icro-structural technology (B81)

B81            icro-structural technology(126)
ethod of manufacturing microtechnical device in volume of photoustical glass plate // 2641508
FIELD: physics.SUBSTANCE: invention relates to a method of manufacturing a microtechnical device in the volume of a photosensitive glass plate (PG). The method involves forming prototypes of local regions by moving a focused laser beam in the plane of creating pre-images of local regions, identifying prototypes of local regions with defects, amorphizing all the pre-images of local regions with defects, re-forming pre-images of local regions in each of the amorphized regions, processing until the appearance of local regions of the crystalline phase in the pre-images of local regions and etching the PG plate. Amorphization is carried out by a converging beam of CO2 laser with an average power density in the neck of the beam of, at least, 7 W/cm2 and not more than 18 W/cm2 with a duration of exposure of 5 to 10 s and a waist size of 25 to 50 mcm. The thermal treatment is carried out by a converging beam of CO2 laser with an average power density in the beam constriction of, at least, 1.5 W/cm2 and not more than 3.0 W/cm2 with a duration of exposure of 15 to 400 s and a waist size of 25 to 500 mcm.EFFECT: shortening the duration of the process and increasing the yield of suitable products.16 dwg

ethod for manufacturing structural element and structural element // 2640892
FIELD: technological processes.SUBSTANCE: composite of the first layer is created, containing the first substrate made of conductive material and at least one groove formed therein and filled with insulating material. The first area of the first substrate is electrically insulated sideways from other areas of the first substrate by the groove, a composite of the second layer is created, containing a composite of the first layer and a structural layer which contains an active structure of the structural element and is made electrically conductive at least in the first area. The active structure adjoins the first surface of the first substrate in the first area of the first substrate and is connected to it in the electrically conductive way, then at the second surface of the first substrate located opposite to the first surface of the first substrate the first contact pad is created in the first area of the first substrate. The first area of the first substrate is electrically insulated sideways from the other areas of the first substrate by the groove on the second surface of the first substrate.EFFECT: providing the possibility of creating a structural element, by means of which electrical contact with parts of the structural element may be realized.14 cl, 6 dwg

ethod of manufacturing microcarriers // 2631526
FIELD: measuring equipment.SUBSTANCE: method includes the following steps: obtaining a plate having a sandwich structure consisting of a bottom layer, a top layer, and an insulating layer located between mentioned lower and upper layers, bleeding the top layer to distinguish the side walls of the microcarriers' bodies, applying the first active layer at least on the upper surface of the bodies, applying a continuous polymer layer over the first active layer, bleeding the lower layer and the insulating layer, removing the polymer layer to release the microcarriers.EFFECT: ensuring the possibility of obtaining accurate quantitative information.12 cl, 18 dwg
ethod of manufacture of a beam with a setted bend // 2630528
FIELD: physics.SUBSTANCE: method comprises applying a sacrificial layer on a substrate, sequential application of two or more layers of material of the beam differing magnitude of internal mechanical stresses, the formation of the beam on the surface of the sacrificial layer by photolithography and etching of the beam material, removing the sacrificial layer from beneath the beam, causing the material layers beams operate by magnetron sputtering, and different internal stresses in the layers due provide different voltage values of constant substrate bias for which the layers are applied. The specified bending of the beam is achieved by selecting the thicknesses of the layers of the beam material, the values of the bias voltage and the number of layers.EFFECT: expansion of the production possibilities for beams with a given bend.3 cl, 7 dwg
ethod of dry electron-beam lithography // 2629135
FIELD: physics.SUBSTANCE: layer of resist is applied, which is chosen as a low-molecular-weight polystyrene, onto the substrate by the method of thermal vacuum deposition, while the temperature of the substrate during the deposition is not more than 30°C; a latent image is formed on the substrate by local exposure of a high-energy electron beam with a light dose of 2000-20000 mcC/cm2; a resist is developed, when the substrate is heated in a vacuum to the temperature of 600-800 K and at the pressure of not more than 10-1 mbar and plasma etching to transfer the pattern of the resist mask to the substrate to form the micro- and nanostructure on the substrate.EFFECT: providing the possibility of increasing the resolution of the finished structure of nanostructure formation on surfaces of uneven complex shapes, and creating very thin resist films.8 cl, 6 dwg

Bi-directional thermal micromechanical actuator and method of its manufacture // 2621612
FIELD: physics.SUBSTANCE: micromechanical actuator is designed as a formed elastically-hinged cantilever beam in the mesa structure consisting of the parallel trapezoidal inserts from the mono-crystallic silicon substrate of p-type with orientation [100] disposed perpendicular to the main axis of the cantilever beam and connected with the polyimide layers formed of the polyimide film, a heater and electroconductive busbars forming an ohmic contact with silicon, the trapezoidal inserts are made on the opposite sides of the elastically-hinged cantilever beam and form, at least, two deformation zones.EFFECT: providing opportunities to increase the operational reliability in a wide temperature range.11 cl, 5 dwg

Silicon-polyimide flexible mixing for microsystems // 2621465
FIELD: physics.SUBSTANCE: silicon-polyimide flexible joint for microsystems contains silicon elements connected by polyimide insert, with holes made of polyimide insert material in silicon elements.EFFECT: providing the possibility of increasing the reliability of the joint.5 cl, 5 dwg

