The research method of an optical disk of the original and the device for its implementation

 

(57) Abstract:

Usage: in a test technique for the study of optical drives-originals, designed to create a CD-ROM or laser disc. The inventive control of the development process of a layer of photoresist on an optical disc of the original manifest liquid transparent body is brought into contact with the developing liquid. The beam of light falls on the optical disk from the original source, and dragirovaniya beam passes through manifesting the liquid and the transparent body to the detector. Dragirovaniya beam is generated from the incident light beam by reflection and is dragirovaniya beam of the first order. An incident beam of light is modulated. The manifestation of the layer of photoresist is controlled by controlling the change of the diffracted light beam detected by the detector, 2 S. and 18 C.p. f-crystals, 9 Il.

The present invention relates to the investigation of processors performed with optical drives-the originals, representing the original intended to create, for example, a CD-ROM or laser disc. It applies both to the device for the study of optical discs of the CD-ROMs and laser discs, currently manufactured by several processes management and backup, which in General terms are as follows.

First, a flat polished glass disk of the original (usually with a diameter of 240 mm and a thickness of 5-6 mm) coated with a thin even layer 9 is typically a thickness of 130 nm) of the positive photoresist.

Then a beam of blue laser light focused to a small spot on the surface of the glass coated by passing it through the lens type lens of the microscope. Laser modulate light in accordance with an electric signal, which is obtained from the corresponding subject record television, sound or other information signal. By rotating glass disk while providing radial movement between the point of focus of the laser light and the axis of rotation of the disk creates a modulated light spot, vycherchivaya spiral track on a glass surface coated, starting with a small radius and moving to the outside.

Thus, in the layer of photoresist is formed latent image consisting of a number of exposed and unexposed parts of SPIRA is h, that the focused light spot is essentially limited by diffraction, it has a rounded profile intensity.

The next step is to show the invisible image. This is done by bringing the coated surface into contact with a developing liquid (e.g. aqueous developing solution), usually by rotating the glass in the horizontal plane (the surface with the coating facing upwards) and the simultaneous filing of the thread showing the liquid, so the liquid was spread on the surface and eventually discarded to the edge of the disc. Showing the liquid dissolves the exposed areas of the coating photoresist, providing at the same time a much smaller impact on the unexposed portions, so that the shielded areas will be holes in the coverage. As showing the liquid gradually destroys the photoresist, fossa first made round in cross-section, until the entire thickness of the layer of photoresist is dissolved in the most heavily exposed part (center) of each fossa. After that, the flat middle part of the Foundation pit (defined by the surface of the glass) is expanding, while stink, is intentionally terminated at the time when the hole becomes appropriate size. Control the size of the holes is very important because it affects the ability to play with made in the development process drives, in particular the magnitude and symmetry of the reproduced waveform. Next objective is to stop the manifestations of this method is to ensure that the walls of the holes were not too steep, because otherwise they are difficult to reproduce in subsequent processes of electroplating and moulding.

Many aspects of the management process, including changing the shape of the dimples at the time of development, as described in Principles of Optical Disk Systems, G. Bouwhuis (Adam Hilger, 1985).

The width of the dimples typically 0.5 μm, while the length of the pits and the spaces between them along the track - variables, and the recorded information contained in these variables intervals.

The last principal stage of the manufacturing process of the original metallization is shown a disk surface of the original is usually silver or Nickel. As a result, the surface becomes conductive, allowing you to apply it with the help of electrolysis significant layer of Nickel (up to 0.3 m is the output element.

At subsequent stages of electroplating and branches you can make duplicates of the original metal. These duplicates (known as matrix) is then used as one surface of the mold in a machine for injection molding or injection-compression). Alternatively, you can use metal original. In any case, the molding machine used for producing discs of plastic material, the surface of which is a duplicate of the surface with dimples manifested glass disk of the original floor.

And, finally, cast disks metallitotuus (usually aluminum) on the carrier information side pockets, metallic surface covered with a protective varnish and lacquer layer is printed branding information.

