Ultrasound transducer device and method of manufacturing same

FIELD: physics.

SUBSTANCE: invention can be used for transmitting and/or receiving ultrasonic waves by means of an ultrasonic transducer. Essence of invention consists in that ultrasonic transducer comprises at least one cMUT cell (30) for transmitting and/or receiving ultrasonic waves, wherein cMUT cell (30) comprises cell membrane (30a) and cavity (30b) underneath cell membrane. Device additionally comprises substrate (10) having first side (10a) and second side (10b), wherein at least one cMUT cell (30) is installed on first side (10a) of substrate (10). Substrate (10) comprises substrate base layer (12) and a plurality of adjacent trenches (17a) extending into substrate (10) in a direction, perpendicular to substrate sides (10a, 10b), wherein spacers (12a) are each formed between adjacent trenches (17a). Substrate (10) further comprises connecting cavity (17b) which connects trenches (17a) and which extends in a direction parallel to substrate sides (10a, 10b), trenches (17 a) and connecting cavity (17b) together forming substrate cavity (17) in substrate (10). Substrate (10) further comprises substrate membrane (23) covering substrate cavity (17). Substrate cavity (17) is located in a region of substrate (10) underneath cMUT cell (30).

EFFECT: reducing or suppressing acoustic communication of ultrasonic waves with substrate.

14 cl, 32 dwg

 



 

Same patents:

FIELD: process engineering.

SUBSTANCE: invention relates to mining. Autosynchronous unbalance vibration exciters are mounted on smoothly damped veering body. Proposed method consists in starting the motors in turn. Note here that, first, one motor is started to start the second motors after the former runs at steady state above resonance mode of revolution. After stable above resonance mode of unbalance vibration exciters, said second motor is switched off with second motor running for vibratory support of rotation.

EFFECT: decreased amplitude of resonance vibrations.

2 cl, 1 dwg

FIELD: physics.

SUBSTANCE: present invention relates to a capacitive micromachined ultrasonic transducer, a system for generating or detecting ultrasonic waves and a method of making the transducer. The disclosed group of inventions includes a capacitive micromachined ultrasonic transducer, a system for generating or detecting ultrasonic waves having the transducer, and methods of making the transducer. The capacitive micromachined ultrasonic transducer has a silicon substrate, a cavity, a first electrode situated between the silicon substrate and the cavity, wherein the first electrode is situated below the cavity, a membrane situated above the cavity and opposite the first electrode, a second electrode situated inside or near the membrane, wherein voltage can be applied across the first electrode and the second electrode, and a first insulating layer between the first electrode and the second electrode, said first insulating layer containing a dielectric. The system for generating or detecting ultrasonic waves has a transducer according to the present invention. Described is a method of making a transducer according to the present invention, wherein the transducer is made using a CMOS manufacturing process, and the transducer can be made by a post-process in a CMOS process.

EFFECT: preventing charging by adding additional layers and obtaining transducers with stable characteristics by setting at least one barrier which is situated on the path of charge carriers to break flow of charge carriers starting at one electrode and directed towards the other electrode.

13 cl, 4 dwg

FIELD: process engineering.

SUBSTANCE: invention relates to water treatment devices and may be used in water treatment in the field and as army individual water treatment set. Proposed plant comprises active oscillator built around two elements of micrologic K176"Л"A7. Note here that frequency of signal removed from output DA 1.2 (K176"Л"A7) to come to emitter follower input that doubles as a signal amplifier is adjusted by varistor R1 (22 kOhm) in frequency range of 25-55 kHz.

EFFECT: compact universal device.

1 dwg, 1 tbl.

FIELD: physics.

SUBSTANCE: invention relates to ultrasonic equipment and can be used for ultrasonic treatment of materials. The apparatus has electromagnetic eddy current inductors (1) connected through thyristor switches (2) with an electrodischarge current source. The electrodischarge current source has a step-up transformer (3), a rectifier (4) and a storage capacitor (5). Control electrodes of the thyristor switches (2) are connected to a commutator switch (6) which is connected to an electric pulse generator (7).

EFFECT: wide range of frequencies of excited oscillations.

1 dwg

Inertial vibrator // 2453380

FIELD: machine building.

SUBSTANCE: proposed vibrator serves to intensify various technological processes. Proposed vibrator with drive motor differs from known designs in that it consists of car with four wheels and made up of two parallel rectangular base plates jointed together by four posts, and stationary sprocket fitted at top base plate center and provided with center hole. Said top base plate hole makes holes of said sprocket and said base plate be aligned. It has also reduction gear fitted inside aforesaid car and comprising moving sprocket engaged with said fixed one to make their planes mutually perpendicular. Reduction gear moving sprocket is engaged via shafts and helical gearing with weight on lever. Drive motor housing is rigidly fixed on top base plate while motor moving section is rigidly fixed with reduction gear. Reduction gear rotational axis is out-of-parallel with that of weight of reduction gear with lever.

EFFECT: vibrations in two planes at a time.

