Method of forming on surface of articles from nickel alloy composite coating
SUBSTANCE: invention relates to sputtering of heat shielding coatings and can be used in aircraft engineering and other fields of industry in production of parts of turbine engines and plants. Method of forming on surface of articles made from nickel alloy a composite coating containing zirconium oxide, comprises sputtering a zirconium oxide film to achieve required thickness, wherein prior to sputtering said film on article surface a primary continuous layer of nickel alloy is formed, which corresponds to composition of said article with zirconium and with addition of a stabilising element and a gradient transition nanocomposite layer with a metal-oxide structure. Formation of said primary layer and gradient transition nanocomposite layer is carried out using a magnetron system with two combined sputtering magnetrons. Using first magnetron a target made of said nickel alloy is sputtered, and using a second magnetron a second target made of zirconium with addition of stabilising element is sputtered. Said primary layer is formed by combined sputtering of said targets in an argon atmosphere, wherein intensity of atomic flux formed from said first target is greater than intensity atomic flux from said second target. Method then includes formation of a gradient transition nanocomposite layer by sputtering said targets in presence of oxygen to form said gradient layer of zirconium oxide in non-oxidised nickel alloy. Ratio of phases in gradient transition layer is varied with increase of share of oxide phase with increase in thickness of said layer, oxygen partial pressure during sputtering is smoothly increased to 1.5 * 10-3 Pa, and power of first magnetron, sputtering first target from said nickel alloy, is reduced up to its complete disconnection, a smooth transition from layer of nickel alloy to film of zirconium oxide without interphase boundaries of macroscopic size is obtained.
EFFECT: providing mechanical strength of coating, high heat resistance, as well as high adhesion and cohesion of coating on working surfaces of articles.
SUBSTANCE: invention relates to field of obtaining nanocomposite coatings and can be used in creation of optic microelectronic devices and materials with increased corrosion resistance and wear resistance. Method of obtaining two-phase nanocomposite coating, consisting of titanium carbide nanoclusters, distributed in amorphous hydrocarbon matrix, on products from hard alloys, includes application of adhesive titanium or chromium sublayer, magnetron sputtering of titanium target in gas mixture of acetylene and argon under pressure 0.01-1 Pa and precipitation of dispersed particles of target and carbon-containing radicals on product surface in combination with bombardment of surface with ions, accelerated by bias voltage, with product surface being subjected to purification with argon ions from plasma, generated by electronic beam, before application of adhesive sublayer, and gas mixture being activated in the process of coating application by impact with beam of electrons with energy 100 eV.
EFFECT: invention is aimed at increase of coating adhesion and micro-hardness of obtained products, as well as at provision of high efficiency of application of acetylene in the process of coating application.
1 ex, 2 dwg
SUBSTANCE: preliminary devolatilisation and purification of a rolled film is realised in a mixture of an inert gas and nitrogen with its movement relative to plasma of a magnetron discharge in a vacuum chamber. The application of oxide is carried out in the chamber with, at least, one pair of magnets in the bipolar pack-pulse mode or their electrical power supply with the stabilised voltage and current, limit for the source of electricity.
EFFECT: creation of multilayer polymer films, high-barrier relative to the penetration of gases and vapours.
3 cl, 1 dwg, 1 ex
SUBSTANCE: in a unit of the cathode of a magnetron diffuser magnets are mounted at the base of a ferromagnetic material and separated from the target by a gap, at that the base from the target side is made with a ledge length-aligned and symmetrical to its longitudinal axis, thus forming a closed loop separated from the target by a heat-conducting gasket, at the opposite side of the base, under the loop, there is a channel for cooling fluid graded in its cross-section, which is covered hermetically by a plug and which comprises openings for the cooling fluid feeding and draining.
EFFECT: enhanced reliability of the unit operation and service life thereof.
2 cl, 2 dwg
SUBSTANCE: invention relates to method of application of the gradient coatings by the magnetron deposition, in particular to application of coatings based on high-melting metals, and can be used to produce coatings with high adhesive and cohesive properties, as well as with optimal combination of strength and plasticity. On pre-cleaned surface of the metal backing the adhesive alloy of high-melting metals is applied in inert gas, and layer of nitrides of high-melting metals in gas mixture of inert and reacting gases. Content of nitrides of high-melting metals varies from 0% to 100%, holding is performed until achievement of the required thickness of the nitride layer, then it is reduced in reverse order, held until achievement of the required layer thickness of high-melting metals, and re-increased in direction to thickness of the deposited layer. For content increasing and decreasing of the nitrides of high-melting metals the reacting gas pressure is varied as per linear law from 0 to 8×10-2 Pa, and then in reverse order.