Cast discs reproduce by focusing the laser beam using a lens through the thickness of the plastic on the inner surface of the metal layer. For the light beam of the inner metal surface has a negative duplicate of the original holes, i.e., "the ledges". The playback signal obtained from light reflected back into the lens, and the diffraction properties of the projections are critical

The height of the protrusions is determined mainly by the thickness of the original photoresistive coating. The width and shape of the protrusions is determined less accurately, and it is affected by a large number of parameters in the process of exposure and manifestations, including the intensity of the laser light, the size and profile spots, temperature and humidity environment, the sensitivity of the photoresistor, the chemical composition exhibiting liquid and the time of development.

If properly control all the relevant parameters, the process can provide stable performance. Fine adjustment can be made retrospectively by control signals received through play with coated metal glass disk of the original, or even waiting to be received moulded duplicate discs with their subsequent playback.

However, it is desirable to maintain control at an earlier stage, and this can be done during the development process. The formation of holes can be controlled optical path in the course of their development, and the development process can be terminated (for example, by replacing the flow proteosomal managed only one process variable (the time of manifestation). However, it is important to be able to impact on the size of the holes and, consequently, on the size and symmetry of the information signal for subsequent playback. If at this stage you can manage the size of the holes, the process would become much less sensitive to variations in other process parameters.

It was found that it is not necessary to observe the holes under a microscope or perform an operation equivalent to the playback of the recording. Sufficient information for practical management receive as a result of relatively coarse observations. If a collimated beam of light, for example, with a diameter of several millimeters, to send up through the glass to the surface with coverage in the area where the floor has holes, the light dirrahiuma dimples. The effect of this diffraction is more pronounced in the radial direction, because, thanks to the regular distance between tracks with the record, most difragirovavshej light emerging from the disk, concentrated in discrete beams in a radial plane, representing different orders of diffraction. (This property is radial dragirovaniya see even if different adjacent turns of the spiral darlina direction). An output beam that can be seen even in the absence of pits (normal transmitted beam), is called the zero order beam.

Furthermore, in addition to the normal reflected beam, known as the reflected beam of the zero order, you can see another group of diffracted rays, going back through the glass. Such dragirovaniya rays may be "reflected" in contrast to "passed".

When a well known method of monitoring the layer of photoresist laser light beam passes up through the glass disk of the original, and the detector has under the drive so that it crosses one of the transmitted diffracted rays, usually dragirovaniya beam of the first order, at the time of development. When the measured intensity is a predetermined threshold, the demonstration automatically ends. This known method presents some significant challenges. During the presentation layer exhibiting liquid flows on the surface of the disc of the original. If this layer is uniform and flat, it does not change the directions of the various rays of light when they move in the air.

However, in reality, on the surface showing the liquid is fluctua the Tata which are fluctuations in their directions of propagation. It is therefore necessary that the optical sensor for determining the intensity of rays of the first order, covered a larger area than would be necessary otherwise. More importantly, (line) beam of zero order is also refracted at random, and in this case you may need to install the sensor rays of the first order. Since the intensity of the zero order beam is many times greater than the intensity of the diffracted beam quality measurements because this can seriously deteriorate, so there is a need to improve the reliability of this method.

In accordance with the first aspect of the present invention, when the formation of holes at the time of development of the optical disk of the original is controlled by the direction of the light beam on the surface of the optical disk of the source and receiving at least one diffracted light beam, a rigid body in contact with a layer showing the liquid, and this rigid body is at a distance from the surface of the optical disc of the original and is located near the surface of the optical disk of the original, on which falls the light beam. It's hard (hard) body d of the liquid, plot the fall of the light beam, thereby reducing or eliminating the impact of such changes in the layer showing the fluid control manifestations of an optical disc of the original.

The solid body is preferably transparent and allows you to act as a window for either or both of the rays of light as going to the optical disk of the original, and the diffracted light beam from the optical disk of the original. Since at least part of the optical path from the source light beam to the detector of the diffracted light beam is then continuously pass through the layer exhibiting liquid, you can see that it is important to provide precise control of its surfaces, so that it is possible to reliably measure the intensity of the diffracted beam.

However, the present invention can also be used in devices in which the rays of light from the light source to the optical disk of the original and from an optical disc of the original to the detector does not pass through the layer exhibiting liquid. At first glance, the control layer exhibiting liquid in accordance with the present invention in this case is no longer required. However, in practice this does not happen, because at least some part of the which is removed from the disk. In particular, there is a direct reflection of the ray or beam of zero order, which, if this surface permits the presence of ripples or other fluctuations, fluctuates in direction and can enter the detector and, thus, interfere with the measurements. Thus, in this case, it is also important to control the surface layer of the liquid.