Conformal air speed sensor with microelectromechanical system (mems) // 2620876
FIELD: measuring equipment.SUBSTANCE: group of inventions relates to the sensors for measuring the speed of an aircraft relative to the surrounding air mass. The essence is that the device for measuring the air speed comprises a flexible structure having an outer surface with the first open channel for air, having a lower part with the first opening, and the first pressure sensor mounted in the flexible structure on the lower side and being in fluid communication with the first opening.EFFECT: exclusion of blocking or icing the Pitot tubes.23 cl, 10 dwg

Vortex heat exchange element // 2615878
FIELD: heating.SUBSTANCE: vortex heat exchange element comprises coaxially arranged one inside the other heat exchanging cylindrical tubes of larger diameter and an inner tube with cylindrical surfaces, with the larger diameter tube is divided into sections, within each of the tubes are at least two swirlers same or different types, and each swirler made in the form of a tapered nozzle and the inner surface is covered with a film of glassy nano shaped tantalum oxide.EFFECT: elimination of contaminants adhering to the inner surface of the swirlers.4 dwg

icrofluidic system for controlling concentration of molecules for stimulating target cell // 2603473
FIELD: measurement technology.SUBSTANCE: invention relates to a microfluidic system and can be used for quantitative determination of response of living cells to certain molecules. Microfluidic system for controlling a card for concentration of molecules capable of stimulating target cells includes: microfluidic device (1); chamber (8) or additional microfluidic channel, having base (6), intended to receive target cell; microporous membrane (5), covering network of holes (47, 470); one or more means supply to supply one or each of microfluidic channels of fluid medium, wherein at least one of said fluids comprises stimulating molecules of target cell. Microfluidic device comprises nc≥1 microfluidic channels equipped with at least one inlet hole (21, 22) for fluid and at least one outlet hole for fluid medium; as well as n0≥2 holes (47, 470) in microfluidic channel (4, 40) or distributed over several microfluidic channels. Number nc of microfluidic channels and n0 holes are related by relationship n0=∑i=1n0ncci, where 1<i<nc, and n0/ci is number of holes per channel Ci.EFFECT: higher accuracy of analysis and reducing duration of analysis.15 cl, 12 dwg

Nanopartical // 2599461
FIELD: electricity.SUBSTANCE: invention can be used for as multivariate switch of electric circuits. Point of this invention is following: nanopartical contains deformable rigidly secured at one end nanotube and two main electrodes to form two electrically conductive circuits by electric field of these electrodes, two electrodes, which perform the function of control with the help of their electric field by deformation of nanotubes to create four additional electric circuits, as well as presence of four additional main electrodes, deforming the nanotune by means of their electric field, and as a result, entering in contact with it to alternately form four additional electrically conductive circuits.EFFECT: possibility of connection and rupture of any of six electrically conductive circuits.4 cl, 2 dwg

Complex micromechanical component // 2598395
FIELD: mechanisms.SUBSTANCE: invention is a micromechanical part (11, 21, 31, 41, 51, 61) made of a single piece of material. According to this invention, this part includes elementary section formed by at least two crossing and unlinked segments, so that one of at least two segments forms height (e3) of micromechanical part (11, 21, 31, 41, 51, 61) which is more than thickness (e1) of each segment.EFFECT: invention is also a method of making said part.15 cl, 17 dwg

ethod for producing conductive mesh micro- and nanostructures and structure therefor // 2593463
FIELD: microstructure technology. SUBSTANCE: invention relates to micro- and nanostructured coatings, used particularly in optically transparent conductive coatings. On a substrate, on which in form of a percolated mesh placed on base layer, having in its composition, at least one layer of at least one metal or non-metal conducting material or a combination of said materials, is formed at least one detachable conducting layer. Further, method provides mechanical connection of said substrate with a second substrate, separation of first and second substrates, wherein at least a part of detachable conducting layer is separated from base layer and remains on second substrate in form of at least part of conductive mesh. First substrate can be reused. EFFECT: efficient formation of conducting mesh structure, providing function of transparent conductive coatings on surface of processed substrate at stage of formation of detachable conducting layer, as well as by transfer of said conducting layer on substrate, which is final carrier of conductive mesh structure. 24 cl, 4 dwg

ethod of producing polyester alcohols // 2591208
FIELD: chemistry.SUBSTANCE: present invention relates to method of producing polyester alcohols by reaction with each other of following initial components: a) one or more alkylene oxides and carbon dioxide, if necessary, as well as b) one or more starting substances with hydrogen functionality, in presence of catalyst to form liquid reaction mixture in reaction unit (1), characterised by that in reaction unit (1) there are internal devices (2), which form plurality of micro-structured flow channels causing multiple separation of liquid reaction mixture into separate flows, current in their trajectories and repeated joining them in changed order, wherein multiple separation and repeated joining is repeated from 10 to 10,000 times, and micro-structured flow channels have typical size, which is defined as maximum possible distance from one arbitrary particles of liquid reaction mixture until closest to particle wall channel for flow in range from 20 to 10,000 mqm, and therefore flow profile liquid reaction mixture through micro-structured channels for flow from parabolic approaches ideal plug flow, wherein internal device (2) represent reaction plates (2), wherein two or more reaction plates (2), arranged in parallel to each other in direction of main flow through reaction unit (1), in each case make reactor module (3). At that, reaction unit (1) contains one or more reactor modules (3), and each reaction plate (2) contains multiple slots with constant or variable width (4), which are parallel to each other at angle α, different from zero to main flow direction, and directly adjoining reaction plate (2) contains multiple corresponding in geometric sense slots (4), which are arranged at same angle α, but with opposite sign and slot (4) of all stacked reaction plates (2) forms flow channel. Also described is version of above method, in which there are two or several reaction units, wherein: 1) initial components a) and b) are supplied to first reaction unit to obtain first reaction mixture, 2) first reaction mix temperature downstream of first reaction unit preferably maintained at specified level, 3) one or more other initial components, other than those which are fed at step 1) of method, or initial components, which at step 1) of method, mixed in different from stage 1) ratio to obtain second reaction mixture and second reaction mix 4) is supplied to second reaction unit, and reaction mixture produced if necessary, is fed in one reaction unit, wherein stages 2) and 3) are repeated accordingly.EFFECT: technical result is improvement of uniform distribution of mass flows in method.15 cl, 2 dwg, 12 tbl, 9 ex

