A method of manufacturing a metal mirror for infrared spectrum


(57) Abstract:

Use: for production of mirrors, in particular used in laser resonators. The inventive as billet mirrors use aluminum bronze containing 4 to 7 wt.% aluminum. Produce oxidation of the surface during the 120 - 140 min at 520 - 620 To at a residual pressure of oxygen of 10-5-510-6mbar or in an inert atmosphere at partyonline the vapor pressure of water 10-3-10-4mbar.

The invention relates to optics, namely, mirrors, optical devices, in particular lasers, and can be used in resonators for lasers and other optical devices containing mirrors the infrared range and require a high degree of protection of their surface.

Known methods of creating mirrors for lasers in the infrared range of the spectrum, when the reflecting mirror surface is made of copper, alloys of copper with gold and copper zirconium [1]

The lack of such mirrors is that in aggressive environments and at high temperatures (above 420 K) copper is oxidized, which reduces the reflectivity of the mirror. To overcome this drawback using multilayer mirrors with protective p is on a copper substrate by high-frequency sputtering put a layer of refractory metal oxides, transparent in the infrared region of the spectrum, such as aluminum oxide [3]

The disadvantage of such a method of manufacture of mirrors is insufficient adhesion of deposited films to the substrate, resulting in the plating will eventually crack and peel and loses its protective properties.

Closest to the proposed is a method for laser mirrors operating in the infrared spectral region by implantation of aluminum in polycrystalline copper with subsequent oxidation [2] Ion implantation of aluminum is carried out at energies of 60-80 Kev and doses of 1-2 x 1017ions/cm2. The oxidation is carried out in a furnace in air at 470 for several hours (up to 12 hours) and 370 For a few days (5-15 days). The result is double layers: external, consisting of CuO, and the internal composition CuAlO2.

The disadvantages of the described method for obtaining mirror are small resistance and low corrosion resistance of the obtained mirrors.

The aim of the invention is to improve the heat resistance and corrosion resistance mirrors for optical devices of the infrared range of the spectrum.

This mirror is made from aluminum bronze containing 4-7 wt. aluminum, and will complement the P>-5x10-6mbar or in an inert atmosphere at a partial pressure of water vapor equal to 10-3-10-4mbar.

In the proposed method ensures the formation of a uniform protective film on the mirror surface, which is achieved by the combination of the composition of aluminum bronze and oxidation. Thus, the proposed method allows to get the mirror out of aluminum bronze, having a reflectivity of copper and protects from oxidation and recrystallization protective layer of aluminum oxide.

P R I m e R 1. Aluminum bronze containing 6 wt. aluminum, after pre-polishing was subjected to selective oxidation when oxygen pressure 5 x10-5at a temperature of 570 K and time of oxidation 240 minutes After oxidation on the surface of the mirror forms a uniform thin film with a thickness of up to 4 nm, consisting of aluminum oxide (has been determined using auger electron spectroscopy (OES)). The mirror has a gold color.

Received the mirror was tested for thermal stability. For this he was placed in a heated oven air and stood for 10 minutes, the Furnace was heated up to the temperature at which begins the formation of oxides of copper (I and II). The presence of oxides aprecie properties of the mirrors as after manufacture, and after the test in the resonator CO2-laser. After testing in the laser resonator investigated the chemical composition of the surface of the mirrors XPS methods and ECO in order to clarify the influence of aggressive environment on the properties of mirrors. Corrosion resistance has been described as the constancy of the chemical composition of the mirrors before and after the test and the resonator CO2-laser

Tests have shown that the mirror obtained in example 1 has a temperature of 870 K, is corrosion resistant and maintains high reflectivity after testing in the resonator of the laser 99,0 of 0.5 relative to the electrolytic copper at a wavelength of 2.5 μm.

Examples of the process and characteristics obtained by other parameters of the proposed method are presented in table.

As can be seen from table metal mirror, obtained by selective oxidation of aluminum bronze containing 4-7 wt. aluminum, for 120-240 min at a residual pressure of oxygen 1x10-4-5x10-6mbar in an inert atmosphere at a partial pressure of water vapor equal to 10-3-10-4mbar, at a temperature of 520-620 It has better heat resistance and corrosion resistance. Additional pre is For) or 5-15 days (at T 370 K) up to 120-240 minutes

This reduces the complexity of the process of surface treatment due to the fact that the source material aluminum bronze has a higher hardness (90-110) compared to copper (40-50).

A method of MANUFACTURING a METAL MIRROR FOR INFRARED spectral REGION made from a material based on copper and aluminum, characterized in that, to improve heat resistance and corrosion resistance, as the material mirror use aluminum bronze containing 4-7 wt. aluminum, however additionally produce oxidation of the surface during 120-140 min at a temperature of 520-620 To, at a residual pressure of oxygen of 10-45 10-6mbar or in an inert atmosphere at a partial pressure of water vapor of 10-310-4mbar.


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