The method of making blanks for fibers based on silica glass


G02B6/16 -

 

(57) Abstract:

The method used for the production of elements of fiber-optic communication lines (fiber collimators radiation devices docking fiber, spectral filters, optical isolators and sensors of physical quantities. To increase the occurrence of nitrogen in a quartz glass to the level required to provide the required difference n the refractive indices of the core and the shell, the support tube serves a mixture of molecular gas reagents containing atoms of nitrogen, oxygen and silicon. Molecular gas reagents are mixed so that each silicon atom has no more than five atoms of oxygen, and for every 1000 atoms of oxygen have at least 1 nitrogen atom. In the support tube excite the microwave discharge. The products flowing in the reaction mixture are deposited on the inner surface of the support tube. 4 C.p. f-crystals, 1 Il.

The invention relates to fiber optics, in particular to the production technology of optical fibers, and is industrially applicable in fiber-optic communication lines, fiber collimators radiation devices docking fiber, the spectral filters, opticare glass, doped with germanium (Optical communication systems). Gower, English Translation edited by A. Larkin, I. - M.: Radio and communication, 1989, S. 98). Germanium is introduced into the glass core of the fiber to increase the refractive index of the glass and thereby create radial profile of the refractive index with the maximum in the core. The drawback of such optical fibers is a relatively high cost of Germany and insufficient radiation resistance of germanium silicate glass. The latter circumstance does not allow to use germanium-silicate optical fibers in conditions of high radiation background.

Known fiber optic cable in which the core consists of undoped quartz glass, and as the shell of the use of quartz glass with a lower refractive index, for example, doped with fluorine (Biryukov, A. C., K. Golant M, Dianov E. M., Corobov Century A., shahani A. C. high-purity substances, No. 1, 1992, S. 19). Such fibers more radiation rack. Their disadvantage, however, is repressirovannaya structure of the refractive index, which makes the light-sensitive microshell and therefore is a source of additional optical loss. To minimize such losses required great technology billets.

Known fiber optical fibers based on silica glass doped with nitrogen (V. A. Bogatyrjov, E. M. Dianov, K. M. Golant, R. R. Khrapko, A. S. Kurkov, Silica fibers with silicon oxynitride core fabricated by plasmachemical technology, OFC'95, San Diego, California, Technical Digest, vol. 8, p. 266). They combine the radiation resistance, which is close to the optical fibers with pure silica core and a fluorine-silicate shell, and the structure of the refractive index without depression characteristic of germanium-silicate fiber light guides. Their advantage is the absence of expensive alloying elements in the composition of quartz glass. Numerical aperture and the associated positive effect achieved by the use of such fibers is greater, the greater the concentration of nitrogen.

The known method for manufacturing of optical fibers based on silica glass, including serving in a support tube of a mixture of molecular gas reagents contain oxygen atoms and silicon and the deposition of products flowing in the reaction mixture on the inner surface of the support tube (Handbook of fiber optic communication lines / Andrushko L. M., ascension Century A., Rink Century B. and others edited Svechnikova S. and Andrushko L. M. - Kyiv: Tekhnika, 1988, S. 69). The disadvantage of this speechmikes decision to declare a known method of manufacturing preforms for fiber based on silica glass, doped with nitrogen, including serving in a support tube of a mixture of molecular gas reagents containing atoms of nitrogen, oxygen and silicon, the excitement in her microwave discharge and precipitation products flowing in the reaction mixture on the inner surface of the support tube (E. M. Dianov, K. M. Golant, R. R. Kharpko, A. S. Kurkov, A. L. Tomashuk. Lowhydrogen silicon oxynitride optical fibers prepared by SPCVD. IEEE Journal of Lightwave Technology, 1995, vol. 13, No. 7, pp. 1471-1474). It is based on the formation of the core of the fiber preform by chemical synthesis layers of silica glass doped with nitrogen, on the inner wall of the support tube made of quartz glass by SPCVD technology (patent France Monique Moisan, Dominique Pavy, Marie Eve Davoust, Serge Saada, Patrick Chollet N 2628730, Dispositif de fabrication de preformes pour fibre optiques, class C 03 B 37/018, publ. 1988).

The disadvantage of the prototype is that it does not define the ratio of silicon to oxygen entering the reactor, the gas mixture. This makes it impossible according to the prototype to ensure that the process mode of occurrence of nitrogen in a quartz glass to obtain a given refractive index difference between the core and the shell n.

