Cooling plant for lighting device

FIELD: heating.

SUBSTANCE: invention relates to cooling systems, in particular, for cooling of lights. A cooling plant (100) is proposed, which comprises a source electrode (102), the first and second electrodes-targets (104, 106), arranged at the distance from the source electrode (102), and a control circuit for control of voltage applied between the source electrode (102) and at least one of the first and second electrodes-targets (104, 106). Voltage is controlled in such a manner that they adjust air flow produced as a result of potential difference between the source electrode (102) and at least one of the first and second electrodes-targets (104, 106), so that their direction changes in turns. With the help of invention one may provide for cooling of a device, having similar or better operating characteristics compared to a regular system with heat release and a fan, but with smaller dimensions and weight, and also with absence of noise.

EFFECT: higher compactness and elimination of noise during work.

15 cl, 4 dwg

 

The technical FIELD TO WHICH the INVENTION RELATES.

The present invention relates to an apparatus that provides cooling device, and particularly to a lighting device containing such a cooling installation. The present invention also relates to a corresponding method.

PRIOR art

In recent years, has made great progress in improving the brightness of light-emitting diodes (LED). As a result, the LEDs are bright enough and inexpensive light sources used, for example, in lighting installations, such as lamp with adjustable color. Combining the differently colored LEDs, you can generate any number of colors, such as white. Lighting system with adjustable color are usually created through the use of a number of primary colors, and in one example, three primary colors: red, green, blue. The color of the generated light is determined by what LEDs are used and the dilution factor. To generate a "white" should include all three LEDs.

For example, in industrial and consumer products high power LEDs are used to replace traditional incandescent lamps in such applications as automotive, industrial, rear wheel p is tsvetki display and lighting systems architectural details. However, the high-power LEDs suffer from high thermal loads, when used for traditional lighting. Important parameters of LEDs, such as efficiency, lifetime, and color, is very sensitive to the temperature of the led, which makes temperature control is a key issue when using LEDs for lighting, especially lighting systems with adjustable color, where color management is necessary for successful application. Of course, the same is applied to "white" LEDs, such as different types of LEDs with a phosphor coating.

A popular way of providing thermal control to reduce the heat load is mounting LEDs on a printed circuit Board (PCB) hardware and PCB heat sink or allocate a portion of the metal layer of the PCB for this purpose. This type of cooling device is often cumbersome, because it requires that the heat sink was large enough to provide the necessary cooling of the led. When you add a fan blowing air on the heatsink, you can use the heat sink is smaller. However, the fan will consume excess energy and often make unwanted noise in the lighting installation.

In addition, the fan is subject to wear, limiting the service life and reliability. In addition, a large bulky design prevents the creation of beautiful and elegant lighting devices. More efficient and graceful cooling installation comprising a cooling device with electrostatic transducer flow, is disclosed in the publication US 2007/0002534. The publication revealed the Converter flow direction of the air flow from the fan to improve heat transfer from the surface of the device, which is the thunk thread. However, even a cooling installation according to the mentioned patent application does not solve the problem of getting rid of the bulky fan.

The INVENTION

There is therefore a need to improve the cooling device and, more specifically, to overcome or at least mitigate, the problems of the prior art relating to bulky cooling components.

According to the aspect of the invention the problem is solved by a cooling setup that contains the source electrode to generate ions, the first and second electrodes to a target located at some distance from the source electrode, and a control circuit to control the voltage applied between the source electrode and at least one of the first and second electrodes targets, pricemyloan voltage is controlled so that air flow resulting from a potential difference between the source electrode and at least one of the first and second electrodes targets, is regulated so as to have alternating direction by alternating application of a voltage between the source electrode and the first electrode-target, and between the source electrode and the second electrode-target, respectively.

The General concept of the present invention is based on the fact that it is possible to transport the air through the so-called electric ion wind, using a cooling installation comprising a source electrode and at least first and second electrodes to the target, provided below in the course from the source electrode. It should be noted that it is possible, and fits in the scope of the invention to use more than the first and second electrodes to the target. Preferably the electrodes are connected to respective terminals of a voltage source having a voltage that the electric charge generating air ions, occurs at the electrode of the source. The result of the electronic discharge are called ions having the same polarity as the electrode of the source, and possibly charged so-called aerosols, i.e. solid particles or liquid droplets present in the air, and these charged particles or droplets from the table is the disappearance of the charged air ions. Air ions move rapidly under the influence of an electric field from the source electrode to at least one of the first and second electrodes to target, where they leave their electric charge and becomes recharged with air molecules. During this movement air ions are constantly faced with uncharged molecules of air, and electric power is transmitted to these molecules of air that are drawn in such a way in the direction from the source electrode to the side electrode to the target, thereby causing movement of air in the form of a so-called ion wind through a hollow structure.