Connecting press for large-format matrices // 2586088
FIELD: electronic equipment.SUBSTANCE: invention relates to field of microelectronic equipment and can be used in development of process equipment for producing hybrid microcircuits of large format, simplification and low cost of such equipment. Proposed connection press for large-format matrices consists of a base on which there is a bottom platform to accommodate large-format matrices, upper platform to transfer compression force on large-format, wherein matrix comprises a unit of amplification of compressing force consisting of axial design, amplification of lever with movable element located on it self-forming recesses for applying compression force of pneumatic unit, as well as conical compression force transmission element freely arranged on large-format matrix consisting of a cone with lower flat base and support ball diameter 14-60 times smaller than that of base cone compression force transmission element, material hardness reference ball shall not be less than 12 times more than material hardness of movable element self-forming recesses for applying compression force.EFFECT: high compression force to 14 kN while maintaining accuracy of combining a plurality of microcontacts, as well as significant design simplification and low cost of producing jointing press.5 cl, 3 dwg, 1 tbl
ethod for protection of angles of 3d micromechanical structures on silicon plate during deep anisotropic etching // 2582903
FIELD: manufacturing technology.SUBSTANCE: this invention consists in fact that protection of angles of 3D micro mechanical structures on silicon plate with crystallographic orientation (100) at deep anisotropic etching in water solution of potassium hydroxide KOH involves formation of mask pattern with angles protection elements adjacent to initial part of topological mask near point of intersection of sides of protected chip or three-dimensional microstructure on plate and continued beyond initial part of mask, wherein for protection of convex angles chip or three-dimensional microstructure of mask pattern with T-shaped elements containing lengthwise and crosswise part, wherein etching is carried out until silicon elements formed in area of mask protection angles are not etched away during anisotropic chemical etching to boundary of initial topological area of rigid centre micro-mechanical structures, longitudinal parts of two adjacent T-shaped elements protection are perpendicular to each other. At that, sizes of produced 3D micro-mechanical structures are determined from certain conditions.EFFECT: possibility of widening range of 3D micro-mechanical structures or chips, improved linearity of converter characteristics and increasing loading capacity of primary converters.1 cl, 4 dwg, 1 tbl

icromechanical part of complex shape with bore // 2577312
FIELD: process engineering.SUBSTANCE: invention relates to production of micromechanical part (11, 31, 41) from a one-piece material. Proposed method comprises the steps that follow. a) The substrate is made with the negative cavity to house the micromechanical part. b) Provisional ply is produced at one part of the substrate. c) The particles to make the points of growth are deposited at said substrate. d) Said provisional ply is removed for selective removal of all particles from said one part of the substrate. e) The material ply is deposited with the help of chemical vapour-phase deposition to make the material settle only at the points with particles. f) The substrate is removed to release the micromechanical part made in said negative cavity.EFFECT: preset geometry of micromechanical part, material savings, simplified process.10 cl, 21 dwg

ethod for manufacturing of integrated micromechanical relay // 2572051
FIELD: electricity.SUBSTANCE: method for manufacturing of integrated micromechanical relay with movable electrode made as structure with piezoelectric layer (7) is implemented at surface of silicone wafers in single technological cycle of manufacturing technology for integrated circuits. To this end at surface of silicone substrate (1) dielectric layer (2) is formed of SiO2 film by thermal oxidation; current conductive layer TiN (3) is sputtered and a fixed electrode is formed by ion-beam deposition and etching using projection laser photolithography. Layer Si3N4 is deposited by CVD method with its pre-treatment as a sacrificial layer with further plasma etching. The first current conductive layer TiN (4) is sputtered, dielectric layer SiC (5) with high resilient properties is deposited by magnetronic deposition. The second current conductive layer TiN (6) is sputtered. LZT piezoelectric layer (7) is deposited. The third current conductive layer TiN (8) is sputtered. Then plasma-chemical etching is performed for the following layers: the third current conductive layer TiN (8), LZT piezoelectric layer (7), the second current conductive layer TiN (6), dielectric layer SiC (5) with high resilient properties, the first current conductive layer TiN (4) with formation of a movable multilayer electrode and penetration of sacrificial layer Si3N4. Etching of sacrificial layer Si3N4 is made with an air gap formed between the fixed and movable electrodes.EFFECT: improved reliability and timing stability of integrated micromechanical relay.1 dwg

