of the film of the organic matter is converted into a substance with a cohesive properties when the above pressure and temperature. Therefore, the first layer 21 of a film of organic matter can be tightly attached to the locking layer 5 cameras for heating without reinforcing the connection layer. In the result, you can reduce the number of operations performed (to avoid unwanted operation).

In addition, when the node containing the nozzle plate 8 and the barrier layer 7 camera for liquids, which are made in the process of implementation of third operas2and the temperature of 250-300oC.

In this case, since the barrier layer 7 camera for liquids formed from a solution of 500 soft polyamidoimide, barrier layer 7 camera for liquid is converted into a substance with a cohesive properties when the above pressure and temperature. Consequently, the barrier layer 7 camera for liquids can be tightly attached to the second layer film 22 made of organic material membrane 20 without reinforcing the connection layer. In the result, you can reduce the number of operations performed (to avoid unwanted operation).

Structural elements that are completely made operations on the first and third operations, gather with each other, aligning them relative to each other. As shown in Fig. 7f, thus can be manufactured inkjet printhead.

As described above, since the barrier layer chamber for liquid and a first membrane layer made of a film of organic matter, formed from a solution of mild polyamidoimide, barrier layer chamber for the liquid and the first layer film of an organic substance into a substance with cohesive properties under certain pressure and temperature shall be tightly coupled with other components without reinforcing the connection layer to prevent leakage of the ink and the working fluid.

Although the present invention has been shown and described specifically with reference to an inkjet printhead, it should be understood that microinjector of the present invention can be applied in Micronase medical devices and device for fuel injection.

In the inkjet printhead and method of manufacture described above, the barrier layer chamber for fluid, a first film layer of the organic matter, etc., made from a solution of mild polymodality.

The solution of mild polymodality is held in the solid state under certain conditions of heat treatment, but becomes adhesive properties at a pressure of 0.5-2 kg/cm2and a temperature of 250-300oC. Therefore, the locking layer chamber for liquid and a first layer of a film of organic compounds that are formed from a solution of mild polyamidoimide, can be tightly attached to other structural elements without reinforcing the connection layer in order to prevent leakage of ink and fluid.

Although the present invention has been shown and described above with reference to specific implementation specialist is tion, without departing from the scope of patent protection of the invention defined by the attached claims.

1. Microinjector containing a base plate attached to the protective film; a resistive heating layers formed on the protective film; an electrode layer formed on the protective film and intended to transmit the electric signal to the resistive heating layer; a barrier layer chamber for heating, located on the electrode layer and designed along with the resistive heating layer to limit the chambers for heating; a membrane comprising a first layer of the film of the organic material and the second layer film made of organic material, placed in a stack on the blocking layer of the chamber for heating, moreover, the membrane is made with the possibility of fluctuations in the volume change of the working fluid fills each of the chambers for heating; barrier layer chamber for fluid, located on the membrane and designed along with the membrane to restrict cameras for liquids with ensuring their alignment relative to the chambers for heating, and a nozzle plate having multiple nozzles, the respective chambers for fluid, RA is eat the heat treatment solution hard polyamidoimide, the first layer film made of organic material is formed by heat treatment of a solution of mild polyamidoimide, and the second layer film made of organic material is formed by heat treatment of solution hard polymodality and barrier layer chamber for heating is formed by heat treatment of a solution of mild polymodality.

2. Microinjector under item 1, characterized in that the structural formula of the solution of hard polymodality has the following form:

< / BR>
3. Microinjector under item 1, characterized in that the structural formula of the solution of mild polymodality has the following form:

< / BR>
4. Microinjector under item 3, characterized in that the solution of mild polymodality made from a composition in which dianhydride with 3,3,4,4-tetracarboxylic added to the mixture of diamine is P, with 1,3-bis-(4-aminophenoxy)benzene, and aminobutanol (substance) at a given ratio.

5. Microinjector under item 4, wherein the structural formula of the diamine P has the following form:

< / BR>
6. Microinjector under item 4, wherein the structural formula of the dianhydride has the following form:

< / BR>
7. Microinjector under item 1, characterized in that the barrier layer camera for agravante, and barrier layer camera for liquids made with the possibility of entering into contact with the second layer of the film of the organic matter.