Through this aspect of the present invention it is possible to provide cooling devices, such as lighting devices with similar or better performance characteristics than the conventional system with heat sink and fan, but with a smaller size and weight and noiseless operation. Thanks to the generation of condensed (focused) air flow near a heat source such as a light source in the lighting device, it may also be possible to reduce the need for heat sinks, fans, thermopaste etc. Preferably, the source electrode is the corona electrode. Accordingly, the electronic discharge is a corona generating air ions.

The distance between the source electrode and at least one of the first and second electrodes targets must be greater than the distance at which electrical breakdown occurs. In the embodiment, the potential difference between the electrode of the source, such as the corona electrode, and at least one of the first and second electrodes to target sufficient for ionization of molecules in the surrounding air at the discharge electrode, and the resultant flow of air from the source electrode toward the electrode-target. Preferably the cooling unit operates at a low voltage level, which increases the possibility of providing safe and reliable installation.

Possible different ways to locate the source electrode and the first and second electrodes to the target. In one embodiment, the electrodes are placed on the host element without limitation, represented, for example, a hollow structure having a shell. In this case, the electrodes can be deposited on the inner side of the hollow structure. For example, the source electrode and at least one of the first and second electrodes targets can be located inside the shell of a hollow structure (for example, in the form of a coating on the inner side of the shell). In another implementation, the source electrode and at least one of the first and the second electrode is in the target can instead (or similar) be located on a substrate (representing in this case the element), fixed, for example, between the first and second sections of the hollow structure. Preferably, the source electrode, the first and second electrodes of the target and/or the inner surface of the shell may be coated with a noble metal, which will lower the content and possibly destroy the ozone, which can be formed on the electrode of the source.

In the embodiment, the hollow structure has an inlet area and outlet area. The hollow structure may also be arranged in such a way that it contains at least one hole having a conical inlet section for air in the direction of the inner volume of the hollow structure to provide a Venturi. The Venturi effect in relation to the present invention will be further discussed below. Preferably the hole is located in close contact with the device requiring cooling, such as light source.

In a preferred embodiment of the invention, the cooling installation is located with the light source, thereby forming the lighting device. To achieve high energy efficiency light source preferably is selected from the group consisting of light emitting diodes (LED), organic light-emitting diodes (OLED), polymer light-emitting diodes (PLED), organic LEDs, fluorescent the e lamp cold cathode (CCFL), fluorescent lamp, a hot cathode (HCFL), a plasma lamp. As noted above, light-emitting diodes (LED) have a higher energy efficiency compared with traditional incandescent bulbs, which are usually isolated in the best case, about 6% of their electric power used in the form of light. Specialists in the art should understand that, of course, you can use a standard light source with a filament, such as argon, krypton and/or xenon light sources. In another preferred implementation, the light source can contain many different colored LEDs to provide lighting unit with adjustable color or, alternatively, a white led, for example, how different types of LEDs with a phosphor coating (for example, “remote phosphor LED”).

In a possible embodiment, the lighting device side tapered inlet for air into the hollow structure, it is directed towards the outer surface of the hollow structure may include a reflective element. Such a reflective element may be provided in the form of a reflector for the light source of the lighting device, for example, when the cone-shaped hole is made in connection with the light source. Ledue is to be noted, that cone-shaped hole containing the reflective element may be provided in any of the discussed above embodiments of a cooling installation according to the invention.

In accordance with another aspect of the invention provides a method of cooling a lighting device containing software support member, placing on the host element of the source electrode to generate ions, placement on the host element of the first and second electrodes targets, and the first and second electrodes to a target located at some distance from the source electrode, the control voltage applied between source and at least one of the first and second electrodes targets, and this voltage is controlled so that the air stream created by the potential difference between the source electrode and at least one from the first and second electrodes targets, is adjusted for alternately changing the direction by the alternating application of a voltage between the source electrode and the first electrode-target, and between the source electrode and the second electrode-target, respectively.