atrix pressure sensor // 2570840
FIELD: instrumentation.SUBSTANCE: invention relates to devices of polymer electronics, in particular, to matrix devices for conversion of pressure into an electric signal. Matrix pressure sensors are used to detect shape of objects acting at the sensor, and may be used in robotics, medicine, during automation of production processes. The matrix of tactile sensors comprises alternating layers of conducting mutually perpendicular buses contacting with layers of strain-gage polymer arranged between them. Availability of electric contact to each of the conducting layers makes it possible to produce, during preservation of high sensitivity of the sensor, a multi-level output signal, providing for expanded dynamic range of transmission characteristic during measurement of tactile pressure.EFFECT: invention provides for increased accuracy of pressure - electric signal conversion.2 cl, 4 dwg
ethod of forming articles with coating // 2570013
FIELD: process engineering.SUBSTANCE: set of invention relates to production of moulded articles with coatings with completely or partially structured surfaces, unit to this end and formed article thus made. Claimed process comprises injection of moulding mass at 220-330°C. Mid cavity is formed in the mould. Formed cavity is filled with reaction mix by fluid injection. This mould is sealed and heated at preset conditions and, then, is cooled down to withdraw moulded article. Besides, invention discloses the unit with injection mould to implement described process. Said method and unit allow the production of moulded articles with preset coating.EFFECT: high mechanical properties, namely, cracking stability and high rigidity.14 cl

Protection of angles of 3d micromechanical structures on silicon plate at deep anisotropic etching // 2568977
FIELD: process engineering.SUBSTANCE: invention can be used for fabrication of micromechanical structures. Protection of the angles of 3D micromechanical structures on silicon plate with crystallographic orientation (100) at deep anisotropic etching in water solution of KOH hydroxide comprises making of mask pattern with angles protection elements. The latter feature diagonal shape on topological mask and are arranged 45 degrees to the stiff centre outlines. Note here that sides of said 3D micromechanical structures are defined from definite conditions.EFFECT: higher quality and yield of said structures.6 dwg, 2 tbl

ethod of making sealed structure // 2568947
FIELD: process engineering.SUBSTANCE: invention relates to making of sealed structures that make micro electromechanical systems. Making a seal inside first composite plate of silicon-insulator-type used for production of sealed structure comprises the steps that follow. First silicon plate is structured to make one or more recesses extending through at least the part of first silicon plate depth. Sole or every recess id filled with insulator suitable to adhesion to silicon by anode junction. This allows making of the first composite plate with multiple interfaces silicon-insulator and first contact surface consisting of insulator. Anode junction process is applied to first and second contact surfaces to produce tight seal in silicon-insulator interfaces of the first composite plate. Note here that second contact surface consists of silicon.EFFECT: simplified making of tight seal.20 cl, 11 dwg

Actuating mechanism, optical scanner and imager // 2566738
FIELD: electricity.SUBSTANCE: invention relates to electrical electrophysics. Actuating mechanism includes a movable part, which may be oscillated around axis of oscillation; connecting part, which passes through the movable part and is deformed torsionally in compliance with oscillations of the movable part. Supporting part supports connecting part. The movable part forms criss-cross shape in top view in thickness direction of the movable part.EFFECT: reduced momentum of inertia during oscillations.15 cl, 15 dwg

Hybrid aerospace rocket ramjet // 2563641
FIELD: engines and pumps.SUBSTANCE: claimed engine comprises rocket engine running on fuel composed of aluminium nanopowder sized to not over 25 nm in liquid aqueous phase and ramjet combined therewith and running on molecular hydrogen formed at combustion of aluminium nanopowder. Claimed engine comprises cylindrical shell ring, central axially symmetric or wedge-like body fitted in said shell ring, combustion chamber to combust aluminium nanopowder in water vapours. One end of said cylindrical shell ring has inlet for atmospheric airflow and discharge nozzle at opposite end. System of shock waves is developed at edges of said central axially symmetric or wedge-like body. Said combustion chamber to combust aluminium nanopowder in water vapours doubles as the chemical reactor for production of hydrogen and is located in wedge-like body and coupled therewith at outlet and with nozzle suitable for formation of combustion zone at interaction of hydrogen efflux with incoming airflow. Molecular hydrogen and oxidizer in combustion zone exist in stoichiometric relationship (fuel-to-oxidizer ratio ϕ=1), or form lean mix (with ratio ϕ<1).EFFECT: higher efficiency of fuel chemical energy conversion into thermal power, expanded range of flying conditions.3 cl, 1 dwg

Optical modulator // 2563120
FIELD: physics.SUBSTANCE: in an optical modulator each pixel or subpixel comprises superimposed fixed flat polariser and movable flat polariser, which is magnetised in the plane of the polariser at a given angle to the transmission plane of the polariser and configured to turn about an axis perpendicular to the polarisers. The optical modulator has means of reading the position of movable polarisers, which include sensors of the direction of the magnetic field (direction of the magnetic induction vector) of each movable polariser and means of retrieving information from the sensors.EFFECT: reduced image flicker and saving power.9 cl, 2 dwg

icromechanical element // 2559032
FIELD: physics, optics.SUBSTANCE: invention relates to instrument-making, particularly a micromechanical unit, especially a controlled optical filter. The unit comprises a first device layer and a second substrate layer, at least partially attached to each other, wherein the device layer comprises a row of reflecting elements, separated between a certain number of fixed reflecting elements. The fixed elements are connected to the substrate and the cavity is bounded between the substrate and each movable element. Each movable element is configured to generate spring-loaded displacement in the cavity, and a certain number of dielectric spacers are placed in cavities between each movable element and the substrate to avoid electrical contact between them. The dielectric layer has a rough surface.EFFECT: simple manufacturing process, high reliability and improved controllability of the device.10 cl, 16 dwg