8. The method of manufacturing microinjector containing the Assembly containing the resistive heating layer and barrier layer chamber to heat produced in the first procedure, with a membrane formed in the second procedure, and the Assembly containing the nozzle plate and barrier layer chamber for fluid formed in the third procedure, the membrane is formed at the second procedure, the first procedure includes the formation of a layer of the electrode on the protective film of the first plate basis to ensure contact of this layer with the resistive heating layer after the deposition of the resistive heating layer on the first basis, in which there is a protective film; the coating solution hard polymodality on the resistive heating layer and the electrode layer while rotating the first substrate with the formation of the first layer of organic matter on the resistive heating layer and the electrode layer; converting a first layer of a solution of organic matter in the barrier layer chamber for heating after drying and term the outcrop resistive heating layer with the restriction of the chambers to heat the resistive heating layer and a sealing layer of chambers for heating; the second procedure includes a coating from a solution of mild polymodality on the second base plate, on which there is a protective film, while rotating the second substrate with the formation of the second layer of organic matter on the protective film; converting the second layer of a solution of an organic substance in the first layer film made of organic material after drying and heat treatment of the second layer of organic matter; the coating solution is hard polymodality on the first layer film made of organic material during the rotation of the second substrate with the formation of the third layer of organic matter on the first layer film made of organic material; converting the third layer of a solution of organic material in the second layer film made of organic material after drying and heat treatment of the third layer of organic matter and the separation of the first and second film layers of the organic matter from the second base; a third procedure provides education nozzle plate having a nozzle, the third plate base, covered with a protective film; a coating from a solution of mild polymodality on the nozzle plate during the rotation of the third is down organic matter in the barrier layer chamber for the liquid after drying and heat treatment of the fourth layer of a solution of an organic substance; the etching barrier layer camera for liquids with exposure of the nozzle plate to limit the chambers for fluid sealing layer of cells in the liquid and the nozzle plate and the separation plate nozzle, and the barrier layer chamber for fluid from the third pillar, and the first, second and third treatments are preferably performed separately from each other.

9. The method according to p. 8, characterized in that the structural formula of the solution of hard polymodality has the following form:

< / BR>
10. The method according to p. 8, characterized in that the structural formula of the solution of mild polymodality has the following form:

< / BR>
11. The method according to p. 10, characterized in that the solution of mild polymodality made from a composition in which dianhydride with 3,3,4,4-tetracarboxylic added to the mixture of diamine is P, with 1,3-bis-(4-aminophenoxy)benzene, and aminobutanol (substances) in a predetermined ratio.

12. The method according to p. 11, characterized in that the structural formula of the diamine P has the following form:

< / BR>
13. The method according to p. 11, characterized in that the structural formula of the dianhydride has the following form:

< / BR>
14. The method according to p. 8, characterized in that the operation of the locking Assembly layer chamber for heating with the membrane of the RCTs barrier layer chamber for heating the membrane temperature maintained within the range of 250 ~ 350oC.

16. The method according to p. 8, characterized in that the merge operation of the nozzle plate with the first plate base having a diaphragm, a nozzle plate is placed on the membrane, and the pressure is about 0.5 ~ 2 kg/cm2.

17. The method according to p. 16, characterized in that the merge operation of the nozzle plate with the first plate base having a diaphragm, a nozzle plate is placed on the membrane, and the temperature maintained within the range of 250 ~ 300oC.

18. The method according to p. 8, characterized in that the conversion of the second layer of a solution of an organic substance in the first layer film made of organic material temperature drying supported in the range of 80 ~ 100oC.

19. The method according to p. 18, characterized in that the conversion of the second layer of a solution of an organic substance in the first layer film made of organic material drying the second layer of the solution of organic substances play for 15 ~ 20 minutes

20. The method according to p. 8, characterized in that the conversion of the second layer of a solution of an organic substance in the first layer film made of organic material temperature during thermal treatment support in the range 170 ~ 180o

22. The method according to p. 8, characterized in that the conversion of the fourth layer of the organic matter in the barrier layer chamber for fluid temperature drying supported in the range of 80 ~ 100oC.

23. The method according to p. 22, characterized in that the conversion of the fourth layer of the organic matter in the barrier layer chamber for liquid drying time of the fourth layer of organic matter is about 15 ~ 20 minutes

24. The method according to p. 8, characterized in that the conversion of the fourth layer of the organic matter in the barrier layer chamber for fluid temperature at the heat treatment support in the range 170 ~ 180oC.

25. The method according to p. 24, characterized in that the conversion of the fourth layer of the organic matter in the barrier layer camera to fluid heat treatment time is about 20 ~ 30 minutes

 

Same patents:

FIELD: jet printing.

SUBSTANCE: device 100 has three column matrices 61 of drop emitters, configured for multi-pass color printing with printing resolution, having a step of carrier axis points, which is less, than step of columnar nozzles of ink drop emitters. Jet printing head has resistors of high resistance heater and effective control circuits, which are configured to compensate alteration of parasite resistance, caused by power routes (86a, 86b, 86c, 86d).

