Method and device for the excitation of high-frequency electric discharge in the gas laser

 

(57) Abstract:

The invention relates to the field of quantum electronics and can be used in gas lasers such as CO2nitrogen and excimer lasers. Excitation of high-frequency discharge in the gas laser is that in addition to the main flow of the laser gas mixture in the area of the exit gas from the electron-electron gap serves an additional stream of electrically neutral cooled gas mixture. This additional gas flow is introduced into part of the main stream, past the near-electrode area discharge, which is the main energy input from the discharge. High-frequency electric discharge excited gas laser, containing getprocesses path defined therein two electrodes forming miscreancy period, means for pumping gas and at least one additional gas channel, the output of which is directed in part of the main stream, past the near-electrode area discharge. The use of the invention will increase the pulse repetition rate, to avoid unwanted breakdowns in theelectrodes area and to increase the efficiency of the laser. 2 S. and 4 C.p. f-crystals, 4 Il.

The invention relates to the field who's lasers.

Known laser (PCT Application WO 87/06773, CL H 01 S 3/03), in which the interelectrode gap through the holes in one of the electrodes serves the additional gas flow. The closest to this technical solution is the way of the excitation pulse-periodic discharge, when along with the main gas flow between the electrodes creates an additional thread (U.S. Patent N 4152672, CL H 01 S 3/02, 1979). A device for its implementation, containing the main getprocesses circuit, in which before the interelectrode gap are the means for pumping the additional gas flow near the border of one of the electrodes (U.S. Patent N 4152672, CL H 01 S 3/02, 1979).

The disadvantage of both analogue and prototype is that in the area of the exit exhaust gas from the interelectrode gap is not fully ionized plasma particles previous gas discharge and the products of erosion of the electrodes create a high conductivity gas down stream.

As a result, after application of the interelectrode gap of the subsequent pulses of high voltage, between the edges of the electrodes in the area of the exhaust outlet of the discharge gap, where there is an electric field from the previous in volumes. To eliminate the above-mentioned parasitic breakdown of the known technical solution is required to create a high velocity gas stream. Since the power consumed by means of the gas flow in the case of a constant cross section of the gas channel is proportional to the flow velocity of gas in the third degree, by increasing the gas velocity significantly decreases the overall efficiency of the laser. The disadvantage is that the past through the bit period of the gas gives up some heat to the electrodes and located in the immediate vicinity of the electrode elements, such as directing a gas stream, the return conductors, which may cause them to overheat and melt.

The objective of the invention is to increase the pulse repetition rate, excluding parasitic breakdown theelectrodes region and improving the overall efficiency of the laser. To solve this problem in the way that the excitation of high-frequency electric discharge in the gas laser, namely, that through the interelectrode gap create the main flow of the working gas mixture and the additional flow of electrically neutral gas, which is fed to the gate area of the main flow from the interelectrode gap, the flow of electrically natsuno the deposition of energy from the discharge. Additional flow is cooled working gas mixture.

Submission of additional electrically neutral gas in part of the main stream, past the near-electrode area discharge, which is the main energy input from the discharge, allows to dilute coming out of the discharge gap exhaust is not fully ionized gas and neutral gas, which reduces the concentration of charged particles. In getprocesses tract downstream, after the interelectrode gap is served electrically neutral gas, such as inert gas, or a gas, which is a component of the working gas mixture. This decreases the conductivity in the above area. This is essential because when applying a high voltage pulse to the electrodes an electric field occurs not only in the area of the discharge, but in getprocessor tract, in the area of the outlet exhaust gas of the discharge gap. Although the electric field in getprocessor tract less than the bit period, but due to the residual conductivity of the waste from the previous pulse of gas may occur parasitic discharge, competing with the discharge of the pumping that occurs between the electrodes in the updated electric is elektronnuyu the discharge zone, which is the main energy input from the discharge eliminates the occurrence of spurious discharge in getprocessor tract and increase the pulse frequency without increasing the velocity of the gas stream, which increases the overall efficiency of the laser. The flow neutral cooled gas is introduced in the last near-electrode layer of the flow, which is the main energy input from the discharge. This part of the stream contains products of erosion of the electrodes, the most heated, and therefore, the supply neutral cooled gas in this area not only reduces the conductivity of the gas and the surfaces bounding the flow at the outlet of the discharge gap, but also eliminates overheating of the elements Gazpromenergo tract and accumulation on their surface charges can increase unwanted electric fields.