icrostructural multilayered screen and vacuum isolation of spacecrafts // 2555891
FIELD: aviation.SUBSTANCE: invention relates to the multilayered screen and vacuum isolation (SVI) with microstructural elements for spacecrafts. Each layer of SVI is implemented as a substrate on which the heat reflecting elements designed as massif of rectangular microplates are fixed. Each microplate is fixed on a substrate with a gap 10…20 mcm. On the substrate side facing towards the spacecraft the flutes with rectangular or trapezoidal section, and also longitudinal depressions with semicircular cross-section are implemented. The second and the subsequent layers of SVI are attached to the previous layers through the spherical spacers installed between plates. The diameter of spacers is no less than the size of the named gap. In the places of installation of spacers the layers of silicon dioxide with the thickness 0.5…1 are applied. The aluminium coating with the thickness 0.1…0.3 microns with the reflection factor 0.7-0.9 is applied on external surface of microplates and open surfaces of the substrate. Microplates can be bimorph. Microplates are manufactured with conducting buses on the surface of the silicon substrate.EFFECT: decrease of weight and overall dimensions of EVI and spacecrafts.7 cl, 7 dwg

ethod of manufacturing of heat-resistant nano and microelectromechanical system of mechanical value transmitter // 2548380
FIELD: measurement equipment.SUBSTANCE: method of manufacturing of heat resistant nano and microelectromechanical system of high temperature transmitter of mechanical values consists in that on the planar surface of the resilient element by the vacuum spraying the heterogeneous structure of the nano- and microfilms of materials is made, it contains thin film dielectric, piezoresistive and contact layers, the strain gauges. The tensoelements - tensoresistors, contact conductors and their contact pads are formed. The tensoresistive layer is formed by magnetron spraying in the vacuum chamber with simultaneous use of two targets out of nickel and titanium. The resilient element with formed on it dielectric layer is installed on rotary table, heated, argon pressure is created, then rotary table is rotated with resilient element, at that definite current densities are set in zones of the first and second targets spraying. Then the resilient element with the applied tensoresistive layer is held in vacuum at elevated temperature.EFFECT: invention ensures the expansion of the work temperature range of the transmitter based on thin film nano- and microelectromechanical system, improves repeatability of such parameters of the strain gauges as electric resistance and temperature resistance coefficient, reduction of the transmitters temperature sensitivity.6 dwg, 1 tbl

icromechanical composite element and method of its fabrication // 2544289
FIELD: process engineering.SUBSTANCE: proposed invention consists in making of the substrate and etching of at least one image to mid ply. Then, insulating coating is applied to substrate top surface. Said coating and said mid ply are subjected to directed etching. Now, at electrode connection to conducting substrate bottom ply, electrical deposition is executed and composite component is removed from said substrate.EFFECT: better tribological properties of silicon, simplified process, application of high-resilience components.14 dwg

Dry adhesives // 2543188
FIELD: chemistry.SUBSTANCE: dry adhesive, having a microstructured and nanostructured surface and an elastic surface, having Shore hardness A of about 60 or less. The microstructured and nanostructured surface and the elastic surface are capable of forming a dry adhesive bond upon contact with one another via reversible mechanical bonding of the elastic surface in micropores and nanopores.EFFECT: improved dry adhesion with a larger thickness of the elastic surface.22 cl, 4 tbl, 27 dwg, 15 ex

ethod and device for elimination of sticking of electrodes in inertial microelectromechanical systems // 2542590
FIELD: electricity.SUBSTANCE: invention relates to the field of inertial microelectromechanical systems used as overload sensors such as, for example, accelerometers or gyroscopes. The method of elimination of sticking of electrodes in the inertial microelectromechanical device comprising: mobile load (150) suspended on the framework by means of the spring device (115) and containing at least one mobile electrode; the motionless electrode which is rigidly attached to the framework and the motionless electrode interacts with the mobile electrode therefore a couple of electrodes is formed. And the method includes the detection of couple of stuck electrodes for which the adhesion is characterised by a force of sticking (Fs), and the separation stage including the supply within the pre-set interval of time of the set voltage between electrodes of the couple of electrodes for creation of electrostatic force which provides shift of mobile load towards the action of sticking force.EFFECT: improvement of the method efficiency.5 cl, 4 dwg

Electrostatic mems key // 2541439
FIELD: electricity.SUBSTANCE: electrostatic microelectromechanical key comprises silicone crystal with formed movable electrode shaped as console with symmetrical slotted openings in it thus forming flexible supporting beams of different length perpendicular to each other and substrate with at least one fixed electrode and current busbars, which is connected to silicone crystal with a gap between movable and fixed electrodes; at that the movable electrode is equipped with shunt short-circuiting current bus bars at contact and off-set in regard to the centre towards free edge of the movable electrode.EFFECT: reduced control voltage of MEMS key and increased maximum permitted commutation current.2 cl, 3 dwg

icrosystem capacitive sensor for measuring physical quantities // 2541415
FIELD: physics.SUBSTANCE: microsystem capacitive sensor for measuring physical quantities includes: a base made of dielectric material; one or more actuating elements in the form of movable thermomechanical microactuators placed on the base; wherein metallic capacitor plates are formed over a polyamide layer of the thermomechanical microactuators on opposite lateral faces of silicon grooves filled with a polyamide, said plates being connected in parallel to each other by conductors running along the movable tail of the thermomechanical microactuator to its base; on and/or inside the base there are metal tracks for electrical contact to pads of the movable thermomechanical microactuator, configured to measure capacitance between the plates of the capacitor formed on the movable thermomechanical microactuator.EFFECT: integrating in one structure sensors of physical quantities, displacement, acceleration, temperature, mechanical force, mass, electrical power, flux, illumination and humidity, enabling operation in deep space conditions and resistance to harsh operating temperature conditions, producing a sensor using batch methods based on standard techniques for microprocessing silicon and mechanical processing of structural components, broader capabilities for unification and production of a standard series of sensors with different measurement ranges of the required physical quantities, enabling sensor tuning through an active operating mode, use as a feedback sensor for systems based on movable thermomechanical microactuators.4 cl, 1 dwg