In the above description the term dragirovaniya beam covers the diffraction both in transmission and in reflection. Thus, the source of the beam incident on the optical disk, can be on the same side of the optical disk, where the detector that detects dragirovaniya beam, or may be located on the opposite side.

There are many different ways to implement the invention in this aspect. In the simplest case, the solid body is a transparent window in the housing. The casing is hollow and may in this case contain a detector, designed to detect the diffracted beam, and (or) the source beam incident on the optical disk. In this case, the surface of the window remote from the optical disk, remains dry, and the gap between the window and the optical disk is filled with liquid to prevent the through the window, and in more preferred and an incident beam, and difragirovavshej beam, but it is also possible that through the window passes the incident beam, and dragirovaniya beam is detected on the opposite side of the optical disk.

It is also possible that the incident and dragirovaniya rays pass through the optical disk toward the disk surface, which comes into contact with the liquid, and from her. In this case there is no need to make a solid transparent body.

To ensure a sufficient showing of fluid near the optical disk of the original are usually provided with appropriate means for supplying the liquid. Therefore, in accordance with this aspect of the present invention, the solid body can be manufactured as a single structure with means for feeding exhibiting liquid. For example, the solid body may constitute the wall of the tool feed. Alternatively, if the means for supplying includes a nozzle through which passes showing the liquid to the optical disk of the original window, you can perform in the wall of this nozzle so that dragirovaniya and (or) the incident rays pass through the liquid in the nozzle and the each of these embodiments dragirovaniya (or falling) the beam passes directly from manifesting liquid into a solid transparent body (or naoborot, because solid transparent body is in direct contact with the developing liquid, thereby preventing fluctuations on the surface showing the fluid due to ripples. As mentioned above, it is also possible to provide the incident beam of light through the transparent body, even if the detector is on the other side of the optical disk from the transparent body.

In accordance with another aspect of the invention, which is not dependent on the first aspect, but can be used in conjunction with it, the formation of holes at the time of development of the original optical disc is controlled by means of the perception of the intensity of the diffracted light beam, and dragirovaniya beam observed on the same side of the disc of the original, from which the incident beam hits the disk, i.e., dragirovaniya beam is observed in the reflection. The use of reflected and not transmitted beam gives some specific advantages. All optical components can be positioned above the disk, it is possible to ensure the insensitivity of the measurements, for example, to the conditions below the surface of the glass, and the original disk can be mounted on an opaque rotatable platform or the d-pad, not interfering optical is imagerunner beam of the first order on very different in the case of measurement when passing through the surface of the original with dimples or reflected from it. However, the zero order beam or strong direct beam is attenuated when the reflection compared to transmitted. This means that the beam intensity of the first order, measured as a fraction of the beam of the zero order more in reflection than in transmission. Therefore, the effects generated by scattered light from the zero order beam entering the beam detector of the first order, is less serious if the reflected beam is used.

In accordance with a third aspect of the invention the light source is periodically modulated in intensity. This allows you to control at least one diffracted beam, limiting the influence of the ambient light. Thus, passing the output signal, for example, the beam detector of the first order through the photosensitive detector, the reference input is the same input that is used to modulate the laser light, and producing due to this, the output DC signal proportional to the component proyektirovanii light intensity, which varies synchronously with the said signal, it is possible to essentially eliminate the effect on the output signal DC of any proyektirovanive is but is a laser diode, and its output light beam is modulated by electronic means. And again this third aspect may be independent, or it can be used in conjunction with the first and or second aspects.

The following is a description of preferred embodiments of the invention with reference to the drawings, which represent the following:

In Fig. 1 - scheme of the rays diffracted on the surface;

Fig. 2 is a schematic representation of an optical tracking device, illustrating the General principle of the present invention;

Fig. 3 - optical receiving device (optical sensor), corresponding to the first variant implementation of the present invention;

Fig. 4 is a perspective view of the device manifestations, including an optical sensor according to Fig. 3;

Fig. 5 is a view of the optical sensor and the adjacent dispensing nozzle;

Fig. 6 - joint device of the optical sensor and metering nozzles corresponding to the second variant embodiment of the invention;

Fig. 7 - joint device of the optical sensor and metering nozzles corresponding to the third variant embodiment of the invention;

Fig. 8 is a block diagram of an electronic system, BR> Fig. 9 - improvement shown in Fig. 8 electronic system that provides more precise control of the process of manifestation in response to the output signal of the optical tracking device.