EFFECT: compactness of jet printing head with large number of ink drop emitters.

20 cl, 11 dwg

FIELD: printing devices.

SUBSTANCE: cartridge comprises compact structure of electrical connections, which includes a number pairs of matrix-columns of electrical contact areas arranged over the back side of the cartridge and connected with the droplet generators.

EFFECT: enhanced reliability.

13 cl, 18 dwg

FIELD: typewriters, printing devices; drop precipitation components, drop precipitation plates with nozzles.

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3 cl, 12 dwg

FIELD: power engineering.

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EFFECT: improved design.

21 cl, 21 dwg

FIELD: production methods; jet printing.

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33 cl, 1 dwg

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36 cl, 69 dwg

FIELD: machine-building.

SUBSTANCE: invention related to flowing media ejection device and to the device control electrical chain. Half-conductor system contains an undercoat, which has first surface, first insulation material, located on at least the first surface segment, and first insulation material contains many holes, which forms a route to the first surface, a first conducting material, located on the first insulation material, in a way that many holes basically are free of the first conduction material, a second insulation material, located on the first conduction material and partly on the first insulation material, in a way that many holes basically are free of the second insulation material, and second conduction material, located on the second insulation material and inside of the many holes, in a way that some part of the second conduction material, located on the second insulation material, has electrical contact with the undercoat.

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60 cl, 9 dwg

FIELD: printing industry.

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7 cl, 19 dwg

FIELD: printing.

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19 cl, 17 dwg, 2 tbl

FIELD: process engineering.

SUBSTANCE: ink-jet printer ink ejection head has power supply conductor, hear conductor and excitation circuit conductor arranged to the left of ink feed port. Said conductors may be arranged using a portion of jumper located to separate feed ports. Besides, multiple feed ports are configured to feed ink and pressure chambers and separated by means of jumpers. Thus, ejection opening may be located on both sides of said feed ports. Conductor connected heater with poser supply conductor or excitation circuit is also located in jumper portion making a separation baffle for feed ports.

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12 cl, 49 dwg

FIELD: printing.

SUBSTANCE: manufacturing method of head substrate for fluid ejection represents provision of silicon substrate containing on its surface layer of etching mask, which has opening, the formation of the first deepening in surface of the silicon substrate by means of anisotropic etching, the formation of the second deepening containing opening in the surface of the first deepening, thereby opening goes in the direction of the other surface of the silicon substrate, being inverse surface to the surface of a silicon substrate and the formation of the inlet channel by anisotropic etching of silicon substrate from surface having the second deepening. Fluid ejection head contains silicon substrate having element of energy generation on its surface that is configured with possibility to generate energy for liquid ejection and the inlet channel for liquid supply to the element of energy generation.

EFFECT: invention provides stable manufacturing of substrate for fluid ejection heads with form accuracy and high efficiency of technological process.

7 cl, 17 dwg

FIELD: technological processes.

SUBSTANCE: invention is related to head that ejects liquid, which carries out printing by means of drops ejection onto carrier, device that ejects liquid and method of liquid ejection. Liquid-ejecting head, in which liquid is ejected from ejection channel due to application of energy to liquid, besides ejection channel comprises one ledge having convex shape and arranged inside ejection channel, the first area for maintenance of liquid surface, which must be related to liquid in the form of column stretched outside from ejection channel, when liquid is ejected from it, and, in condition when the first area is created, the second area, to which liquid must be sucked in ejection channel in direction opposite to direction of liquid ejection, and which has hydraulic resistance that is lower than hydraulic resistance of the first area, at the same time the first area is created in direction, in which ledge shape convexity is inverted from distal end of ledge, and the second area is created on both sides from ledge.

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19 cl, 37 dwg

FIELD: printing industry.

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EFFECT: fast formation of slot for ink feed in semiconducting substrate for jet printing head with low costs.

19 cl, 14 dwg

FIELD: printing industry.

SUBSTANCE: invention relates to method for liquid ejection to eject liquid from ejection channel by application of energy to liquid. Method includes the following stages: liquid is put in motion along ejection channel, which comprises, in cross section, relative to direction of ejection, two ledges inside the channel, then liquid surface that is arranged on both sides of two ledges and in area between two ledges in channel in direction opposite to direction of liquid ejection is pulled so that liquid arranged in specified area is joined to liquid in the form of column and is in contact with distal ends of two ledges, and them liquid in the form of column is separated from liquid arranged in specified area to eject liquid from ejection channel, so that liquid arranged in specified area is in contact with distal ends of two ledges.