In this aspect of the present invention can be achieved by such and similar to that which was described above with reference to the first aspect of the invention, to provide cooling at the of troist, such as lighting devices with similar or better performance, but of smaller size and weight, as well as providing the opportunity for quiet operation. Due to its ability to generate condensed (focused) air flow near a heat source such as a light source in the lighting device, it may also be possible to reduce the need for heat sinks, fans, thermopaste etc. Additionally, this aspect also enables the use of different types of bearing elements, such as a hollow structure having a membrane or substrate, such as printed circuit Board. Of course there are other specific solutions.

Additional characteristics and advantages of the present invention will become apparent upon study of the accompanying claims and the following description. Specialists in the art will understand that various features of the present invention can be combined to create variants of realization that differ from those described in the future, without deviating from the scope of the present invention.

BRIEF DESCRIPTION of DRAWINGS

Various aspects of the invention, including its particular features and advantages, will become clearer from the following detailed description and the accompanying line is her on which:

Figure 1 schematically depicts the conceptual cooling installation according to a preferred variant implementation of the present invention;

Figure 2 depicts schematically a cooling installation according to another preferred variant implementation of the present invention;

Figure 3 schematically depicts a lighting device containing a variant of the cooling installation according to the present invention;

Figure 4 depicts schematically another lighting device containing a variant of the cooling installation in accordance with the present invention.

DETAILED DESCRIPTION of embodiments of the INVENTION

The present invention will now be described more fully below with reference to the accompanying drawings, which represent preferred at the moment embodiments of the invention. However, this invention can be implemented in many different forms and should not be construed as limited presented here options of implementation; rather, these embodiments of presents for thoroughness, completeness and fullness of the message of the scope of the invention to specialists in this field of technology. The same reference items refer to the same elements throughout the text.

Refer now to the drawings and, in particular, in figure 1, not only is but a schematic representation of a cooling installation according to preferred at the moment variant of implementation of the present invention. Figure 1 depicts a separate part of the cooling installation 100 containing the source electrode in the form of the discharge electrode 102, the first electrode-target 104 and the second electrode-target 106. Additionally, the cooling installation 100 includes first and second enclosing elements 108 and 110, respectively, is configured to hang on the corona electrode 102 and the electrode-target 104, 106 and to provide a wrapper for the cooling installation 100. Appropriate fencing elements preferably contain the ends formed for inlet and outlet air flow. On fig.1b illustrates the principle of operation of the cooling installation 100 and the direction of the air flow in the cooling system 100 upon application of a potential difference between the corona electrode 102 and the electrodes of the target 104, 106. As an example, on fig.1b the potential difference provided between the corona electrode 102 and the electrode-target 106, while the other electrode is the target 104 is held essentially at the same potential, and the corona electrode 102. Accordingly, and as discussed above, the potential difference between the corona electrode 102 and the electrode-target 106 must be maintained if possible, low, among other things, and for security reasons. However, in one given as an example but are not limited to the eat implementation, the potential difference between the corona electrode 102 and the electrode-target 106 is at least 7 kV, and more preferably 10 kV, possibly providing an air flow of about 1-3 m/s In the same embodiment, the distance between the corona electrode 102 and the electrode-target 106 may be chosen to be approximately equal to about 7 mm

By providing a potential difference will occur electronic discharge at the corona electrode 102, which, in turn, will generate air ions. That is the result of electron discharge are called ions having the same polarity as the corona electrode 102, and may also be charged, so-called aerosols, i.e. solid particles or liquid droplets present in the air, where these particles or droplets are charged from a collision with charged air ions. Air ions quickly, under the influence of an electric field, moving from the discharge electrode 102 to the electrode-target 106, where they leave their electric charge and becomes recharged with air molecules. During this movement air ions are constantly faced with uncharged molecules of air, and thus electric power is transmitted to the air molecules, which are sent from the source electrode toward the electrode to the target, creating the eat the air flow in the form of ion wind through the building envelope elements 108, 110. In the end point of the enclosing element 110 closest to the electrode-target 106, will produce an output stream, as shown by the arrow, while the incoming flow will exist at the end point of the enclosing element 108 closest to the other electrode of the target 104. On figs potential difference changed so that in this case the potential difference is applied between the corona electrode 102 and the first electrode-target 104, causing the air flow in the opposite direction compared to Fig 1. Similarly, the potential at the second electrode of the target 106 can be maintained almost at the same level to that of the corona electrode 102. Additionally, in order to minimize the possibility of generation of ozone may be appropriate to cover, to sheathe or make the discharge electrode 102 and/or the electrodes of the target 104, 106 of the noble metal, such as gold or silver.