Before describing embodiments of the present invention will be explained the General principles underlying the present invention.

As mentioned above, the present invention is used dragirovaniya beam derived from the light beam incident on the optical disc of the original. In the simplest case, when the beam of light falls is normal (i.e. perpendicular) to the surface 100, for example, on the surface of the optical disc of the original, the angle between the normal and diregiovani beam m-th order is given by the expression:

Qm= sin-1(m/nP), (1) ,

where

the wavelength of light in vacuum, P is the track pitch of the recording; n is the refractive index of the medium in which to observe the beam.

However, the beam of light does not necessarily have to fall normally.

In Fig. 1 shows a picture of rays diffracted by the structure of the holes in the top (covered) surface 100 of the drive in the case, when the incident beam 101 enters at a slight angle to the perpendicular.

It should be noted that Hotusa is formed, when an incident beam 101 reaches the surface 100 on the outer side of the disk.

The intensity of the diffracted rays of different orders of magnitude depend on the size and forms of dimples. Thus, information about the process of manifestation can be obtained by measuring the intensities of the diffracted beams as a proportion of the intensity of the incident beam (or, alternatively, as a proportion of the intensity of the beam of zero order).

The wavelength of light must be large enough so that the light does not Savicheva the photoresist. Usually use light helium-neon laser (wavelength 633 nm). In this case, the above equation (1) shows that at normal incidence, when the track pitch recording of 1.6 μm, the two diffracted beam out into the air on each side of the zero order beam angles 23 and 52oto normals.

In practice, the most useful information for process control is obtained from the intensity of one of the beams of the first order, because this intensity increases smoothly up to the optimum stage of manifestation and beyond, while the beam intensity of the second order tends to reach a peak and then decreases with a further manifestation. No neobhodimo use of the system can be calibrated by establishing an empirical relationship between the threshold value and the reproduction characteristics of the final cast in the form of discs. On the threshold values will have a significant impact changes as the track pitch of the recording, and the thickness of the coating of the inside, but their influence can also be determined empirically and, accordingly, to take into account. Measurement of step track record will change the direction of the diffracted beam, and the optical sensor should provide an opportunity of reception of rays in a range of directions, which corresponds to the range used steps track record (typically 1.5 - 1.7 mm in the case of CD).

Theoretical consideration of this issue is contained in the work of J. H. T. Pasman, J. Audio Eng. Soc., vol. 41, N 1/2, Jannaky 1993.

Now in General will be described behavior of the analyzed diffracted rays, the passage of these diffracted beams through the transparent body, located next to the optical drive of the original.

In Fig. 2 shows an optical disk of the original 3 with the coating layer 2 on it. The covering layer 2 is a photoresist material. When processing an optical disc of the original 3 layer 2 is exposed to the modulated laser light to create a series of exposed and unexposed areas in the layer 2 corresponding to the required schema location is a way of creating an appropriate layout of the holes, layer 2 is exposed to manifesting liquid (developer) 14.

The present invention is directed to the study of this development process. As shown in Fig. 2, the housing 1 is located near the optical disk of the original 3, and in this case has a window 4. The housing 1 is located so that the window 4 is in contact with the developing liquid 14 and immersed in it. Therefore, the layout area of the window 4 has no ripples on the surface showing the liquid 14, although in other parts ripples (15) is available.

To explore the development process, the light beam 6 is directed to the covering layer 2 of the optical disk 3 through the window 4. As described with reference to Fig. 1, the presence of a fully or partially developed holes in the area of the covering layer 2, which is illuminated by the beam 6, causes the appearance of diffracted rays, which includes dragirovaniya beam 8 of the first order (dragirovaniya the reflection and the reflected beam 10 zero order. In Fig. 2 is not shown for more dragirovaniya rays, dragirovaniya in transmission and in reflection, which are usually formed as shown above with reference to Fig. 1. Then to define the development process covering socialno diffracted beam 8 of the first order). Since the optical path of the beam 6 and the beam 8 sustainable carried out an accurate measurement.