Additional gas flow consists of the working gas mixture, which is essential so as to create no additional source of gas.

The technical result of the proposed method of excitation of high-frequency electric discharge in the gas laser is an exception occurrence of the parasitic resistance for trajectories passing through the area joomseo efficiency of the laser.

The technical challenge is to create a device that allows the proposed method for the excitation of high-frequency discharge in a gas laser.

In the device for implementing the method of the excitation high-frequency electric discharge in the gas laser, containing getprocesses path defined therein two electrodes forming the interelectrode gap, means for pumping gas and at least one additional gas channel, the output of which is located directly in the area of the outlet of the working gas mixture from the interelectrode gap, the output of the additional gas channel is directed in part of the main gas flow past the near-electrode area discharge, which is the main energy input from the discharge, the input gas channel is communicated with the discharge part Gazpromenergo circuit. Additional gas channel made in the form of through holes in at least one electrode. In the channel of the additional flow is the dust filter.

The output of the additional gas channel is directed in part of the main gas flow past the near-electrode area discharge, which is the main energy input from the discharge, what is vital is 2">

The location of the input gas flow in the discharge zone Gazpromenergo circuit significantly, because in this zone the gas pressure is higher than in the area of the exit gas from the discharge gap, and this pressure differential provides additional flow without the use of additional means of pumping gas, in addition, in the injection zone, the gas is chilled, as this zone is located after the heat exchanger in the course of the stream, i.e. you will not need additional funds additional cooling flow, which simplifies the design of the laser.

The possibility of using laser gas mixture for an additional stream is related to the fact that the recombination time formed in the discharge zone of charged plasma particles is comparable to the time interval between adjacent pulses in the mode of operation of the laser with high pulse repetition rate, and the time of passage of the particle getprocessname contour much more. Ionized in the discharge gap, the gas becomes neutral to the time of passage of these particles in the gas through an additional channel.

In the particular case, in the device for implementing the method of excitation of high-frequency gas discharge dopac thereby increased electrode surface in contact with the cooled gas stream, which reduces the temperature of the electrode. This prevents the electrode from overheating, therefore, decreases the erosion electrode and the degradation of the gas mixture. In addition, it facilitates the construction of an additional channel.

In the particular case, in the device for implementing the method of excitation of high-frequency gas discharge in the channel of the additional flow is the filter dust particles. This is essential because it reduces the number of charged and conductive particles, and the insulating properties of the gas used as an additional flow, improve.

The technical result of the proposed devices is the implementation of the method of excitation of high-frequency discharge in the gas laser and the simplification of the design of the laser, the technical result of the private decision, in which the secondary channel is made in the form of through-holes in the electrode is, in addition, protection of the electrode from overheating and erosion.

In Fig. 1 and Fig. 2 schematically shows a cross section of a device for the excitation of high-frequency discharge in a gas laser.

In Fig. 3 schematically shows a cross-Sich is automatically shows a longitudinal cross section of the laser in Fig. 3 along the line G-G electrodes, in which holes for additional gas channel.

The proposed method for the excitation of high-frequency electric discharge in the gas laser we will illustrate on the example of the device for its implementation, shown in Fig. 1 and Fig. 2. The electrodes 1, 2 to form the interelectrode gap, through which serves the main stream of gas moving in the direction A. When the voltage is applied between the electrodes 1, 2, an electric field. The electric field causes the volumetric gas discharge G in the electrode gap.

In the outlet area of the exhaust gas from the interelectrode gap having a high conductivity, through the exit 3 serves the additional gas stream B comprising electrically neutral chilled gas. Additional gas flow B can be started near one of the electrodes, and simultaneously both of the electrodes 1, 2.

When you increase the voltage between the electrodes 1, 2 for the subsequent pulse electric field extends into the zone of demolition, waste from the previous pulse of gas.