8 dwg

Loud-speaker drive // 2450478

FIELD: electricity.

SUBSTANCE: in loud-speaker system, drive and method of loud-speaker driving loud-speaker element is used which is connected by metal piece with memory device; it is made as portable electronic device and there is power supply unit that supplies power to metal piece with memory device. Metal piece with memory device can apply force to loud-speaker element when power is supplied to metal piece with memory device.

EFFECT: cheapening, simplification and decrease in loud-speaker weight and dimensions.

12 cl, 6 dwg

FIELD: medicine.

SUBSTANCE: invention relates to physiotherapeutic devices of shock-wave impact. Device for shock-wave therapy contains electromagnetic irradiator of shock waves with focusing system, ultrasonic guidance system, case and control panel. Focusing system is made long-focus with focus distance not less than F=(L+H)/(l-d/D), where L is sound conductor, D id focusing system diametre, H is depth of location of area with pathologic process, which has characteristic size d. Shock wave irradiator is fixed on bracket with possibility of fixation and 180° rotation around axis.

EFFECT: application of the invention makes it possible to increase efficiency and efficiency of treatment.

4 cl, 2 dwg

FIELD: process engineering.

SUBSTANCE: invention relates to ultrasound vibration and cosmetician devices. Proposed ultrasound vibration device comprises ultrasound vibrator to generate ultrasound vibrations, base with front and rear surfaces. Note here that rear surface is connected with ultrasound vibrator. Aforesaid base allows radiating ultrasound power from said front surface, while ultrasound power is fed from ultrasound vibrator. Said base comprises integral first, second, third and fourth bodies. Note here that first body has aforesaid front surface and features shape narrowing from rear end to front end, while first body thickness equals or exceeds second body thickness. Any width of the second body differs from that of the first body, except for first body rear end. Fourth body features diametre smaller than that of the second and third bodies, and is connected with the second body rear end, while third body is connected to the fourth body rear end. There are extra versions of vibrator and cosmetician devices.

EFFECT: ruling out parasitic resistance originating from interaction between resonance and anti-resonance frequencies.

9 cl, 13 dwg

FIELD: mechanics.

SUBSTANCE: ultrasonic transducer includes ultrasonic vibrator and mouth. Ultrasonic vibrator is installed on connection mouth surface by means of glue. Mouth also includes restrictor for restricting glue beads, which is formed with glue between connection surface and ultrasonic vibrator.

EFFECT: improvement of system.

4 cl, 5 dwg

FIELD: physics.

SUBSTANCE: invention relates to ultrasonic engineering and can be used in designing ultrasonic oscillatory systems such as devices for cleaning (ultrasonic baths), dispersing, homogenising, and emulsifying substances. The ultrasonic transducer has a diaphragm, in the antinodes of bending vibrations of which are fitted electromechanical motors. The diaphragm is made form titanium alloy with bosses in form of flattened cones. Taper ratio equals 1:0.061 in places where the electromechanical motors are fitted. Matching elements with seals are fitted between the electromechanical motors and the diaphragm.

EFFECT: increased efficiency.

2 dwg

FIELD: the invention is used for ultrasound control of products of metallurgic production particularly of cylindrical products for example of bars and rods.

SUBSTANCE: the essence is in that an electromagnet-acoustic transformer is multi channel with radial arrangement of induction coils relatively to the surface of the object under control, magnetic system is fulfilled at least of three cylindrical bodies out of nonmagnetic material and directed with the poles of the same name to the surface of the object under control, on the inner surface of constant ring magnets or electromagnets-solenoids there is an adapter out of nonmagnetic material in which transparent grooves are evenly fulfilled along the circumference and on the inner surface of the adapter there is a ceramic ring installed in the flatness of symmetry to the middle constant ring magnet or electromagnet-solenoid and the transparent grooves. The ring is for example fulfilled of separate segments evenly positioned along the circumference in the grooves of the adapter on which induction coils and concentrators are located.

EFFECT: creation of a transformer with broad band of control and high sensitiveness.

6 cl, 1 tbl, 12 dwg

FIELD: medical equipment.

SUBSTANCE: shock-wave pulse oscillator has capacitor. Controlled discharger is disposed inside capacitor as well as case with focusing system, disc inductor, irradiating membrane and aid for providing cavities with water under "water pillow". The aid is used to provide vacuum pressing of membrane against inductor to change curvature of inductor and membrane's surfaces and for provision of asymmetrical shock-wave beam. Lithotripsy and therapy procedures are performed due to complex match of geometrical characteristics of focusing lens to geometric and kinetic properties of irradiating membrane, and to pulse characteristics of discharge circuit.

EFFECT: improved efficiency.

4 cl, 3 dwg

FIELD: medicine, urology.