EFFECT: method produces materials with high strength characteristics and optimal combination of hardness (H>40 GPa) and plasticity (We > 70%).
2 cl, 1 dwg, 2 ex
FIELD: process engineering.
SUBSTANCE: invention relates to machine building, particularly, to making of protective coating on parts subjected to high temperatures and mechanical stresses. Proposed method comprises cleaning of parts and vacuum chamber in glow discharge in inert gas atmosphere, ionic etching and coat application by deposition from vapour phase. Note here that prior to coat application the ion-plasma cementation is executed along with ionic etching. This is performed by feed of carbon-containing gas into the chamber and part heating with the help of two magnetrons operated in dual mode. Cementation is alternated with ionic etching in N steps, where N ≥ 1, while application of coating is executed by sequential forming of consecutive alternating plies of at least one micro ply consisting of chromium and the alloy of aluminium with silicon of total depth of 1.9-2.8 mcm and at least one micro ply consisting of chromium, aluminium and silicon oxides of total depth of 0.4-1.6 mcm produced at oxygen feed into said chamber. Note here that said micro plies consist of nano plies of said materials of 1-100 nm depth composed at part feed by magnetrons with targets of chromium and alloy of aluminium with silicon.
EFFECT: longer life, higher heat resistance at high-temperature oxidation and erosion.
1 ex, 1 tbl
FIELD: technological processes.
SUBSTANCE: invention relates to the field of machine building, in particular, to the method to produce a protective nanocomposite coating on the surface of the item from heat-resistant nickel alloy exposed to high temperatures and mechanical loads. The item and the vacuum chamber are cleaned in the medium of inert gas, ion etching is carried out, after which they perform ion-plasma cementation, additionally they perform ion etching of the item surface and apply the coating by the method of physical deposition from vapour phase. Ion-plasma cementation with subsequent ion etching is carried out in stages with number of stages N, besides N≥1, until saturation of the near-surface layer with carbon in the specified item for the depth of up to 50 mcm. Onto the surface of the item they apply at least one microlayer from nichrome and aluminium alloy with silicon, which consists of nanolayers of specified materials with thickness of 1-100 nm, and then they apply a microlayer from nanolayers of oxides of nichrome and aluminium alloy with silicon having thickness of 1-100 nm. In particular cases of invention realisation the total thickness of a microlayer from nichrome and aluminium alloy with silicon makes 2.3-3.0 mcm, at the same time the specified microlayer is applied by means of serial passage of the item in front of targets of magnetrons from the specified materials. The thickness of a microlayer from oxides of nichrome and aluminium alloy with silicon makes 0.5-1.5 mcm, at the same time the specified microlayer is applied by means of serial passage of the item in front of targets of magnetrons from the specified materials as oxygen is supplied into the chamber.
EFFECT: invention provides for increased durability and heat resistance of a nickel alloy under conditions of high-temperature oxidation and erosion impact.
3 cl, 1 tbl, 1 ex
SUBSTANCE: polymer material sample is placed into a vacuum chamber with a magnetron discharge unit. Argon is supplied into the device, and argon-metal plasma is generated. A polymer surface is activated, and a nanostructured metal coating is deposited thereon. A biodegradable material representing polyaminoacid covalently bond to cyclophosphazene is used as a polymer material. The coating is deposited in pulsed magnetron discharge plasma at burner voltage 400-700 V, current intensity 1-10 A, pulse length 1-20 ms and pulse count 1-100.
EFFECT: implementing this method enables developing the ecologically friendly technology of biomimetic nanostructured metallopolymers with controlled structure of metal coating and controlled processes of physiological electrical conductivity.
1 tbl, 3 dwg
FIELD: machine building.
SUBSTANCE: invention relates to the systems for nano coating application, in particular to the rotor substrate holder. The rotor substrate holder has a modular design. The module consists of the attachable rotor installed using the rotary holder on a support and coupled with the rotation drive, and time check sensor in standby position. The support of the substrate holder by its end parts is fixed in the draw-out housing. It has a modular cylindrical design and comprises a guiding sleeve, movement sleeve, spline shaft. The attachable rotor has a capability of independent piece-by- piece, and also group transmission in one of the fixed positions: standby or processing. The attachable rotor is mounted on the shaft installed in a holder hatch with a possibility of rotation with reference to it in a working position. The shaft by means of the bevel gear, mounted in its lower part, when the attachable rotor is placed into a working position, is set into a rotational motion by the bevel gear of the head mounted on the splined shaft with a possibility of reciprocative movements. The head is fed into the engagement zone by means of two intersected slots, one of which is located on the guiding sleeve, and another one - on the movement sleeve.