Preferably the work is illustrated fig.1b and 1C, there may occur sequentially and a lot of times, thereby alternately changing the air flow, which can be used for cooling, for example, the lighting device. At the same time to control the alternating application of a potential difference between the corona electrode 102 and at least one of the first is about 104 and 106 of the second electrodes targets can be used, for example, the control circuit (not shown). The control circuit may include a microprocessor, microcontroller, programmable digital signal processor or other programmable device. The control circuit may also, or instead, include an integrated circuit application-specific programmable matrix logic programmable gate arrays, programmable logic device or a digital signal processor. If the control circuit includes a programmable device such as the above-mentioned microprocessor or microcontroller, a processor may optionally include executable computer code that controls the operation of the programmable device. Additionally, the control circuit may include an input for receiving temperature readings from a sensor located near object, such as a led or lighting device, which must be cooled by the cooling installation 100 that provides additional management capabilities.

Refer now to figure 2, which presents a schematic representation of a cooling installation 200 according to another preferred at the moment variant of implementation of the present invention. Cooling installation 200 shown in combination with a substrate, such as pecan what I charge (RSV), on which the first discharge electrode 202, the second discharge electrode 204, the first electrode-target 206 and the second electrode-target 208. In addition, the circuit Board is additionally light source, such as light emitting diode (LED) 210. During operation of the led 210 is used allocator 212 heat to exhaust heat generated from the led 210 and is spread over a large space.

This unit may also be provided on the opposite side of the PCB. This ionization can effectively occur on both sides of the PCB. Ionization will occur only in acute, positively charged electrodes or corona electrodes. Therefore, the air will move from one side of the led to the other only for pollperiod. The direction of air flow is changed in the following half-period under consideration as an example the case of high-voltage alternating current generator. Therefore, the change in air flow direction coincides with the frequency of alternating current.

Accordingly, when the operation of the cooling installation 200 during the first period, a potential difference is applied between the first discharge electrode 202 and the first electrode, the target 206. The principle of operation is similar to the principle described in connection with fig.1b. there is air flow will begin to flow in the direction from the first discharge electrode 202 to the first electrode of the target 206. During the second period, the potential difference is applied between the second discharge electrode 204 and the second electrode-target 208, thereby causing the air flow is actually in the opposite direction. The enlarged view in section of the first discharge electrode 202 is also presented in figure 2. In the enlarged view shows a typical example of the implementation of the first discharge electrode, including four indicator L1-L4length/width to determine the size of the discharge electrode 202. In a non-limiting embodiment, the length L1and L2can be selected in the range from 1 to 5 mm, whereas the width of the L3plot the discharge electrode can be maintained approximately 0.25 mm, having, perhaps, a characteristic triangular edge at the open end. Additionally, the distance between two different sections of the discharge electrode can be chosen in the range of 1-3 mm, Specialists in the art will, however, it is clear that different values of the length and width can be chosen, for example, depending on the potential difference applied between the corona electrode and the electrode-target. Implementation option, described above, contains only one cooling installation 200, however, it is clear that can be built in an array of such devices when using only real the high-voltage generator.

Figure 3 presents a diagram of the lighting device 300 that contains a variant of the cooling installation 200 according to the invention. First figa shows the General conceptual side view of the lighting device 300 within which the PCB can be located cooling installation 200. Compared with the cooling unit 100, shown in figure 1, the cooling installation 200 figa also includes two enclosing section 302 and 304, which are made with the possibility of fixing a printed circuit Board, for example, by means of latches. Additionally, the lighting device 300 includes a cone-shaped hole 306 in at least one of the enclosing sections 302, 304. During operation, the cooling installation 200 inside of the lighting device 300 hole 306 will act as a Venturi nozzle, allowing you to implement the Venturi effect. Under the Venturi effect refers to the pressure of the fluid, for example air pressure, which occurs when an incompressible fluid is passed through a narrowed section of the pipe. Accordingly, the Venturi effect can be deduced from a combination of Bernoulli's principle and the continuity equation. That is, the velocity of air flow through the structure must increase to satisfy the equation of continuity, while its pressure must drop due to the save the tion energy: increased kinetic energy is achieved by pressure drop or power, due to the pressure gradient. Thus, the air flow in the first direction will cause a drop in pressure on both sides of the PCB, causing the air will passivates through the hole 306 and possibly an extra hole on the opposite side of the lighting device 300. This is similar to the impact force of the jet with the difference that the air flow through the hole is caused by pressure drop on the exhaust plot holes, and not to increase the pressure in the inlet area of the hole.