Now is the detailed description of the variant of implementation of the present invention with reference to Fig. 3. In Fig. 3 elements that correspond to elements of Fig. 2, are denoted by the same reference position.

In the form shown in Fig. 3 embodiment, waterproof metal housing 1 have during the development process above described developing layer 2 horizontal glass disk of the original. At the base of the housing 1 is mounted window 4 made of synthetic sapphire. Sealed solid-state laser diode forms a light source 5 which emits a collimated light beam 6 of wavelength 670 nm. Round mask 7 limits the diameter of the light beam 6 to about 1 mm channel 5 on a laser diode is mounted at a small angle equal to about 5 to 10oto the vertical, to prevent reverse passage in his reflected light. The housing 1 is oriented in the radial direction relative to the disk of the original 3, so (if manifested holes in the coating layer 2) dragirovaniya beam 8 of the first order lies in the plane of the drawing and reaches the photodiode datsang on disc 3 (the pitch range of the track record of 1.5-1.7 nm corresponds to the angular range of 3.5oor linear size of 3 mm at a distance of 50 mm from the detector).

The reflected beam 10 zero-order intercepts blacked out inside the absorbing cylinder 11, so as to minimize stray light that could reach the detector 9. Optionally (but not necessarily) detector zero order beam 16 can be placed in the cylinder 11 so that the beam of the first order can be measured in fractions of a count of zero order. However, usually the output signal of the laser diode 5 is stabilized by local feedback circuit, so that it is stable enough for the purposes of process control without direct measurement of the beam of the zero order of 10.

Close window 4 in the preferred case may be, there is a hole 12 to prevent hitting the detector 9 of the light scattered back from the bottom surface 13 of the disk of the original 3.

Box 4 should be placed close enough to the layer of the coating 2, to ensure that showing the liquid 14 wets the window 4 and fills the space between it and the coating layer 2. Almost can be implemented in gap size of 0.5 mm in Order to facilitate the filling of the fluid gap sensor should be placed blischke mounted on the same bracket, which supports the nozzle. In a preferred embodiment, the nozzle feeds the developer in the range of radii on the disc, covering at least the area of writing programs (23-58 mm in the case of the CD-ROM drive), and the optical sensor sends a beam of light 6 to the radius of the disk at the lower end of this range (may 30 mm), so that accurate readings are obtained even in cases where, in order to save time on the manufacturer of the original part of the record ends on a small radius.

The choice of synthetic sapphire as the material of the window 4 is determined by its chemical resistance and its resistance to scratches. Manifest solutions are usually alkaline and was found to cause irritation and blurred glass window in the course of its use. The window must have a good level of polishing, on its upper surface may be applied to the antireflective coating to reduce light scattering of the incident beam 6 back to the detector 9. Due to the high refractive index of sapphire there is a simple quarter-wave layer of coating a magnesium fluoride.

In Fig. 4 shows a General view in vertical section of the device manifestations, steriade is nstein 32 and 33 disposed at the loading of the disc, and when the manifestation are in the positions shown in Fig. 4. The bracket 32 may provide a flow of developer through the fan-shaped nozzle 34. The bracket 33 can supply washing water through the same nozzle 35. The sensor housing 1 is mounted over the nozzle 34, and the sapphire window 4 is located next to the covering layer 2 on the upper surface of the disc 3. In the shown device, the direction of rotation of the disk 3 is counterclockwise when viewed from above, so that the developer is transferred from the nozzle 34 to the sensor block. The sequence of the process may begin with the transmission of the washing water from the nozzle 35, with subsequent transmission of expressing liquid from the nozzle 34, and then switching back to the flow of flush water from the nozzle 35. In the final rinsing nozzle 34 is removed. After washing the disk 3 is dried by rotating at high speed. The time when a thread showing the fluid should be replaced by the flow of the washing water is determined by electronic means using the output signal of the detector 9 of the light beam of the first order.