EFFECT: invention makes it possible to reduce formation of satellites (secondary drops) and to accordingly improve quality of printing.

6 cl, 37 dwg

FIELD: printing industry.

SUBSTANCE: method to make a silicon substrate for a liquid-ejecting head, having the first surface, opposite to the second surface, includes the following stages: provision of a layer on the second surface of the silicon substrate, besides, this layer has a lower etching speed compared to silicon, when exposed to the silicon etchant; partial removal of the layer to open a part of the second surface of the silicon substrate, besides, this opened part surrounds at least one part of the layer; and moist etching of the specified layer and opened part of the second surface of the silicon substrate with application of the silicon etchant, in order to form a channel of liquid supply, stretching from the second surface to the first surface of the silicon substrate.

EFFECT: simplified formation of ink supply channel and reduced time of substrate making.

12 cl, 22 dwg

FIELD: process engineering.

SUBSTANCE: method of producing said head including silicon substrate and inlet channel comprises: producing silicon substrate including isolating layers on first surface and mask layers with etching holes substrate other surface. Note here that said insulating layer is located in section extending from position opposite section between adjacent mask layer holes, and producing holes by etching section of silicon substrate so that etched section extends to insulated layer section opposite aforesaid hole. Silicon substrate located between adjacent holes is subjected to etching so that secintion on its first surface may be thinner than that on its second surface.

EFFECT: higher hardness of thus produced head and higher efficiency.

5 cl, 35 dwg

FIELD: printing.

SUBSTANCE: method for processing a substrate of head for ejecting the fluid includes the stage of providing the substrate and the stage of providing a deepened section on the rear surface of the substrate by ejecting fluid in a linear form from the rear surface of the substrate, and by processing the rear surface of the substrate by laser light which passes along the fluid and in the liquid.

EFFECT: increased mechanical strength of the substrate.

9 cl, 10 dwg

FIELD: chemistry.

SUBSTANCE: photosensitive composition contains a cation-polymerisable compound, an acid photogenerator having an anionic part and a cationic part, as well as a salt having a cationic part having anyone of a quaternary ammonium structure or a quaternary phosphonium structure, and an anionic part. The anionic part of the salt is substituted with the anionic part of the first acid obtained from the anionic part of the acid photogenerator, to form a second acid having acid strength lower than that of the first acid. The cation-polymerisable compound is an epoxy resin. The acid photogenerator is at least a compound selected from a group comprising a sulphonic acid compound and other sulphonic acid derivatives, a diazomethane compound, a sulphonium salt, an iodonium salt, a sulphonimide compound, a disulphonic compound, a nitrobenzene compound, a benzoin tosylate compound, an iron arene complex, a halogen-containing triadine compound, an acetophene derivative, and a cyano group-containing sulfatoxim. The method of forming a pattern involves preparing a substrate on which the photosensitive composition is provided. A portion of the composition is then exposed to light to cure the exposed portion. The cured portion is then heated. The liquid ejection head has a part with an outlet channel for ejecting liquid. The part with the outlet channel is formed from cured material made from said composition.

EFFECT: invention increases heat resistance of the photosensitive composition and increases accuracy of forming a pattern.

13 cl, 4 dwg, 5 tbl, 9 ex

FIELD: printing.

SUBSTANCE: invention relates to an ink-jet printer in which the operation of restoring is performed in the print head for ejecting ink, and to a method for restoring the print head in the ink-jet printer. The ink-jet printer comprises a print head that can eject ink. The device also comprises a transportation unit, which serves for transportation of a recording medium along the transportation path passing the printing position in which printing can be performed on the printing carrier by the print head. The cutter which can cut the printing carrier. The restoring unit to perform operations of restoring the print head. The control unit to control the restoring operation performed by the restoring unit based on the number of passes which is the number of times that the cut-off part of printing carrier, which is cut off by the cutter, passes the printing position.

EFFECT: proposed invention provides the systematisation of the process of restoring the print head taking into account cutting of the carrier.

14 cl, 13 dwg

FIELD: printing industry.

SUBSTANCE: in the invention the ink jet printing head is designed, comprising an element provided with an ejection port for ejecting the ink. The said ink jet printing head additionally comprises a water-repellent layer comprising a cured product of the condensed product obtained by condensation of the hydrolyzable silane compound comprising an epoxy group, and a hydrolyzable silane compound comprising a perfluoropolyether group on the surface of the said element on the side where the ejection port comes.

EFFECT: improved quality of printing.

16 cl, 8 dwg, 1 tbl

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