Preferably the hole 306 may be located in the vicinity of the led 210, as shown in fig.3b, and can also be covered with a reflective coating, allowing the hole to serve as a reflector for the led 210. On fig.3b also shows the use of holes 308 on the opposite side of the lighting device 300. In addition, the arrows on fig.3b shown alternately changing the direction of movement of air through the lighting device 300. Like the cooling system in figure 1 the ends of the enclosing sections 302 and 304 are open to free access of the air flow, thereby forming the inlet/outlet openings for air. However, there may be provided other structures, including, for example, the filter element is located inside the exhaust/exhaust holes for air.

Finally, on figa-4C shows the cross-section, a top view and a side view of another variant implementation of the lighting device 400 containing a cooling installation according to another variant implementation of the present invention. The lighting device 400 further comprises an led 402, fixed under layer (such as copper) 404, located adjacent to the led 402, the corona electrode 406 and the electrode-target 408, together forming the "upper section" of the lighting device 400. Additionally, the lighting device 400 contains many spacers 410 located on the "bottom"section, and located in the middle of the neck 412 (e.g., inlet/outlet for air). The upper and lower sections can be connected to each other through, for example, adhesives, welding, fasteners, or other suitable method.

The principle of operation of the lighting device 400 similar to that described with reference to the variant of implementation, related to figure 2 and 3. However, the difference lies in the fact that the lighting device 400 does not use the Venturi effect, and directly causes the cooling effect of the impact force of the jet, creating a pressure drop at the internal center of the volume formed by many spacers 410 on the lower section and upper section, through the wind the corona discharge. In this case, cold air is sucked in through the neck 412, heated by fixed under the surface on the circuit Board and is blown in the radial direction outwards from the center.

Summing up, I must say that according to the present invention it is possible to provide a cooling installation comprising a source electrode, the first and second electrodes to a target located at some distance from the source electrode, a hollow structure having a shell, and a control circuit to control the voltage applied between the source electrode and at least one of the first and second electrodes targets. The voltage is controlled so that the air stream generated by the potential difference between the source electrode and at least one of the first and second electrodes targets, is regulated so as to have alternately changing the direction. Through the invention it is possible to provide a cooling device with similar or better performance characteristics than the conventional system with heat sink and fan, but of smaller size and weight and no noise.

Although the invention has been described with reference to specific illustrative examples of its implementation, many different changes, modifications, etc. can be obvious to experts in the field of those who IKI. For example, cooling under the influence of the ions can be applied in large systems with led arrays, such as rear lights, led retrofit bulbs, led downlight fixtures, etc. in Addition, the above-mentioned cooling systems were described in relation to the application of a potential difference between the corona electrode and the electrode-target. The application of the potential difference can be provided by using voltage or AC, or DC. Additional changes to the options described implementations can be understood and implemented by experts in the field of technology for practical application of the claimed invention based on the drawings, the description and the attached claims. In the claims the word "comprising" does not exclude other elements or steps, and specifying the characteristics in the singular not plural. A single processor or other unit may fulfill the functions of several items listed in the claims. The fact that certain characteristics described in mutually different dependent claims does not indicate that the combination of these characteristics cannot be advantageously used.

1. Cooling at the plant, contains:
the source electrode to generate ions;
the first and second electrodes to the target, located at a distance from the source electrode; and
a control circuit to control the voltage applied between the source electrode and at least one of the first and second electrodes targets,
moreover, the applied voltage is controlled so that the air stream resulting from the potential difference between the source electrode and one of the first and second electrodes targets, is regulated so as to have alternately changing the voltage by the alternating application of a voltage between the source electrode and the first electrode-target and between the source electrode and the second electrode-target.