odulation-doped field-effect transistor // 2539754
FIELD: physics.SUBSTANCE: invention relates to electronic engineering. A modulation-doped field-effect transistor comprises a flange, a pedestal, a heteroepitaxial structure, a buffer layer, a source, a gate, a drain and ohmic contacts. The pedestal is made of a heat-conducting layer of polycrystalline diamond. A transistor chip is placed on top of the pedestal, said chip comprising series-arranged base substrate made of GaAs, buffer layers, heteroepitaxial heterostructure based on AlGaAs/GaAs, and on the surface of the heteroepitaxial structure, between the source, the gate and the drain, there is a dielectric coating layer and two buffer layers arranged in series, said layers being made of hafnium dioxide and a metal oxide, wherein the buffer layers have total thickness of 1.0-4.0 nm; in the gate region, the buffer layers are placed under the gate, directly on an epitaxial structure in the form of a gradient layer of n-type GaAs.EFFECT: reduced effect of DX centres on device characteristics, high mobility of majority charge carriers, providing minimum leakage of gate current, improved heat removal from the pedestal, achieving the lowest noise coefficient in the GHz range, high efficiency and reliability of high-power field-effect transistors.8 cl, 3 tbl

Coulometric nanocaliper // 2538425
FIELD: measurement equipment.SUBSTANCE: coulometric nanocaliper comprises a double-electrode electrolytic cell connected to a source of high-stability current, a source of electrolyte and an instrument that records voltage changes in a circuit of electrodes of an electrolytic cell. The novelty in the coulometric nanocaliper is the fact that the source of electrolyte is equipped with a unit of precision dosing, and the double-electrode electrolytic cell comprising a platinum cathode and an anode, representing a layerwise metal coating of the investigated sample, comprises a unit of capacitance feedback formed by a metal coating of the investigated section and the platinum cathode, data from which makes it possible to form a drop of optimal shape with the help of a device for information reception and processing, comprising a PC, I/O circuit boards and appropriate software, making it possible to also analyse dependence of speed of voltage growth on time during anode oxidation in DC mode for determination of thickness values and interfaces of the layerwise structure in nanometers.EFFECT: simplified processes of calibration of a coulometric nanocaliper and production of a measurement result of coating thickness.1 dwg

Device to control tightness of microstructure // 2538420
FIELD: measurement equipment.SUBSTANCE: invention relates to equipment for control of tightness of microelectromechanical and microelectronic devices, for functioning of which a tight body is required with an internal cavity. Substance: the device comprises a chamber of exposition of microstructures in probe gas, a spectrometer operating in infrared range, and a unit of control of wave guide positioning. In the exposition chamber there are two wave guides, one of which is used to supply infrared radiation from the spectrometer to the microstructure, and the other one - for reception and transmission of radiation that has gone via the microstructure, to the infrared spectrometer.EFFECT: measurement of quantity characteristics of leak-in with high accuracy, automatic testing of microstructures by group method, also microstructures that are sealed integrally as "plate to plate", measurement of high leaks in small volumes, detection of hidden defects of encapsulation.2 cl, 1 dwg

ethod of forming channel for transmitting optical signal between electronic modules on one printed-circuit board // 2536790
FIELD: radio engineering, communication.SUBSTANCE: invention relates to electronics and a method of forming a channel for transmitting an optical signal between electronic modules on one printed-circuit board. The method employs a head which contains a transparent polymer, placing a photoresist over a suitable area on the head and applying a die on said area. UV radiation exposure is carried out through the transparent mask of the die and the outer surface of the optical path of the hardened photoresist is coated with a light-reflecting metal layer by sputtering.EFFECT: simple method of forming a channel and improved performance of products.5 dwg

ethod of connection, sealed structure made thereby and system of sealed structures // 2536076
FIELD: process engineering.SUBSTANCE: this invention is used for connection of sealed cases of the device built around microelectromechanical systems (MEMS). This invention consists in main god stack of the first metal to be oxidised in air on the surface of both first and second plates. Then, ply of second metal is made on outer surface of every stack of first metal second metal fusion points being lower than that of first ply (note that second metal ply depth is selected to be sufficient for prevention of first metal ply outer surface oxidation). Second metal ply is brought in contact with second metal ply on second plate to make the area of joint. Pressure is applied to first and second plates at the temperature of joint area lower the second metal fusion point to initiate the bonding. Note here that pressure of bonding is selected to be sufficient for deformation of second metal plies in joint area.EFFECT: possibility to make sealed case.13 cl, 5 dwg

ultifunctional sensory microelectromechanical system // 2533325
FIELD: physics.SUBSTANCE: multifunctional sensory microelectromechanical system (MEMS) is intended for use in gas analysers, in medicine as biosensors, in microelectronics and other high-tech fields for controlling technological processes. The multifunctional sensory MEMS comprises a group of resonators attached by first ends to a first holder connected to a substrate. The resonators are not all parallel to each other. Use of a resonator which, owing to its bending through a piezoceramic can change the initial resonance frequency of a resonator parallel to it, will increase measurement accuracy owing to different initial characteristics of measurement of the presence of the same number of adsorbed particles on a layer.EFFECT: high accuracy of analysis and broader functional capabilities of the device.10 dwg