Submission of additional electrically neutral gas in the outlet area of the primary is oneiromancy gas is a neutral gas, which increases the dielectric strength of the most prone to parasitic breakdown path D. the Trajectory D is held between forming an electric field by the electrode surfaces W through the ionized preceding pulse gas that is

Surface Gazpromenergo tract in theelectrodes zone 3, 4, limiting the total gas flow directly washed by the electrically neutral cooled gas, which increases the dielectric strength of these surfaces, as in the case of directing the gas flow from the dielectric material prevents the accumulation of charges on its surface.

The flow neutral cooled gas B is introduced into the portion of the main flow And held near-electrode area discharge and which is the main energy input from the discharge. This part of the stream contains products of erosion of the electrodes, the most heated, and therefore, the supply neutral cooled gas in the above area is not only significantly reduces the overall conductivity of the gas and the surfaces bounding the flow, but also eliminates overheating of the elements Gazpromenergo tract 3, 4 adjacent to the gate area of this gas from the interelectrode gap.

The private decision of a device for implementing the method is the design of the laser, the cross section of which is shown in Fig. 1 and Fig. 2. The laser contains the electrodes 1, 2 forming the interelectrode gap, directing the gas stream 3, 4, forming a cone, 5 radiator for cooling the working gas mixture, the fan wheel 6, a dust filter 7 and the housing 8.

The laser operates in a pulse-periodic mode. The gas flow And is created by the impeller 6. When the voltage is applied to the electrodes 1, 2 occurs volumetric gas discharge G in the region of highest electric field intensity, i.e. in the interval between the electrodes 1, 2. Ionized gas at the outlet of the interelectrode gap is mixed with electrically neutral cooled by the additional gas flow B. After the diffuser, the gas passes through the radiator 5 where it is cooled.

The input channel of the additional gas flow is located in a zone of high pressure gas path, and the output B is in the area of low static pressure gas (as the speed of the main gas flow in the electrode gap maximum), so to build up the high flow made with a large cross-sectional area, and so the speed of the gas particles in this area is small. This ensures effective operation of the filter dust particles, for example electrostatic filter.

Other private decision device for implementing the method is the design of the laser, the cross section of which is schematically shown in Fig. 3, a longitudinal cross section G-G shown in Fig. 4. The additional channel flow is made in the form of holes 9, 10 in the electrodes 1, 2. Additional gas flow passes through the holes 9, 10 of the electrodes 1, 2. Thus, the increased surface electrodes in contact with the cooled gas stream, which reduces the temperature of the electrodes. This prevents the electrodes from overheating, and therefore decreases the erosion of the electrodes and the degradation of the gas mixture. In addition, such performance is an additional channel simplifies the design of the laser. The generated radiation is displayed through the window 11.

As an example, indicating the possibility of practical realization of the proposed device for the excitation of high-frequency electric discharge in the gas laser, it is possible to bring the results obtained in the study of pulse-periodic THE N2laser with the thought between the electrodes of 10 mm The width of the discharge gap of 2.5 mm, the Rate of gas flow through the interelectrode gap 48 m/s

This ensures reliable operation of the laser at a pulse frequency of 10 kHz.

In the absence of additional flow, at a flow rate of gas through the interelectrode gap 48 m/s maximum pulse frequency of 6.5 kHz.

1. The method of excitation of high-frequency electric discharge in the gas laser, namely, that through the interelectrode gap create the main flow of the working gas mixture and the additional flow of electrically neutral gas, which is fed to the gate area of the main flow from the interelectrode gap, characterized in that the flow of electrically neutral gas is introduced into part of the main stream, past the near-electrode area discharge, which is the main energy input from discharge.

2. The method according to p. 1, characterized in that the additional flow is cooled working gas mixture.

3. The device for implementing the method of the excitation high-frequency electric discharge in the gas laser, containing getprocesses path defined therein two electrodes, forming what is directly in the area of the outlet of the working gas mixture from the interelectrode gap, characterized in that the output of the additional gas channel is directed in part of the main gas flow past the near-electrode area discharge, which is the main energy input from discharge.

4. The device according to p. 3, characterized in that the input gas channel is communicated with the discharge part Gazpromenergo path.

5. The device under item 3 or 4, characterized in that the additional gas channel made in the form of through holes in at least one electrode.

6. The device under item 3 or 4, characterized in that the additional channel flow has a dust filter.

 

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