2. Cooling installation according to claim 1, additionally containing a hollow structure having a shell, and the source electrode and the first and second electrodes to a target located inside the hollow structure.

3. Cooling installation according to any one of claims 1 or 2, in which the source electrode is the corona electrode.

4. Cooling installation according to any one of claims 1 or 2, in which the distance between the source electrode and at least one of the first and second electrodes to target larger than the distance at which electrical breakdown occurs when the above-mentioned voltage.

5. Cooling installation according to l is the Boma one of claims 1 or 2, in which the potential difference between the source electrode and at least one of the first and second electrodes to target sufficient for ionization of molecules in the surrounding air at the discharge electrode and the subsequent formation of air flow from the electrode to electrode-target.

6. Cooling installation according to any one of claims 1 or 2, in which the source electrode and at least one of the first and second electrodes targets are located on a substrate.

7. Cooling installation according to claim 6, in which the hollow structure includes first and second areas, and the substrate is fixed between the first and second sections.

8. Cooling installation according to any one of claims 1 or 2, in which the source electrode and the first and second electrodes of the target is covered with a noble metal.

9. A cooling installation according to claim 2, in which the hollow structure contains the inlet section and the outlet section.

10. A cooling installation according to claim 2, in which the hollow structure contains at least one hole having a conical shape towards the inside of the hollow structure to provide a Venturi.

11. Lighting device containing a light source and a cooling installation according to claim 1.

12. The lighting device according to claim 11, in which the light source includes at least one light emitting diode (LED).

13. The lighting device according to any the of § § 11, or 12, in which the hollow structure contains at least one hole having a conical shape towards the inside of the hollow structure and the inner surface of the cone that extends outward from the hollow structure includes a reflective element.

14. Method of cooling a lighting device, comprising stages, which are:
provide supporting member;
place the electrode source for generating ions to the support element;
place the first and second electrode-target on the host element,
moreover, the first and second electrodes to a target located at a distance from the source electrode;
control the voltage applied between the source electrode and at least one of the first and second electrodes targets,
moreover, the control voltage thereby to regulate the air flow resulting from the potential difference between source and at least one of the first and second electrodes targets so as to be alternately changing the direction by alternating application of a voltage between the source electrode and the first electrode-target and between the source electrode and the second electrode-target.

15. The method according to 14, in which the source electrode is the corona electrode.



 

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3 cl, 4 dwg, 1 ex

FIELD: physics.

SUBSTANCE: tight block switching fixtures represent welded components with separate tight leadouts incorporating rigid conducting terminal extenders with a flat flange while coaxial tight leadouts incorporate flexible terminal extenders fitted on the rods arranged on the surface of ceramic plates in rows with the difference in height of top points of the flexible conducting terminal extenders between the first and every subsequent row h defined from the formula h=l·sinα, where l is the distance between the first and each subsequent row and α is the angle of inclination of a plane of the contact between the top points of the aforesaid flexible conducting terminal extenders to the ceramic plate plane. The terminal block comprises also cylindrical extender sleeves with tabs arranged on both end faces. Note that the said tabs of the lower end face are bent along the radius by the angle of 90° outward from the sleeve axis of symmetry. Note also that, at the top end face, the said tabs are vent two times by 90° towards the aforesaid axis of symmetry of the sleeve. To weld the aforesaid fixtures, a pulsed laser radiation makes a heating source.

EFFECT: high level of technological and operational properties of proposed tight block.

2 cl, 1 dwg

FIELD: thin-film technology; electronic, atomic, and other fields of science and technology.

SUBSTANCE: proposed mosaic target designed for applying multicomponent film coatings has matrix and fusible components disposed in its depressions. Fusible components are placed in matrix in the form of powders having different density and surface area, dependencies between them being governed by properties of elements and stoichiometric coefficients or percentage of film material components. Method for manufacturing claimed target is also proposed.

EFFECT: enhanced quality of composite coatings.

2 cl, 2 dwg, 2 tbl

FIELD: producing thin coating films for electronic, atomic, and other fields of science and technology.

SUBSTANCE: proposed mosaic target has steel matrix with cooled base accommodating in its cavities spraying elements. Used as matrix elements are powders whose grain size depends on their properties. Elements are disposed in matrix in the form of cells to form areas of gradual transition of one element into another at boundary of their contact so as to reduce linear nonuniformity of their distribution over target surface. Proposed target manufacturing process is also given in description of invention.

