Optical mirror

 

(57) Abstract:

Use: in the manufacture of reflective elements of various optical devices. The inventive optical mirror includes a substrate, an opaque reflective layer of aluminum, the protective layers of aluminum oxide and cerium oxide. The optical thickness of layers of aluminum oxide and cerium are 0,130 - is 0.135 μm and 0.150 - 0,155 μm, respectively, and the thickness of the layer of aluminum of 0.2 - 0.25 μm. 2 Il.

The invention relates to the optical instrument and can be used in the manufacture of reflective elements of different optical devices.

Known optical mirror containing a polished substrate of glass and a deposited sequentially by sputtering in a vacuum layer of aluminum on top of it a layer of silicon SiOxwhere 1 < x > 2, a thickness of 1500 (I. T. Cox, . Hass and Hunter WR Appl. Opt, 1975, 14, N 6, S. 1247).

The main disadvantages of such mirrors are the low mechanical strength of the corresponding group III according to OST 3-1901-85, and insufficient moisture. Mirrors are destroyed after a one-night stay in a humid atmosphere (90% humidity at 20aboutC). In addition, the reflectivity of the aluminum after applying Plei oblique incidence of the radiation.

It is also known an optical mirror containing the polished substrate made of glass and is deposited by sputtering in a vacuum layer of aluminum, protected by a layer of aluminum oxide, also deposited by evaporation in vacuum (I. T Cox and . Hass Appl. Opt 1978, 17 N 14, 333). The main disadvantage of such a mirror is not a high reflectance in the visible region of the spectrum, which is 85% . Other disadvantages are the low mechanical strength of the corresponding group II according to OST 3-1901-85, and low resistance to corrosion - mirror withstand relative humidity 90% at 20aboutAnd with further increase in the temperature and humidity are destroyed.

Also known mirror [1] with a protective coating of oxide of yttrium. On the layer svejenarublennogo of aluminum with a thickness of 600 at a pressure of 2 to 10-5mm RT.article deposited by thermal evaporation from a tungsten boat layer of yttrium oxide thickness 1375 . The disadvantage of this mirror is that the layers of yttrium oxide, deposited by thermal evaporation in vacuum without heating of the substrate is porous and nevlagostoyky. Mirrors can withstand relative humidity 90% at 20aboutAnd with further increase in temperature and humidity (98% at 40about(C) destroyed. Additionally, the proposed technical solution to the technical essence is the design of the mirrors, shown in OST 3-1901-85, sheet 17, containing a substrate of glass K8 and it is on the opaque coating of aluminium of a thickness of 0.1 to 0.15 μm, and the oxide layer of aluminium of a thickness of 0.05 to 0.15 μm, formed by anodic oxidation. The lack of optical mirrors is not sufficiently high reflectance in the visible region of the spectrum 80-86%. Other shortcomings are not enough high moisture resistance, as the mirror can withstand a relative humidity of 85% at 40aboutWith no less than 48 hours, which is insufficient when it is used at high humidity, and low mechanical strength corresponding to the first group, according to OST 3-1901-85 that is not enough when using it in the field.

The aim of the invention is to increase the reflection coefficient, mechanical strength, moisture resistance and heat resistance.

The aim is achieved in that in the optical mirror containing a substrate, an opaque reflective layer of aluminium of a thickness of 0.20 to 0.25 μm and a protective coating of aluminium oxide thickness 0,130-is 0.135 μm, on top of this layer is applied a layer of cerium oxide thickness 0,150 - 0,155 μm. A significant difference of the mirrors is to perform a protective coating in Vimy thicknesses, this choice of materials from which is made a two-layer protective coating, and the proposed thickness of the layers allows you to increase the reflectivity aluminum mirror in the visible spectrum, to improve the performance characteristics of the mirror. This embodiment of the protective coating in the sources of scientific and technical literature is not found.