Protection device of primary acceleration transducer // 2530435
FIELD: radio engineering, communication.SUBSTANCE: invention is designed for protection of primary acceleration transducers (PAT) against action of external destabilising factors (EDF). A PAT protection device includes a housing, on which a base is installed, which is made of two parts (lower and upper ones) connected to each other, on the upper side there fixed is PAT; the lower part of the base is made in the form of a hollow metal cylinder, on the side surface of which there made in a circumferential direction are at least two rows of cross through slots so that identical cross pieces are formed in each row between the slots. Besides, slots of one row are symmetrically offset relative to slots of another row, in each of which there are two identical through holes, the axes of which lie in one radial plane and form an angle of not more than 2π/n between themselves, where n - number of slots. Centres of these holes are offset along the slot relative to its beginning and end.EFFECT: improving stability and strength of primary acceleration transducers to EDF and improving strength of the upper part of the base, on which PAT is arranged.1 dwg

Analysis device and method for performing biological analyses // 2527686
FIELD: medicine.SUBSTANCE: group of inventions refers to medicine, and can be used for multiplex analysis. An analysis device comprises a reaction space, two sets of individually coded microcarriers (2), and each microcarrier is functionalising, and each microcarrier of one of at least two sets has identical functionalisation, wherein the reaction space is a microchannel. The microcarriers (2) are shaped in relation to the microchannel (1) section which provides comprising two any microcarriers (2) arranged side by side out of contact with each other and with a perimeter of the microchannel (1) along the whole length of the microchannel (1). The device comprises the microcarrier (2) limit stop (4) longwise the microchannel (1), while fluids can still flow, and a code of the microcarriers is indicative of its functionalisation. The group of inventions also refers to a method for performing a multiplex analysis and the multiplex analysis microcircuit.EFFECT: group of inventions provides accelerated mass transfer, a decreased number of samples, simplifies preparing and performing the analysis and facilitates biological response readouts.17 cl, 18 dwg, 1 ex

ethod of assembling sensing element of micromechanical sensor // 2525715
FIELD: instrumentation.SUBSTANCE: in the process of assembling the sensing element of micromechanical sensor the glass lining and crystal of monocrystalline silicon are combined, installed and clamped in a special device, warmed up, kept at a predetermined temperature and the required voltage is supplied. At that two glass linings and crystal of monocrystalline silicon are combined simultaneously, located between them, they are heated to a temperature of 410°C, kept for 1.5 hours, the voltage is supplied to both linings for not less than two minutes, the voltage is switched off, the polarity of the voltage is changed, the voltage is applied again and the cycle of changing polarity is repeated at least three times.EFFECT: simplification and reduction of technological cycle of assembling sensing element of micromechanical sensor.1 dwg

ethod to assemble microelectromechanical devices // 2525684
FIELD: electricity.SUBSTANCE: method includes formation of volume current leads (VCL) on contact sites of a primary converter (PC) of crystalline type by the method of thermosonic microwelding with subsequent installation of the PC onto the board of the secondary converter of microelectromechanical devices and systems (MEMS). At the same time they previously perform high-temperature assembly of the PC made of a sensitive element SE and other functional elements of MEMS, which is carried out at temperature of not more than 500°C, afterwards to volume current leads made on contact sites of the PC, made of alternating metal layers Cr - Au with thickness of not more than 0.4 mcm, current leads are welded, in the form of a wire of gold by the method of contact welding. Then the PC produced in the specified manner is connected by the produced current leads in the form of a wire by the method of contact welding to contact sites of the secondary converter (SC) of MEMS.EFFECT: increased reliability of functioning under conditions of high complex external impact.2 dwg

Control method and device of fluid medium temperature and flow rate // 2521737
FIELD: measurement equipment.SUBSTANCE: invention relates to instrument-making industry and can be used at control of fluid medium flow rate and temperature. According to this invention, materials, components and methods are aimed at manufacture and use of macro-scale channels containing fluid medium, the temperature and flow rate of which is controlled by means of geometrical sizes of the macro-scale channel and configuration of at least some part of the wall of the macro-scale channel and a flow of composite particles, which form fluid medium. Besides, the wall of the macro-scale channel and the flow of composite particles have such a configuration that collisions between composite parts and the wall can be preferably accompanied by mirror rebound.EFFECT: improving fluid medium temperature and flow rate control accuracy.54 cl, 18 dwg

icrosystem device for temperature control of surface of spacecraft // 2518258
FIELD: physics.SUBSTANCE: microsystem device for temperature control of the surface of spacecraft includes: a base made of dielectric material with a low coefficient of heat conduction with a rectangular hole; at least two rows of independent parallel control channels consisting of microactuators arranged parallel to each other along the base (as shown on fig. 1a, b);a reflecting shield placed over the microactuators; metal-coated tracks with electrical contacts on and/or inside the base for electrical contact with the microactuators; guides of the reflecting shield mounted on the base; polyimide clamps placed between the guides of the reflecting shield and the reflecting shield. Adjacent microactuators in a row are turned towards each other at an angle of 180 degrees; the number of microactuators in each row is equal to the number of rows - which is an even number, and the number of microactuators in each row is not less than 6; the microactuators are configured for angular displacement of mobile elements by an angle of not less than 30 degrees; the reflecting shield is placed over the microactuators such that the axis of symmetry of the reflecting shield is equidistant from each pair of rows of microactuators (as shown on fig. 1a, b); the free surface of the base is coated on both sides with a material with a high coefficient of reflection; force on the mobile elements of the microactuators is such that, overall for all microactuators, it is sufficient to overcome the frictional force between the reflecting shield and the microactuators.EFFECT: reduced weight and size owing to linear displacement of the mobile element in one plane, capacity of the system to operate in open space conditions, resistance to severe operating temperature conditions, reduced frictional losses between components of the structure, high operating efficiency of the system owing to active control and full closure of the protected surface by the reflecting shield, reducing supply voltage to on-board voltage, high reliability owing to use of microdrives which are resistant to repeated bending, low power consumption owing to an operating mode which requires system activity, and power consumption only when moving the shield, ie when changing the temperature conditions of the protected object or the ambient environment, enabling the manufacture of temperature control systems via batch methods according to standard technologies of silicon micromachining and machining components of the structure.15 cl, 5 dwg

