Anode pack of vacuum arc source of cathode plasma

FIELD: electricity.

SUBSTANCE: invention may be used mainly in straight-line vacuum arc sources of cathode plasma with microscopic particles filtration in the set with different vacuum arc evaporators and plasma conduit for plasma transportation. The anode pack comprises the anode covered by a focusing electromagnetic coil made as a pipe section. Inside the anode a deflecting electromagnetic coil is placed coaxially to it in the electroconductive housing, at that its magnet field is directed towards the focusing electromagnetic coil. Inside the deflecting coil, at the axis close to its butt end faced to input opening of the anode there is a permanent deflecting magnet, which magnet field is codirectional to the magnet field of deflecting electromagnetic coil. The anode pack is distinctive in that it includes an additional permanent magnet, which is placed inside the permanent deflecting magnet at the axis close to its butt end faced to the side opposite to input opening of the anode, and magnet field of this additional permanent magnet is opposed to the magnet field of the permanent deflecting magnet. At that positive pole of the supply source is connected electrically both to anode through winding of the focusing electromagnetic coil and to the housing of the deflecting coil through its winding.

EFFECT: ensuring dynamic balance of plasma fluxes moving in the gap between inner surface of the anode and outer surface in the housing of the deviating electromagnetic coil thus reducing plasma losses significantly.

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The invention relates to techniques for obtaining plasma flows in the electric-arc plasma sources. The proposed anode node can be used mainly in the straight source of vacuum arc cathode plasma filtration against particulate complete with a variety of vacuum-arc evaporators and plasmogamy for the transport of plasma.

Known anode node [1] straightforward source of vacuum arc cathode plasma, which contains the anode in the form of a segment of pipe covered by the electromagnetic coils forming a partitioned solenoid, consisting of at least three separate sections, each of which is connected to a separate power supply. The site includes a reflector particles made in the form of a disk mounted inside the pipe piece on its axis using conductive rods attached to its inner wall to provide electrical and thermal contact. This reflector in the anode node will be called a flap.

Using partitioned solenoid inside the anode create the desired magnetic field configuration, providing maximum bypass damper force lines of the magnetic field crossing a significant part of the end-evaporable cathode surface without crossing the anode. However, h is the motion of magnetic field lines in the region of the cathode about the axis of the lands on the valve. This leads to a significant loss of plasma propagating along the magnetic field. A significant arc current is directly on the valve. Is it overheating, especially when the arc currents over 70 A. This can lead to binding of the arc to the hot side of the valve and its melting or destruction. In addition, there is a considerable loss of plasma due to the weakened magnetic field in the vicinity of the valve, which causes the plasma drift towards the anode and settling her on the anode.

As a prototype, consider the anodic Assembly of vacuum-arc source cathode plasma [2]. It contains the anode in the form of a segment of pipe covered by the focusing of the electromagnetic coil. Inside the anode coaxially placed him in a conductive casing of the electromagnetic deflecting coil inside which on its axis near its end directed toward the inlet of the anode is a cylindrical deflecting the permanent magnet. Deflecting electromagnetic coil generates a magnetic field directed opposite to the magnetic field generated by the focusing of the electromagnetic coil. The magnetic field of the permanent magnet collinear with the magnetic field generated by the electromagnetic deflecting coil on its axis. Deflecting electromagnetic coil with a permanent magnet forming a so-called "magnetic island". IP is the use of a permanent magnet allows to reduce the dimensions of the "magnetic Islands" without reducing the intensity of the deflecting magnetic field and thereby reduce the dimensions of the source of vacuum arc cathode the plasma. "Magnetic island" reduces the loss of plasma moving in the axial region along the axis of the valve, which in this anode node is the end wall of the above-mentioned casing.

However, despite the presence of such a "magnetic Islands", loss of plasma still remain significant. A significant part of the plasma flow leaving the cathode arc spots moving in the Central (axial) region of the cathode, getting in a sufficiently strong magnetic field generated by the electromagnetic deflecting coil in conjunction with a permanent magnet, bypasses "magnetic island" and gets on his back side. This leads to loss of plasma flow on the back side of the "magnetic Islands". The plasma flows out of the cathode arc spots in the peripheral region of the working face of the cathode, moving in a magnetic field, created mainly focusing electromagnetic coil bypass the deflecting magnetic coil and practically do not get on its back side. However, the increased loss of plasma across the magnetic field on the wall of the anode, as by means of the gradient magnetic field directed toward the side surface of the electromagnetic deflecting coils, and education around this coil magnetic mirrors for electrons.