EFFECT: possibility of access of working medium to all processed surfaces of the substrate in a single mount.
FIELD: machine building.
SUBSTANCE: products are cleaned in a vacuum chamber in the inert gas medium, with further execution of ionic etching, ion-plasma nitriding alternating with ionic etching and application of nanocomposite coating using the method of physical vapour deposition using magnetrons. The temperature of thin-walled and thick-walled parts of products is levelled during cleaning of products in the medium of inert gas, ionic etching, ion-plasma nitriding alternating with ionic etching and application of nanocomposite coating by placement of products so that the thin-walled part of one product to be located between thick-walled parts of other products. The named application of nanocomposite coating is performed by application of microlayer composed of nanolayers with the thickness 1-100 nm from the titanium and chromium and the subsequent application of microlayer of nanolayers 1-100 nm from titanium and chromium nitrides. In specific applications of the invention the titanium and chromium microlayer is applied with the thickness 0.3-0.8 mcm by consecutive passing of the product in front of magnetrons with targets from the named materials. The microlayer of titanium and chromium nitrides is applied with the thickness 2.5-3 mcm by consecutive passing of the product in front of magnetrons with titanium and chromium targets when feeding into the nitrogen chamber.
EFFECT: increase of coating service life in conditions of erosion, corrosion and high temperatures.
3 cl, 1 tbl, 1 ex
SUBSTANCE: method of obtaining strengthening heat-reflecting clarifying coating for transparent plastic product includes formation of sublayer, application of heat-reflecting layer of tin oxide SnO2 and application of clarifying layer of silicon dioxide SiO2. Said layers are applied by magnetron sputtering in argon and oxygen medium. As sublayer applied is strengthening adhesion layer of silicon oxide SiOx, at 1.5≤x<2.0, with thickness (2.7-3.3)·λ0/4, where λ0=550 nm, heat-reflecting layer of tin oxide SnO2 is applied with thickness (3.6-4.4)·λ0/4 and clarifying layer of silicon dioxide SiO2 - with thickness (0.9-1.1)·λ0/4.
EFFECT: increased mechanical abrasion resistance of strengthening heat-reflecting clarifying coating.
2 dwg, 3 ex
FIELD: application of reinforcing, protective and decorative coats on articles in vacuum.
SUBSTANCE: proposed method includes electric arc spraying of cathode target and treatment of metal plasma flow in crossing electric and magnetic fields in cavity of additional anode of electric arc device. Dependent discharge of reaction and/or inert gas is ignited inside cavity of this additional anode. Metal plasma flow is additionally treated while passing through this discharge. Flow containing ions of gas and ions of material of cathode target settles on surface to be coated; potential of article is below potential of additional anode by 2000 V.
EFFECT: enhanced adhesion strength; high rise of coats at stoichiometric connections.
5 cl, 4 dwg, 3 tbl
FIELD: plasma engineering; application of multi-layer coats in form of thin films made from metals, their oxides, nitrides and other compounds synthesized in the course of plasma chemical reactions on surfaces of articles made from dielectric materials.
SUBSTANCE: proposed device includes magnetron spraying system, power supply system for said magnetron system, gas bleeding-in system, vacuum system and the following components mounted in series: sluice chamber equipped with loading unit, vacuum seal, first reversible chamber, working chamber and second reversible chamber. Magnetron spraying system is mounted in working chamber which is additionally equipped with ion source with belt-type bundle covering the surface of work in way perpendicular to its motion at energy from 0.1 to 10 keV and density of ion flow of 1x1012-1x1015 particles xcm-2xs1 falling at angle of 20-70° relative to normal to surface. Ion source has magneto-conducting housing used as cathode with magnetic system and extended water-cooled anode, emission slot forming belt-type bundle and gas supply system located inside it. Gas supply system is made in form of supply passage cascade located in base of housing. Passages in each cascade are symmetrically divided in two. All passages have similar length. Distance between outlet holes does not exceed 40 mm.
EFFECT: enhanced efficiency of cleaning and activation of surfaces of articles.
7 cl, 9 dwg
FIELD: systems for applying coatings in vacuum, possibly protective coatings in machine engineering and machine tool making industry branches.