Pressure sensor based on nano- and microelectromechanical system for precision measurements // 2516375
FIELD: measurement equipment.SUBSTANCE: sensor comprises a body, a nano- and microelectromechanicall system (NMEMS) installed in it, comprising an elastic element in the form of a membrane with a stiff centre, embedded along the contour into the support base, a heterogeneous structure formed on it from thin films of materials, a sealing contact block and connecting conductors. Radial strain resistors formed in the heterogeneous structure installed on two circumferences comprise identical strain elements in the form of squares, connected by thin-film links and connected into a bridge measurement chain. Centres of the first and second strain elements are placed along circumferences with radii determined according to appropriate ratios. Between the membrane and stiff centre, and also the membrane and support base there are roundings with a certain radius.EFFECT: increased accuracy and manufacturability.1 tbl, 9 dwg

Use of composites with adjusted nanotubes for heat transmission in wells // 2516078
FIELD: oil and gas industry.SUBSTANCE: invention relates to heat engineering and can be used for heat removal from heating units in wells. In the device containing an anisotropic nanocomposite element which is bounded thermally with a heating unit for the purpose of heat removal from the above unit along the preset direction, the anisotropic nanocomposite element forms a cable and includes heat-conducting nanoparticles introduced into the base material and adjusted in it in order to form a heat line to transmit heat from the first cable end to its second end, at that the heat conductivity in the preset direction is bigger than the heat conductivity in the direction perpendicular to the preset direction and the base material is configured so that there is contact between the heat-generating and heat-absorbing elements. The invention also includes the method of heat removal and the tool intended for use in the well.EFFECT: improving operational efficiency of the downhole tool.14 cl, 5 dwg

ethod to manufacture strain-gauge resistor sensor of pressure based on thin-film nano- and microelectromechanical system // 2512142
FIELD: measuring equipment.SUBSTANCE: invention belongs to measuring equipment, in particular to pressure sensors on the basis of thin-film nano -and the microelectric systems (NiMEMS) intended for use in control systems, control and diagnostics of objects of long functioning. The method of manufacturing consists in polishing of a surface of a membrane, formation on it of a dielectric film and a strain gauge element with low-impedance crossing points and contact platforms between them with use of a template of the strain-gauge sensitive layer having a configuration of a strain gauge element in zones, combined with the low-impedance crossing points and contact platforms. Thus formation of the strain-gauge element with the low-impedance crossing points and contact platforms between them is carried out in areas, in which deformations and temperatures influencing them during operation meet the corresponding ratio. After formation they measure dimensions and area of elements and transitions of NiMEMS taking into account quantity, dimensions and distribution of defects, then using them they calculate the criterion of temporary stability according to the corresponding ratio. If the criterion of temporary stability is less than maximum permissible value of criterion of temporary stability, which is determined experimentally by statistical data for a concrete standard size of the sensor, this assembly is transferred to the subsequent operations.EFFECT: increase of temporary stability, resource and service life.2 dwg
ethod for increasing heat removal by means of microturbulisation particles // 2511806
FIELD: heating.SUBSTANCE: invention relates to heat engineering and electrolytic metallurgy and can be used in heat removal increasing systems to improve heat removal characteristics on different surfaces of the heat transfer device. It is achieved due to use of Taunit carbon nanotubes (CNT) as microturbulisation particles, and oxide galvanic coatings as binding medium. Attachment of a variety of microturbulisation particles to heat removal surfaces is performed by application of oxide coatings, the nanomodification of which is performed by introduction to oxidation electrolyte of Taunit CNT by means of an ultrasonic disperser.EFFECT: method provides intensification of heat exchange processes on heat removal aluminium surfaces, as well as simple implementation.2 tbl, 2 cl

Electronic circuit and/or microelectromechanical system with radiation source of mobile charge carriers // 2511614
FIELD: electricity.SUBSTANCE: invention relates to electronic engineering and microelectromechanical systems. Electronic circuit or microelectromechanical system with radiation source of mobile charge carriers (isistor) contains at least two areas - the first areas and the second one. The first area consists of radioisotopic material emitting mobile charge carriers due to radioactive emission while the second area consists of non-radioisotopic material accepting the above mobile charge carriers introduced into the material. These two areas are either located at distance less than travel distance of the above mobile charge carriers emitted by the first area of radioisotopic material, or the first area of radioisotopic material emitting mobile charge carriers is located at surface of the second area of non-radioisotopic material, or the first area of radioisotopic material emitting mobile charge carriers in dissipated form or in the form of assembled structure inside the area of non-radioisotopic material.EFFECT: invention allows creation of active isistor device having instant readiness for operation without time required to connect it to the voltage source in order to ensure passage of mobile charge carriers with certain current level through it.13 cl, 1 tbl, 6 dwg, 1 ex