The challenge to the Torah aims the present invention, is the improvement of the anode node of vacuum-arc source cathode plasma to reduce losses plasma during transportation inside this node. Improvement should be carried out by changing the configuration of the magnetic field within the anode and by adjusting the magnetic fields generated by the electromagnetic coils depending on the arc current, the current through the conductive elements of the anode node.

The task is implemented in the proposed anode node of vacuum-arc source cathode plasma, as well as anodic Assembly adopted for the prototype, includes an anode, made in the form of a segment of pipe covered by the focusing of the electromagnetic coil. Inside the anode coaxially placed him in a conductive casing deflecting electromagnetic coil. Inside this coil on its axis near its end directed toward the inlet of the anode, is deflecting the permanent magnet. Deflecting electromagnetic coil for creating a magnetic field directed opposite to the magnetic field of the focusing of the electromagnetic coil. The magnetic field of the permanent magnet is directed to the magnetic field, which is generated electromagnetic deflecting coil on its axis.

Unlike the prototype of the proposed anode node on the clients is located inside the electromagnetic deflecting coil, on its axis near its end facing in the direction opposite to the inlet of the anode, an additional permanent magnet. The magnetic field of this magnet are directed oppositely to the magnetic field deflecting the permanent magnet. The positive pole of the power source arc electrically connected with the anode through the focusing coil of the electromagnetic coil and casing deflection coil through its winding.

The winding of the electromagnetic deflecting coils may be made of a tube, which is cooled by water at this turn of this coil near its end directed toward the inlet of the anode must have a thermal contact with the casing.

Consider how the proposed anode node reduces the loss of plasma during transportation inside the anode.

Additional permanent magnet in conjunction with the magnetic field of the focusing solenoid coil provides a significant deviation of the power lines of a magnetic field deflecting electromagnetic deflecting coil and a permanent magnet in the direction of the outlet of the anode. This prevents the intersection of the above lines of force of the magnetic field of the end surface of the casing of this coil facing the outlet of the anode. In the plasma jet emitted by Caton the mi arc spots, moving in the Central (axial) region of the cathode, propagating along the magnetic field lines, eg electromagnetic deflecting coil together with the casing, out through the outlet of the anode, not getting on the end of the casing, facing the hole. As shown by the experiments, it is one-third increases the output ion current.

The above electrical connection of the coils of the focusing and deflecting solenoid coils provides adjustment of the directions of the lines of force of the magnetic fields of coils, depending on the arc currents that flow through the anode or through the aforementioned casing. This adjustment allows the change of the total magnetic field in such a way that it rejects the plasma flows from the inner surface of the anode, if the arc current is going through it, or from the outer surface of the casing, if the arc current is going through this casing. Due to this, in the proposed anode node is a dynamic equilibrium plasma flows, moving between the inner surface of the anode and the outer casing surface electromagnetic deflecting coils, which greatly reduces the loss of plasma in the anode node.

Execution of turns of the winding electromagnetic deflecting coils of the tube, water-cooled, with the connection is of the casing, as described above, enables interference-free use of the casing deflecting electromagnetic coil as part of the anode.

The essence of the invention is illustrated by scheme anode node, which is depicted in the drawing.

Consider the example of performing anodic Assembly for rectilinear source of filtered vacuum arc cathode plasma.

The proposed anode node contains a water-cooled anode 1 (see diagram), made in the form of a segment of pipe of non-magnetic stainless steel flanges. Focusing electromagnetic coil 2 comprises the anode. Deflecting electromagnetic coil 3 in the conductive casing 4 is coaxially arranged inside the anode on its axis. It is made of copper tube, water-cooled. The casing 4 is attached to the primary coil 5 coil 3 to provide electrical and thermal contact. Deflecting the permanent magnet 6 is mounted inside the electromagnetic deflecting coil 3 on its axis near its end directed toward the inlet 7 of the anode. Additional permanent magnet 8 is mounted inside the electromagnetic deflecting coil 3 on the same axis as the magnet 6, but near the end of the coil 3, facing in the direction opposite to the inlet 7. Additional permanent magnet 8 is oriented with its magnetic field toward the magnetic field deflecting the village is wannago magnet 6. Mount electromagnetic deflecting coil 3 inside the anode carried out with the help of her findings 9 and 10, along the diameter of the insulating ring 11 and is secured in vacuum tight on its outer surface. The anode is electrically connected to the terminal end of a coil winding 12 of the focusing of the electromagnetic coil. Conclusion the initial coil 13 is connected with the positive pole of the power source of the arc 14 and the output 10 of the final round of deflecting winding of the electromagnetic coil 3, the primary coil 5 which is connected with its casing 4.