In Fig.1 shows the design of the mirror, consisting of a substrate 1 and located on it consistently reflecting layer 2, made of aluminum, a layer 3 of aluminum oxide with a thickness 0,130-is 0.135 μm, the layer 4 of cerium oxide thickness 0,150-0,155 μm, sufficient for obtaining a zero group mechanical strength and high reflectance in the visible region of the spectrum. When applying a layer with a smaller thickness decreases the resistance, and with large thickness - reduced reflectance. The range of layer thicknesses of aluminum required to obtain anodic oxidation layer of aluminum oxide of a specified thickness.

In Fig. 2 shows the spectral reflection curve for the prototype and the proposed mirror (curves 5 and 6, respectively).

P R I m e R 1. The surface is polished and thoroughly cleaned substrate made of glass K8 when pressure is N. At the end of processing by a glow discharge by evaporation at a pressure of 2 to 10-5mm RT.article put a layer of aluminum at a speed of 60 /C. the Protective coating is made of sequentially disposed on the substrate layer of aluminum oxide of a thickness of 0,130 μm and a layer of cerium oxide thickness 0,150 mm. The aluminium oxide layer was obtained by anodic oxidation in 0.5% solution of disubstituted ammonium phosphate. The layer of cerium oxide was obtained electron-beam evaporation at a pressure of 2 to 10-5mm RT.article heated to 200aboutFrom the surface. The reflection coefficient of the mirrors in the visible spectral range equal to 95%.

P R I m m e R 2. The surface is polished and thoroughly cleaned substrate made of glass K8 at a pressure of 1 to 10-2mm RT.article was treated by a glow discharge at a current of 150 mA and the voltage on the electrode 2 kV for 10 minutes At the end of processing by a glow discharge by evaporation at a pressure of 2 to 10-5mm RT.article put an opaque reflecting layer of aluminum of a thickness of 0.22 μm at a speed of 60 /C. the Protective coating is made of sequentially disposed on the substrate layer of aluminum oxide of a thickness of 0,132 μm and a layer of cerium oxide thickness 0,152 mm. The aluminium oxide layer was obtained by anodic oxidation in 0.5% solution of dunamase mm RT. senior heated to 200aboutFrom the surface. The reflection coefficient of the mirrors in the visible region of the spectrum 95%.

P R I m e R 3. The surface is polished and thoroughly cleaned substrate made of glass K8 at a pressure of 1 to 10-2mm RT.article was treated by a glow discharge at a current of 150 mA and the voltage on the electrode 2 kV for 10 minutes At the end of processing by a glow discharge by evaporation at a pressure of 2 to 10-5mm RT.article put an opaque reflecting layer of aluminum with a thickness of 0.25 μm at a speed of 60 /C. the Protective coating is made of sequentially disposed on the substrate layer of aluminium oxide thickness is 0.135 μm and a layer of cerium oxide thickness 0,155 μm. The aluminium oxide layer was obtained by anodic oxidation in 0.5% solution of disubstituted ammonium phosphate. The layer of cerium oxide was obtained electron-beam evaporation at a pressure of 2 to 10-5mm RT.article heated to 200aboutFrom the surface. The reflection coefficient of the mirrors in the visible spectral range equal to 95%.

The mirrors were made on the vacuum unit VU-1. Testing of the mirrors on the mechanical strength of the wear on the unit CM-55 on the EAST 3-1901-85 showed that mirrors the prototype have 1 group strength, and offer zero group (videri the lo prototype withstand extreme humidity 95% at 40aboutC for 48 h, and the proposed mirror - 98% relative humidity at 40aboutWith within 30 days.

Mirror prototype withstands thermal Cycling from plus to minus 60 60aboutC. (a range from minus 60 to plus 80aboutC. the reflection Coefficient of the proposed mirror in the spectral range of 0.45 to 0.7 μm is 95%, and the reflectance of the prototype - 85%.

OPTICAL MIRROR comprising a substrate, a layer of aluminum and a layer of aluminum oxide, characterized in that, to increase the reflection coefficient, mechanical strength, moisture resistance and heat resistance, it further comprises a layer of cerium oxide, located on the aluminium oxide layer, and the thickness of the layers of aluminum, aluminum oxide and cerium oxide, respectively 0,2 - 0,25, 0,130 - is 0.135 and 0.150 - 0,155 μm.

 

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