SUBSTANCE: one should affect the calculus with energy impulse at frequency of impulse sequence being 1-5 Hz and duration of impulse front being 100 nsec, not more. Moreover, while carrying out lithotripsy it is necessary to affect urethral calculus with electric impulse at energy being 0.3-0.4 J and frequency of impulse sequence being 5 Hz. While performing lithotripsy one should affect bladder's calculus with electric impulse at energy being 0.6 J and frequency of impulse sequence being 5 Hz, and while conducting lithotripsy in urethra one should affect the calculus with electric impulse at 0.2-0/3 J energy and 1 Hz frequency of impulse sequence.

EFFECT: higher efficiency.

8 dwg, 3 ex

FIELD: electronics.

SUBSTANCE: device has piezoelectric drive 2 connected with oscillation unit 1 and feedback electronic unit 3. Feedback electronic unit 3 excites oscillations of piezoelectric drive 2 by means of periodic exciting signal 20 characterizing by positive-going and negative-going slopes. Response signal 21 of piezoelectric drive returns to feedback electronic unit 3. At least one peak compensation unit 4 is provided, which unit suppresses at least one parasitic signal 2 in response signal 1, which parasitic signal arises during piezoelectric drive's 2 recharge processes. At least one suppress unit 5, 13 with at least one commutation member 6, 14 is provided in peak compensation unit 4. Suppress unit 5, 13 is controlled by exciting signal 20 of feedback electronic unit 3 in such a way that during positive-going or negative-going slopes in exciting signal 20, piezoelectric drive 2 is in conducting connection with mass.

EFFECT: damping of parasitic signal in response signal; reduced number of costly parts.

13 cl, 5 dwg

FIELD: electricity.

SUBSTANCE: device includes electroacoustical transducer connected to amplifier connected to feedback circuit, and power source. In addition it features current rate sensor for power circuit of electroacoustical transducer implemented by feedback circuit with phase inverter. Phase inverter input is connected to current rate sensor, while output is connected to amplifier input.

EFFECT: simplified construction, enhanced process load and operation stability of device.

3 dwg

FIELD: machine building.

SUBSTANCE: invention is related to devices for influence at flow of fluid medium. Device for influence at vortical structures in turbulent air jet flowing from air exhaust channel comprises pair of needles installed in close proximity to flow and connected to source of AC voltage for creation of pulsating corona discharge between needles. One needle from pair of needles is oriented in direction along flow, and the other needle - across flow. Method is characterised with influence of pulsating corona discharge at vortical structures in turbulent air jet.

EFFECT: reduction of jet noise.

12 cl, 4 dwg

FIELD: physics.

SUBSTANCE: invention relates to ultrasonic engineering and can be used in designing ultrasonic oscillatory systems such as devices for cleaning (ultrasonic baths), dispersing, homogenising, and emulsifying substances. The ultrasonic transducer has a diaphragm, in the antinodes of bending vibrations of which are fitted electromechanical motors. The diaphragm is made form titanium alloy with bosses in form of flattened cones. Taper ratio equals 1:0.061 in places where the electromechanical motors are fitted. Matching elements with seals are fitted between the electromechanical motors and the diaphragm.

EFFECT: increased efficiency.

2 dwg

FIELD: mechanics.

SUBSTANCE: ultrasonic transducer includes ultrasonic vibrator and mouth. Ultrasonic vibrator is installed on connection mouth surface by means of glue. Mouth also includes restrictor for restricting glue beads, which is formed with glue between connection surface and ultrasonic vibrator.

EFFECT: improvement of system.

4 cl, 5 dwg

FIELD: process engineering.

SUBSTANCE: invention relates to ultrasound vibration and cosmetician devices. Proposed ultrasound vibration device comprises ultrasound vibrator to generate ultrasound vibrations, base with front and rear surfaces. Note here that rear surface is connected with ultrasound vibrator. Aforesaid base allows radiating ultrasound power from said front surface, while ultrasound power is fed from ultrasound vibrator. Said base comprises integral first, second, third and fourth bodies. Note here that first body has aforesaid front surface and features shape narrowing from rear end to front end, while first body thickness equals or exceeds second body thickness. Any width of the second body differs from that of the first body, except for first body rear end. Fourth body features diametre smaller than that of the second and third bodies, and is connected with the second body rear end, while third body is connected to the fourth body rear end. There are extra versions of vibrator and cosmetician devices.

EFFECT: ruling out parasitic resistance originating from interaction between resonance and anti-resonance frequencies.

9 cl, 13 dwg

FIELD: medicine.

SUBSTANCE: invention relates to physiotherapeutic devices of shock-wave impact. Device for shock-wave therapy contains electromagnetic irradiator of shock waves with focusing system, ultrasonic guidance system, case and control panel. Focusing system is made long-focus with focus distance not less than F=(L+H)/(l-d/D), where L is sound conductor, D id focusing system diametre, H is depth of location of area with pathologic process, which has characteristic size d. Shock wave irradiator is fixed on bracket with possibility of fixation and 180° rotation around axis.

EFFECT: application of the invention makes it possible to increase efficiency and efficiency of treatment.

4 cl, 2 dwg

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