In Fig. 5 shows a view in cross section of the sensor housing 1 near RA is its output 41 is near the end of the housing, contains the window 4. A detector (not shown in Fig. 5) and channel 5 are placed in the housing 1.

In Fig. 6 shows a second variant in which the optical sensor is combined with the distribution nozzle 34. The form of the laser diode 5, the diaphragm 7, the detector 9 and the absorber 11 is similar to the same elements shown in Fig. 3, and corresponding parts are designated by the same reference position.

In the form shown in Fig. 6 the second embodiment, the incident beam 6 from the laser diode 5, the reflected beam 10 zero-order and dragirovaniya beam 8 of the first order are not through the air and through the transparent body 35, which forms the wall of the nozzle 34, which is made of plastic, based on the polyacrylate. Instead of 4 here is a flat polished bottom surface 40 of the nozzle 34. The bottom surface 40 has the same length on each side of the slot 42, through which is distributed showing the liquid, so showing the fluid is displaced between the bottom surface 40 and the covering layer 2, forming, thus, the optical homogeneous part of the light path to the covering layer 2 and from him. The gap between the bottom surface 40 and the coating layer 2 may be approximately 2 mm

In Fig. 7 shows another variant, in which the optical sensor is combined with the distribution nozzle 34. The laser diode 5, the diaphragm 7, the detector 9 and the absorber 11 is again similar to that shown in Fig. 3 similar items, but the light rays 6, 10, and 8 pass through manifesting the liquid in the nozzle 34, reaching the surface of the disk 2 through the slot 43 in the nozzle 34 through which extends also showing the liquid. The slot 43 performs slightly wider (e.g., 2 mm) than the slot 42 as shown in Fig. 6 embodiment, the light beam 6 Shusterman so that it passes through the centre. There is at least one polished window 50 for output beam 6 and the output beam 8 from the cavity of the nozzle 34. It is possible to provide a separate window 50 for beams 6 and 8, but may be sufficient to have one window 50. In the nozzle 34 can be formed bubbles, therefore, the fluid flow must be directed so that the bubbles, if they are formed, settled in points that do not intersect any of the beams 6, 10, 8.

In Fig. 8 shows a block diagram of an electronic system designed to form from the output signal of the detector 9 signal intended to interrupt manifestations, in accordance with a third aspect of the invention. Source 5 on the laser diode is modulated input, which allows you to switch power light between high value and low value in response to the supplied external signal. The generator 110 generates a signal in the form of a square wave with a frequency of about 10 kHz, which is served on said modulating input source 5 on the laser diode and the input reference signal out phase-sensitive detector or multiplier 112. The output signal of the detector 9 passes through predvaritelnogo current served on the signal input of the multiplier 112. The output signal 116 of the tube 112 is filtered by the filter bottom castor to remove high frequency components associated with the signal generator 111. Passed through the filter output signal 118 suitably amplified by the power amplifier 119, the output signal 120 which is fed to one input of the comparator 121, the second input of which receives the reference voltage 122 received from the potentiometer 123. The output signal 124 of the comparator 121 is a signal which, when exceeded, proyektirovanii detector 9 by the beam of light thresholds defined reference voltage 122, becomes the condition for the interrupt occurrence.

The amplifier 119 is also provided a voltage zero 125 with potentiometer 126; this allows you to set the output signal 120 to zero in the absence of manifest holes in the covering layer 2, thus compensating hit any stray light in the detector 9 in block 1, for example from the surface of the window 4.

There is no need to completely turn on and off the output signal of the laser diode signal 11. Sufficient moderate modulation depth, if it is stable in time.

1. The method of research in the process of manufacturing an optical disc of the original, including the formation on the surface of the layer disc (14) exhibiting liquid, the direction of the beam (6) of light on the surface of the disc (3) and study at least one diffracted beam (8, 10) of light in the diffraction beam (6) of light on the surface of the disk, characterized in that the other surface layer exhibiting liquid (14) is brought into contact with a solid body (4, 35, 50) so that the surface area of the disk and a solid body (4, 35, 50) is some part of the layer (the different beams (8, 10) light is diregiovani beam (8) of light of the first order.

3. The method according to p. 1, characterized in that the investigated dragirovaniya rays (8, 10) light include at least dragirovaniya beam (8) of light of the first order and the beam (10) zero-order light.