With the help of the claimed invention solves the problem of finding a technological regime is required to ensure="ptx2">

The problem is solved in that in the known method of manufacturing preforms for fiber based on silica glass doped with nitrogen, including serving in a support tube of a mixture of molecular gas reagents containing atoms of nitrogen, oxygen and silicon, the excitement in her microwave discharge and precipitation products flowing in the reaction mixture on the inner surface of the support tube, molecular gas reagents supplied in the supporting tube, mix so that each silicon atom has no more than five atoms of oxygen, and for every 1000 atoms of oxygen have at least 1 nitrogen atom.

In particular, as a mixture of molecular gas reagents used at least one of the mixtures SiCl4+ O2+ N2, SiCl4+ O2+ NO2, SiCl4+ O2+ N2O3, SiCl4+ O2+ N2O4, SiCl4+ O2+ N2O, SiCl4+ O2+ NO and/or SiCl4+ O2+ NH4.

In particular, the temperature of the support tube is 900 - 1300oC; the power required for excitation in the support tube of the microwave discharge is 0.1 - 10 kW; pressure molecular gas reagents inside the supporting MESI molecular gas reagents inside the supporting tube increases the nitrogen content in the blanks and, the result is the desired value of n.

the drawing shows a device that implements the inventive method.

The drawing shows a reference quartz tube 1, a mixture of molecular gas reagents 2, the area of deposition 3, the microwave power 4 supplied through waveguide 5 in the annular gap 6, the surface plasma wave 7, the matching device 8 with the piston and the plasma column 9.

The molecular gas mixture of reagents 2 arrives in the support tube 1 made of quartz glass under pressure of several mm RT.article On the opposite side to the tube is supplied microwave power of 4, under the action of which in the mixture is maintained stationary discharge, forming a plasma column 9. As reagents 2 use the dried oxygen and nitrogen with silicon tetrachloride. Reagents 2, falling into the region of the plasma column 9, experiencing chemical transformations due to the appearance in the mixture of active radicals, which are "acquired" in a mixture of unexcited molecules during their interaction with the "hot electrons" plasma. As a result, the silicon tetrachloride is converted into silicon oxide, which is adsorbed by the walls of the support tube and doukissis in the heterogeneous reaction with usuarios glass. Changing the length of the plasma column 9 by changing the applied microwave power of 4, you can implement the scanning mode of the deposition zone 3 along the support tube 1 and thereby to carry out the mode layer-by-layer deposition of glass on the inner surface.

For the manufacture of wood fiber fiber with a cladding of undoped quartz glass, the core glass doped with nitrogen, and the value n=0,02 support tube 1 with a diameter of 20 mm and a wall thickness of 2 mm is heated to a temperature of 1250oC. In the support tube 1 serves a mixture of 2 composition SiCl4+O2+N2with the full pressure of 1 mm RT.article Microwave power 4 change in the range of 1 to 5 kW. The desired doping level glass nitrogen is obtained when the mass ratio of expenses [SiCl4] :[O2] = 0.92 and [O2]:[N2] = 0,5. When this attitude coming into the reactor per unit time of oxygen atoms and silicon is 2.2, and nitrogen and oxygen is - 2.

For the manufacture of wood fiber fiber with a cladding of undoped quartz glass, the core glass doped with nitrogen, and the value of n=0.01 to the support tube 1 with a diameter of 20 mm and a wall thickness of 2 mm is heated to a temperature of 1250oC. In the support tube 1 pod is e 1 - 5 kW. The desired doping level glass nitrogen is obtained when the mass ratio of expenses [SiCl4]:[O2]=0,76 and [O2]:[N2]=0,5. When this attitude coming into the reactor per unit time of oxygen atoms and silicon is 2.6, and nitrogen and oxygen is - 2.

Thus, examples of specific performance indicate the solution of the problem.

1. The method of making blanks for fibers based on silica glass doped with nitrogen, comprising heating the support tube, the flow in the reference tube molecular gas mixture of reagents containing atoms of nitrogen, oxygen and silicon, the excitement in her microwave discharge and precipitation products flowing in the reaction mixture on the inner surface of the support tube, wherein the molecular gas reagents supplied in the supporting tube, mix so that each silicon atom has no more than five atoms of oxygen, and for every 1000 atoms of oxygen have at least one nitrogen atom.

2. The method according to p. 1, characterized in that as the molecular gas mixture of reagents used at least one of the mixtures SiCl4+O2+N2, SiCl4+O2O, SiCl4+O2+NO and/or SiCl4+O2+NH4.

3. The method according to p. 1, characterized in that the molecular gas mixture flow of reagents in the support tube, it is heated to 900 - 1300oC.

4. The method according to p. 1, characterized in that the power required for excitation in the support tube of the microwave discharge is 0.1 - 10 kW.

5. The method according to p. 1, characterized in that the gas pressure of the reactants inside the supporting tube is 0.05 - 50 mm RT.article

 

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