SUBSTANCE: electric-arc generator of plasma metal flows includes cooled anode and cathode; cathode holder; igniting electrode, stabilizing solenoid arranged on outer surface of cooled anode; duct for supplying reaction gas, focusing solenoid and additional anode. Focusing solenoid is arranged on outer surface of additional anode. Cathode holder includes electrically insulated sleeve of magnetically soft material whose outer diameter is equal to diameter of end working portion of cathode mounted with gap relative to cooled anode. Invention prevents penetration of cathode holder material into coating, lowers micro-drop and vapor phase creation at time moments of turning off electric arc, increases ionization degree of plasma flow of metal.
EFFECT: improved quality, enhanced adhesion strength of coating.
1 dwg, 1 tbl
FIELD: plasma equipment, namely magnetron type spraying system, possibly used for depositing coatings onto surface of extended sheet materials, for example applying coatings on architectural designation glasses.
SUBSTANCE: magnetron type spraying apparatus includes magnetic unit having magnetic circuit 2 and permanent magnets 3; flat target-cathode 1. Magnetic unit is in the form of extended frame forming closed magnetic system with pole tips 8 turned inside frame. Flat target-cathode 1 is arranged along inner surface of said framework. Thin film deposition is realized simultaneously onto two flat substrates (glasses) moving through window (cavity) of frame.
EFFECT: improved design, possibility for applying low emission coatings onto flat glasses of large surface areas.
9 cl, 4 dwg
FIELD: devices for application of coats in vacuum; application of protective, reinforcing and decorative coats on inner surfaces of articles.
SUBSTANCE: vacuum chamber is provided with revolving substrate for placing the part to be treated and electric arc evaporator for metals. Evaporator consists of arc discharge non-magnetic cathode and anode. Cathode is made in form of cooled hollow cylinder made from evaporable material; control system for control of cathode spot motion in form of coil with solenoids is mounted inside this cylinder. Non-magnetic anode is made in form of vertical plates fitted over circumference along cathode embracing it. Cathode spot motion control unit consists of programmed unit, DC source with negative output for connection with part to be treated, arc current source and feedback unit whose output is connected to programmed unit and input is connected to DC source and output of arc current source. Hollow cylinder has semispherical top. Cathode spot motion control system is provided with magnetic circuit on which multi-sectional coil is fitted with solenoids located in its separate sections. Anode is provided with metal ring and length of vertical plates of anode exceeds length of cathode; plates copy its shape; they are interconnected in their upper parts by means of metal ring. Control unit is provided with adjustable multi-channel current source whose outputs are connected to respective sections of coil and its input is connected to output of programmed unit. Positive output of arc current source is connected to anode and positive output of DC source is connected to anode.
EFFECT: improved quality of coats due to enhanced reliability of cathode spot motion control system.
FIELD: metallurgy; spraying cathodes for application of coats in vacuum chamber; manufacture of articles provided with coats.
SUBSTANCE: proposed cathode has at least one solid target (2) mounted on metal membrane (3). Side of membrane (3) directed from target (2) has cooling passage with delivery line (9) and drain line (10) for cooling fluid and cavity (7) for at least one magnetic system (5) which is located in bath (6) which is sealed relative to membrane (3) and is not subjected to action of cooling fluid. Cathode is located on load-bearing structure (12) which has hollow body (13) hermetically closed relative to interior of vacuum chamber (18); it is used for communication of magnetic system (5) and cavity (7) with atmosphere beyond vacuum chamber (18). Cooling passage is made in form of closed water supply pipe (4) closed over perimeter of section with at least one flat side (4a) which is in heat-conducting connection with membrane (3). Membrane (3) and surfaces of water supply pipe (4) directed away from membrane (3) are subjected to atmospheric pressure through load-bearing structure (12) beyond vacuum chamber (18). Such construction of cathode enhances transfer of heat from target to cooling fluid excluding penetration of it into vacuum chamber.
EFFECT: enhanced operational and economical efficiency.
8 cl, 6 dwg
FIELD: plasma technology; metallization of surfaces of elements of micro-mechanics, filters, delay lines, integral micro-circuits and printed circuit boards.
SUBSTANCE: proposed method consists in cathode spraying of material on target placed in plasma to which negative bias is fed relative to plasma created in buffer gas by outside generator. Transversal size of target is close to transversal size of coat layer; target and substrate are shifted relative to each other at high accuracy of positioning. Rate of motion of target relative to substrate is so selected that preset thickness of coat layer should be obtained. Rate of spraying is regulated by change of plasma generator power. Device proposed for realization of this method has vacuum chamber, units for discharge and admission of working gas, plasma generator in working chamber and metal target consisting of material to be sprayed; it is connected to voltage source creating negative bias on target; device is also provided with dielectric substrate which is subjected to spraying. Target and substrate are movable at high accuracy of positioning relative to each other; size of target is considerably lesser that that of substrate. Plasma source employs inductive RF discharge.