4. The method according to any of paragraphs. 1 to 3, characterized in that the solid body (4, 35, 50) is transparent and at least one of the beams (6) light and at least one of the diffracted beams (8, 10) light pass through the solid body (4, 35, 50).

5. The method according to any of paragraphs.1 to 4, characterized in that at least one of the diffracted beams (8, 10) light is formed as a result of diffraction of the beam (6) of light on the surface of the disc (3) in the reflection from her.

6. The method according to any of paragraphs.1 to 4, characterized in that at least one of the diffracted beams (8, 10) of the light beam is formed from (6) light as it passes through the surface of the disc (3).

7. The method according to any of paragraphs.1 - 6, characterized in that the formation of the layer (14) showing the fluid produced by the flow through the nozzle (34), the window in which is a solid body (4, 35, 50).

8. The method according to any of paragraphs.1 to 7, characterized in that the beam (6) light periodically modulate the intense the photoresist (2) and exhibit a photoresist (2) modulated light before formation of the layer (14) exhibiting liquid on the surface of the disc (3).

10. The method according to any of paragraphs.1 to 9, characterized in that the optical drive (3) of the original rotate in the formation thereon of a layer (14) exhibiting liquid.

11. The device for optical research of the original disk containing the means (30, 31) support designed to maintain the disc (3), means (34) feeder layer (14) exhibiting liquid on the surface of the disc (3), source (5) and a detector (9) light, designed respectively for beam forming (6) light and registering at least one diffracted beam (8) of the light resulting from the interaction of the beam (6) of the light to the surface of the disk (3), characterized in that next to the tool (30, 31) support posted solid body (4, 35, 50) intended for contact with the developing liquid (14), so that between the surface of the disc (3) and a solid body (4, 35, 50) is some part of the layer (14) exhibiting liquid.

12. The device according to p. 11, characterized in that the solid body (4, 35, 50) - translucent.

13. The device according to p. 12, characterized in that the solid body (4, 35, 50) made in the form of window in the housing, which is placed inside the detector (9).

14. The device according to p. 13, characterized in that the solid body is made of sapphire.

16. The device according to p. 11, characterized in that the means for supplying showing fluid (14) is designed as a nozzle (34) and directed to the means (30, 31) support, and a solid body (4, 35, 50) made in the form of a transparent window (50) in the wall of the nozzle.

17. Device according to any one of paragraphs.11 to 16, characterized in that the spring (5) and a detector (9) light is placed on one side of the optical disk (3) of the original, which is installed on the tool (30, 31) support.

18. Device according to any one of paragraphs.11 to 17, characterized in that the detector (9) light and medium (34) the filing of manifests fluid made in the form of a single design.

19. Device according to any one of paragraphs.11 to 18, characterized in that it contains is made with the possibility of a periodic modulation of the intensity of the beam of light from the light source (5) medium (110 - 128) management development process the surface of the developing liquid (14) on the output signal of the detector (9).

20. Device according to any one of paragraphs.11 to 19, characterized in that the tool support (30, 31) is made to rotate.

 

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8 dwg

FIELD: measurement of surface profiles.

SUBSTANCE: the method consists in obtaining of a set of interferograms of the surface under examination at scanning of it by a low-coherent radiation source and recreation of the original profile of the surface under examination with the aid of them. At obtaining of each main interferogram an additional interferogram is read off at a shift of the bearing surface by a fractional part of the wavelength, after that the signal of the additional interferogram is subtracted from the signal of the main interferogram and a differential interferogram is obtained, and the original profile of the surface under examination is recreated from the obtained differential interferograms.

EFFECT: enhanced quality of interferograms due to localization of the zone of interference on the surface under examination.

4 cl, 6 dwg

FIELD: optics.

SUBSTANCE: device has, serially placed at one optical axis, light source, collimator, ring optical mark forming means and multi-element photo-detector, connected to photo-detector signal processing block, as well as assembly for displacing part along axis. At optical axis before photo-detector ring mark projector is mounted with optical localizer of its position.

EFFECT: broader functional capabilities, higher speed and precision.

5 cl, 5 dwg

FIELD: measuring engineering.