EFFECT: enhanced spraying capacity and quality of multicomponent films.

2 cl, 6 dwg, 2 tbl

Magnetron anode // 2256978

FIELD: magnetron anodes.

SUBSTANCE: anode 6 is surrounded by central cathode 1 and is has segmental mechanical design using plurality of circular segments 9 stacked together over its length. Each circular segment 9 has binder 10, all these binders being actually distributed along entire axial length of anode blades 8. Such mechanical design provides for dividing oscillation modes even in case of long anode and, consequently, enables operation in applications responsible for high power. In addition, segmental design of anode makes it possible to obtain mechanically ribbed structure resistant to mechanical impacts.

EFFECT: enlarged functional capabilities.

19 cl, 11 dwg

FIELD: producing thin coating films for electronic, atomic, and other fields of science and technology.

SUBSTANCE: proposed mosaic target has steel matrix with cooled base accommodating in its cavities spraying elements. Used as matrix elements are powders whose grain size depends on their properties. Elements are disposed in matrix in the form of cells to form areas of gradual transition of one element into another at boundary of their contact so as to reduce linear nonuniformity of their distribution over target surface. Proposed target manufacturing process is also given in description of invention.

EFFECT: enhanced spraying capacity and quality of multicomponent films.

2 cl, 6 dwg, 2 tbl

FIELD: thin-film technology; electronic, atomic, and other fields of science and technology.

SUBSTANCE: proposed mosaic target designed for applying multicomponent film coatings has matrix and fusible components disposed in its depressions. Fusible components are placed in matrix in the form of powders having different density and surface area, dependencies between them being governed by properties of elements and stoichiometric coefficients or percentage of film material components. Method for manufacturing claimed target is also proposed.

EFFECT: enhanced quality of composite coatings.

2 cl, 2 dwg, 2 tbl

FIELD: physics.

SUBSTANCE: tight block switching fixtures represent welded components with separate tight leadouts incorporating rigid conducting terminal extenders with a flat flange while coaxial tight leadouts incorporate flexible terminal extenders fitted on the rods arranged on the surface of ceramic plates in rows with the difference in height of top points of the flexible conducting terminal extenders between the first and every subsequent row h defined from the formula h=l·sinα, where l is the distance between the first and each subsequent row and α is the angle of inclination of a plane of the contact between the top points of the aforesaid flexible conducting terminal extenders to the ceramic plate plane. The terminal block comprises also cylindrical extender sleeves with tabs arranged on both end faces. Note that the said tabs of the lower end face are bent along the radius by the angle of 90° outward from the sleeve axis of symmetry. Note also that, at the top end face, the said tabs are vent two times by 90° towards the aforesaid axis of symmetry of the sleeve. To weld the aforesaid fixtures, a pulsed laser radiation makes a heating source.

EFFECT: high level of technological and operational properties of proposed tight block.

2 cl, 1 dwg

FIELD: metallurgy.

SUBSTANCE: it is implemented deep vacuum refinement by multiple remelting of tungsten and titanium with receiving of polycrystalline ingots of titanium and tungsten monocrystal. Then from the polycrystalline ingot of titanium it is manufactured disk, in which in diffusing area per two concentric circles alternate there are bored holes and by press fit there are fixed in it cast cylindrical inserts from tungsten monocrystal, preliminarily subject to grinding and cutting per exact lengths. Target, recived by mentioned method, consists of cast disk made of high-clean titanium and cast cylindrical inserts made of high-clean monocrystalline tungsten, located in diffusing area of disk by two concentric circles alternate. Additionally area ratio on surface of target, taken up by tungsten and titanium, provides receiving of films at magnetron sputtering composition 35-40 wt % of titanium, tungsten is the rest.

EFFECT: improving and reliability growth of applied films of barrier plate tungsten - titanic alloy.

3 cl, 4 dwg, 1 ex

FIELD: metallurgy.

SUBSTANCE: invention relates to non-ferrous metallurgy, namely to production of sputtering molybdenum targets and can be used in microelectronics to apply coatings by thin-film metallisation. The method involves a consistent deep vacuum refining by electron-beam remelting of a high-purity metal-ceramic bar obtaining monocrystalline or polycrystalline molybdenum. Whereupon a semi-finished target shaped as a monocrystalline or polycrystalline ingot is formed from the obtained product using electron-beam remelting in the horizontal or vertical mold. The ingot produced is then machined.