EFFECT: reduced consumption of material for target; enhanced accuracy of obtaining required thickness of coat; improved quality of coat; increased degree of ionization of gas and material sprayed on target.
16 cl, 11 dwg, 2 ex
FIELD: procedures for applying strengthening, protecting and decorative coatings in vacuum onto different articles for imparting to surfaces of said articles improved functional properties, namely electric arc generator for creating separated flows of metal plasma in vacuum.
SUBSTANCE: cooled cathode 6 is made of material evaporated from its end surface during electric arc erosion process. Cylindrical cooled anode 1 embraces cathode 6. On outer surface of anode 1 stabilizing electromagnet 8 is mounted. Additional coaxial cooled anode 2 is arranged between plane of cross section of end consumable surface of cathode 6 and flange of chamber. Flange inner surface has curvilinear profile whose cross section narrows and then enlarges and on outer surface of which focusing electromagnet 9 is arranged. Inner surface of additional anode 2 is provided with set of annular rectangular protrusions 3 with height h = (4.0 - 8.0) mm and width d = (10.0 - 20.0) mm between them. Diameter of inner opening of anode 2 in zone of its least cross section consists of (1.2 - 1,8) Dc while said cross section is spaced by distance (2.3 - 3.5) Dc where Dc - diameter of end consumable surface of cathode 6. In outlet portion of least cross section of anode spaced by distance L from cathode 6 there is attenuating member 4 having set of plane-parallel plates 5. Planes of plates 5 are horizontal and parallel to axis of apparatus while they are spaced one from other by distance D ≥10 mm; width of plates H ≤ 1.4 D. Distance L is determined according to relation: 0.4 = (H2 + 2HL)/(H + D); 0.2 m ≤ L ≤ 0.4 m.
EFFECT: improved quality of coating, lowered quantity of micro-drop phase without significant decrease of ion phase quantity in plasma flow.
3 dwg, 1 tbl
FIELD: electronic engineering; microwave integrated circuits.
SUBSTANCE: proposed microwave hybrid integrated circuit designed for use at frequencies exceeding 100 MHz has insulating substrate carrying two layers, one being adhesive sublayer and other, evaporated high-conductivity metal layer. Adhesive sublayer, 0.02 to 0.5 μm thick, is made of insulating material, for instance, silicon, aluminum, titanium, tantalum, and vanadium oxides, silicon or aluminum nitrides. Hybrid integrated circuit is produced by sequentially covering substrate with adhesive sublayer and high-conductivity metal layer followed by photolithography and etching of conducting layer forming its desired layout. Adhesive sublayer is applied by reactive magnetron spraying of target mixed up with argon and nitrogen. Time interval between application of adhesive layer and high-conductivity metal layer is not to exceed 10 s. Such manufacturing process makes it possible to reduce loss in microwave radiation through strip lines from 3.5 to 0.2 dB.
EFFECT: enhanced quality factor of strip lines and hybrid integrated circuits, reduced deviation of integrated-circuit components from desired values during their formation.
11 cl, 3 dwg
FIELD: application of thin films; forming multi-component stoichiometric film coats; electronic, atomic and other industries.
SUBSTANCE: proposed method consists in presetting some technological parameters: current intensity of magnetron discharge current, areas of target erosion zones and target density whose dependence is determined by properties of materials and stoichiometric coefficients or percentage of film material components at the following ratio: , where ρi is density of target material of i-element; Ii is current intensity of discharge of i-magnetron; Si is area of erosion zone of i-target; ai is stoichiometric coefficient of i- element in chemical formula or percentage of i-element in film; Mai is atomic mass of gas ions; Eci is sublimation energy of is atoms of target of i-element; αi is dimensionless parameter of material of target of i-element depending on Ma/Mu; ρ1 is density of target material of base element having minimum density of compact material; S1 is area of erosion zone of base element having minimum density of compact material; a1 is stoichiometric coefficient of base element having minimum density of compact material of chemical formula or percentage of base element having minimum density of compact material in film; Ma1 is atomic mass of target material of base element having minimum density of compact material; Ec1 is sublimation energy of target atoms of base element having minimum density of compact material; α1 is dimensionless parameter of base element target material having minimum density of compact material depending on Ma/Mu. Then, magnetron spraying of opposite targets is performed and sprayed material is directed to mixing zone by at least two counter flows of sprayed material. Each counter flow is directed away from substrate for forming resultant flow. Substrate is shifted relative to resultant flow and sprayed material is settled on substrate.
EFFECT: enhanced efficiency.
2 dwg, 4 tbl, 2 ex