SUBSTANCE: method comprises receiving mirror and diffuse components of light radiation reflected from the surface, extracting pulses of the same duration from the components received, generating reference pulses by converting each pulse extracted from the mirror and diffusion components into photocurrents, and determining the quality of the surface from the photocurrents. Before being incident on the surface, the monochromatic beam is split into the mirror and diffusion pulses of the same duration. The reference pulses are generated by separating a part of the light flux from the extracted light pulses. The device comprises source of monochromatic light radiation, light-splitting plate, mirror made of a paraboloid of revolution, focusing system, first photodetector, unit for control and processing information, first obturator with a port and mirror zone on the surface of the rotatable disk, second obturator with a pair of same ports on the rotatable disk, and second photodetector.

EFFECT: enhanced accuracy and quality of determining.

5 cl, 4 dwg

FIELD: measuring engineering.

SUBSTANCE: device comprises light source and light receiver provided with means for processing information. The light source and receiver are made in block that is made of a tube. The scanning unit is provided with two channels optically connected with the tube and system of mirrors, which allow the light to pass from the tube to the outer or inner surface of the article through the channels. The scanning unit is optically connected with the tube so that the optical axis of one of the channels is in coincidence with the optical axis of the tube.

EFFECT: expanded functional capabilities.

8 cl, 1 dwg

FIELD: automatics, engineering of controlling devices.

SUBSTANCE: device has cylinder-shaped body with serially positioned lighting system, consisting of electronic lamp and toroidal lens, surveillance system, consisting of conic mirror for all-around observation, objective, light guide, scale mesh and ocular. Additionally inserted are second objective, positioned in front of input end of light guide and forming its image in plane of scale mesh, positioned in focal plane of ocular, optical axis of which coincides with axis of second objective micro-objective, positioned on optical axis, parallel to ocular axis and axis of second object respectively. Second objective and micro-objective are mounted with possible mutual displacement for serial mounting on optical axis of ocular, micro-objective is focused on output end of light guide and builds image of fragments of light section in plane of scale mesh, second objective, scale mesh, ocular and micro-objective are constructively combined in single block, mounted at output portion of light guide with possible movement in two orthogonal directions.

EFFECT: improved sensitivity of device, improved precision of defects dimensions estimation.

3 dwg

FIELD: determination of inner surface contour.

SUBSTANCE: the device has a laser, reflectors symmetrically installed on the scanner assembly provided with means for angular scanning of the reflectors relative to the axis of the mentioned assembly, and receiver of the laser beam reflected from the object surface. The scanner assembly is made in the form of a motor, whose shaft is coupled to the reflectors; the means for angular scanning relative to the axis of the scanner assembly are made in the form of a solenoid installed in the axis of the motor shaft, a laser beam splitter is positioned between the laser and deflectors.

EFFECT: enhanced accuracy and efficiency of contour measurement.

1 dwg

FIELD: engineering of touch sensors.

SUBSTANCE: device has measuring diffraction grid, probe, two guides, two reading heads, substrate, engine, a group of magnets. First reading head is rigidly connected to body of indicator. Second reading head contains receiver of radiation, collimator, indicator diffraction grid, a matrix of photo-receivers. Group of bearings provides for movement of measuring diffraction grid along movement direction. Measuring diffraction grid and substrate are utilized as guides. One indicator diffraction grid is held in carriage. Carriage is connected to probe, which touches measured surface and moves relatively to same together with measuring diffraction grid. Measuring diffraction grid and substrate are connected to engine, and reading heads are connected to adders.

EFFECT: increased precision of touch coordinate detection at measured surface.

5 dwg

FIELD: non-destructive inspection.

SUBSTANCE: device has standard side-view endoscope, which has system for illuminating object and system for observing object provided with measuring scale. Device is additionally provided with bushing having linear and angular scales, which bushing is capable of translation and rotation about axis of symmetry of flange fastened to input opening of cavity to be controlled. Tube with optical system for laser illumination of object is mounted inside bushing; tube has microscopic laser and mirror. Tube is mounted in bushing for linear movement relatively endoscope in parallel to its longitudinal axis. Precision of measurement of sizes of objects disposed at long distances to surfaces to be controlled is improved. Measurement of coordinates of defect location on surfaces of object can be made with higher precision.

EFFECT: improved precision of measurement.

3 dwg

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