Consider the anodic Assembly comprising vacuum-arc source cathode plasma with the evaporator and the plasma duct.

From the inlet of the anode node is attached to a vacuum arc evaporator with the cathode covered by the cathode of the electromagnetic coil. From the outlet it is connected to the plasma duct, which is covered by the output of the electromagnetic coil (not shown). Using these coils inside the anode site, you can create a continuous, convex in the direction from the axis of the transporting magnetic field. After initiation of the arc discharge on the end evaporable cathode surface (not shown) of the plasma jet emerging from the cathode arc spots that move around evaporable cathode surface, move along power lines transport youseo magnetic field. However, depending on the position of the cathode spots relative to the axis of the cathode, the arc current can either go through the anode 1, or through the casing 4 electromagnetic deflecting coil 3, or simultaneously through the anode 1 and the casing 4.

In the case of cathode spots move in the peripheral region of the end face of the cathode plasma jet emerging from these spots, will be held at a sufficiently close distance from the inner wall of the anode 1. By connecting the anode to the positive pole of the power source of the arc 14 via the outputs 13 and 12 of the winding of the focusing of the electromagnetic coil 2, with the passage of the arc current through the anode increases the magnetic field, which deflects the plasma flows from the walls of the anode 1. As a result of loss of plasma on its wall is dramatically reduced.

When the cathode spot of the arc is moved in the axial region of the end face of the cathode plasma jet emerging from these spots will be around the casing 4 at a fairly close distance from him. Almost the entire arc current can go through this casing. But thanks to the connection of the housing 4 to the positive pole of the power source of the arc 14 through the winding of the electromagnetic deflecting coil 3 with the passage of the arc current through the casing and, consequently, through the coil 3 increases the magnetic field, providing repulsion plasma flows from the side wall to the ear. With the additional permanent magnet 8 is secured deviation considerable part of the force lines of a magnetic field created by the electromagnetic coil 3 and the permanent magnet 6 in the direction of the outlet of the anode site. The result reduces the loss of plasma to the back side of the housing 4. When working anode node is cooling water coil deflecting coil 4 made of copper tubes with pins 9 and 10 arranged and vacuumable sealed in the insulating ring 11. Due to the presence of thermal contact 5 coil 3 with the casing 4 is provided effective cooling. Effectively cooled and the anode. Anode the node can operate for a long time.

Trials were conducted anode node with the following main dimensions: the inner diameter of the anode - 226 mm; the length of the anode - 155 mm; outer diameter deflecting magnetic coils - 68 mm; length deflecting electromagnetic coil is 60 mm; the outer diameter of the casing of the electromagnetic deflecting coil - 74 mm; the distance from the inlet of the anode to the end surface of the casing electromagnetic deflecting coil - 100 mm Test anodic Assembly complete with vacuum arc evaporator with a cylindrical consumable titanium cathode showed that the full output current of the ions with the arc current of 100 a SOS is to place at least 6 A. This is almost 1.5 times higher than at the outlet of the anode of the site, taken as a prototype for the same arc current.

Sources of information

1. I. I. Aksenov, V. M. Khoroshikh. Filtering shields in vacuum arc plasma sourses // Proc. of the 6thInternational Simposium on Trends and New Application of Thin Films (TATF '98), Regensburg, Germany, March 1998, p.283-286.

2. A. Kleiman, A. Marques, R. L. Boxman. Performance of a magnetic islend macroparticle filter in a titenium vacuum arc // Plasma Sources Sci. Technol. 17, 2008, p.1-7 (prototype).

1. The anode node of vacuum-arc source cathode plasma containing covered by the focusing of the electromagnetic coil, the anode is made in the form of a segment of pipe, inside of which is coaxially placed him in a conductive casing deflecting electromagnetic coil, the magnetic field toward the magnetic field focusing the electromagnetic coil inside the deflection of the coil on its axis near its end directed toward the inlet of the anode is constant deflecting magnet, the magnetic field which is directed to the magnetic field deflecting the electromagnetic coil, characterized in that it includes inside the electromagnetic deflecting coils on its axis near its end, facing opposite the inlet of the anode, an additional permanent magnet, the magnetic field which is directed oppositely to the magnetic field of the permanent deflection of the magnet, while the positive is the first pole of the power source arc electrically connected with the anode through the focusing coil of the electromagnetic coil, and with the casing deflection coil through its winding.

2. Anodic Assembly under item 1, characterized in that the winding of the electromagnetic deflecting coil made of a conductive tube, water-cooled, with this turn of this coil near its end directed toward the inlet of the anode has a thermal contact with the casing.



 

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