EFFECT: improved quality and reliability of the barrier and conducting films when sputtering cast high-purity molybdenum targets.

3 cl, 1 dwg, 1 ex

FIELD: metallurgy.

SUBSTANCE: manufacturing method of composite target for obtaining films by magnetron sputtering and target obtained using the above method is proposed. Method involves manufacture of disc from polycrystalline titanium ingot obtained by multiple vacuum titanium re-melting, drilling of holes in staggered order in sputtered zone of titanium disc along two concentric circles and fixture of cylindrical inserts in them. Cylindrical inserts are made by cutting of ingots of monocrystalline tungsten and monocrystalline silicon, which have been obtained by multiple vacuum remelting of tungsten and silicon. Inserts attachment is performed by press fitting to drilled holes at the ratio of surface areas occupied with tungsten and silicon inserts on surface of target in titanium disc providing the production of films consisting of the following, wt %: silicon 0.1-1.3, titanium 11-33, and tungsten is the rest.

EFFECT: increasing thermal stability of metal coating and reproducibility of its formation process.

2 cl, 1 tbl, 1 ex

FIELD: metallurgy.

SUBSTANCE: manufacturing method of composite target for obtaining films by magnetron sputtering and target obtained using the above method is proposed. Method involves manufacture of disc from polycrystalline titanium ingot obtained by multiple vacuum titanium re-melting, drilling of holes in staggered order in sputtered zone of titanium disc along two concentric circles and fixture of cylindrical inserts in them. Cylindrical inserts are made by cutting of ingots of monocrystalline tungsten and monocrystalline rhenium, which have been obtained by multiple vacuum remelting of tungsten and rhenium. Inserts attachment is performed by press fitting to drilled holes at the ratio of surface areas occupied with tungsten and rhenium inserts on surface of target in titanium disc providing the production of films consisting of the following, wt %: titanium 2.5-37.0, rhenium 0.04-9.78, and tungsten is the rest.

EFFECT: improving reliability and process barrier layers due to decreasing mechanical stresses and improving homogeneity of metal coating.

2 cl, 1 tbl, 1 ex

FIELD: metallurgy.

SUBSTANCE: manufacturing method of cast target for magnetron sputtering from tantalum-based alloy and target obtained using the above method is proposed. Method involves obtaining of an ingot of alloy on the basis of tantalum. First, tantalum ingot of high purity degree is obtained by means of deep vacuum refining by electron-beam drip re-melting of a workpiece made by pressing of high-purity tantalum powders; besides, ingots of intermetallic compounds TaFe2 and YFe3 are obtained by melting of tantalum with iron and yttrium with iron; after that, arc vacuum remelting of high-purity tantalum ingot with ingots of intermetallic compounds TaFe2 and YFe3 is performed at their ratio, wt %: TaFe2 3.0-10.0, YFe3 0.3-3.0, Ta - the rest; ingot of tantalum-based alloy with composition of Ta + 1 wt % Fe + 0.1 wt % Y is obtained and subject to machining.

EFFECT: improving the quality of sputtered targets in order to increase the yield ratio of thin-film capacitors.

2 cl, 1 tbl, 1 ex

FIELD: metallurgy.

SUBSTANCE: manufacturing method of cast target for magnetron sputtering from molybdenum-based alloy and target obtained using the above method is proposed. Method involves obtaining of an ingot of alloy on the basis of molybdenum. First, high-purity polycrystalline molybdenum ingot is obtained by means of deep vacuum refining by electron-beam drip re-melting of a workpiece made from high-purity molybdenum; after that, arc vacuum remelting of high-purity polycrystalline molybdenum ingot is performed with strips from high-purity monocrystalline silicon; at that, the number of strips is chosen from the condition for obtaining polycrystalline alloy ingot with composition of molybdenum - 0.005-1.0 wt % of silicon, which is subject to machining.

EFFECT: improving the quality of semiconductor devices and integral circuits due to improvement of chemical resistance of films, as wells as stability of value of transient resistance of contacts at heat treatment.

2 cl, 2 tbl, 1 ex

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